Micro/Nanoformability and properties of metallic materials for MEMS
Project/Area Number |
21360355
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Research Category |
Grant-in-Aid for Scientific Research (B)
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Allocation Type | Single-year Grants |
Section | 一般 |
Research Field |
Material processing/treatments
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Research Institution | Tohoku University |
Principal Investigator |
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Co-Investigator(Kenkyū-buntansha) |
AMIYA Kenji 東北大学, 金属材料研究所, 准教授 (30463798)
|
Project Period (FY) |
2009 – 2011
|
Project Status |
Completed (Fiscal Year 2011)
|
Budget Amount *help |
¥7,280,000 (Direct Cost: ¥5,600,000、Indirect Cost: ¥1,680,000)
Fiscal Year 2011: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2010: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2009: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
|
Keywords | 金属ガラス / アモルファス / ナノ成形加工 / ナノインプリント / MEMS / 材料加工 / 材料加工・熱処理 / 塑性加工 / 結晶化 / TTT曲線 / DSC / 赤外線幅射加熱 / ガラス遷移 |
Research Abstract |
Silicon has been generally used to fabricate MEMS. On the other hand, high performance micro-machines(MEMS)should be realized by use of high strength and functional metallic materials. Since, new metallic glass(glassy alloy, amorphous structured materials)was developed in the present study. The material exhibits Elinvar characteristic. From the aspect of micro-forming of metallic glasses, highly efficient and high throughput micro-forming method was developed and superior material properties were proved in this study
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Report
(4 results)
Research Products
(50 results)
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[Presentation] Fatigue Behavior of Ni-Based Metallic Glass2010
Author(s)
Y.Saotome, J.Hatcho, M.Ishida, H.Takeda, N.Nishiyama, A.Inoue
Organizer
17th Int.Symposium on Metastable, Amorphous and Nanostructured Materials (ISMANAMA2010)
Place of Presentation
Zurich, Switzerland
Year and Date
2010-07-05
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[Patent(Industrial Property Rights)] 金属ガラス製品の製造方法および異種材料複合体2010
Inventor(s)
竹崎陽二, 早乙女康典, 網谷健児, 島田登, 浅井弘, 天野和弘, 大隈厚士, 舩山勉, 齋藤飛鳥, 太田甲吉, 鈴木佑輔
Industrial Property Rights Holder
ポーライト株式会社, 国立大学法人東北大学
Industrial Property Number
2010-011152
Filing Date
2010-05-13
Related Report
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