The study of fundamental processes of EUV laser ablation and the application toward mask-free nano-fabrication

• Project/Area Number: 21360364
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Material processing/treatments
• Research Institution: Japan Atomic Energy Agency
• Principal Investigator: KAWACHI Tetsuya 独立行政法人日本原子力研究開発機構, 量子ビーム応用研究部門, 研究主幹 (40343941)
• Co-Investigator(Kenkyū-buntansha): FAENOV Anatoly 独立行政法人日本原子力研究開発機構, 量子ビーム応用研究部門, リサーチフェロー (10469794) ; ISHINO Masahiko 独立行政法人日本原子力研究開発機構, 量子ビーム応用研究部門, 研究副主幹 (80360410) ; HASEGAWA Noboru 独立行政法人日本原子力研究開発機構, 量子ビーム応用研究部門, 研究職 (50360409) ; OCHI Yoshihiro 独立行政法人日本原子力研究開発機構, 量子ビーム応用研究部門, 研究副主幹 (20370372)
• Co-Investigator(Renkei-kenkyūsha): NISHIKINO Masaharu 独立行政法人日本原子力研究開発機構, 量子ビーム応用研究部門, 研究副主幹 (70370450)
• Project Period (FY): 2009 – 2011
• Project Status: Completed (Fiscal Year 2011)
• Budget Amount: ¥10,140,000 (Direct Cost: ¥7,800,000、Indirect Cost: ¥2,340,000); Fiscal Year 2011: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000); Fiscal Year 2010: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000); Fiscal Year 2009: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
• Keywords: 材料加工・処理 / 量子ビーム / 高性能レーザー / 材料加工、処理 / EUVレーザー

Research Abstract

We have quantitatively investigated the relation between the energy fluence of the EUV laser and the ablation threshold of substances and have developed key technologies toward nano-fabrication using EUV laser. We also investigated the method to increase the EUV laser power and to expand the wavelength range to shorter wavelength region.

Research Products

• [Journal Article] Surface modifications of metals induced by soft x-ray laser pulse irradiations (2012)
  • Author(s): M. Ishino, A. Faenov, M. Tanaka, N. Hasegawa, M. Nishikino, S. Tamaotsu, T. Pikuz, T. Ohba, T. Kaihori and T. Kawachi
  • Journal Title: J. Micro/Nanoeng Volume: 7 Issue: 2 Pages: 147-151
  • DOI: 10.2961/jlmn.2012.02.0004
  • Peer Reviewed
• [Journal Article] Resonant photo pumping x-ray laser scheme using intense characteristic x-rays for water-window radiation generation (2011)
  • Author(s): T. Kawachi and Y. Kato
  • Journal Title: Phys. Rev. A Volume: 84 Issue: 6
  • DOI: 10.1103/physreva.84.063848
  • Peer Reviewed
• [Journal Article] Ablation of insulators under the action of short pulses of x-ray plasma lasers and free-electron lasers (2011)
  • Author(s): N. Inogamov, S. Anisimov, V. Khokhlov, A. Faenov, T. Pikuz, V. Fortov, Yu. Skobelev, Y. Kato, V. Shepelev, Y. Fukuda, M. Tanaka, M. Ishino, M. Kando, T. Kawachi, M. Kishimoto, M. Nagasono, M. Yabashi, T. Ishikawa, N. Ohashi, K. Tano, T. Togashi, Y. Senba
  • Journal Title: J. Opt. Tech Volume: 78 Issue: 8 Pages: 473-480
  • DOI: 10.1364/jot.78.000473
  • Peer Reviewed
• [Journal Article] Laser ablation of gold : Experimental and atomic simulation (2011)
  • Author(s): S. V. Starikov, V. Stegaliv, G. Norman, V. Fortov, M. Ishino, M. Tanaka, N. Hasegawa, M. Nishikino, T. Ohba, T. Kaihori, Y. Ochi, T. Imazono, T. Kawachi, S. Tamotsu, T. Pikuz, I. Skobelev and A. Faenov
  • Journal Title: JETP let. Volume: 93 Issue: 11 Pages: 642-647
  • DOI: 10.1134/s0021364011110129
  • Peer Reviewed
• [Journal Article] Interaction of short laser pulses in wavelength range from infared to x-ray with metals, semiconductors and dielectrics (2011)
  • Author(s): N. Inogamov, A. Faenov, V. Khokholov, V. Zhakhovskii, Y. Petrov, I. Skobelev, K. Nishihara, Y. Kato, M. Tanaka, T. Pikuz, M. Kishimoto, M. Ishino, M. Nishikino, Y. Fukuda, S. Bulanov, T. Kawachi, S. Anisimov and V. Fortov
  • Journal Title: Contr. plasma phys Volume: 51 Issue: 4 Pages: 361-366
  • DOI: 10.1002/ctpp.201010103
  • Peer Reviewed
• [Journal Article] Nanoscale surface modifications and formation of conical structures at aluminum surface induced by single shot exposure of soft x-ray laser pulse (2011)
  • Author(s): M. Ishino, A. Faenov, M. Tanaka, N. Hasegawa, M. Nishikino, S. Tamotsu, T. A. Pikuz, N. A. Inogamov, V. V. Zhakhovsky, I. Yu. Skobelev, V. E. Fortov, V. A. Khohlov, V. V. Shepelev, T. Ohba, T. Kaihori, Y. Ochi, T. Imazono, T. Kawachi
  • Journal Title: J. Appl. Phys Volume: 109 Issue: 1 Pages: 13504-13509
  • DOI: 10.1063/1.3525980
  • Peer Reviewed
• [Journal Article] Two-temperature warm dense matter produced by ultrashort extreme vacuum ultraviolet free electron laser (EUV-FEL) pulse (2011)
  • Author(s): N.Inogamov, A.Faenov, V.Zhakhovsky, T.Pikuz, I.Skobelev, Yu.Petrov, V.Khokhlov, V.Shepelev, S.Anismov, V.Fortov, Y.Fukuda, M.Kando, T.Kawachi, M.Nagasono, H.Ohashi, M.Yabashi, K.Tono, Y.Senba, T.Togashi, T.Ishikawa
  • Journal Title: Contrib.Plasma Phys. Volume: 51 Pages: 419-426
  • Peer Reviewed
• [Journal Article] Source development and novel applications of laser-driven plasma x-ray lasers in JAEA (2011)
  • Author(s): T.Kawachi, M.Kishimoto, M.Kado, Y.Ochi, N.Hasegawa, M.Tanaka, M.Nishikino, M.Ishino, T.Imazono, T.Ohba, T.Kaihori, M.Koike, K.Namikawa, T.Suemoto, K.Terakawa, T.Tomita, N.Sarukura, H.Nishimura, A.Faenov, S.Bulanov, A.Y.Faenov, T.Pikuz, H.Daido
  • Journal Title: X-ray lasers (Springer proceedings in physics) Volume: 136 Pages: 12-19
  • Peer Reviewed
• [Journal Article] Spallative Ablation of Metals and Dielectrics (2011)
  • Author(s): N.Inogamov, A.Faenov, V.Khokholov, V.Zhakhovskii, Y.Petrov, I.Skobelev, K.Nishihara, Y.Kato, M.Tanaka, T.Pikuz, M.Kishimoto, M.Ishino, M.Nishikino, Y.Fukuda, S.Bulanov, T.Kawachi, S.Anisimov, V.Fortov
  • Journal Title: Contribution of plasma physics Volume: 51 Pages: 361-366
  • Peer Reviewed
• [Journal Article] Source development and novel applications of laser-driven plasma x-ray lasers in JAEA (2010)
  • Author(s): T. Kawachi, M. Kishimoto, M. Kado, Y. Ochi, N. Hasegawa, M. Tanaka, M. Nishikino, M. Ishino, T. Imazono, T. Ohba, T. Kaihori, M. Koike, K. Namikawa, T. Suemoto, K. Terakawa, T. Tomita, H. Nishimura, A. Faenov, and S. Bulanov
  • Journal Title: X-ray lasers Volume: 136 Pages: 12-19
  • URL: http://www.springer.com/physics/atomic,+molecular,+optical+%26+plasma+physics/book/978-94-007-1185-3
  • Peer Reviewed
• [Journal Article] プラズマ軟X線レーザーとその応用 (2010)
  • Author(s): 河内哲哉
  • Journal Title: レーザー研究 Volume: 38 Pages: 91-95
  • NAID: 10027617582
  • URL: http://www.lsj.or.jp/laser/38/38-12.pdf
  • Peer Reviewed
• [Journal Article] Spallative ablation of dielectrics by X-ray laser (2010)
  • Author(s): N. Inogamov, V. V. Zhakhovsky, A. Y. Faenov, V. A. Khokhlov, I. Y. Skobelev, Y. Kato, M. Tanaka, T. A. Pikuz, M. Ishino, M. Nishikino, Y. Fukuda, S. V. Bulanov, T. Kawachi, Y. V. Petrov, S. I. Anisimov, V. E. Fortov
  • Journal Title: Appl. Phys. A Volume: 101 Pages: 87-96
  • Peer Reviewed
• [Journal Article] Nanoscale surface modifications and formation of conical structures at aluminum surface induced by single shot exposure of soft x-ray laser pulse (2010)
  • Author(s): M.Ishino, A.Ya.Faenov, M.Tanaka, N.Hasegawa, M.Nishikino, S.Tamotsu, T.A.Pikuz, N.A.Inogamov, V.V.Zhakhovsky, I.Yu.Skobelev, V.E.Fortov, V.A.Khohlov, V.V.Shepelev, T.Ohba, T.Kaihori, Y.Ochi, T.Imazono, T.Kawachi
  • Journal Title: J.Applied Physics Volume: 109 Pages: 13504-13509
  • Peer Reviewed
• [Journal Article] Spallative ablation of dielectrics by X-ray laser (2010)
  • Author(s): N.A.Inogamov, V.V.Zhakhovsky, A.Y.Faenov, V.A.Khokhlov, V.V.Shepelev, I.Y.Skobelev, Y.Kato, M.Tanaka, T.A.Pikuz, M.Kishimoto, M.Ishino, M.Nishikino, Y.Fukuda, S.V.Bulanov, T.Kawachi, Y.V.Petrov, S.I.Anisimov, V.E.Fortov
  • Journal Title: Applied Physics A Volume: 101 Pages: 87-96
  • Peer Reviewed
• [Journal Article] Metrology of Wide Field of View Nano-Thickness Foils' Homogeneity by Conventional and Phase Contrast Soft X-ray Imaging (2010)
  • Author(s): A.Faenov, T.Pikuz, Y.Fukuda, M.kando, H.Kotaki, T.Homma, K.Kawase, I Skobelev, S.Gasilov, T.Kawachi, H.Daido, T.Tajima, Y.Kato, S.Bulanov
  • Journal Title: Japanese J.Applied Physics Volume: 49
  • Peer Reviewed
• [Journal Article] Spallative Ablation of Metals and Dielectrics (2009)
  • Author(s): N. Inogamov, A. Faenov, V. Khokholov, V. Zhakhovskii, Y. Petrov, I. Skobelev, K. Nishihara, Y. Kato, M. Tanaka, T. Pikuz, M. Kishimoto, M. Ishino, M. Nishikino, Y. Fukuda, S. Bulanov, T. Kawachi, S. Anisimov and V. Fortov
  • Journal Title: Contr. plasma phys Volume: 49 Issue: 7-8 Pages: 455-466
  • DOI: 10.1002/ctpp.200910045
  • Peer Reviewed
• [Journal Article] レーザー駆動プラズマ軟X線レーザーの開発とその応用 (2009)
  • Author(s): 河内哲哉
  • Journal Title: レーザー研究 Volume: 37 Pages: 101-105
  • NAID: 10026195619
  • URL: http://www.lsj.or.jp/laser/37/ab37-12.pdf
  • Peer Reviewed
• [Journal Article] Wide-field-of-view phase contrast imaging of nanostructure with a comparatively large polychromatic soft x-ray plasma source (2009)
  • Author(s): S. Gasilov, A. Faenov, T. Pikuz, Y. Fukuda, M. Kando, T. Kawachi, I. Skobelev, Y. Kato and S. Bulanov
  • Journal Title: Opt. Lett Volume: 34 Issue: 21 Pages: 3268-3270
  • DOI: 10.1364/ol.34.003268
  • Peer Reviewed
• [Journal Article] Propagation-based phase contrast enhance-ment of nanostructure images using a debris free femto second laser driven cluster based plasma soft x-ray source and a LiF crystal detector (2009)
  • Author(s): T. Pikuz, A. Faenov, S. Gasilov, I. Skobelev, Y. Fukuda, M. Kando, H. Kotaki, T. Homma, K. Kawase, Y. Hayashi, T. Kawachi, H. Daido, Y. Kato and S. Bulanov
  • Journal Title: Appl. Opt Volume: 48 Issue: 32 Pages: 6271-6276
  • DOI: 10.1364/ao.48.006271
  • Peer Reviewed
• [Journal Article] Source Development and Novel Applications of X-ray Lasers for Probing Materials (2009)
  • Author(s): T. Kawachi, M. Kishimoto, M. Kado, Y. Ochi, N. Hasegawa, M. Tanaka, M. Nishikino, M. Ishino, T. Imazono, T. Ohba, T. Kaihori, M. Koike, K. Namikawa, T. Suemoto, K. Terakawa, T. Tomita, N. Sarukura, H. Nishimura, A. Faenov, S. Bulanov and H. Daido
  • Journal Title: SPIE Volume: 7451 Pages: 745107-745107
  • DOI: 10.1117/12.825662
  • Peer Reviewed
• [Journal Article] Low threshold ablation of dielectrics irradiated by pico-second soft x-ray laser pulses (2009)
  • Author(s): A. Y. Faenov, N. Inogamov, V. Zhakhovskii, V. Khokhlov, K. Nishihara, Y. Kato, M. Tanaka, T. Pikuz, M. Nishikino, M. Ishino, T. Nakamura, Y. Fukuda, S. Bulanov and T. Kawachi
  • Journal Title: Appl. Phys. Lett Volume: 94 Issue: 23 Pages: 231107-231107
  • DOI: 10.1063/1.3152290
  • Peer Reviewed
• [Journal Article] Low threshold ablation of dielectrics irradiated by pico-second soft x-ray laser pulses (2009)
  • Author(s): A.Faenov, et al.
  • Journal Title: Applied Physics Letters 94
  • Peer Reviewed
• [Journal Article] Source Development and Novel Applications of X-ray Lasers for Probing Materials (2009)
  • Author(s): T.Kawachi, et al.
  • Journal Title: SPIE, Soft X-Ray Lasers and Applications VIII 7451
  • Peer Reviewed
• [Journal Article] Propagation-based phase-contrast enhancement of nanostructure images using a debris-free femtosecond-laser-driven cluster-based plasma soft x-rav source and a LiF crystal detector (2009)
  • Author(s): T.Pikuz, et al.
  • Journal Title: Applied Optics 48 Pages: 6271-6276
  • Peer Reviewed
• [Journal Article] Wide-field-of-view phase contrast imaging of nanostructure with a comparatively large polychromatic soft x-ray plasma source (2009)
  • Author(s): S.Gasilov, et al.
  • Journal Title: Optics letters 34 Pages: 3268-3270
  • Peer Reviewed
• [Journal Article] Enhancement of soft x-ray emission from fs laser plasma by using mixture of molecule and atomic gases as cluster jet targets and its application for nanostructure imaging (2009)
  • Author(s): T.Pikuz, et al.
  • Journal Title: Journal of Physics : conference series 163
  • Peer Reviewed
• [Journal Article] Spallative Ablation of Metals and Dielectrics (2009)
  • Author(s): N.Inogamov, et al.
  • Journal Title: Contribution to plasma physics 49 Pages: 455-466
  • Peer Reviewed
• [Journal Article] レーザー駆動プラズマ軟X線レーザーの開発とその応用 (2009)
  • Author(s): 河内哲哉
  • Journal Title: レーザー学会誌 レーザー研究 37 Pages: 854-858
  • NAID: 10026195619
  • Peer Reviewed
• [Presentation] The near field and far field in situ characterization of soft x-ray laser beam by submicrometer-resolution LiF crystal x-ray detector (2012)
  • Author(s): Faenov, 等
  • Organizer: The 1st Advanced Lasers and Plasma Sources
  • Place of Presentation: 横浜、日本
  • Year and Date: 2012-04-26
• [Presentation] 軟X線レーザーを用いたフェムト秒レーザーアブレーションの時間分解測定法の開発 (2011)
  • Author(s): 長谷川, 等
  • Organizer: プラズマ物理学会
  • Place of Presentation: 石川県、日本
  • Year and Date: 2011-12-22
• [Presentation] Nano-meter scale structure of gold surface induced by soft x-ray laser pulse (2011)
  • Author(s): 石野, 等
  • Organizer: 平成23年度レーザー励起X線源とその応用研究会
  • Place of Presentation: 浜松、日本
  • Year and Date: 2011-12-09
• [Presentation] Coherent X-ray Mirage (2011)
  • Author(s): Ishino, 等
  • Organizer: SPIE 2011 Optics and Photonics
  • Place of Presentation: San Diego, USA(招待講演)
  • Year and Date: 2011-08-22
• [Presentation] Novel applications using x-ray lasers (2011)
  • Author(s): M.Nishikino, et al.
  • Organizer: JSPS Asian Core Workshop on Next Generation Ultra Short Pulse Lasers for High Field and Ultrafast Science
  • Place of Presentation: 和光市(理研)(招待講演)
  • Year and Date: 2011-03-03
• [Presentation] Coherent X-ray Mirage (2011)
  • Author(s): M. Ishino, et al.
  • Organizer: SPIE 2011 Optics and Photonics
  • Place of Presentation: San Diego, USA
• [Presentation] Novel applications using x-ray lasers (2011)
  • Author(s): M. Nishikino, et al.
  • Organizer: JSPS Asian Core Workshop on Next Generation Ultra Short Pulse Lasers for High Field and Ultrafast Science
  • Place of Presentation: 和光市
• [Presentation] Development and applications of plasma x-ray lasers in JAEA (2010)
  • Author(s): 錦野, 等
  • Organizer: 平成22年度レーザープラズマ粒子加速研究会
  • Place of Presentation: 浜松(光産業創成大学院大学)
  • Year and Date: 2010-12-06
• [Presentation] Source development and novel applications of laser-driven plasma x-ray lasers in JAEA (2010)
  • Author(s): M.Kado, et al.
  • Organizer: POEM 2010, Laser technology and applications
  • Place of Presentation: 中国、武漢(招待講演)
  • Year and Date: 2010-11-05
• [Presentation] Development and application of plasma x-ray lasers (2010)
  • Author(s): M.Nishikino, et al.
  • Organizer: The 6^<th> asian symposium on intense laser science
  • Place of Presentation: 中国、北京(口頭発表)
  • Year and Date: 2010-10-15
• [Presentation] EUVレーザーによる固体のアブレーションしきい値の観測 (2010)
  • Author(s): 河内, 等
  • Organizer: 第65回日本物理学会
  • Place of Presentation: 大阪(大阪市大)
  • Year and Date: 2010-09-23
• [Presentation] 軟X線レーザーを集光照射した金属表面の観察 (2010)
  • Author(s): 石野, 等
  • Organizer: 第71回応用物理学会学術講演会
  • Place of Presentation: 長崎(長崎大学)
  • Year and Date: 2010-09-19
• [Presentation] ピコ秒EUVレーザー照射による低アブレーションしきい値の観察 (2010)
  • Author(s): 河内, 等
  • Organizer: 第71回応用物理学会学術講演会
  • Place of Presentation: 長崎(長崎大学)
  • Year and Date: 2010-09-14
• [Presentation] Low threshold ablation of dielectrics irradiated by picoseconds soft x-ray laser pulse. Observation and modeling (2010)
  • Author(s): A.Faenov, et al.
  • Organizer: The 12^<th> international conference on x-ray lasers
  • Place of Presentation: 韓国、光州市(口頭発表)
  • Year and Date: 2010-06-02
• [Presentation] Source development and novel applications of laser-driven plasma x-ray lasers in JAEA (2010)
  • Author(s): T.Kawachi, et al.
  • Organizer: The 12^<th> international conference on x-ray lasers
  • Place of Presentation: 韓国、光州市(招待講演)
  • Year and Date: 2010-05-31
• [Presentation] Low-threshold ablation of dielectrics irradiated by ultrashort soft x-ray laser pulses, Observation and modeling (2010)
  • Author(s): A.Faenov
  • Organizer: 第16回FELとHigh power radiation研究会
  • Place of Presentation: 播磨(SPring-8)
  • Year and Date: 2010-03-05
• [Presentation] Applications of laser driven plasma x-ray laser in JAEA(招待講演) (2010)
  • Author(s): Yoshihiro Ochi, et al.
  • Organizer: レーザー共同研究所設立記念国際シンポジウム
  • Place of Presentation: 敦賀市
  • Year and Date: 2010-02-18
• [Presentation] Development and application of plasma x-ray lasers (2010)
  • Author(s): M. Nishikino, et al.
  • Organizer: The 6^<th> asian symposium on intense laser science(ASILS6)
  • Place of Presentation: Beijing, China
• [Presentation] EUVレーザーによる固体のアブレーションしきい値の観測 (2010)
  • Author(s): 河内等
  • Organizer: 第65回日本物理学会
  • Place of Presentation: 大阪
• [Presentation] 軟X線レーザーを集光照射した金属表面の観察 (2010)
  • Author(s): 石野等
  • Organizer: 第71回応用物理学会学術講演会
  • Place of Presentation: 長崎
• [Presentation] ピコ秒EUVレーザー照射による低アブレーションしきい値の観察 (2010)
  • Author(s): 河内等
  • Organizer: 第71回応用物理学会学術講演会
  • Place of Presentation: 長崎
• [Presentation] Low threshold ablation of dielectrics irradiated by picoseconds soft x-ray laser pulse. Observation and modeling (2010)
  • Author(s): A. Faenov, et al
  • Organizer: The 12^<th> international conference on x-ray lasers
  • Place of Presentation: Gwangju, Korea
• [Presentation] Source development and novel applications of laser-driven plasma x-ray lasers in JAEA (2010)
  • Author(s): T. Kawachi, et al
  • Organizer: The 12^<th> international conference on x-ray lasers
  • Place of Presentation: Gwangju, Korea
• [Presentation] Low-threshold ablation of dielectrics irradiated by ultrashort soft x-ray laser pulses, Observation and modeling (2010)
  • Author(s): A. Faenov, et al
  • Organizer: 第16回FELとHigh power radiation研究会
  • Place of Presentation: 播磨
• [Presentation] Applications of laser driven plasma x-ray laser in JAEA (2010)
  • Author(s): Y. Ochi, et al
  • Organizer: レーザー共同研究所設立記念国際シンポジウム
  • Place of Presentation: 敦賀市
• [Presentation] Laser driven plasma x-ray lasers and the applications(招待講演) (2009)
  • Author(s): Tetsuya Kawachi, et al.
  • Organizer: The 5th Asian Symposium on Intense laser Science
  • Place of Presentation: ベトナム、ハノイ市
  • Year and Date: 2009-12-04
• [Presentation] Source Development and Novel Applications of X-ray Lasers for Probing Materials(招待講演) (2009)
  • Author(s): Tetsuya Kawachi, et al.
  • Organizer: SPIE Photonics and Optics
  • Place of Presentation: 米国、サンディエゴ市
  • Year and Date: 2009-08-07
• [Presentation] Laser driven plasma x-ray lasers and the applications (2009)
  • Author(s): T. Kawachi, et al
  • Organizer: The 5th Asian Symposium(ASILS5)
  • Place of Presentation: Vietnum, Hanoi
• [Presentation] Source Development and Novel Appli-cations of X-ray Lasers for Probing Materials (2009)
  • Author(s): T. Kawachi, et al
  • Organizer: SPIE Photonics and Optics
  • Place of Presentation: San Diego, USA