Scanning confocal electron microscopy using two dimensional CCD
| Project/Area Number |
21560036
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Thin film/Surface and interfacial physical properties
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| Research Institution | National Institute for Materials Science |
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Principal Investigator |
MITSUISHI Kazutaka 独立行政法人物質・材料研究機構, 表界面構造・物性ユニット, 主幹研究員 (40354328)
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| Project Period (FY) |
2009 – 2011
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| Project Status |
Completed (Fiscal Year 2011)
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| Budget Amount *help |
¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2011: ¥260,000 (Direct Cost: ¥200,000、Indirect Cost: ¥60,000)
Fiscal Year 2010: ¥260,000 (Direct Cost: ¥200,000、Indirect Cost: ¥60,000)
Fiscal Year 2009: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
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| Keywords | 電子顕微鏡 / 共焦点電子顕微鏡 / 走査透過電子顕微鏡 / 3次元観察 |
|---|
| Research Abstract |
Scanning confocal electron microscopy(SCEM) is a technique that enable to obtain 3D information of a specimen that is usually lost in conventional observation. In this work, SCEM is realized in a conventional microscope by using 2D CCD instead of using a combination of a descan coil and pinhole aperture enabling SCEM in conventional microscopes.
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Report
(4 results)
Research Products
(13 results)
