| Budget Amount *help |
¥7,280,000 (Direct Cost: ¥5,600,000、Indirect Cost: ¥1,680,000)
Fiscal Year 2011: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2010: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2009: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
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| Research Abstract |
Silicon has been generally used to fabricate MEMS. On the other hand, high performance micro-machines(MEMS)should be realized by use of high strength and functional metallic materials. Since, new metallic glass(glassy alloy, amorphous structured materials)was developed in the present study. The material exhibits Elinvar characteristic. From the aspect of micro-forming of metallic glasses, highly efficient and high throughput micro-forming method was developed and superior material properties were proved in this study
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