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Improvement of sensitivity in high-resolution RBS

Research Project

Project/Area Number 21360022
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionKyoto University

Principal Investigator

KIMURA Kenji  京都大学, 大学院・工学研究科, 教授 (50127073)

Co-Investigator(Kenkyū-buntansha) SUZUKI Motofumi  京都大学, 大学院・工学研究科, 准教授 (00346040)
NAKAJIMA Kaoru  京都大学, 大学院・工学研究科, 助教 (80293885)
Project Period (FY) 2009 – 2011
Project Status Completed (Fiscal Year 2011)
Budget Amount *help
¥18,200,000 (Direct Cost: ¥14,000,000、Indirect Cost: ¥4,200,000)
Fiscal Year 2011: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2010: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2009: ¥9,360,000 (Direct Cost: ¥7,200,000、Indirect Cost: ¥2,160,000)
Keywordsノイズ低減 / 高分解能RBS / 高分解能ERDA / 軽元素分析 / 位置検出器
Research Abstract

The sensitivity(limit of detection) of high-resolution Rutherford backscattering spectroscopy(HRBS) is mainly determined by the background noise of the spectrometer. There are two major origins of the background noise in HRBS, one is the stray ions scattered from the inner wall of the vacuum chamber of the spectrometer and the other is the dark noise of the detector. A method to reduce the background noise was proposed and the noise was actually reduced by a factor 200. The detection limit can be improved down to 10 ppm for As in Si at a measurement time of one hour under ideal conditions.

Report

(4 results)
  • 2011 Annual Research Report   Final Research Report ( PDF )
  • 2010 Annual Research Report
  • 2009 Annual Research Report
  • Research Products

    (12 results)

All 2012 2011 2010

All Journal Article (4 results) (of which Peer Reviewed: 2 results) Presentation (8 results)

  • [Journal Article] Improvement of sensitivity in high-resolution ERDA2012

    • Author(s)
      H. Hashimoto, K. Nakajima, M. Suzuki, K. Sasakawa, K. Kimura
    • Journal Title

      Nucl. Instr. and Methods B

      Volume: 273 Pages: 241-241

    • Related Report
      2011 Final Research Report
  • [Journal Article] Improvement of sensitivity in high-resolution ERDA2012

    • Author(s)
      H.Hashimoto, K.Nakajima, M.Suzuki, K.Sasakawa, K.
    • Journal Title

      clear Instruments and Methods in Physics Research

      Volume: 273 Pages: 241-244

    • DOI

      10.1016/j.nimb.2011.07.085

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Improvement of sensitivity in high-resolution RBS2011

    • Author(s)
      H. Hashimoto, K. Nakajima, M. Suzuki, K. Sasakawa, K. Kimura
    • Journal Title

      Rev. Sci. In strum

      Volume: 82

    • Related Report
      2011 Final Research Report
  • [Journal Article] Improvement of sensitivity in high-resolution RBS2011

    • Author(s)
      H.Hashimoto, K.Nakajima, M.Suzuki, K.Sasakawa, K.
    • Journal Title

      Review of Scientific Instruments

      Volume: 82 Issue: 6

    • DOI

      10.1063/1.3594095

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Presentation] Improvement of sensitivity in high-resolution RBS by reducing detector noise2011

    • Author(s)
      H. Hashimoto, K. Nakajima, M. Suzuki, K. Sasakawa, K. Kimura
    • Organizer
      The 6th International Workshop on High-Resolution Depth Profiling
    • Place of Presentation
      Paris, France
    • Year and Date
      2011-06-29
    • Related Report
      2011 Final Research Report
  • [Presentation] provement of sensitivity in high-resolution RBS by reducing detector noi2011

    • Author(s)
      H.Hashimoto, K.Nakajima, M.Suzuki, K.Sasakawa, K.
    • Organizer
      The 6th International Workshop on High-Resolution Depth Profiling
    • Place of Presentation
      Paris, France
    • Year and Date
      2011-06-29
    • Related Report
      2011 Annual Research Report
  • [Presentation] High-resolution depth profiling of boron in silicon : comparison between high-resolution RBS/ERDA and atom probe2011

    • Author(s)
      Sho Fujita, Kaoru Nakajima, Kaoru Sasakawa, Motofumi Suzuki, Wilfried Vandervorst, Kenji Kimura
    • Organizer
      8th International Symposium on Atomic Level Characterizations for New Materials and Devices
    • Place of Presentation
      Seoul, Republic of Korea
    • Year and Date
      2011-05-24
    • Related Report
      2011 Annual Research Report 2011 Final Research Report
  • [Presentation] Improvement of sensitivity in high-resolution RBS/ERDA2011

    • Author(s)
      Hashimoto, K. Nakajima, M. Suzuki, K. Sasakawa, K. Kimura
    • Organizer
      The 20th International Conference on Ion Beam Analysis
    • Place of Presentation
      Itapema, Brazil
    • Year and Date
      2011-04-14
    • Related Report
      2011 Final Research Report
  • [Presentation] Improvement of sensitivity in high-resolution RBS/ERDA2011

    • Author(s)
      H.Hashimoto, K.Nakajima, M.Suzuki, K.Sasakawa, K.
    • Organizer
      e 20th International Conference on Ion Beam Analysi
    • Place of Presentation
      Itapema, Brazil
    • Year and Date
      2011-04-14
    • Related Report
      2011 Annual Research Report
  • [Presentation] 高分解能RBS/ERDAの検出器系におけるバックグラウンド・ノイズ低減2011

    • Author(s)
      橋元弘貴, 藤田頌, 中嶋薫, 鈴木基史, 木村健二
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学
    • Year and Date
      2011-03-25
    • Related Report
      2011 Final Research Report 2010 Annual Research Report
  • [Presentation] 高分解能RBS法の検出器系におけるバックグラウンド・ノイズ低減2010

    • Author(s)
      橋元弘貴、中嶋薫、鈴木基史、木村健二
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      東海大学湘南キャンパス
    • Year and Date
      2010-03-19
    • Related Report
      2011 Final Research Report
  • [Presentation] 高分解能RBS法の検出器系におけるバックグラウンド・ノイズ低減2010

    • Author(s)
      橋元弘貴
    • Organizer
      応用物理学会
    • Place of Presentation
      東海大学湘南キャンパス
    • Year and Date
      2010-03-19
    • Related Report
      2009 Annual Research Report

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Published: 2009-04-01   Modified: 2016-04-21  

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