Creation of next-generation nanocomposite films by establishment of differential pumping co-deposition technique
| Project/Area Number |
21360359
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Material processing/treatments
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| Research Institution | University of Toyama |
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Principal Investigator |
NOSE Masateru 富山大学, 芸術文化学部, 教授 (70269570)
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| Co-Investigator(Kenkyū-buntansha) |
IKENO Susumu 富山大学, 大学院・理工学研究部, 教授 (70115129)
TERAYAMA Kiyoshi 富山大学, 大学院・理工学研究部, 教授 (20019219)
MATSUDA Kenji 富山大学, 大学院・理工学研究部, 教授 (00209553)
SAIKI Atsushi 富山大学, 大学院・理工学研究部, 教授 (50221255)
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| Project Period (FY) |
2009 – 2011
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| Project Status |
Completed (Fiscal Year 2011)
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| Budget Amount *help |
¥18,720,000 (Direct Cost: ¥14,400,000、Indirect Cost: ¥4,320,000)
Fiscal Year 2011: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2010: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2009: ¥14,690,000 (Direct Cost: ¥11,300,000、Indirect Cost: ¥3,390,000)
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| Keywords | 薄膜プロセス / 差動排気同時成膜 / 硬質膜 / ナノコンポジット膜 / 高分解能電子顕微鏡 / イオン伝導性 / 多層薄膜 / 酸化還元反応 / 機能性薄膜 / r.f.-スパッタリング |
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| Research Abstract |
A differential pumping co-sputtering system(DPCS) was newly developed to facilitate a controlled, but flexible fabrication of multifunctional nanocomposite films with compositions not limited by thermodynamic restrictions. As for the hard coatings, new nanocomoposite films consisting of nitride(CrAlN or AlN) and oxide(Al_2O_3 and SiO_2) were prepared using DPCS. Furthermore, a new nanocomposite films consisting of CrAlN and alumina was obtained from CrAlN/BN films, which was prepared with conventional sputtering apparatus, by annealing in air. On the other hand, as for the functional film, multi layered CeO_2/Al films were successfully obtained without aluminum oxidation during sputtering deposition with DPCS
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Report
(4 results)
Research Products
(49 results)
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[Presentation] 差動排気型2元同時スパッタ装置の開発2010
Author(s)
野瀬正照, 佐伯淳, 池野進, 寺山清志, 松田健二, 他4名
Organizer
粉体粉末冶金協会平成22年度秋季(第106回)講演大会
Place of Presentation
京都大学百周年時計台記念館(京都)
Year and Date
2010-11-09
Related Report
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