| Project/Area Number |
21360364
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Material processing/treatments
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| Research Institution | Japan Atomic Energy Agency |
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Principal Investigator |
KAWACHI Tetsuya 独立行政法人日本原子力研究開発機構, 量子ビーム応用研究部門, 研究主幹 (40343941)
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| Co-Investigator(Kenkyū-buntansha) |
FAENOV Anatoly 独立行政法人日本原子力研究開発機構, 量子ビーム応用研究部門, リサーチフェロー (10469794)
ISHINO Masahiko 独立行政法人日本原子力研究開発機構, 量子ビーム応用研究部門, 研究副主幹 (80360410)
HASEGAWA Noboru 独立行政法人日本原子力研究開発機構, 量子ビーム応用研究部門, 研究職 (50360409)
OCHI Yoshihiro 独立行政法人日本原子力研究開発機構, 量子ビーム応用研究部門, 研究副主幹 (20370372)
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| Co-Investigator(Renkei-kenkyūsha) |
NISHIKINO Masaharu 独立行政法人日本原子力研究開発機構, 量子ビーム応用研究部門, 研究副主幹 (70370450)
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| Project Period (FY) |
2009 – 2011
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| Project Status |
Completed (Fiscal Year 2011)
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| Budget Amount *help |
¥10,140,000 (Direct Cost: ¥7,800,000、Indirect Cost: ¥2,340,000)
Fiscal Year 2011: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2010: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000)
Fiscal Year 2009: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
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| Keywords | 材料加工・処理 / 量子ビーム / 高性能レーザー / 材料加工、処理 / EUVレーザー |
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| Research Abstract |
We have quantitatively investigated the relation between the energy fluence of the EUV laser and the ablation threshold of substances and have developed key technologies toward nano-fabrication using EUV laser. We also investigated the method to increase the EUV laser power and to expand the wavelength range to shorter wavelength region.
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