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STUDIES ON STEP BEHAVIOR ON Si(110)SURFACE AND ITS APPLICATION TO SELF-ORGANIZED FORMATION OF GRAPHENE NANO-RIBBON

Research Project

Project/Area Number 21360017
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionTohoku University

Principal Investigator

SUEMITSU Maki  東北大学, 電気通信研究所, 教授 (00134057)

Co-Investigator(Kenkyū-buntansha) FUKIDOME Hirokazu  東北大学, 電気通信研究所, 准教授 (10342841)
ENTA Yoshiharu  弘前大学, 理工学部, 准教授 (20232986)
Project Period (FY) 2009 – 2011
Project Status Completed (Fiscal Year 2011)
Budget Amount *help
¥19,630,000 (Direct Cost: ¥15,100,000、Indirect Cost: ¥4,530,000)
Fiscal Year 2011: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2010: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2009: ¥17,160,000 (Direct Cost: ¥13,200,000、Indirect Cost: ¥3,960,000)
Keywordsグラフェン / エピタキシャルグラフェン / ステップ / 表面微細加工 / 表面終端 / 電子物性 / 半導体 / 金属 / ナノリボン
Research Abstract

We have studied in detail the impacts of surface microstructures of substrates on the quality and the electronic structure of the epitaxial graphene (EG)formed on them. As a result, we established a method to control the surface steps on Si and SiC substrates, and succeeded in the betterment of EG quality and in controlling the Si-and C-termination of 3C-SiC(111)surfaces. Moreover, it was found that EGs on Si-terminated and C-terminated SiC(111)surfaces show semiconducting and metallic properties, respectively. This finding surely provides a novel method to control the graphene electronic properties, which can be applied to fabrication of graphene devices.

Report

(4 results)
  • 2011 Annual Research Report   Final Research Report ( PDF )
  • 2010 Annual Research Report
  • 2009 Annual Research Report
  • Research Products

    (31 results)

All 2012 2011 2010 2009

All Journal Article (16 results) (of which Peer Reviewed: 16 results) Presentation (13 results) Book (2 results)

  • [Journal Article] Transmission Electron Microscopy and Raman-Scattering Spectroscopy Observation on the Interface Structure of Graphene Formed on Si Substrates with Various Orientations2011

    • Author(s)
      H. Handa, R. Takahashi, S. Abe, K. Imaizumi, E. Saito, M. H. Jung, S. Ito, H. Fukidome and M. Suemitsu
    • Journal Title

      JJAP

      Volume: 50巻

    • NAID

      210000070339

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Temperature-Programmed Desorption Observation of Graphene-on-silicon Process2011

    • Author(s)
      Shunsuke Abe, Hiroyuki Handa, Ryota Takahashi, Kei Imaizumi, Hirokazu Fukidome, and Maki Suemitsu
    • Journal Title

      JJAP

      Volume: 50巻

    • NAID

      210000139163

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Controls over Structural and Electronic Properties of Epitaxial Graphene on Silicon using Surface Termination of 3C-SiC(111)/Si2011

    • Author(s)
      Hirokazu Fukidome, Shunsuke Abe, Ryota Takahashi, Kei Imaizumi, Syuya Inomata, Hiroyuki Handa, Eiji Saito, Yoshiharu Enta, Akitaka Yoshigoe, Yuden Teraoka, Masato Kotsugi, Takuo Ohkouchi, Toyohiko Kinoshita, Shun Ito, and Maki Suemitsu
    • Journal Title

      Appled Phsics Express

      Volume: 4巻

    • NAID

      10030153776

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Transmission-electron-microscopy observations on the growth of epitaxial graphene on 3C-SiC(110)and 3C-SiC(100)virtual substrates2011

    • Author(s)
      Hiroyuki Handa, Shun Ito, Hirokazu Fukidome and Maki Suemitsu
    • Journal Title

      Materials Science Forum

      Volume: 711巻 Pages: 242-245

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Growth Rate Anomaly in Ultralow-Pressure Chemical Vapor Deposition of 3C-SiC on Si(001)Using Monomethylsilane2011

    • Author(s)
      Eiji Saito, Sergey N. Filimonov, and Maki Suemitsu
    • Journal Title

      JJAP

      Volume: 50巻

    • NAID

      40017446817

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Step bunching and step"rotation" in homoepitaxial growth of Si on Si(110)-16×22011

    • Author(s)
      Arnold Alguno, Sergey N. Filimonov, Maki Suemitsu
    • Journal Title

      Surface Science

      Volume: 605巻 Pages: 838-843

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Transmission Electron Microscopy and Raman-Scattering Spectroscopy Observation on the Interface Structure of Graphene Formed on Si Substrates with Various Orientations2011

    • Author(s)
      H.Handa, R.Takahashi, S.Abe, K.Imaizumi, E.Saito, M.H.Jung, S.Ito, H.Fukidome, M.Suemitsu
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 50

    • NAID

      210000070339

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Temperature-Programmed Desorption Observation of Graphene-on-ilicon Process2011

    • Author(s)
      Shunsuke Abe, Hiroyuki Handa, Ryota Takahashi, Kei Imaizumi, Hirokazu Fukidome, Maki Suemitsu
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 50 Issue: 7R Pages: 070102-070102

    • DOI

      10.1143/jjap.50.070102

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Controls over Structural and Electronic Properties of Epitaxial Graphene on Silicon using Surface Termination of 3C-SiC(111)/Si2011

    • Author(s)
      Hirokazu Fukidome, Shunsuke Abe, Ryota Takahashi, Kei Imaizumi, Syuya Inomata, Hiroyuki Handa, Eiji Saito, Yoshiharu Enta, Akitaka Yoshigoe, Yuden Teraoka, Masato Kotsugi, Takuo Ohkouchi, Toyohiko Kinoshita, Shun Ito, Maki Suemitsu
    • Journal Title

      Appled Phsics Express

      Volume: 4

    • NAID

      10030153776

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Transmission-electron-microscopy observations on the growth of epitaxial graphene on 3C-SiC(110) and 3C-SiC(110) virtual substrates2011

    • Author(s)
      Hiroyuki Handa, Shun Ito, Hirokazu Fukidome, Maki Suemitsu
    • Journal Title

      Materials Science Forum

      Volume: 711 Pages: 242-245

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Growth Rate Anomaly in Ultralow-Pressure Chemical Vapor Deposition of 3C-SiC on Si(001) Using Monomethylsilane2011

    • Author(s)
      Eiji Saito, Sergey N.Filimonov, Maki Suemitsu
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 50

    • NAID

      40017446817

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Step bunching and step "rotation" in homoepitaxial growth of Si on Si(110)-16×22011

    • Author(s)
      Arnold Alguno, Sergey N.Filimonov, Maki Suemitsu
    • Journal Title

      Surface Science

      Volume: 605 Pages: 838-843

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Epitaxial growth processes of graphene on silicon substrates2010

    • Author(s)
      Hirokazu Fukidome, Yu Miyamoto, Hiroyuki Handa, Eiji Saito, and Maki Suemitsu
    • Journal Title

      JJAP

      Volume: 49巻

    • NAID

      210000067872

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Silicon thermal oxidation and its thermal desorption investigated by Si 2p core-level photoemission2010

    • Author(s)
      Y. Enta, H. Nakazawa, S. Sato, H. Kato, and Y. Sakisaka
    • Journal Title

      Journal of Physics : Conference Series

      Volume: 235巻 Pages: 12008-12013

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Silicon thermal oxidation and its thermal desorption investigated by Si 2p core-level photoemission2010

    • Author(s)
      Y.Enta, H.Nakazawa, S.Sato, H.Kato, Y.Sakisaka
    • Journal Title

      Journal of Physics : Conference Series

      Volume: 235 Pages: 12008-12013

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Epitaxial Growth Processes of Graphene on Silicon Substrates2010

    • Author(s)
      Hirokazu Fukidome, Yu Miyamoto, Hiroyuki Handa, Eiji Saito, Maki Suemitsu
    • Journal Title

      Japanese Journal of Applied Physics 49

    • NAID

      210000067872

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Presentation] Epitaxial growth of graphene on 3C-SiC thin film formed on Si substrates2012

    • Author(s)
      Maki Suemitsu
    • Organizer
      International Symposium on Surface Science (ISSS-6)
    • Place of Presentation
      東京(招待講演)
    • Year and Date
      2012-12-15
    • Related Report
      2011 Annual Research Report
  • [Presentation] Epitaxial growth of graphene on 3C-SiC thin film formed on Si substrates2011

    • Author(s)
      Maki Suemitsu
    • Organizer
      International Symposium on Surface Science(ISSS-6)
    • Place of Presentation
      東京
    • Year and Date
      2011-12-15
    • Related Report
      2011 Final Research Report
  • [Presentation] Tunable electronic structure of epitaxial graphene formed on silicon substrates2011

    • Author(s)
      Maki Suemitsu, and Hirokazu Fukidome
    • Organizer
      3rd Symposium on the Science and Technology of Epitaxial Graphene (STEG3)
    • Place of Presentation
      Florida
    • Year and Date
      2011-10-25
    • Related Report
      2011 Final Research Report
  • [Presentation] Tunable electronic structure of epitaxial graphene formed on silicon substrates2011

    • Author(s)
      Maki Suemitsu, Hirokazu Fukidome
    • Organizer
      3rd Symposium on the Science and Technology of Epitaxial Graphene (STEG3)
    • Place of Presentation
      Florida (USA)(招待講演)
    • Year and Date
      2011-10-25
    • Related Report
      2011 Annual Research Report
  • [Presentation] Growth of epitaxial graphene on 3C-SiC/Si heterostructure2011

    • Author(s)
      Maki Suemitsu, Hiroyuki Handa, Shun Ito, and Hirokazu Fukidome
    • Organizer
      HeteroSiC-WASMPE2011
    • Place of Presentation
      Tours
    • Year and Date
      2011-06-30
    • Related Report
      2011 Final Research Report
  • [Presentation] Growth of epitaxial graphene on 3C-SiC/Si heterostructure2011

    • Author(s)
      Maki Sue, Hirokazu Fukidome
    • Organizer
      HeteroSiC-WASMPE2011
    • Place of Presentation
      Tours (France)(招待講演)
    • Year and Date
      2011-06-30
    • Related Report
      2011 Annual Research Report
  • [Presentation] Novel epitaxy of graphene using substrate microfabrication2011

    • Author(s)
      H.Fukidome, M.Kotsugi, T.Ohokuchi, T.Kinoshita, Th.Seyller, K.Horn, Y.Kawai, M.Suemitsu, Y.Watanabe
    • Organizer
      APS March Meeting 2011
    • Place of Presentation
      Dallas, USA
    • Related Report
      2010 Annual Research Report
  • [Presentation] Formation of Epitaxial Graphene on Mesa-patterned SiC Substrate2010

    • Author(s)
      H. Handa, R. Takahashi, K. Imaizumi, Y. Kawai, H. Fukidome, Y. Enta, M. Suemitsu, M. Kotsugi, T. Ohkochi, Y. Watanabe, T. Kinoshita
    • Organizer
      23rd International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      福岡
    • Year and Date
      2010-11-09
    • Related Report
      2011 Final Research Report 2010 Annual Research Report
  • [Presentation] CONTROL OF STRUCTURAL AND ELECTRONIC PROPERTIES OF EPITAXIAL GRAPHENE BY CRYSTALLOGRAHIC ORIENTATION OF Si SUBSTRATE2010

    • Author(s)
      Hirokazu Fukidome, Masato Kotsugi, Yusuke Kawai, Takuo Ohkouchi, Thomas Seyller, Karsten Horn, Hiroyuki Handa, Ryota Takahashi, Kei Imaizumi, Yoshiharu Enta, Maki Suemitsu, Toyohiko Kinoshita, Yoshio Watanabe
    • Organizer
      2nd International Symposium on Graphene Devices
    • Place of Presentation
      仙台
    • Year and Date
      2010-10-27
    • Related Report
      2011 Final Research Report
  • [Presentation] Nanoscale Control of Structure of Epitaxial Graphene by Using Substrate Microfabrication2010

    • Author(s)
      Hirokazu Fukidome, Masato Kotsugi, Yusuke Kawai, Takuo Ohkouchi, Thomas Seyller, Karsten Horn, Hiroyuki Handa, Ryota Takahashi, Kei Imaizumi, Yoshiharu Enta, Maki Suemitsu, Toyohiko Kinoshita, Yoshio Watanabe
    • Organizer
      2nd International Symposium on Graphene Devices
    • Place of Presentation
      仙台
    • Related Report
      2010 Annual Research Report
  • [Presentation] Formation of Epitaxial Graphene on Silicon Substrates via a SiC Ultrathin Film2009

    • Author(s)
      Maki Suemitsu
    • Place of Presentation
      シンガポール
    • Year and Date
      2009-12-15
    • Related Report
      2011 Final Research Report
  • [Presentation] Formation of Epitaxial Graphene on Silicon Substrates via a SiC Ultrathin Film2009

    • Author(s)
      末光眞希
    • Organizer
      SICC-6
    • Place of Presentation
      Singapore、Singapore
    • Year and Date
      2009-12-15
    • Related Report
      2009 Annual Research Report
  • [Presentation] Si系薄膜の成膜機構の原子・分子レベルでの解明と低温・高品質形成を実現する新たな成膜技術の創生2009

    • Author(s)
      末光眞希
    • Organizer
      第50回真空に関する連合講演会
    • Place of Presentation
      東京
    • Year and Date
      2009-11-04
    • Related Report
      2011 Final Research Report 2009 Annual Research Report
  • [Book] Silicon-germanium(SiGe)nanostructures : Production, properties and applications in electronics, Chapter2011

    • Author(s)
      M. Suemitsu and S. Filimonov
    • Total Pages
      3
    • Publisher
      Woodhead Publishing
    • Related Report
      2011 Final Research Report
  • [Book] Silicon-germanium(SiGe) nanostructures : Production, properties and applications in electronics, Chapter 32011

    • Author(s)
      M.Suemitsu, S.Filimonov
    • Publisher
      Woodhead Publishing
    • Related Report
      2010 Annual Research Report

URL: 

Published: 2009-04-01   Modified: 2016-04-21  

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