| Budget Amount *help |
¥17,550,000 (Direct Cost: ¥13,500,000、Indirect Cost: ¥4,050,000)
Fiscal Year 2011: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Fiscal Year 2010: ¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2009: ¥9,880,000 (Direct Cost: ¥7,600,000、Indirect Cost: ¥2,280,000)
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| Research Abstract |
Thin films having pores at a nano scale level are expected to show useful functions. In this study, we aimed at developing a novel gas-phase process for preparing such porous films. The particle synthesis in gas followed by their transport to and deposition on a substrate was experimentally investigated. Films with a uniform nano porous structure were found to be prepared by using non-agglomerated nanoparticles. The effects of particle size and agglomeration, deposition conditions, and heat treatment to the films were also clarified, leading to obtaining the directions for controlling the preparation of porous films
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