• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Determination of absolute value of vacancy concentration for silicon crystal using low-temperature ultrasonic measurement

Research Project

Project/Area Number 21560012
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionNiigata University

Principal Investigator

KANETA Hiroshi  新潟大学, 超域学術院, 教授 (30418131)

Co-Investigator(Renkei-kenkyūsha) GOTO Terutaka  新潟大学, 自然科学研究科, 教授 (60134053)
NEMOTO Yuichi  新潟大学, 自然科学系, 准教授 (10303174)
Project Period (FY) 2009 – 2011
Project Status Completed (Fiscal Year 2011)
Budget Amount *help
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2011: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2010: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2009: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Keywordsシリコン / 原子空孔 / 絶対濃度 / 超音波 / 絶対温度
Research Abstract

Regarding the sample preparation in this study performed by the annealing furnace in the laboratory of university-level cleanness, we have found the following two problems :(1) The cleanness of the laboratory is totally inadequate in order to anneal well-cleaned samples in the contamination-free ambient.(2) The cooling(quenching) speed is insufficient to freeze the vacancies which are in thermal equilibrium in the annealing. We have found that the best way to resolve these problems is to prepare the samples by using the apparatuses and facilities in silicon wafer manufacturing company. The level of the cleanness of the apparatus and the clean room is far higher than that of those in the university. The quenching with sufficiently high speed can also be realized by the rapid thermal annealer(RAT) adopted in silicon wafer manufacturing. In this case however, we have to deal with the silicon wafers of surface orientation<001> and the thickness thinner than 0. 8 mm, instead of the block-shaped samples we first considered for the experiment. In this case, we also have to totally change the regular condition of the ultrasonic measurement into a special one, where we measure the elastic constantC11 by using the longitudinal sound wave propagating along<001> direction through the very thin sample(wafer). We have shown that this method of measurement for the elastic softening is possible. Sample preparation using the RTA in silicon wafer manufacturer is now in progress.

Report

(4 results)
  • 2011 Annual Research Report   Final Research Report ( PDF )
  • 2010 Annual Research Report
  • 2009 Annual Research Report
  • Research Products

    (51 results)

All 2011 2010 2009 Other

All Journal Article (9 results) (of which Peer Reviewed: 8 results) Presentation (32 results) Remarks (3 results) Patent(Industrial Property Rights) (7 results) (of which Overseas: 4 results)

  • [Journal Article] Quadrupole Wffects of Vacancy Orbital in Boron-Doped Silicon2011

    • Author(s)
      Baba, T. Goto, Y. Nagai, M. Mitsumoto, M. Akatsu, H. Watanabe, K. Mitsumoto, T. Ogawa, Y. Nemoto, and H. Yamada-Kaneta
    • Journal Title

      J. Phys. Soc. Jpn.

      Volume: 80 Pages: 94601-94601

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Second Harmonic Vibrational Mode of Substitional Carbon in Cast-Grown Multicrystalline Silicon2011

    • Author(s)
      H. Ono and H. Yamada-Kaneta
    • Journal Title

      Appl. Phys. Express

      Volume: 4 Pages: 51401-51401

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Quadrupole Effects of Vacancy Orbital in Boron-Doped Silicon2011

    • Author(s)
      Shotaro Baba, Terutaka Goto, Yuta Nagai, Mitsuhiro Akatsu, Hajime Watanabe, Keisuke Mitsumoto, Takafumi Ogawa, Yuichi Nemoto, Hiroshi Yamada-Kaneta
    • Journal Title

      J.Phys.Soc.Jpn.

      Volume: 80 Issue: 9 Pages: 94601-8

    • DOI

      10.1143/jpsj.80.094601

    • NAID

      210000109197

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Practical method and physics of evaluation for vacancy concentration of silicon crystals by means of low-temperature elastic softening2011

    • Author(s)
      H.Yamada-Kaneta, S.Baba, Y.Nagai, M.Akatsu, K.Mitsumoto, T.Yanase, K.Okabe, Y.Ono, Y.Nemoto, T.Goto
    • Journal Title

      ECS Transactions

      Volume: 33(招待論文) Pages: 63-72

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Practical method and physics of evaluation for vacancy concentration of silicon crystals by means of low-tempature elastic softening2010

    • Author(s)
      H. Yamada-Kaneta, S. Baba, Y. Nagai, M. Akatsu, K. Mitsumoto, T. Yanase, K. Okabe, Y. Ono, Y. Nemoto, T. Goto
    • Journal Title

      ECS Transactions

      Volume: 33 Pages: 63-72

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Practical method and physics of evaluation for vacancy concentration of silicon crystals by means of low-temperature elastic softening2010

    • Author(s)
      H. Yamada-Kaneta, S. Baba, Y. Nagai, M. Akatsu, K. Mitsumoto, T. Yanase, K. Okabe, Y. Ono, Y. Nemoto, T. Goto
    • Journal Title

      ECS Fall Meeting October

      Volume: 218 Pages: 10-15

    • Related Report
      2011 Final Research Report
  • [Journal Article] Practical method and physics of evaluation for vacancy concentration of silicon crystals by measuring low-temperature elastic softening2010

    • Author(s)
      Hiroshi Yamada-Kaneta, Shotaro Baba, Yuta Nagai, Mitsuhiro A katsu, Keisuke Mitsumoto, Taka shi Yanase, Kazuki Okabe, Yasushi Ono, Yuichi Nemoto, Teruta ka Goto
    • Journal Title

      ECS(Electro Chemical Society)Transaction

      Volume: 33 Pages: 63-72

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Low-temperature elastic softening due to vacancies in boron-doped FZ silicon crystals2010

    • Author(s)
      H.Yamada-Kaneta, H.Watanabe, Y.Nagai, S.Baba, M.Akatsu, Y.Nemoto, T.Goto
    • Journal Title

      Solid State Phenomena 156-158

      Pages: 135-138

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Ultrasonic Study of Vacancy in Single Crystal Silicon at Low Temperatures2009

    • Author(s)
      M. Akatsu, T. Goto, H. Yamada-Kaneta, H. Watanabe, Y. Nemoto, K. Mitsumoto, S. Baba, Y. Nagai, S. Nakamura
    • Journal Title

      J. Phys. Conf. Series

      Volume: 150 Pages: 420021-4

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Presentation] 第一原理分子動力学法よるシリコン原子空孔の電子状態解析2011

    • Author(s)
      小川貴史, 鶴田健二, 家富洋, 根本祐一, 金田寛, 後藤輝孝
    • Organizer
      第24回分子シミュレーション討論会
    • Place of Presentation
      福井県県民ホール
    • Year and Date
      2011-11-25
    • Related Report
      2010 Annual Research Report
  • [Presentation] ボロン添加シリコンの原子空孔軌道と横波弾性定数C44の異方的な磁場依存性2011

    • Author(s)
      馬場正太郎,赤津光洋,三本啓輔,小松悟,堀江邦彦,根本祐一,金田寛A,後藤輝孝
    • Organizer
      日本物理学会2011年秋季大会
    • Place of Presentation
      富山大学五福キャンパス
    • Related Report
      2011 Annual Research Report 2011 Final Research Report
  • [Presentation] 横波超音波計測によるボロン添加シリコンの原子空孔軌道の研究2011

    • Author(s)
      小松悟, 馬場正太郎, 堀江邦彦, 赤津光洋, 三本啓輔, 小川貴史, 根本祐一, 金田寛, 後藤輝孝
    • Organizer
      日本物理学会第66回春季大会
    • Place of Presentation
      新潟大学
    • Related Report
      2010 Annual Research Report
  • [Presentation] 第一原理分子動力学法よるシリコン原子空孔の電子状態解析2010

    • Author(s)
      小川貴史,鶴田健二,家富洋,根本祐一,金田寛,後藤輝孝
    • Organizer
      第24回分子シミュレーション討論会
    • Place of Presentation
      福井県県民ホール
    • Year and Date
      2010-11-25
    • Related Report
      2011 Final Research Report
  • [Presentation] DFT計算によるシリコン単原子空孔の局在電子軌道の解析2010

    • Author(s)
      小川貴史, 鶴田健二, 家富洋, 根本祐一, 金田寛, 後藤輝孝
    • Organizer
      日本物理学会2010年秋季大会
    • Place of Presentation
      大阪府立大学
    • Year and Date
      2010-09-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] 第一原理計算によるシリコン単原子空孔の局在電子状態2010

    • Author(s)
      小川貴史,鶴田健二,家富洋,根本祐一,金田寛,後藤輝孝
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学文教キャンパス
    • Year and Date
      2010-09-16
    • Related Report
      2011 Final Research Report 2010 Annual Research Report
  • [Presentation] ボロン添加FZシリコンの原子空孔軌道の四極子効果II2010

    • Author(s)
      永井勇太, 馬場正太郎, 赤津光洋, 小松悟, 三本啓輔, 小川貴史, 根本祐一, 金田寛, 後藤輝孝
    • Organizer
      日本物理学会 第65回年次大会
    • Place of Presentation
      岡山大学津島キャンパス
    • Year and Date
      2010-03-20
    • Related Report
      2009 Annual Research Report
  • [Presentation] 超音波計測を用いたボロン添加FZシリコンの原子空孔観測東海大学湘南キャンパス2010

    • Author(s)
      馬場正太郎, 永井勇太, 赤津光洋, 小松悟, 三本啓輔, 根本祐一, 金田寛, 後藤輝孝
    • Organizer
      春季 第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学湘南キャンパス
    • Year and Date
      2010-03-17
    • Related Report
      2009 Annual Research Report
  • [Presentation] シリコン原子空孔評価:P(VDF/TrFE)圧電薄膜を用いたシリコン単結晶の超音波測定2010

    • Author(s)
      三本啓輔, 岡部和樹, 柳瀬隆史, 赤津光洋, 馬場正太郎, 永井勇太, 小松悟, 小野恭史, 根本祐一, 金田寛, 後藤輝孝
    • Organizer
      春季 第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学湘南キャンパス
    • Year and Date
      2010-03-17
    • Related Report
      2009 Annual Research Report
  • [Presentation] 低温超音波計測によるボロン添加シリコン中の原子空孔観測2010

    • Author(s)
      小松悟,馬場正太郎,赤津光洋,三本啓輔,小川貴史,根本祐一,金田寛,後藤輝孝
    • Organizer
      第6回シリコンフォーラム岡山会議
    • Related Report
      2011 Final Research Report
  • [Presentation] Electric quadrupole effects of vacancyorbital in boron-doped silicon2010

    • Author(s)
      S. Baba, Y. Nagai, M. Akatsu, S. Komatsu, K. Mitsumoto, T. Ogawa, Y. Nemoto, H. Yamada-Kaneta, T. Goto
    • Organizer
      第6回シリコンフォーラム岡山会議
    • Related Report
      2011 Final Research Report
  • [Presentation] Practical evaluation of vacansy concentration in sillicon crystals and wafers by ultrasonic measurements with organic P(VDF/TrFE) transducers2010

    • Author(s)
      K. Okabe, K. Mitsumoto, T. Yanase, M. Akatsu, S. Baba, S. Komatsu, Y. Ono, Y. Nemoto, H. Y. Kaneta, T. Goto
    • Organizer
      第6回シリコンフォーラム岡山会議
    • Related Report
      2011 Final Research Report
  • [Presentation] Ab-initio evaluation of quadrupole moment associated with silicon mono-vacancy(シリコン単原子空孔における電気四極子の第一原理的評価)2010

    • Author(s)
      Takafumi Ogawa, Kenji Tsuruta, Hiroshi Iyetomi, Yuichi Nemoto, Hiroshi Yamada-Kaneta, Terutaka Goto
    • Organizer
      第6回シリコンフォーラム岡山会議
    • Related Report
      2011 Final Research Report
  • [Presentation] DFT計算によるシリコン単原子空孔の局在電子軌道の解析2010

    • Author(s)
      小川貴史,鶴田健二,家富洋,根本祐一,金田寛,後藤輝孝
    • Organizer
      日本物理学会秋季大会
    • Place of Presentation
      大阪府立大学中百舌鳥キャンパス
    • Related Report
      2011 Final Research Report
  • [Presentation] Magnetic-field-dependence of low-temperature elastic softening of the vacancies in boron-doped silicon crystals2010

    • Author(s)
      S.Baba, Y.Nagai, M.Akatsu, S.Komatsu, K.Mitsumoto, Y.Ne moto, H.Yamada-Kaneta, T.Goto
    • Organizer
      European Materials Research Society (E-MRS) 2010 Spring Meeting
    • Place of Presentation
      Strasbourg, France
    • Related Report
      2010 Annual Research Report
  • [Presentation] Observation of elastic softening due to vacancy orbitals in B-doped FZ Si by ultrasonic measurements with copolymer transducers2010

    • Author(s)
      K.Mitsumoto, K.Okabe, T.Yanase, M.Akatsu, S.Baba, Y.Nagai, S.Komatsu, Y.Ono, Y.Nemoto, H.Kaneta, T.Goto
    • Organizer
      European Materials Research Society (E-MRS) 2010 Spring Meeting
    • Place of Presentation
      Strasbourg, France
    • Related Report
      2010 Annual Research Report
  • [Presentation] Ab-initio evaluation of quadrupole moment associated with silicon mono-vacancy(シリコン単原子空孔における電気四極子の第一原理的評価)2010

    • Author(s)
      Takafumi Ogawa, Kenji Tsuruta, Hiroshi Iyetomi, Yuichi Nemoto,Hiroshi Yamada-Kaneta, Terutaka Goto
    • Organizer
      第6回シリコンフォーラム岡山会議
    • Place of Presentation
      岡山大学
    • Related Report
      2010 Annual Research Report
  • [Presentation] Electric quadrupole effects of vacancy orbital in boron-doped silicon B Center for quantum materials science, Niigata Univ2010

    • Author(s)
      S.Baba, Y.Nagai, M.Akatsu, S Komatsu, K.Mitsumoto, T.Ogawa, Y.Nemoto, H.Yamada-Ka neta, T.Goto
    • Organizer
      第6回シリコンフォーラム岡山会議
    • Place of Presentation
      岡山大学
    • Related Report
      2010 Annual Research Report
  • [Presentation] 低温超音波計測によるボロン添加シリコン中の原子空孔観測2010

    • Author(s)
      小松悟, 馬場正太郎, 赤津光洋, 三本啓輔, 小川貴史, 根本祐一, 金田寛, 後藤輝孝
    • Organizer
      第6回シリコンフォーラム岡山会議
    • Place of Presentation
      岡山大学
    • Related Report
      2010 Annual Research Report
  • [Presentation] Density-Functional-Analysis on Vacancy Orbital and its Elastic Response of Silicon2009

    • Author(s)
      Tatafumi ogawa, Kenji Tsuruta, Hiroshi Iyetomi, Hiroshi Y Kaneta, Terutaka Goto
    • Organizer
      Material research society 2009 fall meeting
    • Place of Presentation
      Boston, USA
    • Year and Date
      2009-11-30
    • Related Report
      2009 Annual Research Report
  • [Presentation] Low-temperature elastic softening due to vacancies in B-doped FZ Si crystals2009

    • Author(s)
      H.Yamada-Kaneta, H.Watanbe, Y.Nagai, S.Baba, M.Akatsu, Y.Nemoto, T.Goto
    • Organizer
      Gettering and Defect Engineering in Semiconductor Technology-GADEST 2009
    • Place of Presentation
      North of Berlin, Germany
    • Year and Date
      2009-09-27
    • Related Report
      2009 Annual Research Report
  • [Presentation] B-doped FZ Siの原子空孔軌道の四極子効果2009

    • Author(s)
      永井勇太, 馬場正太郎, 赤津光洋, 小松悟, 渡邊肇, 三本啓輔, 小川貴史, 根本祐一, 中村慎太郎,金田寛, 後藤輝孝
    • Organizer
      日本物理学会2009年秋季大会
    • Place of Presentation
      熊本大学黒髪キャンパス
    • Year and Date
      2009-09-25
    • Related Report
      2009 Annual Research Report
  • [Presentation] ボロン添加FZシリコンの弾性定数の磁気異方性2009

    • Author(s)
      馬場正太郎, 永井勇太, 赤津光洋, 小松悟, 渡邊肇, 三本啓輔, 小川貴史, 根本祐一, 中村慎太郎, 金田寛, 後藤輝孝
    • Organizer
      日本物理学会2009年秋季大会
    • Place of Presentation
      熊本大学黒髪キャンパス
    • Year and Date
      2009-09-25
    • Related Report
      2009 Annual Research Report
  • [Presentation] 低温超音波計測によるシリコン原子空孔評価-その物理と実用評価技術2009

    • Author(s)
      H.Yamada-Kaneta, H.Watanbe, Y.Nagai, S.Baba, M.Akatsu, Y.Nemoto, T.Goto
    • Organizer
      第19回格子欠陥フォーラム「半導体格子欠陥の最前線」
    • Place of Presentation
      九州大学応用力学研究所
    • Year and Date
      2009-09-24
    • Related Report
      2009 Annual Research Report
  • [Presentation] Characteristic Aspects of Low-Temperature Elastic Softening Due to Vacancies in Boron-Doped FZ Silicon Crystals2009

    • Author(s)
      H.Yamada-Kaneta, H.Watanbe, Y.Nagai, S.Baba, M.Akatsu, Y.Nemoto, T.Goto
    • Organizer
      13th International Conference on Defects Recognition Imaging and Physics in Semiconductors (DRIR XIII)
    • Place of Presentation
      Wheeling, West Virginia, USA
    • Year and Date
      2009-09-15
    • Related Report
      2009 Annual Research Report
  • [Presentation] 超音波によるB添加FZシリコンの原子空孔の電荷状態の研究2009

    • Author(s)
      永井勇太, 馬場正太郎, 赤津光洋, 小松悟, 渡邊肇, 三本啓輔, 小川貴史, 根本祐一, 金田寛, 後藤輝孝
    • Organizer
      2009年秋季第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] シリコン原子空孔:試料への直接塗布によるP(VDF/TrFE)圧電薄膜の作成2009

    • Author(s)
      岡部和樹, 三本啓輔, 柳瀬隆史, 赤津光洋, 小野恭史, 根本祐一, 金田寛, 後藤輝孝
    • Organizer
      2009年秋季第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] シリコン原子空孔評価:P(VDF/TrFE)圧電薄膜を用いたシリコン単結晶の超音波測定2009

    • Author(s)
      三本啓輔, 岡部和樹, 柳瀬隆史, 赤津光洋, 小野恭史, 根本祐一, 金田寛, 後藤輝孝
    • Organizer
      2009年秋季第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] Quadrupole Effects of Vacancy Orbital in Boron-Doped Silicon2009

    • Author(s)
      T.Goto, M.Akatsu, H.Watanabe, Y.Nagai, S.Baba, Y.Nemoto, H.Yamada-Kaneta, I.Ishii, T.Ogawa, K.Mitsumoto
    • Organizer
      The International Conference on Magnetism-ICM 2009
    • Place of Presentation
      Karlsruhe, Germany
    • Year and Date
      2009-07-29
    • Related Report
      2009 Annual Research Report
  • [Presentation] Observation of vacancy in crystalline silicon by ultrasonic measurements with piezoelectric copolymer trandsducers2009

    • Author(s)
      K.Mitsumoto, T.Yanase, K.Okabe, M.Akatsu, H.Watanabe, Y.Nagai, S.Baba, Y.Ono, Y.Negai, S.Baba, Y.Ono, Y.Nemoto, H.Y-Kaneta, T.Goto
    • Organizer
      25^<th> International Conference on Defects in Semiconductors
    • Place of Presentation
      St Petersburg, Russia
    • Year and Date
      2009-07-21
    • Related Report
      2009 Annual Research Report
  • [Presentation] Characteristic aspects of elastic softening due to vacancies in boron-doped FZ silicon observed by low-temperature ultrasonic measurements2009

    • Author(s)
      H.Yamada-Kaneta, H.Watanbe, Y.Nagai, S.Baba, M.Akatsu, Y.Nemoto, T.Goto
    • Organizer
      25^<th> International Conference on Defects in Semiconductors
    • Place of Presentation
      St Petersburg, Russia
    • Year and Date
      2009-07-20
    • Related Report
      2009 Annual Research Report
  • [Presentation] 分子動力学法によるシリコン原子空孔周囲の歪場解析2009

    • Author(s)
      小川貴史, 鶴田健二^A, 家富洋, 金田寛, 後藤輝孝
    • Organizer
      第19回日本MRS学術シンポジウム
    • Place of Presentation
      横浜情報文化センター
    • Related Report
      2009 Annual Research Report
  • [Remarks]

    • URL

      http://www.sc.niigata-u.ac.jp/goto/

    • Related Report
      2011 Annual Research Report
  • [Remarks]

    • URL

      http://www.sc.niigata-u.ac.jp/goto/

    • Related Report
      2010 Annual Research Report
  • [Remarks]

    • URL

      http://www.sc.niigata-u.ac.jp/goto/

    • Related Report
      2009 Annual Research Report
  • [Patent(Industrial Property Rights)] シリコンウェーハ中に存在する原子空孔の定量評価装置および方法2011

    • Inventor(s)
      後藤輝孝、根本祐一、金田寛、宝耒正隆
    • Industrial Property Rights Holder
      国立大学法人新潟大学、株式会社SUMCO
    • Filing Date
      2011-10-18
    • Related Report
      2011 Final Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] CZ法によるSi単結晶インゴットの製造方法2011

    • Inventor(s)
      後藤輝孝、根本祐一、金田寛、宝耒正隆
    • Industrial Property Rights Holder
      国立大学法人新潟大学、株式会社SUMCO
    • Acquisition Date
      2011-04-26
    • Related Report
      2011 Final Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] シリコンウェーハ中に存在する原子空孔濃度の定量評価方法、シリコンウェーハの製造方法、および当該製造方法により製造したシリコンウェーハ2010

    • Inventor(s)
      後藤輝孝、金田寛、根本祐一、赤津光洋
    • Industrial Property Rights Holder
      国立大学法人新潟大学
    • Industrial Property Number
      2010-529866
    • Filing Date
      2010-08-19
    • Related Report
      2011 Final Research Report
  • [Patent(Industrial Property Rights)] シリコンウェーハ中に存在する原子空孔濃度の定量評価方法、シリコンウェーハの製造方法、および当該製造方法により製造したシリコンウェーハ2010

    • Inventor(s)
      後藤輝孝、金田寛、根本祐一、赤津光洋
    • Industrial Property Rights Holder
      国立大学法人新潟大学
    • Filing Date
      2010-08-31
    • Related Report
      2011 Final Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] シリコンウェーハ中に存在する原子空孔濃度の定量評価方法、シリコンウエーハの製造方法、および当該製造方法により製造したシリコンウェーハ2010

    • Inventor(s)
      後藤輝孝、金田寛、根本祐一、赤津光洋
    • Industrial Property Rights Holder
      国立大学法 人新潟大学
    • Filing Date
      2010-08-19
    • Related Report
      2010 Annual Research Report
  • [Patent(Industrial Property Rights)] シリコンウェーバ中に存在する原子空孔濃度の定量評価方法、シリコンウエーハの製造方法、および当該製造方法により製造したシリコンウェーハ2010

    • Inventor(s)
      後藤輝孝、金田寛、根本祐一、赤津光洋
    • Industrial Property Rights Holder
      国立大学法 人新潟大学
    • Filing Date
      2010-08-31
    • Related Report
      2010 Annual Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] シリコンウェーハ中に存在する原子空孔濃度の定量評価方法、シリコンウェーハの製造方法、および当該製造方法により製造したシリコンウェーハ2009

    • Inventor(s)
      後藤輝孝、金田寛、根本祐一、赤津光洋
    • Industrial Property Rights Holder
      国立大学法人 新潟大学
    • Industrial Property Number
      2009-206397
    • Filing Date
      2009-09-07
    • Related Report
      2009 Annual Research Report

URL: 

Published: 2009-04-01   Modified: 2016-04-21  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi