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Manufacture of calibration and measurement surface standards for areal surface texture measuring instruments and their international standardization

Research Project

Project/Area Number 21360062
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionNagaoka University of Technology

Principal Investigator

YANAGI Kazuhisa  長岡技術科学大学, 工学部, 教授 (80108216)

Co-Investigator(Kenkyū-buntansha) AKETAGAWA Masato  長岡技術科学大学, 工学部, 教授 (10231854)
TANAKA Hidetake  長岡技術科学大学, 工学部, 助教 (10422651)
FUKATSU Hiroya  東京都立産業技術高等専門学校 (80228866)
UCHIDATE Michimasa  岩手大学, 工学部, 助教 (30422067)
Project Period (FY) 2009 – 2011
Project Status Completed (Fiscal Year 2011)
Budget Amount *help
¥10,660,000 (Direct Cost: ¥8,200,000、Indirect Cost: ¥2,460,000)
Fiscal Year 2011: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2010: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Fiscal Year 2009: ¥6,890,000 (Direct Cost: ¥5,300,000、Indirect Cost: ¥1,590,000)
Keywordsナノ・マイクロ加工 / 表面性状 / 国際標準規格 / 不確かさ / 測定標準面
Research Abstract

Design guidelines and specifications of surface texture standards for calibrating areal surface texture measuring instruments and also verifying their metrological properties were established. Then, their fabrication processes and reproducing techniques have been developed. Profile and areal random topography data were generated using a novel mathematical model in particular for contact stylus instruments. And some material measures as the molds were manufactured by an ultra-precision machine tool. Their duplications were made by electro plating and nano in-printing techniques. Additionally chirp-like signal waveform with constant maximum slope was fabricated by FIB process. The evaluation values were given to those surface standards by taking uncertainties into account. Finally, analyzing the obtained remarks, we proposed new items as a draft of ISO/TC213 WG16 and accepted.

Report

(4 results)
  • 2011 Annual Research Report   Final Research Report ( PDF )
  • 2010 Annual Research Report
  • 2009 Annual Research Report
  • Research Products

    (33 results)

All 2012 2011 2010 2009

All Journal Article (16 results) (of which Peer Reviewed: 7 results) Presentation (17 results)

  • [Journal Article] Generation of 3-D random topography datasets with periodic bound-aries for surface metrology algorithms and measurement standards2011

    • Author(s)
      M.Uchidate
    • Journal Title

      Wear

      Volume: 271 Issue: 3-4 Pages: 565-670

    • DOI

      10.1016/j.wear.2010.04.035

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] 焦点検出式輪郭測定センサを対象とした微細凹凸面による回折像解析2011

    • Author(s)
      深津拡也、岡和彦、柳和久
    • Journal Title

      精密工学会誌

      Volume: 77, 4 Pages: 428-432

    • Related Report
      2011 Annual Research Report 2011 Final Research Report
  • [Journal Article] Development of measurement standards for verifying functional performance of surface texture measuring instruments2011

    • Author(s)
      A. Fujii, H. Suzuki and K. Yanagi
    • Journal Title

      13th Int. Conf. on Metrology and Properties of Engineering Surfaces, Journal of Physics : Conference Series 311, IOP Publishing

      Volume: 012009 Pages: 1-7

    • Related Report
      2011 Final Research Report
  • [Journal Article] Generation of 3-D random topography datasets with periodic boundaries for surface metrology algorithms and measurement standards2011

    • Author(s)
      M. Uchidate, K. Yanagi, I. Yoshida, T. Shimizu, A. Iwabuchi
    • Journal Title

      Wear

      Volume: 271 Pages: 565-570

    • Related Report
      2011 Annual Research Report 2011 Final Research Report
  • [Journal Article] Development of measurement standards for verifying functional performance of surface texture measuring instruments2011

    • Author(s)
      A.Fujii, H.Suzuki, K.Yanagi
    • Journal Title

      Journal of Physics : Conference Series

      Volume: 311 Pages: 1-7

    • Related Report
      2011 Annual Research Report
  • [Journal Article] 面領域の表面性状測定機を対象とした測定標準に関する研究-第1報粗さ測定用標準面の設計-2010

    • Author(s)
      根本賢太郎、柳和久、明田川正人、内舘道正、吉田一朗
    • Journal Title

      精密工学会誌

      Volume: 76, 3 Pages: 349-353

    • Related Report
      2011 Final Research Report
  • [Journal Article] Characterisation of geometrical properties of electroplated diamond tools and estimation of its grinding performances2010

    • Author(s)
      Mohd Fauzi Ismail, Kazuhisa Yanagi and Hiromi Isobe
    • Journal Title

      Wear Special Issue

      Volume: 271 Issue: 3-4 Pages: 559-564

    • DOI

      10.1016/j.wear.2010.04.030

    • Related Report
      2011 Final Research Report
  • [Journal Article] An outlier correction procedure and its application to areal surface data measured by optical instruments2010

    • Author(s)
      Mohd Fauzi Ismail, Kazuhisa Yanagi and Akihiro Fujii
    • Journal Title

      Measurement Science and Technology

      Volume: 21 Issue: 10 Pages: 105105-105105

    • DOI

      10.1088/0957-0233/21/10/105105

    • Related Report
      2011 Final Research Report
  • [Journal Article] Characterisation of geometrical properties of electroplated diamond tools and estimation of its grinding performances2010

    • Author(s)
      Mohd Fauzi Ismail, Kazuhisa Yanaei, Hiromi Isobe
    • Journal Title

      Wear Special Issue

      Volume: doi:10.1016/j.wear.2010.04.030 Pages: 1-5

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Generation of 3-D random topography datasets with periodic boundaries for surface metrology algorithms and measurement standards2010

    • Author(s)
      M.Uchidate, K.Yanagi, I.Yoshida, T.Shimizu, A.Iwabuchi
    • Journal Title

      Wear Special Issue

      Volume: doi:10.1016/j.wear.2010.04.035 Pages: 1-6

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] An outlier correction procedure and its application to areal surface data measured by optical instruments2010

    • Author(s)
      Mohd Fauzi Ismail, Kazuhisa Yanagi, Akihiro Fujii
    • Journal Title

      Measurement Science and Technology

      Volume: 21,doi:10.1088 Pages: 1-11

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 面領域の表面性状測定機を対象とした測定標準に関する研究-第1報 粗さ測定用標準面の設計-2010

    • Author(s)
      根本賢太郎、柳和久、明田川正人、内舘道正、吉田一朗
    • Journal Title

      精密工学会誌 76, 3

      Pages: 349-353

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of a roughness measurement standard with irregular surface topography for improving 3D surface texture measurement2009

    • Author(s)
      Kentaro Nemoto, Kazuhisa Yanagi, Masato Aketagawa, Ichiro Yoshida, Michimasa Uchidate, Takashi Miyaguchi and Hideki Maruyama
    • Journal Title

      Measurement Science and Technology

      Volume: 20

    • Related Report
      2011 Final Research Report
  • [Journal Article] An optimal discrete operator for the two-dimensional Spline filter2009

    • Author(s)
      Tomonori Goto and Kazuhisa Yanagi
    • Journal Title

      Measurement Science and Technology

      Volume: Vol.20No.12 Pages: 125105-125108

    • Related Report
      2011 Final Research Report
  • [Journal Article] Development of a roughness measurement standard with irregular surface topography for improving 3D surface texture measurement2009

    • Author(s)
      K.Nemoto, K.Yanagi, M.Aketagawa, I.Yoshida, M.Uchidate, T.Miyaguchi, H.Maruyama
    • Journal Title

      Measurement Science and Technology MST 20 Online

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] An optimal discrete operator for the two-dimensional Spline filter2009

    • Author(s)
      T.Goto, K.Yanagi
    • Journal Title

      Measurement Science and Technology MST 20 Online

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Presentation] 光学式の表面性状測定機を対象とした短波長測定限界に関する一考察2012

    • Author(s)
      藤井章弘、柳和久
    • Organizer
      2012年度精密工学会春季大会学術講演会
    • Place of Presentation
      首都大学東京(南大沢キャンパス)
    • Year and Date
      2012-03-16
    • Related Report
      2011 Annual Research Report
  • [Presentation] 光学式の表面性状測定機を対象とした短波長測定限界に関する一考察2012

    • Author(s)
      藤井章弘、柳和久
    • Organizer
      2012年度精密工学会春季大会学術講演会
    • Place of Presentation
      首都大学東京
    • Related Report
      2011 Final Research Report
  • [Presentation] Development of measurement standards for verifying functional performance of surface texture measuring instruments2011

    • Author(s)
      A. Fujii, H. Suzuki and K. Yanagi
    • Organizer
      13th Int. Conf. on Metrology and Properties of Engineering Surfaces
    • Place of Presentation
      NPL London
    • Related Report
      2011 Final Research Report
  • [Presentation] ナノインプリント技術を用いた表面性状標準の複製2010

    • Author(s)
      山岡正英、田中秀岳、柳和久
    • Organizer
      2010年度精密工学会北陸信越支部学術講演会
    • Place of Presentation
      長岡技術科学大学
    • Year and Date
      2010-11-06
    • Related Report
      2010 Annual Research Report
  • [Presentation] テクスチャ表面のトライボロジー(2)テクスチャ表面の性状評価2010

    • Author(s)
      柳和久
    • Organizer
      日本機械学会2010年度年次大会
    • Place of Presentation
      名古屋工業大学
    • Year and Date
      2010-09-08
    • Related Report
      2010 Annual Research Report
  • [Presentation] A study on response properties of surface texture measuring instruments in terms of surface wavelengths2010

    • Author(s)
      Akihiko Fujii, Hitoshi Suzuki, Kazuhisa Yanali
    • Organizer
      ASPE 2010 Summer Topical Meeting
    • Place of Presentation
      Ashville, North Carolina, USA
    • Year and Date
      2010-06-24
    • Related Report
      2010 Annual Research Report
  • [Presentation] 面領域の表面性状評価-幾何特性のスケール依存と表記法2010

    • Author(s)
      柳和久、Francois Blateyron
    • Organizer
      トライボロジー会議2010春東京
    • Place of Presentation
      東京(代々木)
    • Year and Date
      2010-05-18
    • Related Report
      2010 Annual Research Report
  • [Presentation] 面領域の表面性状評価-幾何特性のスケール依存と表記法2010

    • Author(s)
      柳和久、Francois Blateyron
    • Organizer
      トライボロジー会議
    • Place of Presentation
      東京
    • Related Report
      2011 Final Research Report
  • [Presentation] A study on response properties of surface texture measuring instruments in terms of surface wavelengths2010

    • Author(s)
      Akihiko Fujii, Hitoshi Suzuki and Kazuhisa Yanagi
    • Organizer
      Proc. of ASPE 2010 Summer Topical Meeting
    • Place of Presentation
      Ashville, North Carolina
    • Related Report
      2011 Final Research Report
  • [Presentation] 【ワークショップ】テクスチャ表面のトライボロジー(2)テクスチャ表面の性状評価2010

    • Author(s)
      柳和久
    • Organizer
      日本機械学会2010年度年次大会
    • Related Report
      2011 Final Research Report
  • [Presentation] ナノインプリント技術を用いた表面性状標準の複製2010

    • Author(s)
      山岡正英、田中秀岳、柳和久
    • Organizer
      2010年度精密工学会北陸信越支部学術講演会後援論文集
    • Related Report
      2011 Final Research Report
  • [Presentation] An optimal discrete operator for the two-dimensional Spline Filter2009

    • Author(s)
      Tomonori Gotoh, Kazuhisa Yanagi
    • Organizer
      Int.Conf.on Surface Metrology
    • Place of Presentation
      Worcester Polytechnic Institute, MA, USA
    • Year and Date
      2009-10-26
    • Related Report
      2009 Annual Research Report
  • [Presentation] ナノインプリント技術を用いた表面性状標準の複製2009

    • Author(s)
      山口晋均、柳和久、田中秀岳、山岡正英
    • Organizer
      2009年度 精密工学会 秋季大会
    • Place of Presentation
      神戸大学 大学院 工学研究科
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] Generation of 3-D random topography datasets with periodic boundaries for surface metrology and measurement standards2009

    • Author(s)
      M.Uchidate, K.Yanagi, I.Yoshida, T.Shimizu, A.Iwabuchi
    • Organizer
      12^<th> Int.Conf.on Metrology & Properties of Engineering Surfaces
    • Place of Presentation
      Rzeszow University of Technology, Poland
    • Year and Date
      2009-07-09
    • Related Report
      2009 Annual Research Report
  • [Presentation] Generation of 3-D random topography datasets with periodic boundaries for surface metrology algorithms and measurement standards2009

    • Author(s)
      M. Uchidate, K. Yanagi, I. Yoshida, T. Shimizu, and A. Iwabuchi
    • Organizer
      Proc. of 12th Int. Conf. on Metrology & Properties of Engineering Surfaces
    • Place of Presentation
      Rzeszow, Poland
    • Related Report
      2011 Final Research Report
  • [Presentation] ナノインプリント技術を用いた表面性状標準の複製2009

    • Author(s)
      山口晋均、柳和久、田中秀岳、山岡正英
    • Organizer
      2009年度精密工学会秋季大会講演論文集
    • Related Report
      2011 Final Research Report
  • [Presentation] An optimal discrete operator for the two-dimensional Spline filter2009

    • Author(s)
      Tomonori Gotoh and Kazuhisa Yanagi
    • Organizer
      Proc. of Int. Conf. on Surface Metrology at WPI
    • Place of Presentation
      Worcester, MA
    • Related Report
      2011 Final Research Report

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Published: 2009-04-01   Modified: 2016-04-21  

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