Development of MEMS based viscosity sensor
Project/Area Number |
21360103
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Research Category |
Grant-in-Aid for Scientific Research (B)
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Allocation Type | Single-year Grants |
Section | 一般 |
Research Field |
Thermal engineering
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Research Institution | National Institute of Advanced Industrial Science and Technology |
Principal Investigator |
FUJII Kenichi 独立行政法人産業技術総合研究所, 計測標準研究部門, 研究室付 (50357901)
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Co-Investigator(Kenkyū-buntansha) |
MATSUMOTO Sohei 独立行政法人産業技術総合研究所, 集積マイクロシステム研究センター, 研究チーム長 (70358050)
YABUNO Hiroshi 慶応義塾大学, 理工学部, 教授 (60241791)
KURODA Masaharu 独立行政法人産業技術総合研究所, ナノシステム研究部門, 主任研究員 (60344222)
YAMAMOTO Yasuyuki 独立行政法人産業技術総合研究所, 計測標準研究部門, 研究員 (00398637)
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Project Period (FY) |
2009 – 2011
|
Project Status |
Completed (Fiscal Year 2011)
|
Budget Amount *help |
¥19,370,000 (Direct Cost: ¥14,900,000、Indirect Cost: ¥4,470,000)
Fiscal Year 2011: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2010: ¥5,590,000 (Direct Cost: ¥4,300,000、Indirect Cost: ¥1,290,000)
Fiscal Year 2009: ¥8,580,000 (Direct Cost: ¥6,600,000、Indirect Cost: ¥1,980,000)
|
Keywords | 粘度 / センサ / MEMS / 熱物性 / 自励発振 / 非線形振動 / 自励振動 / マイクロカンチレバー / 粘性率 / ファンデルポール型自励振動 / マイクロカンチレバ |
Research Abstract |
The development of viscosity sensor based on the MEMS technology was conducted. It came to be able to produce the basic structure of the sensor and strain gauge on the sensor chip. The measurement principle of the sensor was verified by using a developed holder which is applied the piezo actuator. The experimental results of the verification agreed with the calibration value of the standard reference liquid. The experiment of the measurement theory using the self-oscillation was quite a success. We applied for eight patents.
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Report
(4 results)
Research Products
(34 results)
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[Presentation] 分数階微積分の工学応用2010
Author(s)
黒田雅治
Organizer
機械工学における力学系理論の応用に関する研究会
Place of Presentation
慶應義塾大学(神奈川県)
Year and Date
2010-03-29
Related Report
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