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INVESTIGATION OF DAMAGE MECHANISM AND ESTIMATION OF STRENGTH OF CARBON NANOTUBES AS ELECTRONIC MATERIAL UNDER HIGH-DENSITY ELECTRONIC CURRENT

Research Project

Project/Area Number 21360046
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Materials/Mechanics of materials
Research InstitutionHirosaki University

Principal Investigator

SASAGAWA Kazuhiko  弘前大学, 大学院・理工学研究科, 教授 (50250676)

Co-Investigator(Kenkyū-buntansha) MURAOKA Mikio  秋田大学, 大学院・工学資源学研究科, 教授 (50190872)
JU Yang  名古屋大学, 大学院・工学研究科, 教授 (60312609)
SAKA Masumi  東北大学, 大学院・工学研究科, 教授 (20158918)
Project Period (FY) 2009 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥18,200,000 (Direct Cost: ¥14,000,000、Indirect Cost: ¥4,200,000)
Fiscal Year 2012: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
Fiscal Year 2011: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2010: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2009: ¥10,920,000 (Direct Cost: ¥8,400,000、Indirect Cost: ¥2,520,000)
Keywordsエレクトロマイグレーション / カーボンナノチューブ / 電子デバイス / 高密度電流 / 信頼性
Research Abstract

Carbon nanotubes (CNTs) are expected to be applied to nano-sized electronic materials. A method of acceleration test to intentionally introduce damage to CNTs was developed by supplying high-density electronic current. Performing the test under various atmospheric and loading conditions the damage mechanism of CNT under electronic current was clarified. Furthermore, an evaluation method of strength of CNT was developed considering the damage mechanism. The evaluated results qualitatively agreed with experimental ones, and the strength of CNT under electronic current was successively evaluated.

Report

(5 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • 2009 Annual Research Report
  • Research Products

    (98 results)

All 2013 2012 2011 2010 2009 Other

All Journal Article (47 results) (of which Peer Reviewed: 44 results) Presentation (42 results) (of which Invited: 2 results) Book (3 results) Remarks (4 results) Patent(Industrial Property Rights) (2 results) (of which Overseas: 1 results)

  • [Journal Article] Experimental Study of Damage Mechanism of Carbon Nanotube as Nano-Component of Electronic Devices under High Current Density2013

    • Author(s)
      K. Sasagawa, K. Fujisaki, J. Unuma and R.Azuma
    • Journal Title

      Proceedings of ASME InterPACK2013 (CD-ROM)

      Volume: (掲載決定)

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Numerical Study of Allowable Current Density for Electromigration Damage of Multilevel Interconnection in Integrated Circuit (Keynote Lecture)2013

    • Author(s)
      K. Sasagawa, T. Fujisaki and T. Yanagi
    • Journal Title

      Proc. 13th Int. Conf. Fracture

      Volume: (掲載決定)

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Repositioning Technique in Nanowire Manipulation by Oscillating Gripper2013

    • Author(s)
      Y. Toku, K. Kobayashi and M. Muraoka
    • Journal Title

      Micro &Nano Letters

      Volume: (掲載決定)

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Experimental Study of Damage Mechanism of Carbon Nanotube as Nano-Component of Electronic Devices under High Current Density2013

    • Author(s)
      K. Sasagawa, K. Fujisaki, J. Unuma and R. Azuma
    • Journal Title

      Proceedings of ASME InterPACK2013 (CD-ROM)

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Repositioning Technique in Nanowire Manipulation by Oscillating Gripper2013

    • Author(s)
      Y. Toku, K. Kobayashi and M. Muraoka
    • Journal Title

      Micro & Nano Letters

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Evaluation of Threshold Current Density in Interconnect with Reservoir Structure Using Numerical Modeling of Electromigration Damage2012

    • Author(s)
      K. Sasagawa, T. Yanagi and J. Unuma
    • Journal Title

      Proc. 7th Int. Symp. on Advanced Science and Technology in Exp. Mechanics (USB Memory)

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Microwave Atomic Force Microscopy : Quantitative Measurement and Characterization of Electrical Properties on the Nanometer Scale2012

    • Author(s)
      L. Zhang, Y. Ju, A. Hosoi and A. Fujimoto
    • Journal Title

      Applied Physics Express

      Volume: Vol. 5

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] リザーバ構造配線におけるエレクトロマイグレーション損傷の数値シミュレーションによるしきい電流密度の評価2012

    • Author(s)
      笹川和彦, 柳 貴裕, 鵜沼 潤
    • Journal Title

      第22回マイクロエレクトロニクスシンポジウム論文集

      Pages: 191-194

    • NAID

      130007887099

    • Related Report
      2012 Annual Research Report
  • [Journal Article] Evaluation of Threshold Current Density in Interconnect with Reservoir Structure Using Numerical Modeling of Electromigration Damage2012

    • Author(s)
      K. Sasagawa, T. Yanagi and J. Unuma
    • Journal Title

      Proceedings of 7th International Symposium on Advanced Science and Technology in Experimental Mechanics (USB Memory)

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Microwave atomic Force Microcopy : Quantitative Measurement and Characterization of Eelectrical Properties on the Nanometer Scale2012

    • Author(s)
      L.Zhang, Y.Ju, A.Hosoi, A.Fujimoto
    • Journal Title

      Applied Physics Express

      Volume: 5 Issue: 1 Pages: 016602-016602

    • DOI

      10.1143/apex.5.016602

    • Related Report
      2012 Annual Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Measurement of Electrical Properties of Materials under the Oxide Layer by Microwave-AFM Probe2012

    • Author(s)
      L. Zhang, Y. Ju, A. Hosoi and A. Fujimoto
    • Journal Title

      Microsystem Technologies

      Volume: 18 Issue: 11 Pages: 1917-1922

    • DOI

      10.1007/s00542-012-1512-2

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A Comparison of Electromigration Failure of Metal Lines with Fracture Mechanics2012

    • Author(s)
      H.Abe, M.Muraoka, K.Sasagawa, M.Saka
    • Journal Title

      Acta Mech.Sin.

      Volume: 28(印刷中)

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of Oxygen Concentration on Damage Mechanism of Carbon Nanotubes under High Current Density2011

    • Author(s)
      K. Sasagawa, J. Unuma and T. Abo
    • Journal Title

      Proc. ASME InterPACK2011 (CD-ROM)

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Change in Damage Mechanism of MWCNTs under Electric Current with Oxygen Concentration2011

    • Author(s)
      K. Sasagawa and J. Unuma
    • Journal Title

      Proc. 13th International Conference on Electric Materials and Packaging(USB flash memory)

      Pages: 69-72

    • Related Report
      2012 Final Research Report
  • [Journal Article] Structure Modification of M-AFM Probe for the Measurement of Local Conductivity2011

    • Author(s)
      A. Fujimoto, L. Zhang, A. Hosoi and Y. Ju
    • Journal Title

      Microsystem Technologies

      Volume: Vol. 17 Pages: 715-720

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Enhancement of Sensitivity for the Evaluation of Electrical Properties by Modifying the Nano Structure of Microwave AFM probe2011

    • Author(s)
      L. Zhang, Y. Ju, A. Hosoi and A. Fujimoto
    • Journal Title

      Mater. Sci. Forum

      Volume: Vols. 675-677 Pages: 555-558

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Characterization of Films with Thickness Less than 10 nm by Sensitivity-Enhanced Atomic Force Acoustic Microscopy2011

    • Author(s)
      M. Muraoka and S. Komatsu
    • Journal Title

      Nanoscale, Res. Lett

      Volume: Vol. 6

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Nanomachining by Rubbing at Ultrasonic Frequency under Controlled Shear Force2011

    • Author(s)
      M. Muraoka
    • Journal Title

      J. Nanosci. Nanotechnol

      Volume: Vol. 11 Pages: 1986-1990

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Effect of Oxygen Concentration on Damage Mechanism of Carbon Nanotubes under High Current Density2011

    • Author(s)
      K.Sasagawa, J.Unuma, T.Abo
    • Journal Title

      Proc.ASME InterPACK2011

      Volume: (CD-ROM)

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of Simulation of Nanostructure Production due to Electromigration Considering Specimen's Damage2011

    • Author(s)
      K.Sasagawa, T.Abo, J.Unuma
    • Journal Title

      Proc.the 4th JSME/ASME International Conference on Materials and Processing

      Volume: (CD-ROM)

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Change in Damage Mechanism of MWCNTs under Electric Current with Oxygen Concentration2011

    • Author(s)
      K.Sasagawa, J.Unuma
    • Journal Title

      Proc.13th International Conference on Electric Materials and Packaging(USB flash memory)

      Pages: 69-72

    • Related Report
      2011 Annual Research Report
  • [Journal Article] Structure Modification of M-AFM Probe for the Measurement of Local Conductivity2011

    • Author(s)
      A. Fujimoto, L. Zhang, A. Hosoi and Y. Ju
    • Journal Title

      Microsystem Technologies

      Volume: 17 Issue: 4 Pages: 715-720

    • DOI

      10.1007/s00542-010-1175-9

    • NAID

      120002816362

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Characterization of Films with Thickness Less than 10 nm by Sensitivity-Enhanced Atomic Force Acoustic Microscopy2011

    • Author(s)
      M.Muraoka, S.Komatsu
    • Journal Title

      Nanoscale Res.Lett.

      Volume: 6

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of Oxygen Concentration on Damage Mechanism of Carbon Nanotubes under High Current Density2011

    • Author(s)
      K.Sasagawa, T.Abo, J.Unuma
    • Journal Title

      Proceedings of ASME InterPACK2011

      Volume: (印刷中)

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of Simulation of Nanostructure Production Due to Electromigration Considering Specimen's Damage2011

    • Author(s)
      K.Sasagawa, T.Abo, J.Unuma
    • Journal Title

      Proceedings of ASME/JSME ICM&P2011

      Volume: (印刷中)

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Structure Modification of M-AFM Probe for the Measurement of Local Conductivity2011

    • Author(s)
      A.Fujimoto, L.Zhang, A.Hosoi, Y.Ju
    • Journal Title

      Microsyst.Technol

      Volume: (印刷中)

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Simulation of Nanostructure Production by Electromigration Considering Specimen's Shape2010

    • Author(s)
      K. Sasagawa, A. Kirita, S. Fukushi and M. Saka
    • Journal Title

      J. Nanosci. Nanotechnol

      Volume: Vol. 10 Pages: 6036-6040

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Microwave Atomic Force Microscopy Imaging for Nanometer-Scale Electrical Property Characterization2010

    • Author(s)
      L. Zhang, Y. Ju, A. Hosoi and A. Fujimoto
    • Journal Title

      Rev. Sci. Instrum

      Volume: Vol.81

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] An Integrated Compact Unit for Wide Range Micro-Newton Force Measurement2010

    • Author(s)
      M.A.S.Akanda, H.Tohmyoh, M.Saka
    • Journal Title

      J.Solid Mech.Mater.Eng.

      Volume: 4 Pages: 545-556

    • NAID

      130000255527

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Simulation of Nanostructure Production by Electromigration Considering Specimen's Shape2010

    • Author(s)
      K.Sasagawa, A.Kirita, S.Fukushi, M.Saka
    • Journal Title

      J.Nanosci. Nanotechnol.

      Volume: 10 Pages: 6036-6040

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Microwave Atomic Force Microscbpy Imaging for Nanometer-Scale Electrical Property Characterization2010

    • Author(s)
      L.Zhang, Y.Ju, A.Hosoi,A.Fujimoto
    • Journal Title

      Rev.Sci.Instrum.

      Volume: 81

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Enhancement of Sensitivity for the Evaluation of Electrical Properties by Modifying the Nano Structure of Microwave AFM probe2010

    • Author(s)
      L.Zhang, Y Ju, A.Hosoi, A.Fujimoto
    • Journal Title

      Mater.Sci.Forum

      Volume: 675-677 Pages: 555-558

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Simulation of Nanostructure Production by Electromigration Considering Specimen's Shape2010

    • Author(s)
      K.Sasagawa, A.Kirita, S.Fukushi, M.Saka
    • Journal Title

      J.Nanosci.Nanotechnol. 10(印刷中)

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nanomachining by Rubbing at Ultrasonic Frequency under Controlled Shear Force2010

    • Author(s)
      M.Muraoka
    • Journal Title

      J.Nanosci.Nanotechnol. 印刷中

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Properties of M-AFM Probe Affected by Nanostructural Metal Coatings2010

    • Author(s)
      A.Hosoi, M.Hamada, A.Fujimoto, Y.Ju
    • Journal Title

      Microsystem Technologies (印刷中)

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] An Integrated Compact Unit for Wide Range Micro-Newton Force Measurement2010

    • Author(s)
      M.A.S.Akanda, H.Tohmyoh, M.Saka
    • Journal Title

      J.Solid Mech.Mater.Eng. (印刷中)

    • NAID

      130000255527

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A Numerical Simulation of Nanostructure Formation Utilizing Electromigration2009

    • Author(s)
      K. Sasagawa, S. Fukushi, Y. Sun and M. Saka
    • Journal Title

      J. Electron. Mater

      Volume: Vol. 38 Pages: 2201-2206

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Derivation of Film Characteristic Constants of Polycrystalline Line for Reliability Evaluation Against Electromigration Failure2009

    • Author(s)
      M.Hasegawa, K.Sasagawa, S.Uno, M.Saka, H.Abe
    • Journal Title

      Mech.Mater. 41

      Pages: 1090-1095

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A Numerical Simulation of Nanostructure Formation Utilizing Electromigration2009

    • Author(s)
      K.Sasagawa, S.Fukushi, Y.Sun, M.Saka
    • Journal Title

      J.Electron.Mater. 38

      Pages: 2201-2206

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Derivation of Electromigration Characteristic Constants of Metal Line Used in Electronic Devices2009

    • Author(s)
      K.Sasagawa, T.Gomyo, A.Kirita
    • Journal Title

      Proceedings of ICF12 (CD-ROM)

      Pages: 9-9

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Numerical Simulation of Threshold Current Density of Electromigration Damage in Cu Interconnect Tree2009

    • Author(s)
      K.Sasagawa, A.Kirita, T.Abo, A.H.Hassan
    • Journal Title

      Proceedings of InterPACK 2009 (CD-ROM)

      Pages: 6-6

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Mechanical Characterization of Nanowires Based on Optical Diffraction Images of the Bend Shape2009

    • Author(s)
      M.Muraoka, R.Tobe
    • Journal Title

      J.Nanosci.Nanotechnol. 9

      Pages: 4566-4574

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Inverse Analysis on Bent Shape of Nanowire in Fracture Test to Estimate the Fracture Strain2009

    • Author(s)
      M.Muraoka
    • Journal Title

      Proceedings of ICF12 (CD-ROM)

      Pages: 6-6

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Formation of Helical Nanostructures by Film Deposition on Straight Nanowire2009

    • Author(s)
      M.Muraoka, T.Adachi
    • Journal Title

      Proceedings of ASMP2009 (CD-ROM)

      Pages: 7-7

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Optimization of the Tip of Microwave AFM Probe2009

    • Author(s)
      Y.Ju, M.Hamada, A.Hosoi, A.Fujimoto
    • Journal Title

      Proceedings of InterPACK 2009 (CD-ROM)

      Pages: 6-6

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of Purity on the Fabrication of Al Micro/Thin-Materials by Utilizing Electromigration2009

    • Author(s)
      Y.B.Lu, M.Saka
    • Journal Title

      Mater.Lett. 63

      Pages: 2294-2296

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Manipulation of Thin Metallic Wires by Joule Heat Joining2009

    • Author(s)
      H.Tohmyoh, H.Takeda, M.A.S.Akanda, M.Saka
    • Journal Title

      Proceedings of InterPACK 2009 (CD-ROM)

      Pages: 5-5

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Presentation] 微細電子配線の安全性評価と生体の応力評価2013

    • Author(s)
      笹川和彦
    • Organizer
      日本非破壊検査協会 東北支部「支部会・講演会」(招待講演)
    • Place of Presentation
      青年文化センター(仙台市)
    • Year and Date
      2013-04-26
    • Related Report
      2012 Final Research Report
  • [Presentation] 材料システムとしての電子機器安全性と生体機能性の評価2013

    • Author(s)
      笹川和彦
    • Organizer
      平成24年度日本材料学会東北支部総会・材料フォーラム講演会(招待講演)
    • Place of Presentation
      カレッジプラザ(秋田市)
    • Year and Date
      2013-03-25
    • Related Report
      2012 Final Research Report
  • [Presentation] 高密度電流下でのカーボンナノチューブの強度に及ぼす周囲環境の影響2013

    • Author(s)
      東 亮汰,笹川和彦,藤崎和弘,鵜沼 潤
    • Organizer
      日本機械学会東北学生会第43回学生員卒業研究発表講演会
    • Place of Presentation
      一関工業高等専門学校(一関市)
    • Year and Date
      2013-03-11
    • Related Report
      2012 Final Research Report
  • [Presentation] 成長環境が及ぼすマイクロ/ナノ材料の原子拡散に基づく形状形成への影響2012

    • Author(s)
      趙 旭,坂 真澄
    • Organizer
      日本機械学会第20回機械材料・材料加工技術講演会
    • Place of Presentation
      大阪工業大学(大阪市)
    • Related Report
      2012 Final Research Report
  • [Presentation] Evaluation of Threshold Current Density in Interconnect with Reservoir Structure Using Numerical Modeling of Electromigration Damage2012

    • Author(s)
      K. Sasagawa and T. Yanagi
    • Organizer
      2012 International Conference on Solid State Devices and Materials
    • Place of Presentation
      Kyoto International Conference Center (Kyoto, Japan)
    • Related Report
      2012 Annual Research Report 2012 Final Research Report
  • [Presentation] Development of Numerical Simulation of Electromigration Damage in Cu Multilevel Interconnection with Reservoir Structure2012

    • Author(s)
      K. Sasagawa and T. Yanagi
    • Organizer
      12th International Workshop on Stress-Induced Phenomena in Microelectronics
    • Place of Presentation
      Co-op Inn Kyoto (Kyoto, Japan)
    • Related Report
      2012 Annual Research Report
  • [Presentation] 成長環境が及ぼすマイクロ/ナノ材料の原子拡散に基づく形状形成への影響2012

    • Author(s)
      趙 旭,坂 真澄
    • Organizer
      日本機械学会第20回機械材料・材料加工技術講演会
    • Place of Presentation
      大阪工業大学(大阪市)
    • Related Report
      2012 Annual Research Report
  • [Presentation] 鋭利な先端を有する銅配線を用いた鉛フリーはんだのエレクトロマイグレーション耐性評価2012

    • Author(s)
      日野航太,坂 真澄
    • Organizer
      日本機械学会第20回機械材料・材料加工技術講演会
    • Place of Presentation
      大阪工業大学(大阪市)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Change in Damage Mechanism of MWCNTs under Electric Current with Oxygen Concentration2011

    • Author(s)
      K. Sasagawa and J. Unuma
    • Organizer
      13th International Conference on Electric Materials and Packaging
    • Place of Presentation
      Kyoto Garden Palace, Kyoto
    • Year and Date
      2011-12-13
    • Related Report
      2012 Final Research Report 2011 Annual Research Report
  • [Presentation] プリント基板Cu配線のエレクトロマイグレーション損傷に関する物性定数の導出(日本非破壊検査協会新進賞受賞:鵜沼 潤)2011

    • Author(s)
      鵜沼 潤, 阿保雄大, 笹川和彦, 五明利雄
    • Organizer
      日本非破壊検査協会平成23年度秋季講演大会
    • Place of Presentation
      淡路夢舞台国際会議場(淡路市)
    • Year and Date
      2011-10-18
    • Related Report
      2012 Final Research Report
  • [Presentation] プリント基板Cu配線のエレクトロマイグレーション損傷に関する物性定数の導出(日本非破壊検査協会新進賞受賞:鵜沼潤)2011

    • Author(s)
      鵜沼潤, 阿保雄大, 笹川和彦, 五明利雄
    • Organizer
      日本非破壊検査協会平成23年度秋季講演大会
    • Place of Presentation
      淡路夢舞台国際会議場(淡路市)
    • Year and Date
      2011-10-18
    • Related Report
      2011 Annual Research Report
  • [Presentation] Manipulation of Nanowires by Chopsticks2011

    • Author(s)
      K. Kobayashi, Y. Toku and M. Muraoka
    • Organizer
      Int. Conf. on Advanced Technology in Experimental Mechanics
    • Place of Presentation
      Kobe Int. Conf. Center, Kobe
    • Year and Date
      2011-09-21
    • Related Report
      2012 Final Research Report
  • [Presentation] Manipulation of Nanowires by Chopsticks2011

    • Author(s)
      K.Kobayashi, Y.Toku, M.Muraoka
    • Organizer
      Int.Conf.on Advanced Technology in Experimental Mechanics
    • Place of Presentation
      Kobe Int.Conf.Center, Kobe
    • Year and Date
      2011-09-21
    • Related Report
      2011 Annual Research Report
  • [Presentation] Effect of Oxygen Concentration on Damage Mechanism of Carbon Nanotubes under High Current Density2011

    • Author(s)
      K.Sasagawa, J.Unuma, T.Abo
    • Organizer
      ASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems, MEMS and NEMS (InterPACK2011)
    • Place of Presentation
      Portland, Oregon, USA
    • Year and Date
      2011-07-06
    • Related Report
      2011 Annual Research Report
  • [Presentation] Development of Simulation of Nanostructure Production due to Electromigration Considering Specimen's Damage2011

    • Author(s)
      K.Sasagawa, T.Abo, J.Unuma
    • Organizer
      4th JSME/ASME International Conference on Materials and Processing
    • Place of Presentation
      Corvallis, Oregon, USA
    • Year and Date
      2011-06-16
    • Related Report
      2011 Annual Research Report
  • [Presentation] テラヘルツ時間領域分光法による半導体ウェーバの電気的特性の測定・評価2011

    • Author(s)
      森俊貴, 巨陽
    • Organizer
      日本機械学会東海支部第60期総会・講演会
    • Place of Presentation
      豊橋技術科学大学(豊橋市)
    • Year and Date
      2011-03-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] Evaluation of Threshold Current Density of Electromigration Damage in Interconnect Tree with Angled Cu Lines2010

    • Author(s)
      K.Sasagawa, T.Abo
    • Organizer
      12th International Conference on Electronics Materials and Packaging(EMAP2010)
    • Place of Presentation
      Orchard Hotel, Singapore
    • Year and Date
      2010-10-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] 高密度電流下におけるカーボンナノチューブの損傷機構に関する研究2010

    • Author(s)
      鵜沼 潤, 笹川和彦, 阿保雄大
    • Organizer
      日本機械学会M&M2010材料力学カンファレンス
    • Place of Presentation
      長岡技術科学大学(長岡市)
    • Year and Date
      2010-10-10
    • Related Report
      2012 Final Research Report
  • [Presentation] 高密度電流下におけるカーボンナノチューブの損傷機構に関する研究2010

    • Author(s)
      鵜沼潤, 笹川和彦, 阿保雄大
    • Organizer
      日本機械学会M&M2010材料力学カンファレンス
    • Place of Presentation
      長岡技術科学大学(長岡市)
    • Year and Date
      2010-10-10
    • Related Report
      2010 Annual Research Report
  • [Presentation] 電子デバイスと生体の材料システムを評価する2010

    • Author(s)
      笹川和彦
    • Organizer
      平成22年度化学系学協会東北大会(招待講演)
    • Place of Presentation
      岩手大学工学部(盛岡市)
    • Year and Date
      2010-09-26
    • Related Report
      2012 Final Research Report
  • [Presentation] 電子デバイスと生体の材料システムを評価する2010

    • Author(s)
      笹川和彦
    • Organizer
      平成22年度化学系学協会東北大会
    • Place of Presentation
      岩手大学工学部(盛岡市) 招待講演
    • Year and Date
      2010-09-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] ツリー構造配線のエレクトロマイグレーション損傷しきい電流密度における配線形状の影響(日本機械学会若手優秀講演フェロー賞受賞:阿保雄大)2010

    • Author(s)
      阿保雄大, 笹川和彦
    • Organizer
      日本機械学会東北支部第46期秋季講演会
    • Place of Presentation
      秋田大学(秋田市)
    • Year and Date
      2010-09-24
    • Related Report
      2012 Final Research Report
  • [Presentation] ツリー構造配線のエレクトロマイグレーション損害における配線形状の影響(日本機械学会若手優秀講演フェロー賞受賞)2010

    • Author(s)
      阿保雄大, 笹川和彦
    • Organizer
      日本機械学会東北支部第46期秋季講演会
    • Place of Presentation
      秋田大学(秋田市)
    • Year and Date
      2010-09-24
    • Related Report
      2010 Annual Research Report
  • [Presentation] AMicroscope System for Characterization ofMechanical Properties of Small-Scaled Objects2010

    • Author(s)
      H. Tohmyoh, M.A.S. Akanda, M. Saka
    • Organizer
      ESTC2010 Conference
    • Place of Presentation
      Maritim proArte Hotel, Berlin, Germany
    • Year and Date
      2010-09-15
    • Related Report
      2012 Final Research Report
  • [Presentation] A Microscope System for Characterization of Mechanical Properties of Small-Scaled Objects2010

    • Author(s)
      H.Tohmyoh, M.A.S.Akanda, M.Saka
    • Organizer
      ESTC2010Confrence
    • Place of Presentation
      Maritim proArte Hotel, Berlin, Germany
    • Year and Date
      2010-09-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] Modifying the Structure of Microwave AFM Probe for Improving the Sensitivity in the Measurement of Electrical Properties2010

    • Author(s)
      張 嵐, 巨 陽, 細井厚志, 藤本紹文
    • Organizer
      日本機械学会2010年度年次大会
    • Place of Presentation
      名古屋工業大学(名古屋市)
    • Year and Date
      2010-09-06
    • Related Report
      2012 Final Research Report
  • [Presentation] 異よる創製条件下のエレクトロマイグレーションによる金属ナノストラクチャー創製の数値シミュレーション2010

    • Author(s)
      笹川和彦, 阿保雄大, 鵜沼潤
    • Organizer
      日本機械学会2010年度年次大会
    • Place of Presentation
      名古屋工業大学(名古屋市)
    • Year and Date
      2010-09-06
    • Related Report
      2010 Annual Research Report
  • [Presentation] 集中質量型カンチレバーのナノ接触共振による水晶ウエハの加工変質層の評価2010

    • Author(s)
      勝又悠樹, 村岡幹夫
    • Organizer
      日本機械学会2010年度年次大会
    • Place of Presentation
      名古屋工業大学(名古屋市)
    • Year and Date
      2010-09-06
    • Related Report
      2010 Annual Research Report
  • [Presentation] Modifyihg the Structure of Microwave AFM Probe for Improving the Sensitivity in the Measurement of Electrical properties2010

    • Author(s)
      張嵐, 巨陽, 細井厚志, 藤本紹文
    • Organizer
      日本機械学会2010年度年次大会
    • Place of Presentation
      名古屋工業大学(名古屋市)
    • Year and Date
      2010-09-06
    • Related Report
      2010 Annual Research Report
  • [Presentation] 高密度電流下におけるカーボンナノチューブ損傷に対する雰囲気環境の影響2010

    • Author(s)
      笹川和彦, 阿保雄大, 鵜沼 潤
    • Organizer
      日本機械学会東北支部第45期総会・講演会
    • Place of Presentation
      東北大学(仙台市)
    • Year and Date
      2010-03-12
    • Related Report
      2012 Final Research Report 2009 Annual Research Report
  • [Presentation] コア流動を利用した金属被覆ナノワイヤのコイル形成2010

    • Author(s)
      徳悠葵, 村岡幹夫
    • Organizer
      日本機械学会東北支部第45期総会・講演会
    • Place of Presentation
      東北大学(仙台市)
    • Year and Date
      2010-03-12
    • Related Report
      2009 Annual Research Report
  • [Presentation] ナノワイヤの真性ひずみ誘起曲げ加工条件の実験的検討2009

    • Author(s)
      徳 悠葵,村岡幹夫
    • Organizer
      2009年度精密工学会東北支部学術講演会
    • Place of Presentation
      日本大学(郡山市)
    • Year and Date
      2009-11-28
    • Related Report
      2012 Final Research Report 2009 Annual Research Report
  • [Presentation] Development of a Nanostructural Microwave Probe for Atomic Force Microscopy2009

    • Author(s)
      Y. Ju
    • Organizer
      International Symposium on Precision Engineering and Micro/Nanotechnology 2009 (Keynote Lecture)
    • Place of Presentation
      Zhejiang University, Hangzhou, China
    • Year and Date
      2009-10-29
    • Related Report
      2012 Final Research Report
  • [Presentation] Development of a Nanostructural Microwave Probe for Atomic Force Microscopy2009

    • Author(s)
      Y.Ju(Keynote Lecture)
    • Organizer
      International Symposium on Precision Engineering and Micro/Nanotechnology 2009
    • Place of Presentation
      Zhejiang University, Hangzhou, China
    • Year and Date
      2009-10-29
    • Related Report
      2009 Annual Research Report
  • [Presentation] 試験片の損傷を考慮したエレクトロマイグレーションによる金属ナノストラクチャー創製の数値シミュレーション2009

    • Author(s)
      笹川和彦, 桐田聡彦, 阿保雄大, アブドル ハフィズ
    • Organizer
      日本機械学会2009年度年次大会
    • Place of Presentation
      岩手大学(盛岡市)
    • Year and Date
      2009-09-15
    • Related Report
      2009 Annual Research Report
  • [Presentation] マイクロ波原子間力顕微鏡プローブの開発および電気的特性の評価2009

    • Author(s)
      藤本紹文, 細井厚志, 巨陽
    • Organizer
      日本機械学会2009年度年次大会
    • Place of Presentation
      岩手大学(盛岡市)
    • Year and Date
      2009-09-15
    • Related Report
      2009 Annual Research Report
  • [Presentation] エレクトロマイグレーションによるAl原子排出のその場観察2009

    • Author(s)
      野辺佑樹, 燈明泰成, 坂真澄
    • Organizer
      日本機械学会2009年度年次大会
    • Place of Presentation
      岩手大学(盛岡市)
    • Year and Date
      2009-09-15
    • Related Report
      2009 Annual Research Report
  • [Presentation] ツリー構造Cu配線におけるエレクトロマイグレーション損傷しきい電流密度の数値シミュレーションの開発2009

    • Author(s)
      笹川和彦, 桐田聡彦, 阿保雄大, アブドル ハフィズ
    • Organizer
      応用物理学会薄膜・表面物理分科会LSIにおける原子輸送・応力問題第14回研究会
    • Place of Presentation
      東京工業大学(東京)
    • Year and Date
      2009-07-27
    • Related Report
      2009 Annual Research Report
  • [Presentation] マイクロ波原子間力顕微鏡に用いるマイクロ波導波プローブの開発2009

    • Author(s)
      藤本紹文, 細井厚志, 巨陽
    • Organizer
      日本非破壊検査協会平成21年度春季講演大会
    • Place of Presentation
      アルカディア市ヶ谷(東京)
    • Year and Date
      2009-05-20
    • Related Report
      2009 Annual Research Report
  • [Presentation] 高密度電流下でのカーボンナノチューブの強度に及ぼす周囲環境の影響

    • Author(s)
      東 亮汰,笹川和彦,藤崎和弘,鵜沼 潤
    • Organizer
      日本機械学会 東北学生会 第43回学生員卒業研究発表講演会
    • Place of Presentation
      一関工業高等専門学校(一関市)
    • Related Report
      2012 Annual Research Report
  • [Presentation] 材料システムとしての電子機器安全性と生体機能性の評価

    • Author(s)
      笹川和彦
    • Organizer
      平成24年度日本材料学会東北支部総会・材料フォーラム講演会
    • Place of Presentation
      カレッジプラザ(秋田市)
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] 微細電子配線の安全性評価と生体の応力評価

    • Author(s)
      笹川和彦
    • Organizer
      日本非破壊検査協会 東北支部「支部会・講演会」
    • Place of Presentation
      青年文化センター(仙台市)
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Book]2013

    • Author(s)
      M. Muraoka, Springer, Heidelberg, Acoustic Scanning Probe Microscopy, eds. F. Marinello, D. Passeri, E. Savio
    • Total Pages
      39
    • Related Report
      2012 Final Research Report
  • [Book] Acoustic Scanning Probe Microscopy, eds. F. Marinello, D. Passeri, E. Savio (担当: Chapter 7: Enhanced Sensitivity of AFAM and UAFM by Concentrated-Mass Cantilevers)2013

    • Author(s)
      M. Muraoka
    • Total Pages
      39
    • Publisher
      Springer, Heidelberg
    • Related Report
      2012 Annual Research Report
  • [Book] Acoustic Scanning Probe Microscopy, Edited by D.Passeri, F.Marinello and E.Savo(担当:Chapter 7)2012

    • Author(s)
      M.Muraoka
    • Total Pages
      39
    • Publisher
      Springer(印刷中)
    • Related Report
      2011 Annual Research Report
  • [Remarks] JSTとNEDOが主催するイノベーションジャパン-大学見本市(東京国際フォーラム)に,「高密度電流の流れる電子デバイス配線の信頼性評価法」(2009年),「高密度電流がもたらす電子配線損傷の信頼性評価法」(2010年),「バーチャルリアリティ実現のための接着型触覚センサ(に併設)」(2012年)と題して出展し,研究成果を広く社会に公表した。

    • URL

      http://www.mech.hirosaki-u.ac.jp/~sasagawa/labhp/

    • Related Report
      2012 Final Research Report
  • [Remarks] エレクトロニクス実装学会主催の「第22回マイクロエレクトロニクスシンポジウム,秋季大会(大阪府立大学,2012年)」の大学研究室紹介コーナーにおいて,電子機器メーカーの研究者に研究成果の紹介を行った。

    • Related Report
      2012 Final Research Report
  • [Remarks] 研究室のホームページに研究内容を記載し,公開している。

    • Related Report
      2012 Final Research Report
  • [Remarks]

    • URL

      http://www.mech.hirosaki-u.ac.jp/~sasagawa/labhp/

    • Related Report
      2010 Annual Research Report
  • [Patent(Industrial Property Rights)] ビア接続の多層配線の信頼性を評価する信頼性評価シミュレーションプログラム,ビア接続の多層配線の許容電流密度向上方法およびビア接続の多層配線2012

    • Inventor(s)
      笹川和彦
    • Industrial Property Rights Holder
      弘前大学
    • Filing Date
      2012-09-06
    • Related Report
      2012 Final Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] ビア接続の多層配線の信頼性を評価する信頼性評価シミュレーションプログラム,ビア接続の多層配線の許容電流密度向上方法およびビア接続の多層配線2012

    • Inventor(s)
      笹川和彦
    • Industrial Property Rights Holder
      弘前大学
    • Industrial Property Rights Type
      特許
    • Filing Date
      2012-09-06
    • Related Report
      2012 Annual Research Report

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Published: 2009-04-01   Modified: 2019-07-29  

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