Multiscale control of supercritical fluid thin film processing using fluctuation imaging ellipsometry
| Project/Area Number |
21360147
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Electronic materials/Electric materials
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| Research Institution | University of Yamanashi |
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Principal Investigator |
KONDOH Eiichd 山梨大学, 大学院・医学工学総合研究部, 教授 (70304871)
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| Co-Investigator(Kenkyū-buntansha) |
JIN Lianhua 山梨大学, 大学院・医学工学総合研究部, 准教授 (40384656)
KAKIO Shoji 山梨大学, 大学院・医学工学総合研究部, 准教授 (70242617)
WATANABE Mitsuhiro 山梨大学, 大学院・医学工学総合研究部, 助教 (90532036)
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| Project Period (FY) |
2009 – 2011
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| Project Status |
Completed (Fiscal Year 2011)
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| Budget Amount *help |
¥16,900,000 (Direct Cost: ¥13,000,000、Indirect Cost: ¥3,900,000)
Fiscal Year 2011: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2010: ¥5,850,000 (Direct Cost: ¥4,500,000、Indirect Cost: ¥1,350,000)
Fiscal Year 2009: ¥6,890,000 (Direct Cost: ¥5,300,000、Indirect Cost: ¥1,590,000)
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| Keywords | 超臨界流体 / ゆらぎ / エリプソメトリ / 面計測 / 弾性表面波 / 撮像エリプソメトリ / 薄膜堆積 |
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| Research Abstract |
This project aims to establish experimental ways to "characterize" and "tame" the multiscale fluctuations present in supercritical fluids in terms of micro and nano electronic applications. The subprojects are three-fold : 1. Measurements of local fluctuation at the surface/interface of a substrate using ellipsometry, and its application to novel processing. 2. Development of a fast fluctuation imaging ellipsometer. 3. Development of novel surface acoustic wave sensors for measuring fluid fluctuation
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Report
(4 results)
Research Products
(80 results)
