Multiscale control of supercritical fluid thin film processing using fluctuation imaging ellipsometry

• Project/Area Number: 21360147
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Electronic materials/Electric materials
• Research Institution: University of Yamanashi
• Principal Investigator: KONDOH Eiichd 山梨大学, 大学院・医学工学総合研究部, 教授 (70304871)
• Co-Investigator(Kenkyū-buntansha): JIN Lianhua 山梨大学, 大学院・医学工学総合研究部, 准教授 (40384656) ; KAKIO Shoji 山梨大学, 大学院・医学工学総合研究部, 准教授 (70242617) ; WATANABE Mitsuhiro 山梨大学, 大学院・医学工学総合研究部, 助教 (90532036)
• Project Period (FY): 2009 – 2011
• Project Status: Completed (Fiscal Year 2011)
• Budget Amount: ¥16,900,000 (Direct Cost: ¥13,000,000、Indirect Cost: ¥3,900,000); Fiscal Year 2011: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000); Fiscal Year 2010: ¥5,850,000 (Direct Cost: ¥4,500,000、Indirect Cost: ¥1,350,000); Fiscal Year 2009: ¥6,890,000 (Direct Cost: ¥5,300,000、Indirect Cost: ¥1,590,000)
• Keywords: 超臨界流体 / ゆらぎ / エリプソメトリ / 面計測 / 弾性表面波 / 撮像エリプソメトリ / 薄膜堆積

Research Abstract

This project aims to establish experimental ways to "characterize" and "tame" the multiscale fluctuations present in supercritical fluids in terms of micro and nano electronic applications. The subprojects are three-fold : 1. Measurements of local fluctuation at the surface/interface of a substrate using ellipsometry, and its application to novel processing. 2. Development of a fast fluctuation imaging ellipsometer. 3. Development of novel surface acoustic wave sensors for measuring fluid fluctuation

Research Products

• [Journal Article] In-situ Spectroscopic Ellipsometry of the Cu Deposition Process from Supercritical Fluids : Evidence of an Abnormal Surface Layer Formation (2012)
  • Author(s): Takuya Sasaki, Yukihiro Tamegai, Takahiro Ueno, Mitsuhiro Watanabe, Lianhua Jin, and Eiichi Kondoh
  • Journal Title: Japanese Journal of Applied Physics Volume: Vol.51
  • NAID: 210000140633
  • Peer Reviewed
• [Journal Article] Behavi or of Surface Acoustic Wave Resonators in Supercritical CO_2 (2011)
  • Author(s): Shoji Kakio, Katsuhiro Hayashi, Eiichi Kondoh, and Yasuhiko Nakagawa
  • Journal Title: Japanese Journal of Applied Physics Volume: Vol.50 Issue: 7S Pages: 07HD08-07HD08
  • DOI: 10.1143/jjap.50.07hd08
  • Peer Reviewed
• [Journal Article] In-situ ellipsometry of porous low-dielectric constant films in supercritical carbon dioxide (2011)
  • Author(s): Eiichi Kondoh and Shosaku Aruga
  • Journal Title: Microelectronic Engineering Volume: Vol.88 Issue: 5 Pages: 623-626
  • DOI: 10.1016/j.mee.2010.05.008
  • Peer Reviewed
• [Journal Article] Theoretical Analysis for the Fast Birefringence Measurement System using Dual Electro-optic Crystal Modulators (2011)
  • Author(s): L. Jin, Y. Masamura, E. Kondoh, H. Kowa, and K. Takizawa
  • Journal Title: Journal of the Japanese Society for Experimental Mechanics Volume: Vol.11 Pages: 198-203
  • NAID: 10029700434
  • URL: http://www.jstage.jst.go.jp/article/jjsem/11/Special_Issue/11_Special_Issue_s_198/_pdf
  • Peer Reviewed
• [Journal Article] Theoretical Analysis for the Fast Birefringence Measurement System using Dual Electro-optic Crystal Modulators (2011)
  • Author(s): L.Jin, Y.Masamura, E.Kondoh, H.Kowa, K.Takizawa
  • Journal Title: Journal of the Japanese Society for Experimental Mechanics Volume: 11
  • NAID: 10029700434
  • Peer Reviewed
• [Journal Article] Electro-Optic Modulation Analysis of a Y-cut Z-Propagation LiNbO_3 Light Modulator : Comparison with an X-Cut Z-Propagation LiNbO_3 Light Modulator and a Dual LiNbO_3 Crystal Type Modulator (2011)
  • Author(s): K.Takizawa, L.Jin
  • Journal Title: Optical Review Volume: 18 Issue: 2 Pages: 203-211
  • DOI: 10.1007/s10043-011-0043-x
  • NAID: 10028155563
  • Peer Reviewed
• [Journal Article] In situ ellipsometry of porous low-dielectric constant films in supercritical carbon dioxide (2011)
  • Author(s): Eiichi Kondoh
  • Journal Title: Microelectronic Engineering Volume: 88 Pages: 623-626
  • Peer Reviewed
• [Journal Article] Initial Cu Growth in Cu-Seeded and Ru-Lined Narrow Trenches for Supercritital Fluid Cu Chemical Deposition (2010)
  • Author(s): Eiichi Kondoh
  • Journal Title: Japanese Journal of Applied Physics Volume: 49
  • Peer Reviewed
• [Journal Article] Step Coverage Quality of Cu Films by Supercritical Fluid Deposition Compared with Chemical Vapor Deposition (2010)
  • Author(s): Takeshi Momose
  • Journal Title: Japanese Journal of Applied Physics Volume: 49
  • Peer Reviewed
• [Journal Article] 超臨界流体での化学的薄膜堆積-なぜ被覆性・充填性に優れているのか- (2010)
  • Author(s): 近藤英一
  • Journal Title: 表面技術 Volume: 61(8) Pages: 566-570
• [Journal Article] Direct Electropolymerization of Poly(para-phenylene)vinylene Films on Si and Porous Si (2010)
  • Author(s): T.Djenizian
  • Journal Title: J. Electrochem. Soc. Volume: 157(5)
  • Peer Reviewed
• [Journal Article] ポラリメータ用YカットZ軸伝搬LiNbO_3 光変調器の温度特性 (2010)
  • Author(s): 滝沢國治
  • Journal Title: 成蹊大学 理工学研究報告 Volume: 47(1) Pages: 15-25
• [Journal Article] Polarization properites of scattered light from macrorough surfaces (2010)
  • Author(s): L.Jin
  • Journal Title: Optics Letters 35(4) Pages: 595-597
  • Peer Reviewed
• [Journal Article] Temperature characteristics of a Y-cut Z-propagation LiNbO_3 light modulator for application to polarimeters (2010)
  • Author(s): K.Takizawa
  • Journal Title: Optical Review 17(1) Pages: 30-40
  • Peer Reviewed
• [Journal Article] Coverage of Copper Thin Films Deposited on the Sidewall of Through-silicon Vias Using Supercritical Fluids (2009)
  • Author(s): 松原正弘、近藤英一
  • Journal Title: Journal of The Surface Finishing Society of Japan Volume: 60 Issue: 8 Pages: 533-539
  • DOI: 10.4139/sfj.60.533
  • NAID: 10025395854
  • ISSN: 0915-1869, 1884-3409
  • Peer Reviewed
• [Journal Article] 3次元集積回路電極用Siマイクロ孔内側壁に超臨界流体を利用してCuを堆積した際の被覆特性の検討 (2009)
  • Author(s): 松原正弘
  • Journal Title: 表面技術 60 Pages: 533-539
  • Peer Reviewed
• [Journal Article] Kinetics of Deposition of Cu Thin Films in Supercritical Carbon Dioxide Sloutions from a F-Free Copper (II)-Diketone Complex (2009)
  • Author(s): Masahiro Matsubara
  • Journal Title: J.Electrochem. Soc. 156
  • Peer Reviewed
• [Journal Article] Topography-sensitive copper deposition in supercritical solutions (2009)
  • Author(s): Eiichi Kondoh
  • Journal Title: Microelectronics Engineering 86 Pages: 902-905
  • Peer Reviewed
• [Presentation] 超臨界二酸化炭素を用いた金属超微粒子/多孔質カーボン複合体の作製 (2012)
  • Author(s): 渡邉満洋, 秋本竜昇, 近藤英一
  • Organizer: 日本金属学会
  • Place of Presentation: 横浜国立大学
  • Year and Date: 2012-03-29
• [Presentation] デュアル電気光学結晶を用いた高速複屈折計測システムの開発 (2012)
  • Author(s): 齋藤壮,ヌルディンムハマド,高和宏行,手島昂太朗,梅田倫弘,滝沢國治,近藤英一,金蓮花
  • Organizer: 応用物理学会
  • Place of Presentation: 早稲田大学
  • Year and Date: 2012-03-18
• [Presentation] デュアル電気光学結晶を用いた高速複屈折計測システムの開発及び応用 (2012)
  • Author(s): 斎藤壮, ヌルディン ムハマド, 高和宏行, 手島昂太朗, 梅田倫弘, 滝沢國治, 近藤英一, 金蓮花
  • Organizer: 応用物理学会
  • Place of Presentation: 早稲田大学
  • Year and Date: 2012-03-18
• [Presentation] 超臨界流体中Cu薄膜堆積のその場分光エリプソメトリ解析(第2報) (2012)
  • Author(s): 佐々木拓哉,田部井幸寛,植野隆大,渡邉満洋,金蓮花,近藤英一
  • Organizer: 応用物理学会
  • Place of Presentation: 早稲田大学
  • Year and Date: 2012-03-17
• [Presentation] 超臨界CO_2を用いた多孔質カーボン表面へのPt-Ru超微粒子担持 (2012)
  • Author(s): 渡邉満洋, 秋本竜昇, 近藤英一
  • Organizer: 化学工学会年会
  • Place of Presentation: 工学院大学
  • Year and Date: 2012-03-16
• [Presentation] 超臨界流体中Cu堆積過程のその場分光エリプソメトリ (2012)
  • Author(s): 佐々木拓哉, 田部井幸寛, 植野隆大, 渡邉満洋, 金蓮花, 近藤英一
  • Organizer: 化学工学会年会
  • Place of Presentation: 工学院大学
  • Year and Date: 2012-03-16
• [Presentation] 光変調技術の偏光計測への応用 (2012)
  • Author(s): 令蓮花,齋藤壮,八木亮磨,山口晃司,若子裕亮,近藤英一
  • Organizer: 精密工学会
  • Place of Presentation: 首都大学
  • Year and Date: 2012-03-14
• [Presentation] 光変調技術の偏光計測への応用 (2012)
  • Author(s): 金蓮花, 斎藤壮, 八木亮磨, 山口晃司, 若子裕亮, 近藤英一
  • Organizer: 精密工学会
  • Place of Presentation: 首都大学東京(招待講演)
  • Year and Date: 2012-03-14
• [Presentation] 超臨界CO_2を用いて堆積したNi薄膜の成膜特性 (2012)
  • Author(s): 長田和真,渡邉満洋,近藤英一
  • Organizer: 表面技術協会
  • Place of Presentation: 東京都市大学
  • Year and Date: 2012-03-13
• [Presentation] Resonance properties of surface acoustic wave resonators in supercritical CO_2 (2011)
  • Author(s): K. Hayashi, S. Kakio, and E. Kondoh
  • Organizer: Symposium Ulstrasonic Electronics
  • Place of Presentation: 京都大学
  • Year and Date: 2011-11-10
• [Presentation] 超臨界CO_2中における弾性表面波共振子の共振特性 (2011)
  • Author(s): 林克洋、垣尾省司、近藤英一
  • Organizer: 電子情報通信学会超音波研究会
  • Place of Presentation: USA, Orlando
  • Year and Date: 2011-10-31
• [Presentation] Resonance properties of surface acoustic wave resonator in supercritical CO_2 (2011)
  • Author(s): S. Kakio, K. Hayashi, and E. Kondoh
  • Organizer: IEEE Internatilal Ultrasonic Symposium
  • Place of Presentation: USA, Orlando
  • Year and Date: 2011-10-21
• [Presentation] Conformal Copper Coating of True 3D Through-holes Using Supercritical Carbon Dioxide (2011)
  • Author(s): M.Watanabe, Y.Takeuchi, T.Ueno, M.Matsubara, E.Kondoh, S.Yamamoto, N.Kikukawa, T.Suemasu
  • Organizer: Advanced Metallizaion Conference USA
  • Place of Presentation: USA San Diego
  • Year and Date: 2011-10-04
• [Presentation] 超臨界CO_2を利用して作製したNi/ガラス構造体の密着性と界面組織 (2011)
  • Author(s): 渡邉満洋,青山央,近藤英一
  • Organizer: 表面技術協会
  • Place of Presentation: 名古屋大学
  • Year and Date: 2011-09-22
• [Presentation] 3次元集積回路電極用Siマイクロ孔内側壁に超臨界流体を利用してCuを堆積した際の被覆特性 (2011)
  • Author(s): 松原正弘,近藤英一
  • Organizer: 表面技術協会
  • Place of Presentation: 名古屋大学
  • Year and Date: 2011-09-21
• [Presentation] 3次元集積回路電極用Siマイクロ孔内側壁に超臨界流体を利用してCuを堆積した際の被覆特性 (2011)
  • Author(s): 松原正弘, 近藤英一
  • Organizer: 表面技術協会
  • Place of Presentation: 名古屋大学(招待講演)
  • Year and Date: 2011-09-21
• [Presentation] 超臨界CO_2を用いた多孔質カーボン上への金属微粒子担持における表面処理の影響 (2011)
  • Author(s): 秋本竜昇, 近藤英一, 渡邉満洋
  • Organizer: 化学工学会
  • Place of Presentation: 名古屋工業大学
  • Year and Date: 2011-09-16
• [Presentation] In-situ Spectroscopic Ellipsometry of Cu Deposition Process from Supercritical Fluids-An Evidence for an Abnormal Surface Layer Formation (2011)
  • Author(s): T. Sasaki, Y. Tamegai, M. Watanabe, L. Jin, and E. Kondoh
  • Organizer: Advanced Metallizaion Conference Asian Session
  • Place of Presentation: 東京大学
  • Year and Date: 2011-09-13
• [Presentation] In-situ Spectroscopic Ellipsometry of Cu Deposition Process from Supercritical Fluids -An Evidence for an Abnormal Surface Layer Formation- (2011)
  • Author(s): T.Sasaki, Y.Tamegai, M.Watanabe, L.Jin, E.Kondoh
  • Organizer: Advanced Metallizaion Conference Asian Session
  • Place of Presentation: 東京大学
  • Year and Date: 2011-09-13
• [Presentation] Conformal Copper Coating of True 3D Through-holes Using Supercritical Carbon Dioxide (2011)
  • Author(s): M.Watanabe, Y.Takeuchi, T.Ueno, M.Matsubara, E.Kondoh, S.Yamamoto, N.Kikukawa, T.Suemasu
  • Organizer: Advanced Metallizaion Conference Asian Session
  • Place of Presentation: 東京大学
  • Year and Date: 2011-09-13
• [Presentation] 超臨界CO_2を用いた高アスペクトマイクロ孔への均一Cu被覆 (2011)
  • Author(s): 竹内裕人,松原正弘,渡邉満洋,近藤英一
  • Organizer: 応用物理学会
  • Place of Presentation: 山形大学
  • Year and Date: 2011-09-02
• [Presentation] Polarization Analysis of Scattering Light using a Facet Model (2011)
  • Author(s): L.Jin, T.Tsutaki, B.Gelloz
  • Organizer: SPIE Optics+Photonics
  • Place of Presentation: USA. San Diego
  • Year and Date: 2011-08-23
• [Presentation] Sciences in micro-and nanoelectronics processes using an environmentally-friendly medium supercritical CO_2 fluid and its application (2011)
  • Author(s): E. Kondoh
  • Organizer: NATO Advanced Research Workshop
  • Place of Presentation: Riga, Latvia
  • Year and Date: 2011-06-20
• [Presentation] Sciences in micro- and nanoelectronics processes using an environmentally-friendly medium. supercritical CO_2 fluid and its application (2011)
  • Author(s): E.Kondoh
  • Organizer: NATO Advanced Research Workshop
  • Place of Presentation: Riga, Latvia(招待講演)
  • Year and Date: 2011-06-20
• [Presentation] 超臨界CO_2中における弾性表面波共振子の共振特性 (2011)
  • Author(s): 林克洋
  • Organizer: 日本音響学会2011年春期研究発表会
  • Place of Presentation: 早稲田大学
  • Year and Date: 2011-03-11
• [Presentation] 高アスペクトシリコンゴムの超臨界メタライズを利用したバイオピンセットの作製 (2011)
  • Author(s): 竹内裕人
  • Organizer: 表面技術協会第123回講演大会
  • Place of Presentation: 関東学院大学
• [Presentation] 超臨界CO_2を用いた多孔性カーボン上への金属微粒子担持 (2011)
  • Author(s): 秋本竜昇
  • Organizer: 化学工学会第76年会
  • Place of Presentation: 東京農工大学小金井キャンパス
• [Presentation] 超臨界CO_2法によるTrue3次元貫通配線孔内への均-Cu被覆 (2011)
  • Author(s): 竹内裕人
  • Organizer: 2011年春季第58回応用物理学関係連合講演会
  • Place of Presentation: 神奈川工科大学
• [Presentation] Facetモデルを用いた散乱光の偏光解析 (2011)
  • Author(s): 金蓮花
  • Organizer: 2011年春季第58回応用物理関係連合講演会
  • Place of Presentation: 神奈川工科大学
• [Presentation] 電気光学結晶を用いた位相変調型画像エリプソメトリー (2011)
  • Author(s): 八木亮磨
  • Organizer: 2011年春季第58回応用物理関係連合講演会
  • Place of Presentation: 神奈川工科大学
• [Presentation] 高速複屈折計測システムの理論解析 (2010)
  • Author(s): 斉藤壮
  • Organizer: 日本機械学会山梨講演会
  • Place of Presentation: 山梨大学
  • Year and Date: 2010-10-22
• [Presentation] 超臨界CO_2中における弾性表面波共振子の振舞い (2010)
  • Author(s): 林克洋
  • Organizer: 日本音響学会2010年秋期研究発表会
  • Place of Presentation: 関西大学
  • Year and Date: 2010-09-14
• [Presentation] Tunable Electro-Optic Crystal Fabry-Perot Filter (2010)
  • Author(s): L.Jin
  • Organizer: Proc. of SPIE, Vol. 7544, 75443
  • Place of Presentation: Hangzhou, China
  • Year and Date: 2010-08-08
• [Presentation] Electropolymerized Poly(para-phenylene)vinylene Films onto and inside Porous Si(Invited) (2010)
  • Author(s): B.Gelloz
  • Organizer: Nanoscale Luminescent Materials, ECS Transactions
  • Place of Presentation: Vancouver, Canada
• [Presentation] Mechanisms of Chemical Deposition from Supercritical Fluids for Advanvced Microelectronics Appilicitions(Invited) (2010)
  • Author(s): E.Kondoh
  • Organizer: International Conference on Modern Problems in the Physics of Surface and Nanostructures
  • Place of Presentation: Yanoslavl State University Yaroslavl, Russia
• [Presentation] Science in Porosity Engineering of Low-k Dielectrics Using Supercritical Carbon Dioxide-Pore Characterization and Pore Cleaning(Invited) (2010)
  • Author(s): E.Kondoh
  • Organizer: 15th International Symposium on Chemical-Mechanical Planarization
  • Place of Presentation: Lake Placid , NY
• [Presentation] 超臨界流体を用いた多孔質低誘電率薄膜プロセス～細孔の評価と洗浄～ (2010)
  • Author(s): 近藤英一
  • Organizer: 電子情報通信学会電子部品・材料研究会
  • Place of Presentation: 道の駅しゃり会議室 (招待講演)
• [Presentation] 超臨界流体中その場分光エリプソメトリの開発と薄膜膨潤測定への応用 (2010)
  • Author(s): 田部井幸寛
  • Organizer: 化学工学会第42回秋季大会
  • Place of Presentation: 同志社大学
• [Presentation] 高アスペクトシリコンゴムのメタライズを利用したバイオピンセットの作製 (2010)
  • Author(s): 竹内裕人
  • Organizer: 化学工学会第42回秋季大会
  • Place of Presentation: 同志社大学
• [Presentation] 超臨界CO_2流体内の多孔質低誘電率薄膜の構造変化のその場分光エリプソメトリによる観測 (2010)
  • Author(s): 田部井幸寛
  • Organizer: 2010年秋季第71回応用物理学会学術講演会
  • Place of Presentation: 長崎大学
• [Presentation] In-situ Spectroscopic Ellipsometry in Superchtical CO_2 Solutions and Its Application to Low-k Thin Film Characterization (2010)
  • Author(s): E.Kondoh
  • Organizer: Advanced Metalization Conference 20th Asian Session 2010
  • Place of Presentation: Takeda Building, The Univ. of Tbkyo, Tokyo
• [Presentation] Theoretical Analysis for the Fast Birefringence Measurement System using Dual Electro-optic Crystal Modulators (2010)
  • Author(s): L.Jin
  • Organizer: 5^<th> International Symposium on Advanced Science and Technology in Experimental Mechanics
  • Place of Presentation: Kyoto, Japan
• [Presentation] Behavior of SAW resonators in supercritical CO_2 (2010)
  • Author(s): Katsuhiro Hayashi
  • Organizer: The 31th Symposium on ULTRASONIC ELECTRONICS
  • Place of Presentation: Meiji University, Tokyo
• [Presentation] Science in porosity engineering of low-k dielectrics using supercritical carbon dioxide-pore characterization and pore cleaning (invited) (2010)
  • Author(s): Eiichi Kondoh
  • Organizer: SEMICON Korea 2010
  • Place of Presentation: COEX Seoul
• [Presentation] Evalaution of the connectivity of micropores (<2 nm) and supermicropores (<0.5 mn) in low-k thin films using supercritical fluids (2010)
  • Author(s): Eiichi Kondoh
  • Organizer: MAM 2010
  • Place of Presentation: Lamot Mechelen, Belgium
• [Presentation] 超臨界CO2を用いたCu薄膜の大面積堆積へのアプローチ (2010)
  • Author(s): 深澤直樹
  • Organizer: 日本機械学会第16期総会講演会
  • Place of Presentation: 明治大学
• [Presentation] 超臨界流体を用いた高アスペクトガラスマイクロ孔内Cu被覆 (2010)
  • Author(s): 松原正弘
  • Organizer: (社)表面技術協会 第121回講演大会
  • Place of Presentation: 成蹊大学
• [Presentation] その場分光エリプソメトリにおける高圧容器用光学窓の偏光補正と吸着解析への適用 (2010)
  • Author(s): 小高和也
  • Organizer: 2010年春季第57回応用物理学関係連合講演会
  • Place of Presentation: 東海大学 湘南キャンパス
• [Presentation] ラフな表面による散乱光の偏光解析 (2010)
  • Author(s): 金蓮花
  • Organizer: 2010年春季第57回応用物理学関係連合講演会
  • Place of Presentation: 東海大学 湘南キャンパス
• [Presentation] デュアル電気光学結晶位相変調器を用いた調整複屈折計測システムの開発:第一報 理論解析 (2010)
  • Author(s): 金蓮花
  • Organizer: 2010年春季第57回応用物理学関係連合講演会
  • Place of Presentation: 東海大学 湘南キャンパス
• [Presentation] フロー式堆積装置を用いたCu薄膜の堆積特性-流量存性 (2010)
  • Author(s): 竹内裕人
  • Organizer: 化学工学会第75年会
  • Place of Presentation: 鹿児島大学
• [Presentation] Stokes parameters of reflected and scattered light by a rough surface (2009)
  • Author(s): L.Jin
  • Organizer: Proc.Of SPIE, Vol.7432, 74320B,.
  • Place of Presentation: San Diego, California, USA,
• [Presentation] 超臨界流体中Cu堆積法におけるCuシード付トレンチ内への初期堆積特性 (2009)
  • Author(s): 近藤英一
  • Organizer: 2009年秋季 第70回応用物理学会学術講演会
  • Place of Presentation: 富山大学
• [Presentation] Siマイクロ孔内に超臨界流体を利用してCuを堆積した際の被覆特性の検討 (2009)
  • Author(s): 松原正弘
  • Organizer: 化学工学会 第41回秋季大会
  • Place of Presentation: 広島大学
• [Presentation] Formation of periodically arrayed Si nano-hole filled with Cu using supercritical CO2 (2009)
  • Author(s): T.Kakeru
  • Organizer: MNE2009 35th International Conference
  • Place of Presentation: ICC Ghent, Belgium
• [Presentation] Initial Cu growth in Cu-seeded and Ru-lined narrow trenches for super criticalfluid Cu chemical deposition (2009)
  • Author(s): Eiichi Kondoh
  • Organizer: Advanced Metallization Conference 19th Asian Session 2009
  • Place of Presentation: Sanjo Conference Hall, The University of Tokyo,
• [Presentation] Deposition kinetics of Cu thin films in supercritical carbon dioxide from a Cu (II) beta-diketonate complex (2009)
  • Author(s): Eiichi Kondoh
  • Organizer: Supergreen 2009
  • Place of Presentation: Sakura Hall, Tohoku University
• [Remarks] 研究代表者HP
• [Patent(Industrial Property Rights)] 導電性物質の形成装置及びその形成方法 (2011)
  • Inventor(s): 近藤英一,松原正弘,竹内裕人
  • Industrial Property Rights Holder: 山梨大学
  • Industrial Property Number: 2010-199678
  • Filing Date: 2011-09-13
• [Patent(Industrial Property Rights)] 特許 (2011)
  • Inventor(s): 近藤英一, 松原正弘, 竹内裕人
  • Industrial Property Rights Holder: 山梨大学
  • Industrial Property Number: 2010-199678
  • Filing Date: 2011-09-13
• [Patent(Industrial Property Rights)] 細孔を有する薄膜の測定方法とそのシステ (2010)
  • Inventor(s): 近藤英一
  • Industrial Property Rights Holder: 山梨大学
  • Industrial Property Number: 2010-197237
  • Filing Date: 2010-09-03
• [Patent(Industrial Property Rights)] 特許 (2010)
  • Inventor(s): 近藤英一
  • Industrial Property Rights Holder: 山梨大学
  • Industrial Property Number: 2010-197237
  • Filing Date: 2010-09-03