Development of micro-plasma molding using integrated fine electrodes

• Project/Area Number: 21360362
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Material processing/treatments
• Research Institution: Osaka University
• Principal Investigator: HIRAIA Yoshinori 大阪大学, 大学院工学研究科, 教授 (00116089)
• Co-Investigator(Kenkyū-buntansha): NISHIYAMA Hiroaki 北海道大学, 電子科学研究所, 准教授 (80403153)
• Project Period (FY): 2009 – 2011
• Project Status: Completed (Fiscal Year 2011)
• Budget Amount: ¥17,940,000 (Direct Cost: ¥13,800,000、Indirect Cost: ¥4,140,000); Fiscal Year 2011: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000); Fiscal Year 2010: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000); Fiscal Year 2009: ¥11,960,000 (Direct Cost: ¥9,200,000、Indirect Cost: ¥2,760,000)
• Keywords: プラズマ処理 / レーザ加工 / マイクロ放電 / 微細電極 / プラズマ / グロー / パワー密度 / 電解研磨 / アーク / 半導体加工プロセス / アークプラズマ / 表面加工 / フェムト秒レーザ / エッチング

Research Abstract

Generation method of very small size plasma beam was developed through controlling the electrical discharge in the range from glow region to arc region with use of the new type nozzle made from BN ceramics and the fast high voltage power source. The power density of newly developed plasma beam reaches higher than 10^9 W/ m^2 and sub-millimeter sized melt spot can be obtained at the surface of stainless steel anode. In order to obtain much smaller diameter of BN nozzle, characterizations of plasma etching properties of BN and nonlinear optical lithography were performed. The etching rate was approximately 2. 5 ilm/ h when BN was exposed to NLD Ar plasma.

Research Products

• [Journal Article] マイクロプラズマ溶接に関する研究 (2012)
  • Author(s): M, Park, 平田好則
  • Journal Title: 第18回エレクトロニクスにおけるマイクロ接合・実装技術シンポジウム論文誌 Pages: 353-358
  • Peer Reviewed
• [Journal Article] 溶滴移行現象の数値解析-グロビュラー移行/スプレー移行の臨界条件- (2012)
  • Author(s): 門田圭二, 平田好則
  • Journal Title: 溶接学会論文集 Volume: 30 Pages: 1-8
  • NAID: 130004445705
  • Peer Reviewed
• [Journal Article] GMA溶接の溶滴移行現象に及ぼすシールドガスとワイヤの影響 (2012)
  • Author(s): 門田圭二, 鈴木悠司, 平田好則, 片岡時彦, 池田倫正, 安田功一
  • Journal Title: 溶接学会論文集 Volume: 30 Pages: 100-106
  • NAID: 130004445707
  • Peer Reviewed
• [Journal Article] Large refractive index changes of a chemically amplified photoresists in femtosecond laser nonlinear lithography (2011)
  • Author(s): M. Mizoshiri, Y. Hirata, J. Nishii, H. Nishiyama
  • Journal Title: Optics Express Volume: Vol.19 Pages: 7634-7679
  • Peer Reviewed
• [Journal Article] Off-axis diffractive focusing reflectors for refractive index sensing in microfluidic devices (2011)
  • Author(s): H. Nishiyama, Y. Sagawa, N. Furukawa, S. Okamoto, Y. Hirata, J. Nishii
  • Journal Title: Japanese Journal of Applied Physics Volume: vol.50
  • NAID: 210000070752
  • Peer Reviewed
• [Journal Article] オフアクシス集光型回折格子を内装したマイクロ流体素子による屈折率センシング (2011)
  • Author(s): 西山宏昭, 岡本晋太朗, 佐川雄一, 平田好則, 西井準治
  • Journal Title: 第28回センサマイクロマシンとシステムシンポジウム論文集 Volume: Vol.1 Pages: 671-674
  • Peer Reviewed
• [Journal Article] Numerical analysis of the heat source characteristics of a two-electrode TIG arc (2011)
  • Author(s): Y.Ogino, Y.Hirata, K.Nomura
  • Journal Title: J.of Physics D : Applied Physics Volume: 44 Pages: 215202-215202
  • NAID: 120004844161
  • Peer Reviewed
• [Journal Article] TIGアークプラズマの三次元温度計測 (2011)
  • Author(s): 小西貴也, 平田好則, 野村和史, 白井健太郎
  • Journal Title: 溶接学会論文集 Volume: 29 Pages: 274-279
  • NAID: 10030151053
  • Peer Reviewed
• [Journal Article] 外部磁場による溶接アークプラズマの制御 (2011)
  • Author(s): 平田好則, 野村和史, 荻野陽輔
  • Journal Title: プラズマ・核融合学会誌 Volume: 87 Pages: 535-538
  • NAID: 110008712079
• [Journal Article] Off-axis diffractive focusing reflectors for refractive index sensing in microfluidic devices (2011)
  • Author(s): H.Nishiyama, Y.Sagawa, F.Furukawa, S.Okamoto, Y.Hirata, J.Nishii
  • Journal Title: Jpn.J.Appl.Phys. Volume: 50
  • NAID: 210000070752
  • Peer Reviewed
• [Journal Article] Fabrication of SiO2 hybrid microlens structures using femtosecond laser nonlinear lithography (2011)
  • Author(s): H.Nishiyama, M.Mizoshiri, Y.Hirata, J.Nishii
  • Journal Title: IOP Conf.Series : Materials Science and Engineering Volume: 18
  • Peer Reviewed
• [Journal Article] Features of Magnetic Controlled TIG Arc Plasma-Modeling and Experiment (2011)
  • Author(s): K.Nomura, Y.Ogino, K.Murakami, Y.Hirata
  • Journal Title: Mathematical Modelling of Weld Phenomena Volume: 9 Pages: 83-91
  • Peer Reviewed
• [Journal Article] 非線形リソグラフィーによるガラスの立体的表面加工 (2010)
  • Author(s): 西山宏昭, 平田好則
  • Journal Title: NEW GLASS Volume: Vol.25 Pages: 11-15
• [Journal Article] Fundamental Research on Micro Discharge Process-Research on Discharge of Sub-millimeter size Process- (2010)
  • Author(s): M.Park, Y.Hirata, K.Nomura
  • Journal Title: Visual-JW2010 Volume: 1 Pages: 225-225
  • NAID: 120004841631
  • Peer Reviewed
• [Journal Article] Influence of Magnet Configurations on Magnetic Controlled TIG Arc Welding (2010)
  • Author(s): K.Nomura, Y.Ogino, T.Haga, Y.Hirata
  • Journal Title: Visual-JW2010 Volume: 1 Pages: 227-227
  • NAID: 120004844661
  • Peer Reviewed
• [Journal Article] Numerical Analysis on the Heat Source Characteristics of the Two-Electrodes TIG Arc (2010)
  • Author(s): Y.Ogino, Y.Hirata, K.Nomura
  • Journal Title: Visual-JW2010 Volume: 1 Pages: 223-223
  • NAID: 120004844161
  • Peer Reviewed
• [Journal Article] 3次元アークモデルの開先部への適用 (2010)
  • Author(s): 荻野陽輔, 野村和史, 平田好則
  • Journal Title: 溶接学会論文集溶接学会論文集 Vol. 28, no. 1 Pages: 10-15
  • NAID: 10030149635
  • Peer Reviewed
• [Journal Article] 永久磁石を用いたカスプ型磁場によるTIGアークプラズマの形状制御 (2009)
  • Author(s): 野村和史, 荻野陽輔, 平田好則
  • Journal Title: 溶接学会論文集 27巻3号 Pages: 170-175
  • NAID: 10030149292
  • Peer Reviewed
• [Journal Article] Magnetic control of arc plasma and its modeling (2009)
  • Author(s): K.Nomura, K.Morisaki, Y.Hirata
  • Journal Title: Welding in the world Vol. 53 Pages: 181-187
  • Peer Reviewed
• [Journal Article] Controlled bridge transfer (CBT) gas metal arc process for steel sheets joining (2009)
  • Author(s): T.Era, A.Ide, T.Uezono, Tueyama, Y.Hirata
  • Journal Title: Science and Technology of Welding and Joining Vol. 14, no. 6 Pages: 493-499
  • NAID: 10030149329
  • Peer Reviewed
• [Journal Article] Spatter Reduction in GMAW of Stainless Steel Sheets using CBT Process (2009)
  • Author(s): T.Era, A.Ide, T.Uezono, Tueyama, Y.Hirata
  • Journal Title: Science and Technology of Welding and Joining Vol. 14, no. 8 Pages: 708-716
  • NAID: 10030149348
  • Peer Reviewed
• [Journal Article] Controlled Bridge Transfer (CBT法)の適用による薄鋼板の溶接 (2009)
  • Author(s): 恵良哲生, 井手章博, 上園敏郎, 上山智之, 平田好則
  • Journal Title: 溶接学会論文集溶接学会論文集 Vol. 27, no. 3 Pages: 189-194
  • NAID: 10030149329
  • Peer Reviewed
• [Journal Article] Controlled Bridge Transfer (CBT法)によるステンレス鋼ミグ溶接のスパッタ低減 (2009)
  • Author(s): 恵良哲生, 井手章博, 上園敏郎, 上山智之, 平田好則
  • Journal Title: 溶接学会論文集溶接学会論文集 Vol. 27, no. 3 Pages: 195-201
  • NAID: 10030149348
  • Peer Reviewed
• [Presentation] プラズマビームプロセスに関する研究 (2012)
  • Author(s): 朴ミンゴン, 浦部竜真, 平田好則
  • Organizer: 溶接学会H24年度春季全国大会
  • Place of Presentation: アジア太平洋トレードセンター(大阪市)
  • Year and Date: 2012-04-10
• [Presentation] Fundamental research on micro discharge process (2011)
  • Author(s): M. Park, Y. Hirata and K. Nomura
  • Organizer: ECO-MATES 2011
  • Place of Presentation: ホテル阪急エクスポパーク(吹田市)
  • Year and Date: 2011-11-28
• [Presentation] Heat input and arc pressure distribution of TIG arc on V-groove surface (2011)
  • Author(s): Y.Ogino, Y.Hirata, K.Nomura
  • Organizer: ECO-MATES 2011
  • Place of Presentation: 吹田市
  • Year and Date: 2011-11-28
• [Presentation] Fundamental research on micro discharge process (2011)
  • Author(s): M.Park, Y.Hirata, K.Nomura
  • Organizer: ECO-MATES 2011
  • Place of Presentation: 吹田市
  • Year and Date: 2011-11-28
• [Presentation] Numerical analysis of metal transfer in GMA welding taking into consideration metal vapour with using unified model (2011)
  • Author(s): K.Kadota, Y.Hirata
  • Organizer: ECO-MATES 2011
  • Place of Presentation: 吹田市
  • Year and Date: 2011-11-28
• [Presentation] Plasma Physics Promotes Progress of Arc Welding Processes (2011)
  • Author(s): Y.Hirata
  • Organizer: The 3rd International Round Table on Thermal Plasmas for Industrial Applications
  • Place of Presentation: Johannesburg (South Africa)(招待講演)
  • Year and Date: 2011-11-02
• [Presentation] Three-dimensional imprint molds fabricated using femtosecond laser nonlinear lithography (2011)
  • Author(s): H.Nishiyama, Y.Hirata, J.Nishii
  • Organizer: MNC 2011
  • Place of Presentation: 京都市
  • Year and Date: 2011-10-27
• [Presentation] オフアクシス集光型回折格子を内装したマイクロ流体素子による屈折率センシング (2011)
  • Author(s): 西山宏昭, 岡本晋太朗, 佐川雄一, 平田好則, 西井準治
  • Organizer: 第28回センサマイクロマシンと応用システムシンポジゥム
  • Place of Presentation: タワーホール船堀(東京都)
  • Year and Date: 2011-09-27
• [Presentation] Femtosecond laser nonlinear lithography for 3D nanoimprint molds (2011)
  • Author(s): H.Nishiyama, Y.Hirata, J.Nishii
  • Organizer: JCK MEMS/NEMS 2011
  • Place of Presentation: Jeju (South Korea)
  • Year and Date: 2011-09-05
• [Presentation] 集光型回折格子内装マイクロ流体素子による屈折率センシング (2011)
  • Author(s): 岡本晋太朗, 西山宏昭, 平田好則, 西井準治
  • Organizer: 第72回応用物理学会学術講演会
  • Place of Presentation: 山形大学(山形市)
  • Year and Date: 2011-09-01
• [Presentation] フェムト秒レーザ直接重合による露光部での導波モード生成 (2011)
  • Author(s): 西山宏昭, 溝尻瑞枝, 平田好則, 西井準治
  • Organizer: 第72回応用物理学会学術講演会
  • Place of Presentation: 山形大学(山形市)
  • Year and Date: 2011-08-31
• [Presentation] Recent Progress of GMAW Processes in Japan (2011)
  • Author(s): Y.Hirata
  • Organizer: International Conference of the 64^<th> IIW Annual Assembly
  • Place of Presentation: Chennai (India)(招待講演)
  • Year and Date: 2011-07-21
• [Presentation] Three Dimensional Temperature Measurement of TIG Arc Plasma (2011)
  • Author(s): T.Konishi, Y.Hirata, K.Nomura, K.Shirai
  • Organizer: IIW 2011
  • Place of Presentation: Chennai (India)
  • Year and Date: 2011-07-18
• [Presentation] Three Dimensional Temperature Measurement of the Gas Tungsten Arc Plasma (2011)
  • Author(s): Y.Hirata, T.Konishi, K.Nomura, K.Shirai
  • Organizer: The 1st East Asia Symposium on Technology of Welding & Joining
  • Place of Presentation: 上海(中国)
  • Year and Date: 2011-06-01
• [Presentation] マイクロアークプロセスに関する研究(第2報) (2011)
  • Author(s): 朴ミンゴン, 野村和史, 平田好則
  • Organizer: 溶接学会H23年度春季全国大会
  • Place of Presentation: 学術総合センター(東京都)
  • Year and Date: 2011-04-22
• [Presentation] Development of spectroscopic measurement for non-axial symmetrical TIG arc plasma (2010)
  • Author(s): K.Nomura, Y.Hirata, T.Konishi, K.Shirai
  • Organizer: ECO-MATES 2011
  • Place of Presentation: 吹田市
  • Year and Date: 2010-11-28
• [Presentation] Thtee-dimensional SiO_2 surfaces structures fabricated using femtosecond laser lithography (2010)
  • Author(s): H.Nishiyama, Y.Hirata, J.Nishii
  • Organizer: The 27^<th> International Korea-Japan Seminar on Ceramics
  • Place of Presentation: Incheon (Korea)
  • Year and Date: 2010-11-25
• [Presentation] Thtee-dimensional SiO_2 surfaces fabricated using nonlinear lithography (2010)
  • Author(s): H.Nishiyama, Y.Hirata, J.Nishii
  • Organizer: 3^<rd> International Congress on Ceramics
  • Place of Presentation: Osaka (Japan)
  • Year and Date: 2010-11-17
• [Presentation] Research on Discharge of Sub-millimeter size Process (2010)
  • Author(s): M. Park, Y. Hirata, K. Nomura
  • Organizer: Visua1-JW2010
  • Place of Presentation: ホテル阪急エクスポパーク(吹田市)
  • Year and Date: 2010-11-11
• [Presentation] マイクロアークプロセスに関する研究 (2010)
  • Author(s): 朴ミンゴン, 野村和史, 平田好則
  • Organizer: 溶接学会H22年度秋季全国大会
  • Place of Presentation: 日本大学工学部(郡山市)
  • Year and Date: 2010-09-09
• [Presentation] Influence of Magnet Configurations on Magnetic Controlled TIG Arc Welding (2010)
  • Author(s): K.Nomura, Y.Ogino, T.Haga, K.Murakami, T.Hirano, Y.Hirata
  • Organizer: IIW 2010
  • Place of Presentation: Istanbul (Turkey)
  • Year and Date: 2010-07-11
• [Presentation] Numerical Analysis on the Heat Source Characteristics of the Two-Electrodes TIG Arc (2010)
  • Author(s): Y.Ogino, Y.Hirata, K.Nomura
  • Organizer: IIW 2010
  • Place of Presentation: Istanbul (Turkey)
  • Year and Date: 2010-07-11
• [Presentation] GMA開先溶接プロセスのモデル解析(第2報) (2009)
  • Author(s): 平野哲也, 平田好則
  • Organizer: 平成21年度溶接学会秋季全国大会
  • Place of Presentation: 徳島大学(徳島県徳島市)
  • Year and Date: 2009-09-09
• [Presentation] 短絡移行現象のモデル解析 (2009)
  • Author(s): 堀川直哉, 平田好則
  • Organizer: 平成21年度溶接学会秋季全国大会
  • Place of Presentation: 徳島大学(徳島県徳島市)
  • Year and Date: 2009-09-09
• [Presentation] パルス電流波形が溶滴移行に及ぼす影響/溶滴移行現象のモデル解析(2) (2009)
  • Author(s): 門田圭二, 平田好則
  • Organizer: 平成21年度溶接学会春季全国大会
  • Place of Presentation: アルカディア市ヶ谷(東京都千代田区)
  • Year and Date: 2009-04-22
• [Presentation] 3次元アークモデルの開先部への適用 (2009)
  • Author(s): 荻野陽輔, 野村和史, 平田好則
  • Organizer: 平成21年度溶接学会春季全国大会
  • Place of Presentation: アルカディア市ヶ谷(東京都千代田区)
  • Year and Date: 2009-04-22
• [Book] 機械実用便覧改訂第7版 (2011)
  • Author(s): 平田好則(分担)
  • Total Pages: 1109
  • Publisher: 丸善
• [Book] Laser pulse phenomena and applications (分担) (2011)
  • Author(s): H.Nishiyama, J.Nishii
  • Total Pages: 474
  • Publisher: In-Tech.Co.Ltd.