Electrochemical tailoring of semiconductor nanowire arrays and their application to photo-energy devices

• Project/Area Number: 21360363
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Material processing/treatments
• Research Institution: Waseda University
• Principal Investigator: HOMMA Takayuki 早稲田大学, 理工学術院, 教授 (80238823)
• Co-Investigator(Kenkyū-buntansha): 福中 康博 早稲田大学, ナノ理工学研究機構, 教授 (60111936)
• Co-Investigator(Renkei-kenkyūsha): ミランダ カエタノ 京都大学, 工学研究科, 助教 (30456800)
• Project Period (FY): 2009 – 2011
• Project Status: Completed (Fiscal Year 2011)
• Budget Amount: ¥18,200,000 (Direct Cost: ¥14,000,000、Indirect Cost: ¥4,200,000); Fiscal Year 2011: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000); Fiscal Year 2010: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000); Fiscal Year 2009: ¥10,660,000 (Direct Cost: ¥8,200,000、Indirect Cost: ¥2,460,000)
• Keywords: 電気化学反応 / シリコン電析 / 光エネルギーデバイス / 反応解析 / ナノ構造創製 / ナノ構造形成 / ナノ材料創製

Research Abstract

Novel process for the electrodeposition of Si thin film from ionic liquid electrolyte has been developed and the initial stage of the deposition process was investigated using EQCM, TEM, and Raman Spectroscopy. It was found that amorphous Si was electrodeposited while a certain amount of ionic liquid was included in the films. Moreover, uniform array of Si nanodots was successfully electrodeposited using 150 nm diameter dot array patterns fabricated by UV nanoimprinting lithography.

Research Products

• [Journal Article] Initial catalyzation analysis of electroless NiP nanoimprinting mold replicated from self-assembled monolayer modified nanopatterns (2012)
  • Author(s): C-P. Lin, M. Saito, T. Homma
  • Journal Title: Electrochim. Acta Volume: 82 Pages: 75-81
  • Peer Reviewed
• [Journal Article] Theoretical Analysis of Catalytic Activity of Metal Surfaces on Reaction of Hypophosphite Ion (2012)
  • Author(s): M. Kunimoto, H. Nakai, T. Homma
  • Journal Title: Electrochemistry Volume: 80(3) Pages: 126-131
  • NAID: 10030143121
  • Peer Reviewed
• [Journal Article] Theoretical Analysis of Catalytic Activity of Metal Surfaces on Reaction of Hypophosphite Ion (2012)
  • Author(s): M.Kunimoto, H.Nakai, T.Homma
  • Journal Title: Electrochemistry Volume: 80 Issue: 3 Pages: 126-131
  • DOI: 10.5796/electrochemistry.80.126
  • NAID: 130002147461
  • ISSN: 1344-3542, 2186-2451
  • Peer Reviewed
• [Journal Article] Density Functional Theory Analysis for Orbital Interaction between Hypophosphite Ions and Metal Surfaces (2011)
  • Author(s): M. Kunimoto, H. Nakai, T. Homma
  • Journal Title: J. Electrochem. Soc., J. Electrochem. Soc Volume: 158(10)
  • Peer Reviewed
• [Journal Article] Density Functional Theory Analysis of Reaction Mechanism of Hypophosphite Ions on Metal Surfaces (2011)
  • Author(s): M. Kunimoto, T. Shimada, S. Odagiri, H. Nakai, T. Homma
  • Journal Title: J. Electrochem. Soc Volume: 158(9)
  • Peer Reviewed
• [Journal Article] Potential-Dependent Surface Morphology and Microtexture Evolution of Electrodeposited Coper Films (2011)
  • Author(s): M.C.Lafouresse, Y.Fukunaka, T.Honma, et al
  • Journal Title: Electrochem.Solid State Let. Volume: 14 Issue: 7 Pages: D77-D77
  • DOI: 10.1149/1.3578016
  • Peer Reviewed
• [Journal Article] Li dendrite growth and Li(+) ionic mass transfer phenomenon (2011)
  • Author(s): K.Nishikawa, T.Mori, T.Nishida, Y.Fukunaka, M.Rosso
  • Journal Title: J.Electroanal.Chem. Volume: 661 Issue: 1 Pages: 84-89
  • DOI: 10.1016/j.jelechem.2011.06.035
  • Peer Reviewed
• [Journal Article] Density Functional Theory Analysis of Reaction Mechanism of Hypophosphite Ions on Metal Surfaces (2011)
  • Author(s): M.Kunimoto, T.Shimada, S.Odagiri, H.Nakai, T.Homma
  • Journal Title: J.Electrochem.Soc. Volume: 158 Issue: 9 Pages: D585-D585
  • DOI: 10.1149/1.3609000
  • Peer Reviewed
• [Journal Article] Numerical Calculation of Transient Current Density Distribution along Vertical Plane Electrode in CuSO4-H2SO4 Electrolyte Solution (2010)
  • Author(s): S. Kawai, Y. Fukunaka, S. Kida
  • Journal Title: J. Electrochem. Soc Volume: 157(3)
  • Peer Reviewed
• [Journal Article] Carbothermic Reduction of Amorphous Silica Refined from Diatomaceous Earth (2010)
  • Author(s): M. Hakamada, Y. Fukunaka, T. Oishi, T. Nishiyama, H. Kusuda
  • Journal Title: Metall. Mater. Trans. B Volume: 41(2) Pages: 350-358
  • Peer Reviewed
• [Journal Article] Electrochemical etching process to tune the diameter of arrayed deep pores by controlling carrier collection at a semiconductor- electrolyte interface (2010)
  • Author(s): H. Sato, T. Yamaguchi, T. Isobe, S. Shoji, T. Homma
  • Journal Title: Electrochem. Comm Volume: 12 Pages: 765-768
  • Peer Reviewed
• [Journal Article] Fabrication of nanodot array using electrochemical deposition processes (2010)
  • Author(s): T. Ouchi, Y. Arikawa, Y. Konishi, T. Homma
  • Journal Title: Electrochim. Acta Volume: 55 Pages: 8081-8086
  • Peer Reviewed
• [Journal Article] Transient mass transfer rate of Cu2+ ion caused by copper electrodeposition with alternating electrolytic current (2010)
  • Author(s): S. Kawai, M. Ogawa, K. Ishibashi, Y. Kondo, T. Matsuoka, T. Homma, Y. Fukunaka, S. Kida
  • Journal Title: Electrochim. Acta Volume: 55(12) Pages: 3987-3994
  • Peer Reviewed
• [Journal Article] Microstructure Formation within Films of Silicon using Electrochemical Anodization (2010)
  • Author(s): J. B. Ratchford, M. Saito, T. Homma
  • Journal Title: Trans. Mat. Res. Soc Volume: 35(1) Pages: 69-72
  • Peer Reviewed
• [Journal Article] Transient Mass Transfer Rate of Cu2+ Ion Caused by Copper Electrodeposition with Alternating Electrolytic Current (2010)
  • Author(s): S.Kawai, M.Ogawa, T.Homma, Y.Fukunaka, et. al.
  • Journal Title: Electrochimica Acta Volume: 55 Pages: 3987-3994
  • Peer Reviewed
• [Journal Article] Electrochemical Etching Process to Tune the Diameter of Arrayed Deep Pores by Controlling Carrier Collection at a Semiconductor Electrolyte Interface (2010)
  • Author(s): M.Sato, T.Yamaguchi, T.Isobe, S.Shoji, T.Honma
  • Journal Title: Electrochem.Comm. Volume: 12 Pages: 765-768
  • Peer Reviewed
• [Journal Article] Carbothermic Reduction of Amorphous Silica Refined from Diatomaceous Earth (2010)
  • Author(s): M.Hakamada, Y.Fukunaka, T.Oishi, T.Nishiyama, H.Kusuda
  • Journal Title: Metallurgical and Materials Transactions B Volume: 41B Pages: 350-358
  • Peer Reviewed
• [Journal Article] Numerical Calculation of Transient Current Density Distribution along Vertical Plane Electrode in CuSO4-H2SO4 Electrolyte Solution (2010)
  • Author(s): S.Kauai, Y.Fukunaka, S.Kida
  • Journal Title: J.Electrochem.Soc Volume: 157 Pages: 40-48
  • Peer Reviewed
• [Journal Article] Microstructure Formation within Films of Silicon using Electrochemical Anodization (2010)
  • Author(s): J.B.Ratchford, M.Saito, T.Homma
  • Journal Title: Trans.Mat.Res.Soc. 35(1) Pages: 69-72
  • Peer Reviewed
• [Journal Article] High-Grade Silica Refined from Diatomaceous Earth for Solar-Grade Silicon Production (2009)
  • Author(s): M. Bessho, Y. Fukunaka, H. Kusuda, T. Nishiyama
  • Journal Title: Energy Fuels Volume: 23(8) Pages: 4160-4165
  • Peer Reviewed
• [Journal Article] Raman Microscopy and Scanning Surface Potential Microscopy Analysis of Nanoscale Defects on Si Wafer Surfaces (2009)
  • Author(s): T. Homma, M. Kato, N. Kubo, K. Sakata, M. Yanagisawa
  • Journal Title: J. Electrochem. Soc Volume: 156(6)
  • Peer Reviewed
• [Journal Article] Electrochemical Evaluation and Finice Element Structural Analysis of Si Wafer Surface under Mechanical Stress (2009)
  • Author(s): K.Sakata, T.Homma
  • Journal Title: Electrochem.Soc.Trans. 16(4) Pages: 79-84
  • Peer Reviewed
• [Journal Article] Raman Microscopy and Scanning Surface Potential Microscopy Analysis of Nanoscale Defects on Si Wafer Surfaces (2009)
  • Author(s): T.Homma, M.Kato, N.Kubo, K.Sakata, N.Kubo, M.Yanagisawa
  • Journal Title: J.Electrochem.Soc. 156(6)
  • Peer Reviewed
• [Presentation] Silicon Bonding State in Films Electrodeposited from SiCl_4 in Ionic Liquid (2012)
  • Author(s): J. Komadina, T. Akiyoshi, Y. Ishibashi, X. Wang, Y. Fukunaka, P. Pianetta, T. Homma
  • Organizer: 222^<nd> Meeting of the Electrochemical Society
  • Place of Presentation: Honolulu, USA
  • Year and Date: 2012-10-10
• [Presentation] Electrodeposition of Si nanopatterns from ionic liquid (2012)
  • Author(s): T. Homma
  • Organizer: 9th International Symposium on Electro- chemical Micro & Nanosystem Technology
  • Place of Presentation: Linz, Austria, Keynote
  • Year and Date: 2012-08-16
• [Presentation] Electrochemical Fabrication of Magnetic Nanodot Arrays (2012)
  • Author(s): T. Homma, A. Takami, M. Kunimoto
  • Organizer: 12^<th> International Fischer Symposium
  • Place of Presentation: Lubeck, Germany, (Invited)
  • Year and Date: 2012-06-04
• [Presentation] Progress in Nanowire Growth and Mechanistic Analysis of Silicon Electrodeposition in Ionic Liquid (2012)
  • Author(s): J. Komadina, T. Akiyoshi, Y. Ishibashi, Y. Fukunaka, P. Pianetta, T. Homma,
  • Organizer: 221^<st> Meeting of the Electrochemical Society
  • Place of Presentation: Seattle, USA
  • Year and Date: 2012-05-07
• [Presentation] Templated electrodeposition of Si nanowires from ionic liquid (2011)
  • Author(s): T.Homma, J.Komadina, Y.Fukunaka, et al
  • Organizer: 220th Meeting of The Electrochemical Society
  • Place of Presentation: ボストン(米国)(招待講演)
  • Year and Date: 2011-10-11
• [Presentation] Templated electro- deposition of Si nanowires from ionic liquid (2011)
  • Author(s): T. Homma, J. Komadina, Y. Nakano, T. Akiyoshi, Y. Ishibashi, Y. Nishimura, T. Nishida, Y. Fukunaka
  • Organizer: 220^<th> Meeting of the Electrochemical Society
  • Place of Presentation: Boston, USA, (Invited)
  • Year and Date: 2011-10-10
• [Presentation] Electrochemical Fabrication of Functional Micro/Nano Structures (2011)
  • Author(s): T. Homma, J. Komadina, M. Kunimoto, Y. Fukunaka
  • Organizer: International Symposium on Renewable energy & Materials Tailoring
  • Place of Presentation: Kyoto, Japan
  • Year and Date: 2011-09-19
• [Presentation] ElectrochemicalFabrication of Functional Micro/Nano Structures (2011)
  • Author(s): T.Homma, J.Komadina, M.Kunimoto, Y.Fukunaka
  • Organizer: International Symposium on Renewable Energy & Materials Tailoring (REMT2011)
  • Place of Presentation: 京都大学(京都府)(招待講演)
  • Year and Date: 2011-09-17
• [Presentation] Electrochemical Fabrication of Functional Micro/Nanostructures: Process Development and Mechanistic Understandings (2010)
  • Author(s): T. Homma
  • Organizer: 218^<th> Meeting of the Electrochemical Society
  • Place of Presentation: Las Vegas, USA, Award Lecture
  • Year and Date: 2010-10-13
• [Presentation] Electrochemical Fabrication of Functional Micro/Nanostructures : Process Development and Mechanistic Understandings (2010)
  • Author(s): T.Homma
  • Organizer: The Electrochemical Society (ECS, 218th Meeting)
  • Place of Presentation: Nevada, USA(招待講演)
  • Year and Date: 2010-10-13
• [Presentation] Investigation of Electroless Deposition Process using DFT Calculation: Catalytic Effect of Metal Surface (2010)
  • Author(s): T. Homma, M. Kunimoto, R. Kinoshita, A. Otomo, H. Nakai
  • Organizer: 218^<th> Meeting of the Electrochemical Society
  • Place of Presentation: Las Vegas, USA, (Invited)
  • Year and Date: 2010-10-12
• [Presentation] 室温イオン液体を用いた電析法によるSiマイクロピラーアレイの作製 (2010)
  • Author(s): 中野悠理, 秋吉貴裕, 大内隆成, 福中康博, 本間敬之
  • Organizer: 2010年電気化学会秋季大会
  • Place of Presentation: 神奈川
  • Year and Date: 2010-09-02
• [Presentation] Electroless-deposited NiP nanoarrays for nanoimprint replicated from a SiO2 (2010)
  • Author(s): C-P. Lin, M. Saito, J. B. Ratchford, T. Homma
  • Organizer: The 7^<th> Asian Conference on Electrochemistry
  • Place of Presentation: Kumamoto, Japan
  • Year and Date: 2010-05-21
• [Presentation] Electrochemical Processing of Li and Si in Ionic Liquids (2010)
  • Author(s): T.Nishida, Y.Nishimura, Y.Nakano, T.Homma, Y.Fukunaka, et al.
  • Organizer: Gordon Research Conference
  • Place of Presentation: New Hampshire, U.S.A(招待講演)
  • Year and Date: 2010-05-08
• [Presentation] Density Functional Theory Study on the Oxidation Reactivity of Hypophosphite Ion as a Reductant for Electroless Deposition Process (2010)
  • Author(s): M. Kunimoto, H. Nakai, T. Homma
  • Place of Presentation: Vancouver, Canada
  • Year and Date: 2010-04-26
• [Presentation] Electrochemical approaches for fabrication of micro/nano scale functional structures and devices (2010)
  • Author(s): T. Homma
  • Organizer: 1^<st> Ertl Symposium on Electrochemistry and Catalysis
  • Place of Presentation: Gwangju, South Korea, (Invited)
  • Year and Date: 2010-04-16
• [Presentation] Electrochemical approaches for fabrication of micro/nano scale functional structures and devices (2010)
  • Author(s): T.Homma
  • Organizer: 1st Ertl Symposium on Electrochemistry and Catalysis
  • Place of Presentation: Gwangju, South Korea(招待講演)
  • Year and Date: 2010-04-12
• [Presentation] The electrochemical formation mechanism of silicon in nanoaqueous solvents (2009)
  • Author(s): Y. Nishimura, T. Nishida, C. Miranda, Y. Fukunaka, T. Nohira, R. Hagiwara
  • Organizer: 216^<th> Meeting of the Electrochemical Society
  • Place of Presentation: Vienna, Austria
  • Year and Date: 2009-10-07
• [Presentation] The electrochemical formation mechanism of silicon in nonaqueous solvents (2009)
  • Author(s): Y.Nishimura, C.Miranda, Y.Fukunaka, T.Nohira, R.Hagiwara
  • Organizer: 216th Meeting of the Electrochemical Society
  • Place of Presentation: Vienna, Austria
  • Year and Date: 2009-10-07
• [Presentation] Fabrication of Nanogap Electrodes using Electrodeposition Process (2009)
  • Author(s): T.Homma, C.Kobayashi, M.Saito, Y.Wakayama
  • Organizer: 216th Meeting of the Electrochemical Society
  • Place of Presentation: Vienna, Austria
  • Year and Date: 2009-10-05
• [Presentation] ウェットプロセスによる機能微細構造体の形成と応用 (2009)
  • Author(s): 本間敬之
  • Organizer: 日本化学会第3回関東支部大会
  • Place of Presentation: 新宿, 東京
  • Year and Date: 2009-09-04
• [Presentation] Fabrication of Magnetic Nanodot Array using Electrochemical Deposition Processes (2009)
  • Author(s): T. Homma, T. Ouchi, Y. Arikawa, C-P. Lin, T. Kuno, J. Mizuno, S. Shoji
  • Organizer: 60^<th> Annual Meeting of International Society of Electrochemistry
  • Place of Presentation: Beijing, China, Keynote
  • Year and Date: 2009-08-19
• [Presentation] Electrochemical Approaches for Micro and Nano Scale Fabrication of Arrayed Functional Structures (2009)
  • Author(s): T. Homma, T. Ouchi, Y. Arikawa, K. Uzawa
  • Organizer: 17^<th> Inter- national Conference on Composites or Nano Engineering
  • Place of Presentation: Honolulu, USA, (Invited)
  • Year and Date: 2009-07-28
• [Presentation] Electrochemical Characterization of Strained Si Crystal Surfaces (2009)
  • Author(s): T. Homma, K. Sakata
  • Organizer: 215^<th> Meeting of the Electrochemical Society
  • Place of Presentation: San Francisco, USA, (Invited)
  • Year and Date: 2009-05-28
• [Presentation] Electrochemical characterization of strained Si crystal surfaces (2009)
  • Author(s): T.Homma, K.Sakata
  • Organizer: 215th Meeting of the Electrochemical Society
  • Place of Presentation: San Francisco, USA
  • Year and Date: 2009-05-28
• [Presentation] Characterization and Modeling of Electroless Deposition Process using DFT Calculation (2009)
  • Author(s): T. Homma, M. Kunimoto, A. Mieno, H. Nakai
  • Organizer: 215^<th> Meeting of the Electrochemical Society
  • Place of Presentation: San Francisco, USA, (Invited)
  • Year and Date: 2009-05-26
• [Presentation] Investigation on mechanical properties of nanoimprint mold prepared by electroless NiP with SAM (2009)
  • Author(s): C.P.Lin, M.Saito, F.Kitaoka, T.Homma
  • Organizer: 電気化学会第77回講演大会
  • Place of Presentation: 富山市, 富山
  • Year and Date: 2009-03-28
• [Presentation] 置換型電解析出プロセスによるナノギャップ電極の作製 (2009)
  • Author(s): 青山裕, 吉田脩平, 小林千秋, 齋藤美紀子, 本間敬之
  • Organizer: 表面技術協会第121回講演大会
  • Place of Presentation: 武蔵野市, 東京
  • Year and Date: 2009-03-15
• [Remarks]
  • URL: http://www.sci.waseda.ac.jp/english/researchprofiles/advanced/subject07_1.html