| Project/Area Number |
21360065
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Tokyo Metropolitan University |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
KANEKO Arata 首都大学東京, システムデザイン学部, 准教授 (30347273)
TANAKA Yasuhiro 首都大学東京, システムデザイン学部, 特任助教 (80568113)
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| Project Period (FY) |
2009 – 2011
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| Project Status |
Completed (Fiscal Year 2011)
|
| Budget Amount *help |
¥19,240,000 (Direct Cost: ¥14,800,000、Indirect Cost: ¥4,440,000)
Fiscal Year 2011: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2010: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2009: ¥10,660,000 (Direct Cost: ¥8,200,000、Indirect Cost: ¥2,460,000)
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| Keywords | ディスペンサ / 微粒子 / 自己整列 / 制御 / 位置決め / 研磨工具 / 転写 |
|---|
| Research Abstract |
Self-assembly of fine particles is one of the potential processes for nano-/microstructuring. It has versatility because it can be used as etching mask as well as functional devices. However, traditional dip-coating has limitation of both of substrate size and particle size. This study proposes a new process which utilizes a combination of dispenser and motored stage. Applying control of dispenser and stage, various particles were assembled on a substrate along arbitrary pattern without any mask. Then, fixation of the particles was discussed where the particles were transferred to another substrate using UV curing resin. In this process, the structure becomes upside-down and the top particles aligned at same height. Thus, an application to polishing tool was also discussed.
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