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Proposal of multifunct ional actuator operated by surface acoustic wave for micro total analysis system

Research Project

Project/Area Number 21510131
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Microdevices/Nanodevices
Research InstitutionHyogo Prefectural Institute of Technology

Principal Investigator

SAIKI Tsunemasa  兵庫県立工業技術センター, 環境・バイオ部, 主任研究員 (80470227)

Co-Investigator(Renkei-kenkyūsha) UTSUMI Yuichi  兵庫県立大学高度産業科学技術研究所, 教授 (80326298)
KURAMOTO Kei  兵庫県立大学, 工学部大学院研究科, 准教授 (70524627)
Project Period (FY) 2009 – 2011
Project Status Completed (Fiscal Year 2011)
Budget Amount *help
¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2011: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2010: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2009: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Keywords弾性表面波 / 流体 / アクチュエーター / MEMS / 数値計算 / μTAS / ニオブ酸リチウム / 液体 / アクチュエータ / 分析システム
Research Abstract

Recently, micro total analysis systems(μTAS) have received a lot of attention for its efficiency in producing reactions and in reducing the used amount of reagents. In the area ofμTAS, s urface acoustic wave(SAW) actuators, because of their very simple structures, have studied. T he SAW is generated from an inter digital transduc er(IDT). We thus investigated t he relationship between IDT's shape s and liquid flows, in order to optimize the SAW actua tors. It was found that optimized IDT's pitch depends on viscosity of liquid. Then, in order to support de sign of the SAW actuators, we investigated the physical mechanism of the liquid flow by using numerical analysis of the moving parti cle semi-im plicit method. It was proven that the liquid flow is caused by t he energy of the SAW and is affected by the visco sity of the liquid and interaction between the liquid and a waved plate of a substance. Finally, on the knowledge obtained b y the experiment and the analysis, a micro chip for mixing and reacting 2 solutions was designed and fabricated. T he local and rapid mixing of conti nuous liquid flow was found to be pos sible by using the chip.

Report

(4 results)
  • 2011 Annual Research Report   Final Research Report ( PDF )
  • 2010 Annual Research Report
  • 2009 Annual Research Report
  • Research Products

    (31 results)

All 2012 2011 2010 2009

All Journal Article (11 results) (of which Peer Reviewed: 11 results) Presentation (20 results)

  • [Journal Article] 弾性表面波駆動の流体アクチュエータを用いた高効率混合チップ2012

    • Author(s)
      才木常正、内海裕一
    • Journal Title

      電気学会論文誌C

      Volume: 132(1) Pages: 70-76

    • NAID

      10030528942

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] ニオブ酸リチウムの延性モード切削に関する研究2012

    • Author(s)
      静弘生、奥田孝一、布引雅之、李偉、稲岡孝信、才木常正、内海裕一
    • Journal Title

      砥粒加工学会誌

      Volume: 56 Pages: 118-123

    • NAID

      10030194713

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Highly Efficient Liquid Flow Actuator Operated by Surface Acoustic Waves2011

    • Author(s)
      Tsunemasa Saiki, et al
    • Journal Title

      Electronics and Communications in Japan

      Volume: 94 Pages: 10-16

    • NAID

      210000166133

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 弾性表面波駆動の流体アクチュエータを用いた高効率混合チップ2011

    • Author(s)
      才木常正, 他
    • Journal Title

      電気学会論文誌C

      Volume: 132 Pages: 70-76

    • NAID

      10030528942

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Micro Liquid Rotor O pera ted by Surface-acoustic-wave2010

    • Author(s)
      Tsunemasa Saiki、Katsuhide Okada、Yuichi Utsumi
    • Journal Title

      Micro System Technology

      Volume: 16 Pages: 1589-1594

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] 弾性表面波を用いた高効率連続流体駆動アクチュエータ2010

    • Author(s)
      才木常正、岡田勝英、内海裕一
    • Journal Title

      電気学会論文誌C

      Volume: 130 Pages: 1717-1722

    • NAID

      10026693963

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Japan Astrobiology Mars Project(JAMP): Search for microbes on the Mars surface with special interest in methane-oxidizing bacteria2010

    • Author(s)
      Akihiko Yamagishi、Shin-ichi Yokobori、Yoshitaka Yoshimura、Masamichi Yamashita、Hirofumi Hashimoto、Takaha shi Kubota、Hajime Yano、J unichi Haruyama、M akoto Tabata、K ensei Kobayashi, Hajime Honda、Yuichi Utsumi、Tsunemasa Saiki、T akashi Itoh、Atsuo Miyakawa、Kenji
    • Journal Title

      Biological Sciences in Space

      Volume: 24 Pages: 67-82

    • NAID

      10027810862

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Micro Liquid Rotor Operated by Surface -acoustic-wave2010

    • Author(s)
      Tsunemasa Saiki, et al.
    • Journal Title

      Micro System Technology

      Volume: 16 Pages: 1589-1594

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 弾性表面波を用いた高効率連続流体駆動アクチュエータ2010

    • Author(s)
      才木常正, 他
    • Journal Title

      電気学会論文誌 C分冊

      Volume: 130 Pages: 1717-1722

    • NAID

      10026693963

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Japan Astrobiology Mars Project(JAMP) : Search for microbes on the Mars surface with special interest in methane-oxidizing bacteria2010

    • Author(s)
      Tsunemasa Saiki, et al.
    • Journal Title

      Biological Sciences in Space

      Volume: 24 Pages: 67-82

    • NAID

      10027810862

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 弾性表面波を用いた新規微小液体ローターの作製と特性評価2009

    • Author(s)
      才木常正, 他
    • Journal Title

      電気学会論文誌 C分冊 129

      Pages: 219-224

    • NAID

      10023999579

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Presentation] Reflected Surface Acoustic Wave Actuator Us ing Micro Groove2011

    • Author(s)
      Tsunemasa Saiki、H ikaru Tomita、H iroo Shizuka、K oichi Okuda、Kazusuke Maenaka、Yuichi Utsumi
    • Organizer
      37th International Conference on Micr o and Nano Engineering
    • Place of Presentation
      Berliner Congress Center、Berlin、Germany
    • Year and Date
      2011-09-19
    • Related Report
      2011 Final Research Report
  • [Presentation] Reflected Surface Acoustic Wave Actuator Using Micro Groove2011

    • Author(s)
      T.Saiki, H.Tomita, H.Shizuka, K.Okuda, K.Maenaka, Y.Utsumi
    • Organizer
      37th International Conference on Micro and Nano Engineering (MNE2011)
    • Place of Presentation
      The bcc Berliner Congress Center, Berlin, Germany
    • Year and Date
      2011-09-19
    • Related Report
      2011 Annual Research Report
  • [Presentation] Study on Powder Transport Using Surface Ac oustic Wave Actuator2011

    • Author(s)
      Hikaru Tomita、Tsunemasa Saiki、Nozomu Araki、Hiroyuki Ishigaki、Yuichi Utsumi
    • Organizer
      9th International Workshop on High Aspect Ratio Micro Structure Technology
    • Place of Presentation
      Ambassador hotel、HsinChu, Taiwan
    • Year and Date
      2011-06-12
    • Related Report
      2011 Final Research Report
  • [Presentation] High Efficiency Microfluidic Reactor Chip Operated Only Using Surface Acoustic Wave2011

    • Author(s)
      Tsunemasa Saiki、T sukasa Azeta、Kei Kuramoto、Yuichi Utsumi
    • Organizer
      9th International Workshop on High Aspect Ratio Micro Structure Technology
    • Place of Presentation
      Ambassador hotel、HsinChu, Taiwan
    • Year and Date
      2011-06-12
    • Related Report
      2011 Final Research Report
  • [Presentation] Study on Powder Transport Using Surface Acoustic Wave Actuator2011

    • Author(s)
      H.Tomita, T.Saiki, N.Araki, H.Ishigaki, Y.Utsumi
    • Organizer
      9th International Workshop on High Aspect Ratio Micro Structure Technology (HARMST2011)
    • Place of Presentation
      Ambassador hotel, HsinChu, Taiwan
    • Year and Date
      2011-06-12
    • Related Report
      2011 Annual Research Report
  • [Presentation] High Efficiency Microfluidic Reactor Chip Operated Only Using Surface Acoustic Wave2011

    • Author(s)
      T.Saiki, T.Azeta, K.Kuramoto, Y.Utsumi
    • Organizer
      9th International Workshop on High Aspect Ratio Micro Structure Technology (HARMST2011)
    • Place of Presentation
      Ambassador hotel, HsinChu, Taiwan
    • Year and Date
      2011-06-12
    • Related Report
      2011 Annual Research Report
  • [Presentation] 弾性表面波アクチュエータを用いた粉体輸送に関する研究2011

    • Author(s)
      冨田光、甲本武士、才木常正、荒木望、内海裕一、石垣博之
    • Organizer
      平成23年電気学会全国大会
    • Place of Presentation
      大阪大学豊中キャンパス
    • Year and Date
      2011-03-16
    • Related Report
      2011 Final Research Report
  • [Presentation] 弾性表面波による超小型高効率反応器に関する研究2011

    • Author(s)
      畔田吏、甲本武士、才木常正、内海裕一
    • Organizer
      2011年度精密工学会春季大会学術講演会
    • Place of Presentation
      東洋大学白山キャンパス
    • Year and Date
      2011-03-14
    • Related Report
      2011 Final Research Report
  • [Presentation] SAWデバイスによる液体輸送現象の理論的検討2010

    • Author(s)
      倉本圭、才木常正、小橋昌司、畑豊、内海裕一
    • Organizer
      第27回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      島根県立産業交流会館
    • Year and Date
      2010-10-14
    • Related Report
      2011 Final Research Report 2010 Annual Research Report
  • [Presentation] A strobiology Mars Project(JAMP):火星表面におけるメタン酸化菌探査2010

    • Author(s)
      山岸明彦、吉村義隆、山下雅道、橋本博文、久保田孝、矢野創、春山純一、田端誠、小林憲正、本多元、内海裕一、才木常正、伊藤隆、宮川厚夫、浜瀬健司、長沼毅、三田肇、戸野倉賢一、佐々木晶
    • Organizer
      日本惑星科学会2010年秋季講演会
    • Place of Presentation
      名古屋大学
    • Year and Date
      2010-10-06
    • Related Report
      2011 Final Research Report
  • [Presentation] Application of Surfac e Acoustic W ave Actuator to Lab-on-a-chip2010

    • Author(s)
      Takeshi Komoto、Tsunemasa Saiki、Yuichi Utsumi
    • Organizer
      The 1st Japan-china-Ko rea Joint Seminar on MEMS/NEMS for Green & Life Innovation
    • Place of Presentation
      札幌コンベンションセンター
    • Year and Date
      2010-08-30
    • Related Report
      2011 Final Research Report
  • [Presentation] 弾性表面波による超小型高効率反応器に関する研究2010

    • Author(s)
      甲本武士、才木常正、内海裕一
    • Organizer
      第21回化学とマイクロ・ナノシステム研究会
    • Place of Presentation
      東京大学本郷キャンパス小柴ホール
    • Year and Date
      2010-06-10
    • Related Report
      2011 Final Research Report
  • [Presentation] 表面弾性波による連続流体駆動と高効率撹拌を同時実現したマイクロ化学リアクターの提案2010

    • Author(s)
      甲本武士、才木常正、岡田勝英、内海裕一
    • Organizer
      第24回エレクトロニクス実装学会講演大会
    • Place of Presentation
      芝浦工業大学豊洲キャンパス
    • Year and Date
      2010-03-10
    • Related Report
      2011 Final Research Report
  • [Presentation] Highly Efficient Liquid Flow Actuator Opera ted by Surface Acoustic Waves2009

    • Author(s)
      Tsunemasa Saiki、Takeshi Komoto、Yuichi Utsumi
    • Organizer
      19th Acad emic Symposium of MRS-Japan
    • Place of Presentation
      横浜情報文化センター
    • Year and Date
      2009-12-07
    • Related Report
      2011 Final Research Report
  • [Presentation] High Efficiency Micro Reactor Operated by Surface-Acoustic-Wave2009

    • Author(s)
      Tsunemasa Saiki
    • Organizer
      22nd International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Sheraton Sapporo Hotel, Sapporo, Japan
    • Year and Date
      2009-11-18
    • Related Report
      2009 Annual Research Report
  • [Presentation] High Efficiency Micro Reactor Operated by Surface-Acoustic-Wave2009

    • Author(s)
      Tsunemasa Saiki、Katsuhide Okada、Yuichi Utsumi
    • Organizer
      22nd International Microprocesses and Nan otechnology Conference
    • Place of Presentation
      シェラトンホテル札幌
    • Year and Date
      2009-11-16
    • Related Report
      2011 Final Research Report
  • [Presentation] High Efficiency Mixing and Pumping of Continuous Liquid Flow using Surface-Acoustic-Wave2009

    • Author(s)
      Tsunemasa Saiki
    • Organizer
      13th International Conference on Miniaturized Systems for Chemistry and Life Sciences
    • Place of Presentation
      ICC Jeju, Jeju, Korea
    • Year and Date
      2009-11-02
    • Related Report
      2009 Annual Research Report
  • [Presentation] High Efficiency Mixing and Pumping of Continuous Liquid Flo w using Surface-Acoustic-Wave2009

    • Author(s)
      Tsunemasa Saiki、Katsuhide Okada、Yuichi Utsumi
    • Organizer
      3th International Conference on Miniaturized Systems for Chemis try and Life Sciences
    • Place of Presentation
      International Convention Center、Jeju、Korea
    • Year and Date
      2009-11-01
    • Related Report
      2011 Final Research Report
  • [Presentation] Micro Liquid Rotor Operated by Surface Acoustic Wave2009

    • Author(s)
      Tsunemasa Saiki
    • Organizer
      8th International Workshop on High-Aspect-Ratio Micro-Structure Technology
    • Place of Presentation
      Delta Bessborough Hotel, Saskatoon, Canada
    • Year and Date
      2009-06-26
    • Related Report
      2009 Annual Research Report
  • [Presentation] Micro Liquid Rotor Oper ated by Surface Acoustic Wave2009

    • Author(s)
      Tsunemasa Saiki、Katsuhide Okada、Yuichi Utsumi
    • Organizer
      8th International Workshop on High-Aspect-Ratio Micro-Structure Technology
    • Place of Presentation
      Delta Bessborough Hotel、Saskatoon、Canada
    • Year and Date
      2009-06-25
    • Related Report
      2011 Final Research Report

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Published: 2009-04-01   Modified: 2016-04-21  

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