XYZ three-axis surface encoder with a single measurement point based on interference of diffraction beams
| Project/Area Number |
21360057
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Tohoku University |
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Principal Investigator |
GAO Wei 東北大学, 大学院・工学研究科, 教授 (70270816)
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| Co-Investigator(Kenkyū-buntansha) |
SHIMIZU Yuki 東北大学, 大学院・工学研究科, 准教授 (70606384)
荒井 義和 東北大学, 大学院・工学研究科, 助教 (20455801)
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| Project Period (FY) |
2009 – 2011
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| Project Status |
Completed (Fiscal Year 2011)
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| Budget Amount *help |
¥19,370,000 (Direct Cost: ¥14,900,000、Indirect Cost: ¥4,470,000)
Fiscal Year 2011: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2010: ¥5,850,000 (Direct Cost: ¥4,500,000、Indirect Cost: ¥1,350,000)
Fiscal Year 2009: ¥9,100,000 (Direct Cost: ¥7,000,000、Indirect Cost: ¥2,100,000)
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| Keywords | 多軸計測 / 微細格子 / 平面ステージ / 回折光 |
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| Research Abstract |
A new type of XYZ three-axis surface encoder has been developed for measurement and control of next-generation XYZ three-axis stages. In the surface encoder, a single laser beam is projected onto a micro-structured surface grating. A compact sensor head, which can be mounted on the stage, has been designed and constructed. It has been verified that the surface encoder has the ability to measure the three-axis XYZ displacements with a resolution of 0. 1 nm over a measurement area of 100mm(X)x 100mm(Y)x 1mm(Z)by using the information from the single measurement point.
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Report
(4 results)
Research Products
(49 results)
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[Journal Article]2009
Author(s)
木村彰秀, 高偉
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Journal Title
機械設計「超精密位置決めのための変位センサ」(日刊工業新聞社)
Pages: 47-54
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