Development of Mechanical Property Evaluation Method for Micro 3D-structure Using Digital Holography

• Project/Area Number: 21360053
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Materials/Mechanics of materials
• Research Institution: Wakayama University
• Principal Investigator: FUJIGAKI Motoharu 和歌山大学, システム工学部, 准教授 (40273875)
• Co-Investigator(Kenkyū-buntansha): MURATA Yorinobu 和歌山大学, システム工学部, 准教授 (50283958) ; MORIMOTO Yoshiharu 和歌山大学, 理事 (20029573)
• Project Period (FY): 2009 – 2011
• Project Status: Completed (Fiscal Year 2011)
• Budget Amount: ¥14,300,000 (Direct Cost: ¥11,000,000、Indirect Cost: ¥3,300,000); Fiscal Year 2011: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000); Fiscal Year 2010: ¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000); Fiscal Year 2009: ¥5,850,000 (Direct Cost: ¥4,500,000、Indirect Cost: ¥1,350,000)
• Keywords: デジタルホログラフィ / 力学特性評価 / マイクロ三次元構造物 / 変位分布計測 / ひずみ分布計測 / 形状計測 / 三次元構造物 / マイクロマシン

Research Abstract

The ability to apply a time-averaged digital holography to defect detection with applying vibrating was shown. We proposed a calibration method to measure the displacement and strain distributions using a number of imaging devices. The availability was confirmed with an experimental verification. A structure design of the compact displacement and strain distribution measurement system with a number of imaging devices was performed. A prototype of an imaging head with four imaging devices specialized for the digital holography was built.

Research Products

• [Presentation] Time Series Deformation Measurement by Windowed Digital (2011)
  • Author(s): Goto, R., Fujigaki, M.
  • Organizer: The 6th International Symposium on Advanced Science and Technology in Experimental Mechanics(6thISEM, 11-Sendai/Kansai), 133(CD-ROM), SEM XII International Congress & Exposition on Experimental and Applied Mechanics
  • Place of Presentation: 関西空港会議場
  • Year and Date: 2011-11-05
• [Presentation] ime Series Deformation Measurement by Windowed Digital Holographic Interferometry (2011)
  • Author(s): Goto, R., Fujigaki, M.
  • Organizer: The 6th International Symposium on Advanced Science and Technology in Experimental Mechanics (6thISEM, 11-Sendai/Kansai)
  • Place of Presentation: 関西空港会議場(大阪府)
  • Year and Date: 2011-11-05
• [Presentation] Calibration Method for Strain Measurement Using Multiple Cameras in Digital (2011)
  • Author(s): Fujigaki, M and Nishitani, R.
  • Organizer: Annual Conference & Exposition on Experimental and Applied Mechanics
  • Place of Presentation: USA
  • Year and Date: 2011-06-16
• [Presentation] Calibration Method for Strain Measurement Using Multiple Cameras in Digital Holography (2011)
  • Author(s): Fujigaki, M, Nishitani, R
  • Organizer: SEM Annual Conference & Exposition on Experimental and Applied Mechanics
  • Place of Presentation: Mohegan Sun, Uncasville, Connecticut USA
  • Year and Date: 2011-06-16
• [Presentation] 位相シフトデジタルホログラフィを用いた時間平均法による構造物の欠陥検出 (2010)
  • Author(s): 根木謙一, 福田智嘉羅, 藤垣元治, 柾谷明大
  • Organizer: 分科会合同ワークショップ2010
  • Place of Presentation: 熊本県阿蘇郡南阿蘇村
  • Year and Date: 2010-11-28
• [Presentation] 位相シフトデジタルホログラフィを用いた時間平均法による構造物の欠陥検出 (2010)
  • Author(s): 根木謙一, 福田智嘉羅, 藤垣元治, 柾谷明大
  • Organizer: 分科会合同ワークショップ2010
  • Place of Presentation: グリーンピア南阿蘇,熊本県阿蘇郡南阿蘇村
  • Year and Date: 2010-11-28
• [Presentation] Defect Detection Using Time-averaged Digital Holography with Noise (2010)
  • Author(s): Fujigaki, M., Fukuda, C., Negi, K. and Morimoto, Y.
  • Organizer: Proceedings of International Symposium on Advanced Science and Technology in Experimental Mechanic
  • Place of Presentation: 京都市
  • Year and Date: 2010-11-05
• [Presentation] Defect Detection Using Time-averaged Digital Holography with Noise Reduction by Windowed Hologram (2010)
  • Author(s): Fujigaki, M., Fukuda, C., Negi, K., Morimoto, Y
  • Organizer: Proceedings of International Symposium on Advanced Science and Technology in Experimental Mechanics
  • Place of Presentation: 龍谷大学大宮キャンパス,京都市
  • Year and Date: 2010-11-05
• [Presentation] デジタルホログラフィによる面内変位・ひずみ分布計測手法における光学系の小型化 (2010)
  • Author(s): 西谷陸, 藤垣元治, 森本吉春
  • Organizer: M & M2010材料力学カンファレンス
  • Place of Presentation: 長岡市
  • Year and Date: 2010-10-10
• [Presentation] デジタルホログラフィによる面内変位・ひずみ分布計測手法における光学系の小型化 (2010)
  • Author(s): 西谷陸, 藤垣元治, 森本吉春
  • Organizer: M&M2010材料力学カンファレンス
  • Place of Presentation: 長岡技術科学大学,長岡市
  • Year and Date: 2010-10-10
• [Presentation] 位相差平均化手法を用いた位相シフトデジタルホログラフィによる高さ分布計測 (2010)
  • Author(s): 後藤良介, 藤垣元治, 柾谷明大
  • Organizer: 第15回知能メカトロニクスワークショップ
  • Place of Presentation: 松山市
  • Year and Date: 2010-09-02
• [Presentation] 位相差平均化手法を用いた位相シフトデジタルホログラフィによる高さ分布計測 (2010)
  • Author(s): 後藤良介, 藤垣元治, 柾谷明大
  • Organizer: 第15回知能メカトロニクスワークショップ
  • Place of Presentation: 愛媛大学,松山市
  • Year and Date: 2010-09-02
• [Presentation] Deformation and Strain Measurement Using Phase-shifting Digital Holography with Off-axis Cameras (2010)
  • Author(s): Fujigaki, M., Nishitani, R., Morimoto, Y.
  • Organizer: SPIE Optics+Photonics
  • Place of Presentation: サンディエゴ(アメリカ)
  • Year and Date: 2010-08-04
• [Presentation] Deformation and Strain Measurement Using Phase-shifting Digital Holography with Off-axis Cameras (2010)
  • Author(s): Fujigaki, M., Nishitani, R., Morimoto, Y
  • Organizer: SPIE Optics+Photonics
  • Place of Presentation: サンディエゴ会議場,サンディエゴ(アメリカ)
  • Year and Date: 2010-08-04
• [Presentation] Strain Measurement Using Phase-shifting Digital Holography with Two Cameras (2010)
  • Author(s): Fujigaki, M., Nishitani, R., Morimoto, Y.
  • Organizer: ICEM 14, EPJ Web of Conferences
  • Place of Presentation: フチュロスコープ(フランス)
  • Year and Date: 2010-07-07
• [Presentation] Strain Measurement Using Phase-shifting Digital Holography with Two Cameras (2010)
  • Author(s): Fujigaki, M., Nishitani, R., Morimoto, Y
  • Organizer: ICEM 14, EPJ Web of Conferences 6
  • Place of Presentation: ICEMコンファレンスセンター,フチュロスコープ(フランス)
  • Year and Date: 2010-07-07
• [Presentation] Identification of Reconstruction Distance in Phase-shifting Digital Holography for Microscope (2009)
  • Author(s): 西谷陸, 藤垣元治, 森本吉春
  • Organizer: 4th ISEM' 09-NIIGATA
  • Place of Presentation: 新潟市
  • Year and Date: 2009-11-30
• [Presentation] Identification of Reconstruction Distance in Phase-shifting Digital Holog raphy for Microscope (2009)
  • Author(s): 西谷陸, 藤垣元治, 森本吉春
  • Organizer: 4th ISEM '09-NIIGATA
  • Place of Presentation: 新潟市
  • Year and Date: 2009-11-30
• [Presentation] Off-axis Reconstruction Method for Displacement and Strain Distribution Measurement with Phase-Shifting (2009)
  • Author(s): 藤垣元治, 柾谷明大, 森本吉春
  • Organizer: Digital Holography Fringe' 09
  • Place of Presentation: ニューティンゲン(ドイツ)
  • Year and Date: 2009-09-16
• [Presentation] Off-axis Reconstruction Method for Displacement and Strain Distribution Measurement with Phase-Shifting Digital Holography (2009)
  • Author(s): 藤垣元治, 柾谷明大, 森本吉春
  • Organizer: Fringe '09
  • Place of Presentation: ニューティンゲン(ドイツ)
  • Year and Date: 2009-09-16
• [Presentation] 2台のカメラを用いたデジタルホログラフィによる面内変位分布計測 (2009)
  • Author(s): 藤垣元治, 塩谷航平, 西谷陸, 柾谷明大, 森本吉春
  • Organizer: 日本実験力学会2009年度年次講演会
  • Place of Presentation: 東京都
  • Year and Date: 2009-08-06
• [Presentation] 2台のカメラを用いたデジタルホログラフィによる面内変位分布計測 (2009)
  • Author(s): 藤垣元治, 塩谷航平, 西谷陸, 柾谷明大, 森本吉春
  • Organizer: 日本実験力学会2009年度年次講演会
  • Place of Presentation: 京都市
  • Year and Date: 2009-08-06
• [Presentation] 光メカトロニクス計測による高速高精度な三次元形状計測・変位分布計測・ひずみ分布計測システムの開発 (2009)
  • Author(s): 藤垣元治
  • Organizer: 日本機械学会流体工学部門ディジタルホログラフィック応用計測研究会第7回研究会
  • Place of Presentation: 京都市
  • Year and Date: 2009-05-16
• [Presentation] 光メカトロニクス計測による高速高精度な三次元形状計測・変位分布計測・ひずみ分布計測システムの開発(ディジタルホログラフィによるひずみ分布計測システムの小型化) (2009)
  • Author(s): 藤垣元治
  • Organizer: 日本機械学会流体工学部門ディジタルホログラフィック応用計測研究会第7回研究会
  • Place of Presentation: 京都市
  • Year and Date: 2009-05-16
• [Presentation] Whole-Space Tabulation Method for Real-time Shape Measurement and Compact Strain Distribution Measurement System (2009)
  • Author(s): 藤垣元治
  • Organizer: ICCES' 09 Thailand
  • Place of Presentation: プーケット(タイ)
  • Year and Date: 2009-04-11
• [Presentation] Whole-Space Tabulation Method for Real-time Shape Measurement and Compact Strain Distribution Measurement System (2009)
  • Author(s): 藤垣元治
  • Organizer: ICCES'09 Thailand
  • Place of Presentation: プーケット(タイ)
  • Year and Date: 2009-04-11
• [Remarks]
  • URL: http://hamachi.sys.wakayama-u.ac.jp/research/about.html#hizumi
• [Remarks]
  • URL: http://hamachi.sys.wakayama-u.ac.jp/research/about.html#hizumi
• [Remarks] ホームページ等
  • URL: http://hamachi.sys.wakayama-u.ac.jp/research/stressstrain.html
• [Patent(Industrial Property Rights)] 小型位相シフト装置 (2011)
  • Inventor(s): 藤垣元治,西谷陸
  • Industrial Property Rights Holder: 国立大学法人和歌山大学
  • Industrial Property Number: 2011-042235
  • Filing Date: 2011-02-28
• [Patent(Industrial Property Rights)] 小型位相シフト装置 (2011)
  • Inventor(s): 藤垣元治, 西谷陸
  • Industrial Property Rights Holder: 国立大学法人和歌山大学
  • Industrial Property Number: 2011-042235
  • Filing Date: 2011-02-28
• [Patent(Industrial Property Rights)] 変位分布計測方法、装置及びプログラム (2009)
  • Inventor(s): 藤垣元治,森本吉春,柾谷明大,塩谷航平,西谷陸
  • Industrial Property Rights Holder: 国立大学法人和歌山大学
  • Filing Date: 2009-09-11
• [Patent(Industrial Property Rights)] 変位分布計測方法、装置及びプログラム (2009)
  • Inventor(s): 藤垣元治, 森本吉春, 柾谷明大, 塩谷航平, 西谷陸
  • Industrial Property Rights Holder: 国立大学法人和歌山大学
  • Filing Date: 2009-09-11