Improvement of sensitivity in high-resolution RBS

• Project/Area Number: 21360022
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Thin film/Surface and interfacial physical properties
• Research Institution: Kyoto University
• Principal Investigator: KIMURA Kenji 京都大学, 大学院・工学研究科, 教授 (50127073)
• Co-Investigator(Kenkyū-buntansha): SUZUKI Motofumi 京都大学, 大学院・工学研究科, 准教授 (00346040) ; NAKAJIMA Kaoru 京都大学, 大学院・工学研究科, 助教 (80293885)
• Project Period (FY): 2009 – 2011
• Project Status: Completed (Fiscal Year 2011)
• Budget Amount: ¥18,200,000 (Direct Cost: ¥14,000,000、Indirect Cost: ¥4,200,000); Fiscal Year 2011: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000); Fiscal Year 2010: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000); Fiscal Year 2009: ¥9,360,000 (Direct Cost: ¥7,200,000、Indirect Cost: ¥2,160,000)
• Keywords: ノイズ低減 / 高分解能RBS / 高分解能ERDA / 軽元素分析 / 位置検出器

Research Abstract

The sensitivity(limit of detection) of high-resolution Rutherford backscattering spectroscopy(HRBS) is mainly determined by the background noise of the spectrometer. There are two major origins of the background noise in HRBS, one is the stray ions scattered from the inner wall of the vacuum chamber of the spectrometer and the other is the dark noise of the detector. A method to reduce the background noise was proposed and the noise was actually reduced by a factor 200. The detection limit can be improved down to 10 ppm for As in Si at a measurement time of one hour under ideal conditions.

Research Products

• [Journal Article] Improvement of sensitivity in high-resolution ERDA (2012)
  • Author(s): H. Hashimoto, K. Nakajima, M. Suzuki, K. Sasakawa, K. Kimura
  • Journal Title: Nucl. Instr. and Methods B Volume: 273 Pages: 241-241
• [Journal Article] Improvement of sensitivity in high-resolution ERDA (2012)
  • Author(s): H.Hashimoto, K.Nakajima, M.Suzuki, K.Sasakawa, K.
  • Journal Title: clear Instruments and Methods in Physics Research Volume: 273 Pages: 241-244
  • DOI: 10.1016/j.nimb.2011.07.085
  • Peer Reviewed
• [Journal Article] Improvement of sensitivity in high-resolution RBS (2011)
  • Author(s): H. Hashimoto, K. Nakajima, M. Suzuki, K. Sasakawa, K. Kimura
  • Journal Title: Rev. Sci. In strum Volume: 82
• [Journal Article] Improvement of sensitivity in high-resolution RBS (2011)
  • Author(s): H.Hashimoto, K.Nakajima, M.Suzuki, K.Sasakawa, K.
  • Journal Title: Review of Scientific Instruments Volume: 82 Issue: 6
  • DOI: 10.1063/1.3594095
  • Peer Reviewed
• [Presentation] Improvement of sensitivity in high-resolution RBS by reducing detector noise (2011)
  • Author(s): H. Hashimoto, K. Nakajima, M. Suzuki, K. Sasakawa, K. Kimura
  • Organizer: The 6th International Workshop on High-Resolution Depth Profiling
  • Place of Presentation: Paris, France
  • Year and Date: 2011-06-29
• [Presentation] provement of sensitivity in high-resolution RBS by reducing detector noi (2011)
  • Author(s): H.Hashimoto, K.Nakajima, M.Suzuki, K.Sasakawa, K.
  • Organizer: The 6th International Workshop on High-Resolution Depth Profiling
  • Place of Presentation: Paris, France
  • Year and Date: 2011-06-29
• [Presentation] High-resolution depth profiling of boron in silicon : comparison between high-resolution RBS/ERDA and atom probe (2011)
  • Author(s): Sho Fujita, Kaoru Nakajima, Kaoru Sasakawa, Motofumi Suzuki, Wilfried Vandervorst, Kenji Kimura
  • Organizer: 8th International Symposium on Atomic Level Characterizations for New Materials and Devices
  • Place of Presentation: Seoul, Republic of Korea
  • Year and Date: 2011-05-24
• [Presentation] Improvement of sensitivity in high-resolution RBS/ERDA (2011)
  • Author(s): Hashimoto, K. Nakajima, M. Suzuki, K. Sasakawa, K. Kimura
  • Organizer: The 20th International Conference on Ion Beam Analysis
  • Place of Presentation: Itapema, Brazil
  • Year and Date: 2011-04-14
• [Presentation] Improvement of sensitivity in high-resolution RBS/ERDA (2011)
  • Author(s): H.Hashimoto, K.Nakajima, M.Suzuki, K.Sasakawa, K.
  • Organizer: e 20th International Conference on Ion Beam Analysi
  • Place of Presentation: Itapema, Brazil
  • Year and Date: 2011-04-14
• [Presentation] 高分解能RBS/ERDAの検出器系におけるバックグラウンド・ノイズ低減 (2011)
  • Author(s): 橋元弘貴, 藤田頌, 中嶋薫, 鈴木基史, 木村健二
  • Organizer: 第58回応用物理学関係連合講演会
  • Place of Presentation: 神奈川工科大学
  • Year and Date: 2011-03-25
• [Presentation] 高分解能RBS法の検出器系におけるバックグラウンド・ノイズ低減 (2010)
  • Author(s): 橋元弘貴、中嶋薫、鈴木基史、木村健二
  • Organizer: 第59回応用物理学関係連合講演会
  • Place of Presentation: 東海大学湘南キャンパス
  • Year and Date: 2010-03-19
• [Presentation] 高分解能RBS法の検出器系におけるバックグラウンド・ノイズ低減 (2010)
  • Author(s): 橋元弘貴
  • Organizer: 応用物理学会
  • Place of Presentation: 東海大学湘南キャンパス
  • Year and Date: 2010-03-19