| Budget Amount *help |
¥19,370,000 (Direct Cost: ¥14,900,000、Indirect Cost: ¥4,470,000)
Fiscal Year 2011: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2010: ¥5,850,000 (Direct Cost: ¥4,500,000、Indirect Cost: ¥1,350,000)
Fiscal Year 2009: ¥9,100,000 (Direct Cost: ¥7,000,000、Indirect Cost: ¥2,100,000)
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| Research Abstract |
A new type of XYZ three-axis surface encoder has been developed for measurement and control of next-generation XYZ three-axis stages. In the surface encoder, a single laser beam is projected onto a micro-structured surface grating. A compact sensor head, which can be mounted on the stage, has been designed and constructed. It has been verified that the surface encoder has the ability to measure the three-axis XYZ displacements with a resolution of 0. 1 nm over a measurement area of 100mm(X)x 100mm(Y)x 1mm(Z)by using the information from the single measurement point.
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