Study of physical process during rapid heating of metal nanoparticle and the laser direct writing of micro-wiring

• Project/Area Number: 21360354
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Material processing/treatments
• Research Institution: Tohoku University
• Principal Investigator: WATANABE Akira 東北大学, 多元物質科学研究所, 准教授 (40182901)
• Project Period (FY): 2009 – 2011
• Project Status: Completed (Fiscal Year 2011)
• Budget Amount: ¥7,800,000 (Direct Cost: ¥6,000,000、Indirect Cost: ¥1,800,000); Fiscal Year 2011: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000); Fiscal Year 2010: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000); Fiscal Year 2009: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
• Keywords: ナノプロセス / レーザー微細配線描画

Research Abstract

The physical process during the local rapid heating of metal nanoparticle by laser irradiation and the laser direct writing of micro-wiring were studied. By laser irradiation to a metal nanoparticle, the laser energy is effectively absorbed by plasmon band of the metal nanoparticle and immediately converted to thermal energy. The inhibition of oxidation during Cu micro-patterning using Cu nanoparticle and the reduction of Cu diffusion into Au coating film prepared by sintering of Au nanoparticle film on Cu substrate were developed by applying the laser irradiation to metal nanoparticles.

Research Products

• [Journal Article] Laser sintering of Si and Ge nano- and microparticle films toward solar cells by solution process (2012)
  • Author(s): A.Watanabe
  • Journal Title: Proc.SPIE, Photonics West 2012-LASE : Lasers and Applications Volume: (未定)(in press)
  • Peer Reviewed
• [Journal Article] Micropatterning of Functional Film by Liquid Phase Laser Direct Patterning Method (2011)
  • Author(s): A. Watanabe, E. Ohta and A. Shimofuku
  • Journal Title: J. Photopolym. Sci Volume: 24 Pages: 511-512
  • Peer Reviewed
• [Journal Article] Formation of Si and Ge films and micropatterns by wet processusing using laser direct writing method (2011)
  • Author(s): A. Watanabe
  • Journal Title: Proc. of SPIE Volume: Vol.7921, 792105 Pages: 1-8
  • Peer Reviewed
• [Journal Article] レーザー直接描画法を用いたウェットプロセスによる機能膜微細パターン形成 (Micropatterning of functional films by wet process using laser direct writing method) (2011)
  • Author(s): 渡辺明
  • Journal Title: 第17回エレクトロニクスにおけるマイクロ接合・実装技術シンポジウム論文集 Volume: 17 Pages: 287-292
  • Peer Reviewed
• [Journal Article] Micropatterning of Functional Film by Liquid Phase Laser Direct Patterning Method (2011)
  • Author(s): A.Watanabe
  • Journal Title: J.Photopolym.Sci.Technol. Volume: 24 Pages: 511-512
  • Peer Reviewed
• [Journal Article] Wet Process of Si Film by Laser Direct Writing Method (2011)
  • Author(s): A.Watanabe
  • Journal Title: Proceedings of LPM2011-the 12th International Symposium on Laser Precision Microfabrication Volume: 11-022 Pages: 1-3
  • Peer Reviewed
• [Journal Article] Direct writing of conductive silver micropatterns on flexible polyimide film by laser-induced pyrolysis of silver nanoparticle-dispersed film (2010)
  • Author(s): M. Aminuzzaman, A. Watanabe, and T. Miyashita
  • Journal Title: J. Nanopart. Res Volume: 12 Pages: 931-938
  • Peer Reviewed
• [Journal Article] Micropatterns Fabricated by Femtosecond Laser Direct Writing Using Cu Nanoparticle Ink (2010)
  • Author(s): M. C. Yang, A. Watanabe, C. W. Cheng, C. Y. Lin, W. C. Shen, Cu
  • Journal Title: Proceedings of LPM2010-the 11th International Symposium on Laser Precision Microfabrication, Proc. of LPM2010 Volume: 10-50 Pages: 1-4
• [Journal Article] Fabrication of Micropatterns by Laser Direct Writing Using Nanomaterials (2010)
  • Author(s): Akira Watanabe, M. C. Yang, C. W. Cheng, C. Y. Lin, and W. C. Shen
  • Journal Title: J. Photopolym. Sci. Technol Volume: 23(3) Pages: 379-380
  • Peer Reviewed
• [Journal Article] Direct writing of conductive silver micropatterns on flexible polyimide film by laser-induced pyrolysis of silver nanoparticle-dispersed film (2010)
  • Author(s): M.Aminuzzaman
  • Journal Title: J.Nanopart.Res. Volume: 12 Pages: 931-938
  • Peer Reviewed
• [Journal Article] Fabrication of Micropatterns by Laser Direct Writing Using Nanomaterials (2010)
  • Author(s): Akira Watanabe
  • Journal Title: J.Photopolym.Sci.Technol. Volume: 23(3) Pages: 379-380
  • Peer Reviewed
• [Journal Article] Micropatterning and crystallization of sol-gel-derived dielectric film by laser direct writing (2010)
  • Author(s): Akira Watanabe
  • Journal Title: Proc.SPIE Volume: 585(7585N1) Pages: 1-8
  • Peer Reviewed
• [Journal Article] F Cu Micropatterns Fabricated by Femtosecond Laser Direct Writing Using Cu Nanoparticle Ink (2010)
  • Author(s): M.C.Yang
  • Journal Title: Proc.of LPM2010 Volume: 10-50 Pages: 1-4
  • Peer Reviewed
• [Journal Article] Laser Direct writing of Silver Microwiring on a Double-Decker-Shaped Polysilsesquioxane Film using Silver Nanoparticle Ink (2009)
  • Author(s): M. Aminuzzaman, A. Watanabe, and T. Miyashita
  • Journal Title: Mater. Res. Soc. Symp. Proc Volume: 1116
  • Peer Reviewed
• [Journal Article] Submicron writing by laser irradiation on metal nano-particle dispersed films toward flexible electronics (2009)
  • Author(s): A. Watanabe, M. Aminuzzaman, and T. Miyashita
  • Journal Title: Proc. SPIE Volume: 7202 Pages: 720206-720206
  • Peer Reviewed
• [Journal Article] Fabrication of conductive silver micropatterns on an organic. inorganic hybrid film by laser direct writing (2009)
  • Author(s): M. Aminuzzaman, A. Watanabe, and T. Miyashita
  • Journal Title: Thin Solid Films Volume: 517 Pages: 5935-5939
  • Peer Reviewed
• [Journal Article] Fabrication of conductive silver micropatterns on an organic. inorganic hybrid film by laser direct writing (2009)
  • Author(s): M.Aminuzzaman
  • Journal Title: Thin Solid Films 517 Pages: 5935-5939
  • Peer Reviewed
• [Journal Article] Direct writing of conductive silver micropatterns on flexible polyimide film by laser-induced (2009)
  • Author(s): M.Aminuzzaman
  • Journal Title: Journal of Nanoparticle Research
  • Peer Reviewed
• [Journal Article] Laser Direct Drawing of Silver Microwiring on a Doble-Decker-Shaped Polysilsesquioxane (2009)
  • Author(s): M.Aminuzzaman
  • Journal Title: Materials Research Society Symposia Proceedings 1116
  • Peer Reviewed
• [Journal Article] Fabrication of BaTiO3-Y : Eu composite micropatterns by combination of laser induced pyrolysis method and nanocrystalline seeding technique (2009)
  • Author(s): Y.Kobayashi
  • Journal Title: Surface Engineering
  • Peer Reviewed
• [Journal Article] かご型シルセスキオキサン系高分子材料 (2009)
  • Author(s): 渡辺明
  • Journal Title: ケイ素化学協会誌 26 Pages: 21-26
• [Journal Article] Submicron writing by laser irradiation on metal nano-particle dispersed films toward flexible electronics (2009)
  • Author(s): 渡辺明
  • Journal Title: Proc.SPIE 7202 Pages: 720206-720206
  • Peer Reviewed
• [Presentation] Laser sintering of Si and Ge nano- and microparticle films toward solar cells by solution process (2012)
  • Author(s): Akira Watanabe
  • Organizer: SPIE, Photonics West 2012
  • Place of Presentation: San Francisco, USA
  • Year and Date: 2012-01-26
• [Presentation] Micropatterning of Functional Film by Liquid Phase Laser Direct Patterning Method (2011)
  • Author(s): A.Watanabe
  • Organizer: 28th International Conference of Photopolymer Science and Technology
  • Place of Presentation: Chiba, Japan
  • Year and Date: 2011-06-24
• [Presentation] Wet process of Si lm by laser direct writing method (2011)
  • Author(s): Akira Watanabe
  • Organizer: LPM2011, The 12th International Symposium on Laser Precision Microfabrication
  • Place of Presentation: Takamatsu, Japan
  • Year and Date: 2011-06-10
• [Presentation] レーザー直接描画法を用いたウェットプロセスによる機能膜微細パターン形成 (2011)
  • Author(s): 渡辺明
  • Organizer: Mate 2011エレクトロニクスにおけるマイクロ接合・実装技術シンポジウム
  • Place of Presentation: パシフィコ横浜
  • Year and Date: 2011-02-03
• [Presentation] レーザー直接描画法を用いたウェットプロセスによる機能膜微細パターン形成 (2011)
  • Author(s): 渡辺明
  • Organizer: Mate 2011
  • Place of Presentation: 横浜
  • Year and Date: 2011-02-03
• [Presentation] Formation of Si and Ge films and micropatterns by wet process using laser directwriting method (2011)
  • Author(s): Akira Watanabe
  • Organizer: SPIE, 2011 Photonics West
  • Place of Presentation: 米国,サンフランシスコ
  • Year and Date: 2011-01-26
• [Presentation] Micropatterning of Functional Film by Liquid Phase Laser Direct Patterning Method (2011)
  • Author(s): A. Watanabe, E. Ohta, A. Shimofuku
  • Organizer: 28th International Conference of Photopolymer Science and Technology
  • Place of Presentation: Japan, chiba
• [Presentation] Wet process of Si lm by laser direct writing method (2011)
  • Author(s): Akira Watanabe
  • Organizer: LPM2011, The 12th International Symposium on Laser Precision Microfabrication
  • Place of Presentation: Japan, Takamatsu
• [Presentation] Formation of Si and Ge films and micropatterns by wet process using laser direct writing method (2011)
  • Author(s): Akira Watanabe
  • Organizer: SPIE Photonics West 2011, United States
  • Place of Presentation: San Francisco
• [Presentation] レーザー直接描画技術を用いた液相法による機能膜形成 (2010)
  • Author(s): 渡辺明
  • Organizer: 多元技術融合光プロセス研究会
  • Place of Presentation: 日本, 仙台, 招待講演
  • Year and Date: 2010-11-26
• [Presentation] レーザー直接描画技術を用いた液相法による機能膜形成 (2010)
  • Author(s): 渡辺明
  • Organizer: 多元技術融合光プロセス研究会
  • Place of Presentation: 仙台
  • Year and Date: 2010-11-26
• [Presentation] 金属およびゲルマニウムナノインクを用いた微細パターンのレーザー直接描画 (2010)
  • Author(s): 渡辺明
  • Organizer: レーザー学会学術講演会第30回年次大会
  • Place of Presentation: 大阪
  • Year and Date: 2010-02-04
• [Presentation] 金属および半導体インクを用いたレーザー直接描画法による微細パターン形成 (2009)
  • Author(s): 渡辺明, 藤井亮介, 宮下徳治
  • Organizer: 第58回高分子討論会
  • Place of Presentation: 熊本
  • Year and Date: 2009-09-16
• [Presentation] Fabrication of Conductive Micropatterns on Flexible Polymer Films by Laser Direct Writing Technique Using Metal Nanoparticle Ink (2009)
  • Author(s): Akira Watanabe, Mohammod Aminuzzaman, Tokuji Miyashita
  • Organizer: The 5th International Congress on Laser Advanced Materials Processing, LAMP2009
  • Place of Presentation: 神戸
  • Year and Date: 2009-07-02
• [Book] 有機-無機ナノハイブリッド材料の新展開 (2009)
  • Author(s): 渡辺明
  • Total Pages: 15
  • Publisher: シーエムシー