Three dimensional nanostructure fabrication technology using self-assemble phenomena
| Project/Area Number |
21360059
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | The University of Tokyo |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
ISHIHARA Sunao 東京大学, 大学院・工学系研究科, 教授 (00422329)
KOMETANI Reo 東京大学, 大学院・工学系研究科, 講師 (90466780)
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| Project Period (FY) |
2009 – 2011
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| Project Status |
Completed (Fiscal Year 2011)
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| Budget Amount *help |
¥18,980,000 (Direct Cost: ¥14,600,000、Indirect Cost: ¥4,380,000)
Fiscal Year 2011: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000)
Fiscal Year 2010: ¥7,150,000 (Direct Cost: ¥5,500,000、Indirect Cost: ¥1,650,000)
Fiscal Year 2009: ¥8,320,000 (Direct Cost: ¥6,400,000、Indirect Cost: ¥1,920,000)
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| Keywords | ナノ・マイクロ加工 / 自己組織化 / 三次元ナノ構造 / ブロック共重合体 / 集束イオンビーム化学気相成長法 / テンプレート / 多層膜 / 自由膜 / メカニカル振動子 / プラズモン共鳴 / 光学多層膜 / 基板処理 / FIB-CVD / 薄膜形成 / ナノメカニクス |
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| Research Abstract |
We developed three-dimensional nanostructure fabrication methods using a self-assembly phenomena of diblock copolymer, polystyrene-polymethyl methacrylate that forms pillar, pore and lamella structures at 30-100nm order scale. Concretely speaking, we proposed and demonstrated the following four methods :(1) Arrangement of the self-assembled nanostructures on three-dimensional nanostructures.(2) Alignment of the self-assembled nanostructures in three-dimensional space by using nano templates.(3) Fabrication of multilayer nanostructures using the self-assembled nanostructures as templates.(4) Fabrication of free standing self-assembled nanostructures using three-dimensional nano frames.(5) Nano patterning method of the self-assembled nanostructures by energy beam irradiation.(6) Thin film jointing method using focused ion beam irradiation.
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Report
(4 results)
Research Products
(23 results)
