Development of Magnetic thin film devices with large saturation magnetization and high anisotropy field with resonance frequency above 10 GHz

• Project/Area Number: 21360145
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Electronic materials/Electric materials
• Research Institution: Tokyo Institute of Technology
• Principal Investigator: NAKAGAWA Shigeki 東京工業大学, 大学院・理工学研究科, 教授 (60180246)
• Project Period (FY): 2009 – 2011
• Project Status: Completed (Fiscal Year 2011)
• Budget Amount: ¥18,200,000 (Direct Cost: ¥14,000,000、Indirect Cost: ¥4,200,000); Fiscal Year 2011: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000); Fiscal Year 2010: ¥5,850,000 (Direct Cost: ¥4,500,000、Indirect Cost: ¥1,350,000); Fiscal Year 2009: ¥9,880,000 (Direct Cost: ¥7,600,000、Indirect Cost: ¥2,280,000)
• Keywords: 大飽和磁化 / 高磁気異方性 / FeCoB / 異方性磁界 / 高共鳴周波数 / 磁歪 / 高周波透磁率

Research Abstract

FeCoB films prepared on Ru underlayer using oblique incidence of sputtered particles have high in-plane magnetic anisotropy H_k of 500 Oe. There is an anisotropic residual stress which is an origin of the in-plane magnetic anisotropy. Such anistotropic crystalline structures may affect to the anisotropic residual stress in FeCoB layer on Ru underlayer. B content of around 6 at.% is appropriate to induce such an anisotropic residual stress. Multilayered structure with Si/NiFe is effective to reduce Bloch type domain walls. The FeCoB films with H_k of 500 Oe revealed 9. 2 GHz of resonance frequency.

Research Products

• [Journal Article] 斜方入射スパッタ粒子を利用して作製した高異方性磁界を有するFeCoB膜 (2012)
  • Author(s): 中川茂樹
  • Journal Title: 日本磁気学会誌(まぐね) Volume: Vol.7. No.1 Pages: 26-32
  • NAID: 10030284490
  • Peer Reviewed
• [Journal Article] Playback performance of perpendicular magnetic recording tape media for over-50-TB cartridge by facing targets sputtering method (2012)
  • Author(s): S.Matsunuma, T.Inoue, T.Watanabe, T.Doi, Y.Mashiko, S.Gomi, K.Hirata, S.Nakagawa
  • Journal Title: Journal of Magnetism and Magnetic Materials Volume: Vol.324, No.3 Issue: 3 Pages: 260-263
  • DOI: 10.1016/j.jmmm.2010.12.030
  • Peer Reviewed
• [Journal Article] Effect of laminated crystalline FeCoB soft magntic underlayer for perpendicular magnetic recording tape media (2011)
  • Author(s): Shunsuke Gomi, Yasuhiro Mashiko, Kenichiro Hirata, Satoshi Matsunuma, Inoue Tetsutaro, Tsugihiro Doi, Shigeki Nakagawa
  • Journal Title: Journal of Applied Physics Volume: Vol.109No.7
  • Peer Reviewed
• [Journal Article] Fabrication of perpendicular magnetic recording tape media with a data capacity of over-50TB using Si/NiFe/FeCoB soft magnetic under layers (2011)
  • Author(s): S. Gomi, Y. Mashiko, K. Hirata, S. Matsunuma, T. Inoue, T. Doi, T. Watanabe, S. Nakagawa
  • Journal Title: Physics Procedia Volume: Vol.16C Pages: 63-67
  • Peer Reviewed
• [Journal Article] Evaluation of Magnetization Interaction at the Interface bet-ween FeCo and TbFeCo for p-MTJ (2011)
  • Author(s): Naoaki Miyamoto, Keisuke Mamiya, Shigeki Nakagawa
  • Journal Title: Journal of Physics : Conference Series Volume: 266巻
  • Peer Reviewed
• [Journal Article] Growth of mixed phased films of γ-Fe_2O_3 and half metallic Fe_2O_3 using (100) MgO/Fe under layer for spin electronic devices (2011)
  • Author(s): Meiling Wang, Shigeki Nakagawa
  • Journal Title: Journal of Physics : Conference Series Volume: Vol.266 Pages: 012111-012111
  • DOI: 10.1088/1742-6596/266/1/012111
  • Peer Reviewed
• [Journal Article] Evaluation of Magnetization Interaction at the Interface between FeCo and TbFeCo for p-MTJ (2011)
  • Author(s): Naoaki Miyamoto, Keisuke Mamiya, Shigeki Nakagawa
  • Journal Title: Journal of Physics : Conference Series Volume: Vol.266 Pages: 012099-012099
  • DOI: 10.1088/1742-6596/266/1/012099
  • Peer Reviewed
• [Journal Article] Fabrication of perpendicular magnetic recording tape media with a data capacity of over-50TB using Si/NiFe/FeCoB soft magnetic underlayers (2011)
  • Author(s): S.Gomi, Y.Mashiko, K.Hirata, S.Matsunuma, T.Inoue, T.Doi, T.Watanabe, S.Nakagawa
  • Journal Title: Physics Procedia Volume: Vol.16C Pages: 63-67
  • DOI: 10.1016/j.phpro.2011.06.109
  • Peer Reviewed
• [Journal Article] FePt ordered alloy films with (001) orientation fabricated with FeCoB soft under layer (2011)
  • Author(s): Makoto Tanaka, Syunsuke Gomi, Yuji Ogata, Shigeki Nakagawa
  • Journal Title: IEEE Transactions on Magnetics Volume: Vol.47,No.10 Issue: 10 Pages: 3151-3153
  • DOI: 10.1109/tmag.2011.2157111
  • Peer Reviewed
• [Journal Article] Enhancement of bcc-FeCo(100) crystalline orientation by introducing Oxygen (2011)
  • Author(s): Naoaki Miyamaoto, Yuki Kubota, Keisuke Mamiya, Shigeki Nakagawa
  • Journal Title: IEEE Transactions on Magnetics Volume: Vol.47,No.10 Issue: 10 Pages: 3917-3920
  • DOI: 10.1109/tmag.2011.2148695
  • Peer Reviewed
• [Journal Article] FePt films 2 nanometers thick with (001) preferential orientation on a MgO underlayer (2011)
  • Author(s): Makoto Tanaka, Yuji Ogata, Shigeki Nakagawa
  • Journal Title: Journal of Applied Physics Volume: Vol.109, No.7 Issue: 7
  • DOI: 10.1063/1.3549569
  • Peer Reviewed
• [Journal Article] Growth of mixed phased films of _Y-Fe_2O_3 and half metallic Fe_3O_4 using (100) MgO/Fe under layer for spin electronic devices (2011)
  • Author(s): M L Wang, Shigeki Nakagawa
  • Journal Title: Journal of Physics : Conference Series Volume: 266
  • Peer Reviewed
• [Journal Article] Evaluation of Magnetization Interaction at the Interface bet-ween FeCo and TbFeCo for _P-MPJ (2011)
  • Author(s): Naoaki Miyamoto, Keisuke Mamiya, Shigeki Nakagawa
  • Journal Title: Journal of Physics : Conference Series Volume: 266
  • Peer Reviewed
• [Journal Article] Highly (100) oriented MgO growth on thin Mg layer in MTJ structure (2011)
  • Author(s): Kazuya Jimbo, Shigeki Nakagawa
  • Journal Title: Journal of Physics : Conference Series Volume: 266
  • Peer Reviewed
• [Journal Article] Direct observation of an anisotropic in-plane residual stress induced by B addition as an origin of high magntic anisotropy field of Ru/FeCoB film (2010)
  • Author(s): Kenichiro Hirata, Shunsuke Gomi, Yasuhiro Mashiko, Shigeki Nakagawa
  • Journal Title: Journal of Applied Physics Volume: 107巻
  • Peer Reviewed
• [Journal Article] Effect of Fe diffusion in MgO/Fe seedlayers to attain (100) oriented Pt underlayer for perovskite films with c-axis orientation (2010)
  • Author(s): Tatsuro Matsumoto, Kazuhiro Tamai, Yuji Murashima, Kazuki KomakiShigeki Nakagawa
  • Journal Title: Thin Solid FIlms Volume: 518
  • Peer Reviewed
• [Journal Article] Effect of multilayer configuration of [Fe/Pt] multilayer to attain (001) oriented FePt ordered alloy thin films (2010)
  • Author(s): Yuji Ogata, Yasuharu Imai, Shigeki Nakagawa
  • Journal Title: Journal of Applied Physics Volume: 107
  • Peer Reviewed
• [Journal Article] Effect of Crystalline Orientation and Lattice Distortion of FeCo Spin Polarization Enhancement Layer in perpendicular MTJ with RE-TM Alloy Films (2010)
  • Author(s): Naoaki Miyamoto, Hideto Ohmori, Shigeki Nakagawa
  • Journal Title: Journal of Applied Physics Volume: 107
  • Peer Reviewed
• [Journal Article] Si/NiFe/FeCoB Crystalline SUL to Reduce Ru Intermediate Layer Thickness for CoPtCr-SiO Granular Perpendicular Magnetic Recording Media (2009)
  • Author(s): Matsuu, T.; Hirata, K.; Gomi, S.; Hashimoto, A.; Matsunuma, S.; Inoue, T.; Doi, T.; Nakagawa, S.
  • Journal Title: IEEE Transactions on Magnetics Volume: 45(10)巻 Pages: 3572-3575
  • Peer Reviewed
• [Journal Article] Ru/FeCoB double layered film with high in-plane magnetic anisotropy field of 500 Oe (2009)
  • Author(s): Ken-ichiro Hirata, Atsuto Hashimoto, Toshimitsu Matsuu, Shigeki Nakagawa
  • Journal Title: J. Appl. Phys. Volume: 105巻
  • Peer Reviewed
• [Journal Article] Ru/FeCoB crystalline soft magnetic underlayer high anisotropy field for CoPtCr-SiO_2 granular perpendicular magnetic recording media (2009)
  • Author(s): Toshimitsu MATAUU, Kenichiro HIRATA, Atsuto HASHIMOTO, Satoshi MATSUNUMA, Tetsutaro INOUE, Tsugihiro DOI, Shigeki NAKAGAWA
  • Journal Title: J.Appl.Phys. 105
  • Peer Reviewed
• [Journal Article] Ru/FeCoB double layered film with high in-plane magnetic anisotropy field of 500 Oe (2009)
  • Author(s): Ken-ichiro Hirata, Atsuto Hashimoto, Toshimitsu Matsuu, Shigeki Nakagawa
  • Journal Title: J.Appl.Phys. 105
  • Peer Reviewed
• [Journal Article] Si/NiFe/FeCoB Crystalline SUL to Reduce Ru Intermediate Layer Thickness for CoPtCr-SiO Granular Perpendicular Magnetic Recording Media (2009)
  • Author(s): Matsuu, T.; Hirata, K.; Gomi, S.; Hashimoto, A.; Matsunuma, S.; Inoue, T.; Doi, T.; Nakagawa, S.
  • Journal Title: IEEE Transactions on Magnetics 45(10) Pages: 3572-3575
  • Peer Reviewed
• [Journal Article] Magnetic Recording Measurements of Sputtered Media on Tape at an Areal Density of 14 Gbits/in^2 (2009)
  • Author(s): Berman, D.; Chembrolu, V.H.; Topuria, T.; Matsunuma, S.; Inoue, T.; Doi, T.; Matsuu, T.; Hashimoto, S.; Hirata, K.; Nakagawa, S.
  • Journal Title: IEEE Transactions on Magnetics 45(10) Pages: 3584-3586
  • Peer Reviewed
• [Journal Article] Comparison of Playback Performance of Facing Targets Sputtered Perpendicular and Longitudinal Tape Media (2009)
  • Author(s): Matsunuma, S.; Inoue, T.; Doi, T.; Matsuu, T.; Hashimoto, A.; Hirata, K.-I.; Nakagawa, S.
  • Journal Title: IEEE Transactions on Magnetics 45(10) Pages: 3598-3600
  • Peer Reviewed
• [Presentation] Ru/FeCoBにおける強磁性共鳴のFeCoB膜厚依存性 (2011)
  • Author(s): 饒平名礼生,益子泰裕,平田健一郎,中川茂樹
  • Organizer: 第35回日本磁気学会学術講演会29pF-5
  • Place of Presentation: 新潟市
  • Year and Date: 2011-09-29
• [Presentation] Effect of B content on magnetic anisotropy field of FeCob films with high ferromagnetic resonance frequency above 9 GHz (2011)
  • Author(s): Shigeki Nakagawa, Yasuhiro Mashiko, Ken-ichoro Hirata
  • Organizer: Intermag 2011 Taipei
  • Place of Presentation: 台北市(台湾)
  • Year and Date: 2011-04-29
• [Presentation] FeCoB Films with High Ferromagnetic Tesonance Frequency above 9 GHz induced by Anisotropic Residual Stress (2010)
  • Author(s): Shigeki Nakagawa, Yasuhiro Mashiko, Ken-ichoro Hirata
  • Organizer: 1st International Conference of AUMS(ICAUMS 2010) organized by the Asian Union of Magnetics Societies(AUMS)
  • Place of Presentation: 済州島(韓国)
  • Year and Date: 2010-12-06
• [Presentation] Effect of B addition on high anisotropy field of FeCoB films on Ruunderlayers (2010)
  • Author(s): Yasuhiro Mashiko, Ken-ichoro Hirata, Shigeki Nakagawa
  • Organizer: 55th Annual Conference on Magnetism and Magnetic Materials. FH-13
  • Place of Presentation: Atlanta(USA)
  • Year and Date: 2010-11-17
• [Presentation] Ru/FeCoB膜のB添加による面内磁気異方性の改善 (2010)
  • Author(s): 益子泰裕,五味俊輔,平田健一郎,中川茂樹
  • Organizer: 第34回日本磁気学会学術講演会7aD-9
  • Place of Presentation: つくば市
  • Year and Date: 2010-09-07
• [Presentation] 2層構造の結晶性FeCoB裏打ち軟磁性層を用いた垂直磁気記録テープの特性改善 (2010)
  • Author(s): 五味俊輔,益子泰裕,平田健一郎,松沼悟,井上鉄太郎,土井嗣裕,渡辺利幸,中川茂樹
  • Organizer: 第34回日本磁気学会学術講演会5aA-9
  • Place of Presentation: つくば市
  • Year and Date: 2010-09-05
• [Presentation] Direct observation of an anisotropic in-plane residual stress induced by B addition as an origin of high magnetic anisotropy field of Ru/FeCoB film (2010)
  • Author(s): Kenichiro Hirata, Shunsuke Gomi, Yasuhiro Mashiko, Shigeki Nakagawa
  • Organizer: The 11th Joint MMM-Intermag Conferece, FE-08
  • Place of Presentation: Washigton, DC(USA)
  • Year and Date: 2010-01-21
• [Presentation] Direct observation of an anisotropic in-plane residual stress induced by B addition as an origin of high magnetic anisotropy field of Ru/FeCoB film (2010)
  • Author(s): Kenichiro HIRATA, Shunsuke GOMI, Yasuhiro MASHIKO, Shigeki NAKAGAWA
  • Organizer: The 11th Joint MMM-Intermag Conferece
  • Place of Presentation: Washington DC
  • Year and Date: 2010-01-21
• [Presentation] FeCoB Films with High Ferromagnetic Tesonance Frequency above 9 GHz induced by Anisotropic Residual Stress (2010)
  • Author(s): Shigeki Nakagawa, Yasuhiro Mashiko, Ken-ichoro Hirata
  • Organizer: 1st International Conference of AUMS (ICAUMS 2010) organized by the Asian Union of Magnetics Societies (AUMS)
  • Place of Presentation: Jeju, Korea
• [Presentation] 結晶性Si/NiFe/FeCoB裏打ち軟磁性層を用いた垂直磁気記録媒体 (2009)
  • Author(s): 五味俊輔, 平田健一郎, 松鵜利光, 松沼悟, 井上鉄太郎, 土井嗣裕, 中川茂樹
  • Organizer: 第33回 日本磁気学会学術講演会
  • Place of Presentation: 長崎大学文教キャンパス
  • Year and Date: 2009-09-15
• [Presentation] 高い面内異方性磁界を有するFeCoB膜に及ぼすRu下地層の影響 (2009)
  • Author(s): 平田健一郎, 五味俊輔, 中川茂樹
  • Organizer: 第33回 日本磁気学会学術講演会
  • Place of Presentation: 長崎大学文教キャンパス
  • Year and Date: 2009-09-15
• [Presentation] 高い面内異方性磁界を有するFeCoB膜に及ぼすRu下地層の影響 (2009)
  • Author(s): 平田健一郎,五味俊輔,中川茂樹
  • Organizer: 第33回日本磁気学会学術講演会
  • Place of Presentation: 長崎市
  • Year and Date: 2009-09-13
• [Presentation] 結晶性Si/NiFe/FeCoB裏打ち軟磁性層を用いた垂直磁気記録媒体 (2009)
  • Author(s): 五味俊輔,平田健一郎,松鵜利光,松沼悟,井上鉄太郎,土井嗣裕,中川茂樹
  • Organizer: 第33回日本磁気学会学術講演会
  • Place of Presentation: 長崎市
  • Year and Date: 2009-09-12
• [Presentation] Directional Alignment of FeCo Crystallites in Si/NiFe/Ru/FeCoB Multilayer with High Anisotropy Field above 500 Oe (2009)
  • Author(s): Kenichiro Hirata, Toshimitsu Matsuu, Shunsuke Gomi, Shigeki Nakagawa
  • Organizer: ICMAT2009 and IUMRS-ICA 2009
  • Place of Presentation: Singapore(Singapore)
  • Year and Date: 2009-06-29
• [Presentation] Directional Alignment of FeCo Crystallites in Si/NiFe/Ru/FeCoB Multilayer with High Anisotropy Field above 500Oe (2009)
  • Author(s): Kenichiro HIRATA, Toshimitsu MATSUU, Shunsuke GOMI, Shigeki NAKAGAWA
  • Organizer: ICMAT2009 and IUMRS-ICA 2009
  • Place of Presentation: Suntec Singapore International Convention & Exhibition Centre, Singapore
  • Year and Date: 2009-06-29