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PREPARATION OF FILMS WITH NANO POROUS STRUCTURES BY GAS-PHASE PLASMA SYNTHESIS AND TRANSPORT CONTROL OF HIGHLY-DISPERSED NANOPARTICLES

Research Project

Project/Area Number 21360380
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Properties in chemical engineering process/Transfer operation/Unit operation
Research InstitutionHiroshima University

Principal Investigator

SHIMADA Manabu  広島大学, 大学院・工学研究院, 教授 (70178953)

Co-Investigator(Renkei-kenkyūsha) ISOMOTO Yoshinori  広島大学, 大学院・工学研究院, 准教授 (40127626)
Project Period (FY) 2009 – 2011
Project Status Completed (Fiscal Year 2011)
Budget Amount *help
¥17,550,000 (Direct Cost: ¥13,500,000、Indirect Cost: ¥4,050,000)
Fiscal Year 2011: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Fiscal Year 2010: ¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2009: ¥9,880,000 (Direct Cost: ¥7,600,000、Indirect Cost: ¥2,280,000)
Keywordsナノ材料 / 薄膜・微粒子形成操作 / 微粒子移動操作 / 非凝集粒子 / 堆積
Research Abstract

Thin films having pores at a nano scale level are expected to show useful functions. In this study, we aimed at developing a novel gas-phase process for preparing such porous films. The particle synthesis in gas followed by their transport to and deposition on a substrate was experimentally investigated. Films with a uniform nano porous structure were found to be prepared by using non-agglomerated nanoparticles. The effects of particle size and agglomeration, deposition conditions, and heat treatment to the films were also clarified, leading to obtaining the directions for controlling the preparation of porous films

Report

(4 results)
  • 2011 Annual Research Report   Final Research Report ( PDF )
  • 2010 Annual Research Report
  • 2009 Annual Research Report
  • Research Products

    (19 results)

All 2012 2011 2010 2009

All Journal Article (4 results) (of which Peer Reviewed: 4 results) Presentation (15 results)

  • [Journal Article] Synthesis of Gallium Nitride Nanoparticles by Microwave Plasma Enhanced Chemical Vapor Deposition Method2010

    • Author(s)
      Manabu Shimada, Wei-Ning Wang and Kikuo Okuyama
    • Journal Title

      Chem. Vap. Deposition

      Volume: 16巻 Pages: 151-156

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Synthesis of Gallium Nitride Nanoparticles by Microwave Plasma Enhanced Chemical Vapor Deposition Method2010

    • Author(s)
      島田学
    • Journal Title

      Chem.Vap.Deposition (掲載決定)

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 高周波非平衡プラズマ中の微粒子の計測と制御2009

    • Author(s)
      島田学
    • Journal Title

      J. Vacuum Soc. Japan

      Volume: 52巻 Pages: 484-490

    • NAID

      10025583995

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] 高周波非平衡プラズマ中の微粒子の計測と制御2009

    • Author(s)
      島田学
    • Journal Title

      J.Vacuum Soc.Japan 52・9

      Pages: 484-490

    • NAID

      10025583995

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Presentation] 気固原料CVDによる複合膜合成条件の検討2012

    • Author(s)
      唐崎健太郎, 山本洋彰, 島田学
    • Organizer
      化学工学会第77年会
    • Place of Presentation
      東京都
    • Year and Date
      2012-03-16
    • Related Report
      2011 Annual Research Report 2011 Final Research Report
  • [Presentation] ナノ粒子による気相薄膜形成に及ぼす堆積条件の影響2012

    • Author(s)
      萬谷勇樹, 石原悠, 島田学
    • Organizer
      第14回化学工学会学生発表会
    • Place of Presentation
      宇部市
    • Year and Date
      2012-03-03
    • Related Report
      2011 Annual Research Report 2011 Final Research Report
  • [Presentation] 基板上付着微粒子による水分介在汚染現象2011

    • Author(s)
      棚橋克臣, 中西雅教, 島田学, 長池宏史, 守屋剛
    • Organizer
      化学工学会第43回秋季大会
    • Place of Presentation
      名古屋市
    • Year and Date
      2011-09-16
    • Related Report
      2011 Annual Research Report 2011 Final Research Report
  • [Presentation] 非凝集ナノサイズ粒子の気相堆積による薄膜構造の形成2011

    • Author(s)
      石原悠, 飯田大樹, 島田学
    • Organizer
      化学工学会第43回秋季大会
    • Place of Presentation
      名古屋市
    • Year and Date
      2011-09-16
    • Related Report
      2011 Annual Research Report 2011 Final Research Report
  • [Presentation] 基板表面の水分析出汚染現象に及ぼす沈着微粒子の影響2011

    • Author(s)
      棚橋克臣, 中西雅教, 島田学, 長池宏史, 守屋剛
    • Organizer
      第28回エアロゾル科学・技術研究討論会
    • Place of Presentation
      堺市
    • Year and Date
      2011-08-29
    • Related Report
      2011 Annual Research Report 2011 Final Research Report
  • [Presentation] Defect Grown from aFine Particle as Its Nucleus on a Si Wafer2010

    • Author(s)
      Hiroshi Nagaike, Tsuyoshi Moriya, Manabu Shimada, Keigo Nakashima and Katsuomi Tanahashi
    • Organizer
      International Symposium on Contamination Control 2010
    • Place of Presentation
      東京都
    • Year and Date
      2010-10-07
    • Related Report
      2011 Final Research Report
  • [Presentation] Defect Grown from a Fine Particle as Its Nucleus on a Si Wafer2010

    • Author(s)
      Shimada, M.
    • Organizer
      International Symposium on Contamination Control 2010
    • Place of Presentation
      東京都
    • Year and Date
      2010-10-07
    • Related Report
      2010 Annual Research Report
  • [Presentation] 粒子原料導入プラズマCVD法によるナノ複合材料の合成2010

    • Author(s)
      山本洋彰, 島田学
    • Organizer
      化学工学会第42回秋季大会
    • Place of Presentation
      京都市
    • Year and Date
      2010-09-08
    • Related Report
      2011 Final Research Report 2010 Annual Research Report
  • [Presentation] ナノクラスターの気相堆積で形成される薄膜構造の評価2010

    • Author(s)
      飯田大樹, 島田学
    • Organizer
      化学工学会第42回秋季大会
    • Place of Presentation
      京都市
    • Year and Date
      2010-09-08
    • Related Report
      2011 Final Research Report 2010 Annual Research Report
  • [Presentation] Plasma Synthesis of Composite Films Using Gaseousand Aerosol Precursors2010

    • Author(s)
      Manabu Shimada, Akiko Tao, HiroakiYamamoto and Wei-Ning Wang
    • Organizer
      2010 International Aerosol Conference(IAC2010)
    • Place of Presentation
      Helsinki, Finland
    • Year and Date
      2010-08-31
    • Related Report
      2011 Final Research Report
  • [Presentation] Plasma Synthesis of Composite Films Using Gaseous and Aerosol Precursors2010

    • Author(s)
      Shimada, M.
    • Organizer
      2010 International Aerosol Conference(IAC 2010)
    • Place of Presentation
      Helsinki, Finland
    • Year and Date
      2010-08-31
    • Related Report
      2010 Annual Research Report
  • [Presentation] ナノクラスターの連続堆積による薄膜の形成過程2010

    • Author(s)
      飯田大樹, 島田学
    • Organizer
      第27回エアロゾル科学・技術研究討論会
    • Place of Presentation
      名古屋市
    • Year and Date
      2010-08-05
    • Related Report
      2011 Final Research Report 2010 Annual Research Report
  • [Presentation] ナノサイズクラスターの堆積による表面形態の形成過程2009

    • Author(s)
      村上詩織, 飯田大樹, 島田学
    • Organizer
      化学工学会第41回秋季大会
    • Place of Presentation
      東広島市
    • Year and Date
      2009-09-17
    • Related Report
      2011 Final Research Report 2009 Annual Research Report
  • [Presentation] RF非平衡プラズマ場を用いた高分散ナノ粒子合成プロセス2009

    • Author(s)
      小坂知徳, 島田学
    • Organizer
      化学工学会第41回秋季大会
    • Place of Presentation
      東広島市
    • Year and Date
      2009-09-17
    • Related Report
      2011 Final Research Report 2009 Annual Research Report
  • [Presentation] プラズマ中エアロゾル粒子を用いた複合薄膜の合成2009

    • Author(s)
      田尾亜紀子, 汪偉寧, 島田学
    • Organizer
      第26回エアロゾル科学・技術研究討論会
    • Place of Presentation
      岡山市
    • Year and Date
      2009-08-20
    • Related Report
      2011 Final Research Report 2009 Annual Research Report

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Published: 2009-04-01   Modified: 2016-04-21  

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