Scanning confocal electron microscopy using two dimensional CCD

• Project/Area Number: 21560036
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Thin film/Surface and interfacial physical properties
• Research Institution: National Institute for Materials Science
• Principal Investigator: MITSUISHI Kazutaka 独立行政法人物質・材料研究機構, 表界面構造・物性ユニット, 主幹研究員 (40354328)
• Project Period (FY): 2009 – 2011
• Project Status: Completed (Fiscal Year 2011)
• Budget Amount: ¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000); Fiscal Year 2011: ¥260,000 (Direct Cost: ¥200,000、Indirect Cost: ¥60,000); Fiscal Year 2010: ¥260,000 (Direct Cost: ¥200,000、Indirect Cost: ¥60,000); Fiscal Year 2009: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
• Keywords: 電子顕微鏡 / 共焦点電子顕微鏡 / 走査透過電子顕微鏡 / 3次元観察

Research Abstract

Scanning confocal electron microscopy(SCEM) is a technique that enable to obtain 3D information of a specimen that is usually lost in conventional observation. In this work, SCEM is realized in a conventional microscope by using 2D CCD instead of using a combination of a descan coil and pinhole aperture enabling SCEM in conventional microscopes.

Research Products

• [Journal Article] Imaging properties of bright-field and annular-dark-field scanning confocal microscopy (2012)
  • Author(s): K. Mitsuishi, et. al., 他4名
  • Journal Title: Ultramicroscopy Volume: 112 Pages: 53-60
  • Peer Reviewed
• [Journal Article] Imaging properties of bright-field and annular-dark-field scanning confocal (2012)
  • Author(s): 三石和貴, 他
  • Journal Title: UTRAMICROSCOPY Volume: 112 Issue: 1 Pages: 53-60
  • DOI: 10.1016/j.ultramic.2011.10.004
  • Peer Reviewed
• [Journal Article] Imaging properties of bright-field and annular-dark-field scanning confocal microscopy II. point spread function analysis (2010)
  • Author(s): K. Mitsuishi, et al., 他4名
  • Journal Title: Ultramicroscopy Volume: 111 Pages: 20-26
  • Peer Reviewed
• [Journal Article] Imaging properties of bright-fieldandannular-dark-fieldscanningconfocal electron microscopy (2010)
  • Author(s): 三石和貴, 他
  • Journal Title: Ultramicroscopy Volume: 111 Pages: 20-26
  • Peer Reviewed
• [Presentation] 2次元検出器を用いた共焦点電子顕微鏡法 (2010)
  • Author(s): 三石和貴, 他4名
  • Organizer: 日本物理学会2010年秋季大会
  • Place of Presentation: 大阪府立大学
  • Year and Date: 2010-09-23
• [Presentation] 2次元検出器を用いた共焦点電子顕微鏡法 (2010)
  • Author(s): 三石和貴
  • Organizer: 日本物理学会2010年秋季大会
  • Place of Presentation: 大阪府立大学(大阪府)
  • Year and Date: 2010-09-23
• [Presentation] STEM像の計算手法の基礎/STEM像の計算手法の基礎 (2010)
  • Author(s): 三石和貴
  • Organizer: 日本顕微鏡学会電顕技術開発若手研究部会研究会
  • Place of Presentation: 東京大学山上会館
  • Year and Date: 2010-08-23
• [Presentation] STEM像の計算手法の基礎/STEM像の計算手法の基礎 (2010)
  • Author(s): 三石和貴
  • Organizer: 日本顕微鏡学会電顕技術開発若手研究部会研究会
  • Place of Presentation: 東京大学 山上会館(東京都)
  • Year and Date: 2010-08-23
• [Presentation] 共焦点暗視野電子顕微鏡法の結像特性 (2010)
  • Author(s): 三石和貴, 他4名
  • Organizer: 日本顕微鏡学会第66回学術講演会
  • Place of Presentation: 名古屋国際会議場
  • Year and Date: 2010-05-23
• [Presentation] 共焦点暗視野電子顕微鏡法の結像特性 (2010)
  • Author(s): 三石和貴
  • Organizer: 日本顕微鏡学会第66回学術講演会
  • Place of Presentation: 名古屋国際会議場(愛知県)
  • Year and Date: 2010-05-23
• [Presentation] 共焦点走査透過電子顕微鏡法による3次元観察の可能性 (2009)
  • Author(s): 三石和貴
  • Organizer: 日本顕微鏡学会第53回シンポジウム
  • Place of Presentation: 東京工業大学(東京都)
  • Year and Date: 2009-10-31
• [Presentation] Depth sectioning property of bright-field and annular-dark-field scanning confocal electron microscopy (2009)
  • Author(s): 三石和貴
  • Organizer: FEMMS2009
  • Place of Presentation: ハウステンボス(九州市)
  • Year and Date: 2009-09-27
• [Presentation] 円環暗視野共焦点STEM像のシミュレーション (2009)
  • Author(s): 三石和貴
  • Organizer: 日本顕微鏡学会第65回学術講演会
  • Place of Presentation: 山台国際センター(仙台市)
  • Year and Date: 2009-05-26