Development of 3-D measurement method based on projection moire for micro structure using SEM
| Project/Area Number |
21360121
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Intelligent mechanics/Mechanical systems
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| Research Institution | Kansai University |
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Principal Investigator |
ARAI Yasuhiko 関西大学, システム理工学部, 教授 (80131415)
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| Co-Investigator(Kenkyū-buntansha) |
TAGAWA Norio 関西大学, システム理工学部, 教授 (50298840)
AOYAGI Seiji 関西大学, システム理工学部, 教授 (30202493)
TAKATA Keiji 関西大学, システム理工学部, 教授 (50416939)
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| Project Period (FY) |
2009 – 2011
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| Project Status |
Completed (Fiscal Year 2011)
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| Budget Amount *help |
¥11,830,000 (Direct Cost: ¥9,100,000、Indirect Cost: ¥2,730,000)
Fiscal Year 2011: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2010: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2009: ¥8,190,000 (Direct Cost: ¥6,300,000、Indirect Cost: ¥1,890,000)
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| Keywords | SEM / MEMS / 縞解析 / 三次元形状計測 / 微細構造物計測 / 高分解能 |
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| Research Abstract |
3-D measurement method by SEM has already been proposed by using the principle of shadow moire. In the method, the image of original grid in shadow moire image must be clearly removed in fringe analysis process in order to perform high resolution analysis. A new method based on the principle of projection moire is proposed to solve the trouble concerning the grid. In this study, the mechanism of producing some shadows of grid on the surface of the object by back scattering electron beam in the new method is discussed. Fringe image as shadow of grid is analyzed by Fringe scanning technology. 3-D precise measurement is realized by using the phenomenon of shadows of grid. Furthermore, a 3-D micro structure is measured. From comparison with results by AFM, it is confirmed that the proposed method has high-resolution power(about 20nm).
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Report
(4 results)
Research Products
(29 results)
