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Creation of next-generation nanocomposite films by establishment of differential pumping co-deposition technique

Research Project

Project/Area Number 21360359
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Material processing/treatments
Research InstitutionUniversity of Toyama

Principal Investigator

NOSE Masateru  富山大学, 芸術文化学部, 教授 (70269570)

Co-Investigator(Kenkyū-buntansha) IKENO Susumu  富山大学, 大学院・理工学研究部, 教授 (70115129)
TERAYAMA Kiyoshi  富山大学, 大学院・理工学研究部, 教授 (20019219)
MATSUDA Kenji  富山大学, 大学院・理工学研究部, 教授 (00209553)
SAIKI Atsushi  富山大学, 大学院・理工学研究部, 教授 (50221255)
Project Period (FY) 2009 – 2011
Project Status Completed (Fiscal Year 2011)
Budget Amount *help
¥18,720,000 (Direct Cost: ¥14,400,000、Indirect Cost: ¥4,320,000)
Fiscal Year 2011: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2010: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2009: ¥14,690,000 (Direct Cost: ¥11,300,000、Indirect Cost: ¥3,390,000)
Keywords薄膜プロセス / 差動排気同時成膜 / 硬質膜 / ナノコンポジット膜 / 高分解能電子顕微鏡 / イオン伝導性 / 多層薄膜 / 酸化還元反応 / 機能性薄膜 / r.f.-スパッタリング
Research Abstract

A differential pumping co-sputtering system(DPCS) was newly developed to facilitate a controlled, but flexible fabrication of multifunctional nanocomposite films with compositions not limited by thermodynamic restrictions. As for the hard coatings, new nanocomoposite films consisting of nitride(CrAlN or AlN) and oxide(Al_2O_3 and SiO_2) were prepared using DPCS. Furthermore, a new nanocomposite films consisting of CrAlN and alumina was obtained from CrAlN/BN films, which was prepared with conventional sputtering apparatus, by annealing in air. On the other hand, as for the functional film, multi layered CeO_2/Al films were successfully obtained without aluminum oxidation during sputtering deposition with DPCS

Report

(4 results)
  • 2011 Annual Research Report   Final Research Report ( PDF )
  • 2010 Annual Research Report
  • 2009 Annual Research Report
  • Research Products

    (49 results)

All 2012 2011 2010 2009

All Journal Article (8 results) (of which Peer Reviewed: 6 results) Presentation (34 results) Patent(Industrial Property Rights) (7 results)

  • [Journal Article] Deposition of Novel Nanocomposite Films by a Newly Developed Differential Pumping Co-Sputtering System2012

    • Author(s)
      M. Nose, T. Kurimoto, A. Saiki, K. Matsuda and K. Terayama
    • Journal Title

      Journal of Vacuum Science and Technology A

      Volume: 30

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] OXIDATION RESISTANCE AND SELF HARDENING OF CrAlN/BN NANOCOMPOSITE COATING2012

    • Author(s)
      M. Nose, T. Watanuki, T. Kawabata, Y. Hatano, K. Matsuda, S. Ikeno
    • Journal Title

      Materials ScienceForum

    • Related Report
      2011 Final Research Report
  • [Journal Article] OXIDATION RESISTANCE AND SELF HARDENING OF CrAlN/BN NANOCOMPOSITE COATINGS2012

    • Author(s)
      Masateru Nose, Kenji Matsuda, Susumu Ikeno, 他3名
    • Journal Title

      Materials Science Forum

      Volume: 706-709 Pages: 2559-2564

    • DOI

      10.4028/www.scientific.net/msf.706-709.2559

    • Related Report
      2011 Annual Research Report
  • [Journal Article] Deposition of Novel Nanocomposite Films by a Newly Developed Differential Pumping Co-Sputtering System2012

    • Author(s)
      Masateru Nose, Takeshi Kurimoto, Atsushi Saiki, Kenji Matsuda, Kiyoshi Terayama
    • Journal Title

      Journal of Vacuum Science and Technology A

      Volume: 30

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Mechanical proper-ties and oxidation resistance of CrAlN/BN nanocomposite coatings prepared by reactive d. c. and r. f. co-sputtering2011

    • Author(s)
      M. Nose, T. Watanuki, S. Ueda. K. Fujii, K. Matsuda, S. Ikeno
    • Journal Title

      Surface and Coatings Technology

      Volume: 205

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Mechanical Properties and oxidation resistance of CrAlN/BN nanocomposite coatings prepared by reactive dc and rf cosputtering2011

    • Author(s)
      M.Nose, T.Matsuda, S.Ikeno, 他4名
    • Journal Title

      Surface and Coatings Technology

      Volume: 205

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Mechanical properties and oxidation resistance of CrAlN/BN nanocomposite coatings prepared b reactive d.c.and r.f.co-sputtering2011

    • Author(s)
      M.Nose, K.Matsuda, S.Ikeno, 他3名
    • Journal Title

      Surface and Coatings Technology

      Volume: 49

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Microstructure and Mechanical Properties of Cr-Al-B-N Coatings Prepared by Reactive D.C. and R.F. Co-Sputtering2010

    • Author(s)
      M.Nose, T.Kawabata, S.Ueda, K.Fujii, K.Matsuda, S Ikeno
    • Journal Title

      Materials Science Forum 638-642

      Pages: 781-786

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Presentation] Deposition of CeO_2/Al thin films by differential pumping co-sputtering system2012

    • Author(s)
      A. Saiki, S. Kurokawa, T. Hashidume, K. Terayama
    • Organizer
      7th International Conference on the Physical Properties and Application of Advanced Materials(ICPMAT2012)
    • Place of Presentation
      Norwegian University of Science and Technology, Trondheim, Norway
    • Year and Date
      2012-06-18
    • Related Report
      2011 Final Research Report
  • [Presentation] Deposition of CeO_2/Al thin films by differential pumping co-sputtering system2012

    • Author(s)
      A.Saiki, S.Kurokawa, T.Hashidume, K.Terayama
    • Organizer
      7th International Conference on the Physical Properties and Application of Advanced Materials (ICPMAT2012)
    • Place of Presentation
      Norwegian University of Science and Technology, Trondheim, Norway(発表確定)
    • Year and Date
      2012-06-18
    • Related Report
      2011 Annual Research Report
  • [Presentation] 差動排気型2元同時成膜装置を用いたAlN/SiOxナノコンポジット膜の作製2012

    • Author(s)
      佐藤誉将, 野瀬正照, 松田健二, 他3名
    • Organizer
      日本金属学会2012年春期大会
    • Place of Presentation
      横浜国立大学(神奈川県横浜市)
    • Year and Date
      2012-03-30
    • Related Report
      2011 Annual Research Report
  • [Presentation] 差動排気型2元同時成膜装置により作製したCrAlN/SiOxナノコンポジット膜の微細構造2012

    • Author(s)
      高畠浩史, 野瀬正照, 松田健二, 他3名
    • Organizer
      日本金属学会2012年春期大会
    • Place of Presentation
      横浜国立大学(神奈川県横浜市)
    • Year and Date
      2012-03-30
    • Related Report
      2011 Annual Research Report
  • [Presentation] RFスパッタリングを用いたCeO_2-Al薄膜の作製2011

    • Author(s)
      黒河駿平,橋爪隆,佐伯淳
    • Organizer
      日本金属学会北陸信越支部・日本鉄鋼協会北陸信越支部平成23年度連合講演会
    • Place of Presentation
      金沢工業大学(金沢)
    • Year and Date
      2011-12-03
    • Related Report
      2011 Annual Research Report 2011 Final Research Report
  • [Presentation] 差動排気型二元同時成膜装置により作製したCrAlN酸化物ナノコンポジット複合膜の機械的性質2011

    • Author(s)
      高畠浩史, 野瀬正照, 松田健二, 他1名
    • Organizer
      日本金属学会北陸信越支部・日本鉄鋼協会北陸信越支部平成23年度連合講演会
    • Place of Presentation
      金沢工業大学(金沢)
    • Year and Date
      2011-12-03
    • Related Report
      2011 Annual Research Report
  • [Presentation] Preperation of new nitride/oxide nanocomposite coatings by a newly developed differential pumping co-sputtering system2011

    • Author(s)
      M. Nose, T. Kawabata, K. Matsuda, W-A. Chiou
    • Organizer
      Plasma Conference
    • Place of Presentation
      金沢(石川県)
    • Year and Date
      2011-11-23
    • Related Report
      2011 Final Research Report
  • [Presentation] Preperation of new nitride/oxide nanocomposite coatings by a newly developed differential pumping co-sputtering system2011

    • Author(s)
      M.Nose, T.Kawabata, K.Matsuda, W-A.Chiou
    • Organizer
      Plasma Conference 2011
    • Place of Presentation
      ANAクラウンプラザホテル金沢(石川県金沢市)
    • Year and Date
      2011-11-23
    • Related Report
      2011 Annual Research Report
  • [Presentation] 差動排気型2元同時スパッタ装置の開発2011

    • Author(s)
      野瀬正照,佐伯淳,池野進,寺山清志,松田健二, 他4名
    • Organizer
      粉体粉末冶金協会平成22年度秋季(第106回)講演大会
    • Place of Presentation
      京都大学(京都)
    • Year and Date
      2011-11-09
    • Related Report
      2011 Final Research Report
  • [Presentation] 差動排気型2元同時成膜装置により作製したCrAlN/酸化物ナノコンポジット膜の微細構造2011

    • Author(s)
      高畠浩史,野瀬正照,松田健二, 他4名
    • Organizer
      日本金属学会2011年秋期大会
    • Place of Presentation
      沖縄コンベンションセンター(沖縄県宜野湾市)
    • Year and Date
      2011-11-07
    • Related Report
      2011 Annual Research Report 2011 Final Research Report
  • [Presentation] CrAlN/BNナノコンポジット膜の大気中熱処理による自己硬化特性2011

    • Author(s)
      野瀬正照, 松田健二, 他4名
    • Organizer
      日本金属学会2011年秋期大会
    • Place of Presentation
      沖縄コンベンションセンター(沖縄県宜野湾市)
    • Year and Date
      2011-11-07
    • Related Report
      2011 Annual Research Report
  • [Presentation] 差動排気型2元同時成膜装置を用いた窒化物/酸化物ナノコンポジット膜作製2011

    • Author(s)
      佐藤誉将, 野瀬正照, 松田健二, 他4名
    • Organizer
      日本金属学会2011年秋期大会
    • Place of Presentation
      沖縄コンベンションセンター(沖縄県宜野湾市)
    • Year and Date
      2011-11-07
    • Related Report
      2011 Annual Research Report
  • [Presentation] 差動排気型2元同時成膜法による窒化物/酸化物系ナノコンポジット膜の作製2011

    • Author(s)
      高畠浩史,野瀬正照,松田健二, 他4名
    • Organizer
      粉体粉末冶金協会平成23年度秋期講演大会
    • Place of Presentation
      大阪大学(大阪府吹田市)
    • Year and Date
      2011-10-27
    • Related Report
      2011 Final Research Report
  • [Presentation] 差動排気型2元同時成膜法による窒化物/酸化物系ナノコンポジット膜の作製2011

    • Author(s)
      高畠浩史, 野瀬正照, 松田健二, 他4名
    • Organizer
      粉体粉末冶金協会平成23年度秋期(第108回)講演大会
    • Place of Presentation
      大阪大学国際会議場(大阪府吹田市)
    • Year and Date
      2011-10-27
    • Related Report
      2011 Annual Research Report
  • [Presentation] 差動排気型2元同時成膜法による窒化物/酸化物系ナノコンポジット膜の機械的性質2011

    • Author(s)
      高畠浩史, 野瀬正照, 松田健二, 他4名
    • Organizer
      粉体粉末冶金協会平成23年度秋期(第108回)講演大会
    • Place of Presentation
      大阪大学国際会議場(大阪府吹田市)
    • Year and Date
      2011-10-27
    • Related Report
      2011 Annual Research Report
  • [Presentation] Properties of CrAlN/BN Nanocomposite Coatings Prepared by RF and DC Reactive Co-sputtering2011

    • Author(s)
      Masateru Nose, Kenji Matsuda, 他4名
    • Organizer
      7th International Conference on the Physical Properties and Application of Advanced Materials (ICPMAT-VI 2011)
    • Place of Presentation
      Shanghai University, Shanghai, China
    • Year and Date
      2011-10-12
    • Related Report
      2011 Annual Research Report
  • [Presentation] EM Charcterization of Self Hardening CrAlN/BN nanocomposite Coatings2011

    • Author(s)
      M.Nose, W-A.Chiou, L-C.Lai, T.Watanuki, K.Matsuda
    • Organizer
      Microscopy and Microanalysis 2011
    • Place of Presentation
      Nashville国際会議場(Tennessee, USA)
    • Year and Date
      2011-08-11
    • Related Report
      2011 Annual Research Report
  • [Presentation] OXIDATION RESITANCE AND SELF HARDENING OF CR-AL-N/BN NANOCOMPOSITE COATINGS2011

    • Author(s)
      M.Nose, W-A.Chiou, L-C.Lai, T.Watanuki, K.Matsuda
    • Organizer
      THERMEC'2011 (International Conference on Processing & Manufacturing of Advanced Materials)
    • Place of Presentation
      Quebec City国際会議場(Cananda)(招待講演)
    • Year and Date
      2011-08-02
    • Related Report
      2011 Annual Research Report
  • [Presentation] Self hardening effect of CrAlN/BN nanocomposite films deposited by reactive dc and rf cosputtering2011

    • Author(s)
      M. Nose, W-A. Chiou, T. Kawabata, Y. Hatano, K. Matsuda
    • Organizer
      第24回プラズマ材料科学シンポジウム
    • Place of Presentation
      大阪大学(大阪府吹田市)
    • Year and Date
      2011-07-19
    • Related Report
      2011 Final Research Report
  • [Presentation] Self hardening effect of CrAlN/BN nanocomposite films deposited by reactive dc and rf cosputtering2011

    • Author(s)
      M.Nose, W-A.Chiou, T.Kawabata, Y.Hatano, K.Matsuda
    • Organizer
      第24回プラズマ材料科学シンポジウム
    • Place of Presentation
      大阪大学銀杏会館(大阪府吹田市)(招待講演)
    • Year and Date
      2011-07-19
    • Related Report
      2011 Annual Research Report
  • [Presentation] Growth Condition of CeO_2 Thin Films Grown on Glass Substrate from Aqueous Solution and Their Optical Property2010

    • Author(s)
      A.Saiki, K.Terayama, 他2名
    • Organizer
      ICC3 (3rd International Congress on Ceramics)
    • Place of Presentation
      大阪国際会議場(大阪市)
    • Year and Date
      2010-11-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] 大気中熱処理したCrAlN/BNナノコンポジット膜の機械的性質と微細構造2010

    • Author(s)
      野瀬正照, 松田健二, 池野進, 他3名
    • Organizer
      粉体粉末冶金協会平成22年度秋季(第106回)講演大会
    • Place of Presentation
      京都大学百周年時計台記念館(京都)
    • Year and Date
      2010-11-09
    • Related Report
      2010 Annual Research Report
  • [Presentation] 差動排気型2元同時スパッタ装置の開発2010

    • Author(s)
      野瀬正照, 佐伯淳, 池野進, 寺山清志, 松田健二, 他4名
    • Organizer
      粉体粉末冶金協会平成22年度秋季(第106回)講演大会
    • Place of Presentation
      京都大学百周年時計台記念館(京都)
    • Year and Date
      2010-11-09
    • Related Report
      2010 Annual Research Report
  • [Presentation] CrAlN/BNナノコンポジット膜の熱処理による構造変化2010

    • Author(s)
      野瀬正照, 松田健二, 池野進, 他3名
    • Organizer
      日本金属学会2010年秋期(第147回)大会
    • Place of Presentation
      北海道大学(札幌)
    • Year and Date
      2010-09-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] 差動排気型2元同時スパッタ装置の動作特性2010

    • Author(s)
      野瀬正照, 佐伯淳, 池野進, 寺山清志, 松田健二, 他4名
    • Organizer
      日本金属学会2010年秋期(第147回)大会
    • Place of Presentation
      北海道大学(札幌)
    • Year and Date
      2010-09-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] Mechanical properties and oxidation resistance of CrAlN/BN nanocomposite coatings prepared by reactive d. c. and r. f. co-sputtering2010

    • Author(s)
      M. Nose, K. Matsuda, S. Ikeno, et. al.
    • Organizer
      12^<th> International Conference on Plasma Surface Engineering
    • Place of Presentation
      Garmisch-Partenkirchen(Germany)
    • Year and Date
      2010-09-14
    • Related Report
      2011 Final Research Report
  • [Presentation] Mechanical properties and oxidation resistance of CrAlN/BN nanocomposite coatings prepared by reactive d.c.and r.f.co-sputtering2010

    • Author(s)
      M.Nose, K.Matsuda, S.Ikeno, 他3名
    • Organizer
      13^<th> International Conference on Plasma Surface Engineering
    • Place of Presentation
      Garmisch-Partenkirchen国際会議場(Germany)
    • Year and Date
      2010-09-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] 反応性2元同時スパッタ法で作製したCrAlN/BNナノコンポジット膜の機械的性質におよぼす熱処理の効果2010

    • Author(s)
      野瀬正照, 松田健二, 池野進, 他3名
    • Organizer
      粉体粉末冶金協会平成22年度春季(第105回)講演大会
    • Place of Presentation
      早稲田大学国際会議場(東京)
    • Year and Date
      2010-05-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] CrAlN/BNナノコンポジット膜の構造と機械的性質に及ぼす熱処理の効果2010

    • Author(s)
      野瀬正照、松田健二、池野進, 他3名
    • Organizer
      日本金属学会2010年春期(第146回)大会
    • Place of Presentation
      筑波大学(つくば)
    • Year and Date
      2010-03-30
    • Related Report
      2009 Annual Research Report
  • [Presentation] RFバイアススパッタ法により作製したAl-O-N膜の構造と特性2010

    • Author(s)
      野瀬正照、佐伯淳、松田健二、寺山清志、池野進, 他3名
    • Organizer
      日本金属学会2010年春期(第146回)大会
    • Place of Presentation
      筑波大学(つくば)
    • Year and Date
      2010-03-30
    • Related Report
      2009 Annual Research Report
  • [Presentation] RFバイアススパッタ法により作製したAl-O-N膜の構造と機械的性質2009

    • Author(s)
      野瀬正照、佐伯淳、松田健二、寺山清志、池野進, 他3名
    • Organizer
      粉体粉末冶金協会平成21年度秋季大会
    • Place of Presentation
      名古屋国際会議場(名古屋)
    • Year and Date
      2009-10-28
    • Related Report
      2009 Annual Research Report
  • [Presentation] Al-O-N膜の構造と特性に及ぼすスパッタ条件の影響2009

    • Author(s)
      野瀬正照、佐伯淳、松田健二、寺山清志、池野進, 他3名
    • Organizer
      日本金属学会2009年秋期(第145回)大会
    • Place of Presentation
      京都大学(京都)
    • Year and Date
      2009-09-17
    • Related Report
      2009 Annual Research Report
  • [Presentation] DC-RF2元同時反応スパッタ法で作製したCrAlN/BN複合膜の耐酸化性2009

    • Author(s)
      野瀬正照、松田健二、池野進, 他3名
    • Organizer
      日本金属学会2009年秋期(第145回)大会
    • Place of Presentation
      京都大学(京都)
    • Year and Date
      2009-09-17
    • Related Report
      2009 Annual Research Report
  • [Presentation] 反応性2元同時スパッタ法で作製したCrAlN/BNコーティング膜の構造と機械的性質2009

    • Author(s)
      野瀬正照、松田健二、池野進, 他3名
    • Organizer
      粉体粉末冶金協会平成21年度秋季大会
    • Place of Presentation
      京都工芸繊維大学(京都)
    • Year and Date
      2009-06-04
    • Related Report
      2009 Annual Research Report
  • [Patent(Industrial Property Rights)] 複合膜の成膜装置及び成膜方法2011

    • Inventor(s)
      野瀬正照,栗本猛,池野進,寺山清志,佐伯淳
    • Industrial Property Rights Holder
      国立大学法人富山大学
    • Filing Date
      2011-02-17
    • Related Report
      2011 Final Research Report
  • [Patent(Industrial Property Rights)] 複合膜の成膜装置及び成膜方法2010

    • Inventor(s)
      野瀬正照,栗本猛,池野進,寺山清志,佐伯淳
    • Industrial Property Rights Holder
      国立大学法人富山大学
    • Filing Date
      2010-06-30
    • Related Report
      2011 Final Research Report
  • [Patent(Industrial Property Rights)] 加工工具用硬質保護膜2010

    • Inventor(s)
      野瀬正照,池野進,松田健二
    • Industrial Property Rights Holder
      国立大学法人富山大学
    • Filing Date
      2010-03-12
    • Related Report
      2011 Final Research Report
  • [Patent(Industrial Property Rights)] 複合膜の成膜装置及び成膜方法2010

    • Inventor(s)
      野瀬正照, 他4名
    • Industrial Property Rights Holder
      国立大学法人富出大学
    • Industrial Property Number
      2010-150268
    • Filing Date
      2010-06-30
    • Related Report
      2010 Annual Research Report
  • [Patent(Industrial Property Rights)] 加工工具用硬質保護膜2010

    • Inventor(s)
      野瀬・池野, 松田
    • Industrial Property Rights Holder
      国立大学法人富山大学
    • Filing Date
      2010-03-12
    • Related Report
      2009 Annual Research Report
  • [Patent(Industrial Property Rights)] 硬質保護膜およびその製造方法2009

    • Inventor(s)
      野瀬正照,池野進,寺山清志,佐伯淳,松田健二,橋爪隆,川畑常眞
    • Industrial Property Rights Holder
      国立大学法人富山大学
    • Filing Date
      2009-09-14
    • Related Report
      2011 Final Research Report
  • [Patent(Industrial Property Rights)] 硬質保護膜およびその製造方法2009

    • Inventor(s)
      野瀬・池野, 寺山・松田
    • Industrial Property Rights Holder
      国立大学法人富山大学
    • Filing Date
      2009-09-14
    • Related Report
      2009 Annual Research Report

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Published: 2009-04-01   Modified: 2018-10-02  

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