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High-Aspect-Ratio Nanofabrication of Carbon Materials Using CNT Probe and TEM in-situ Observations of Their Process

Research Project

Project/Area Number 21560133
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionAichi Institute of Technology

Principal Investigator

MATSUMURO Akihito  愛知工業大学, 工学部, 教授 (80173889)

Co-Investigator(Kenkyū-buntansha) TAKAGI Makoto  愛知工業大学, 工学部, 教授 (40288428)
Project Period (FY) 2009 – 2011
Project Status Completed (Fiscal Year 2011)
Budget Amount *help
¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2011: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2010: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2009: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Keywordsナノチューブ加工 / TEM内その場観察 / カーボンナノチューブ / ナノスケールSTM加工 / TEM内その場観 / 加工原理 / カーボン材料 / TEMホルダー開発 / 最適加工条件 / 応力負荷 / 高アスペクト比加工 / 線加工 / 低抵抗シリコン / 高アスペクト比凹凸加工 / ピエゾ試料ホルダー
Research Abstract

We have developed a fabrication method for a high-aspect-ratio nanometer-scale pit using a carbon nanotube as a scanning tunneling microscope probe. Nanometer-scale pits were fabricated on low-resistivity single crystal silicon in an ambient pressure and room temperature. The results of our experiment show that the shape fabricated was changed from the pit to the mound increasing with the bias voltage. Furthermore, we tried to fabricate the nanometer-scale line fabrications with high-aspect-ratio. The process mechanism of the nanofabrication by STM method was also tried to clarify by TEM in-situ observations during fabrication process. The field evaporation of the specimen around the probe was observed without dislocations and strains. Therefore, the physical origin of this nanometer-scale fabrication using STM was considered to be the field evaporation mechanism.

Report

(4 results)
  • 2011 Annual Research Report   Final Research Report ( PDF )
  • 2010 Annual Research Report
  • 2009 Annual Research Report
  • Research Products

    (17 results)

All 2012 2011 2010 2009

All Journal Article (9 results) (of which Peer Reviewed: 9 results) Presentation (8 results)

  • [Journal Article] Microstructural Change and Work-hardening of Sub-surface of Silicon Single Crystal Scrached under a Very Small Loading Force by AFM2012

    • Author(s)
      M. Takagi, A. Matsumuro
    • Journal Title

      Abstract of International Symposium on Role of Electron Microscopy in Industry

      Pages: 2-2

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Microstructural Change and Work-hardening of Sub-surface of Silicon Single Crystal Scrached under a Very Small Loading Force by AFM2012

    • Author(s)
      M.Takagi, A.Matsumuro
    • Journal Title

      Abstract of International Symposium on Role of Electron Microscopy in Industry

      Volume: Vol.1 Pages: 2-2

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] High-Aspect-Ratio Nanofabrication of Carbon Materials Using CNT Probe and TEM in-situ Observations of Their Process2011

    • Author(s)
      A. Matsumuro, M. Takagi
    • Journal Title

      Proc. the 11^<th> International Conference

      Pages: 451-454

    • NAID

      40019450966

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] High-Aspect-Ratio Nanofabrication of Carbon Materials Using CNT Probe and TEM in-situ Observations of Their Process2011

    • Author(s)
      A.Matsumuro, M.Takagi
    • Journal Title

      Proceedings of the 11^<th> euspen International Conference

      Volume: Vol.2 Pages: 451-454

    • NAID

      40019450966

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 集束イオンビーム励起化学気相法によるマイクロ構造体の作製と機械的性質の評価2010

    • Author(s)
      高木誠, 中山浩征, 松室昭仁
    • Journal Title

      金属学会論文集

      Volume: Vol.74, No.2 Pages: 72-76

    • NAID

      10026269067

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] High-Aspect-Ratio Nanofabrication Using Carbon Nanotube Probe in Scanning Tunneling Microscope2010

    • Author(s)
      A. Matsumuro, M. Takagi
    • Journal Title

      Proceedings of the 10^<th> euspen International Conference

      Pages: 282-285

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] High-Aspect-Ratio Nanofabrication Using Carbon Nanotube Probe in Scanning Tunneling Microscope2010

    • Author(s)
      A.Matsumuro, M.Takagi
    • Journal Title

      Proceedings of the 10^<th> euspen International Conference

      Volume: 10 Pages: 282-285

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 収束イオンビーム励起化学気相法によるマイクロ構造体の作製と機械的性質の評価2010

    • Author(s)
      高木誠, 中山浩征, 松室昭仁
    • Journal Title

      日本金属学会誌 74

      Pages: 72-76

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] High-Aspect-Ratio Nanofabrication Using Carbon Nanotube Probe in Scanning Tunneling Microscope2010

    • Author(s)
      松室昭仁, 高木誠
    • Journal Title

      Proceedings of the euspen Ineternational Conference (accepted, 未定)

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Presentation] 真空加熱下におけるAFMによるSi単結晶のナノ加工2011

    • Author(s)
      松室昭仁, 高本誠, 若山大輔
    • Organizer
      2011年度精密工学会秋季大会
    • Place of Presentation
      金沢大学
    • Year and Date
      2011-09-21
    • Related Report
      2011 Annual Research Report
  • [Presentation] 電圧印加に伴うナノスケール現象のTEM内その場観察スケール加工2010

    • Author(s)
      江間弘崇, 高木誠, 松室昭仁, 岩田博之
    • Organizer
      日本機械学会第2回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      松江
    • Year and Date
      2010-10-13
    • Related Report
      2010 Annual Research Report
  • [Presentation] スパッタリング法によるTi-Ni形状記憶合金ナノスケール薄膜の作製と評価2010

    • Author(s)
      宇佐美幸博, 高木誠, 松室昭仁
    • Organizer
      日本機械学会第2回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      松江
    • Year and Date
      2010-10-13
    • Related Report
      2010 Annual Research Report
  • [Presentation] TEMによる水酸アパタイトのマイクロ/ナノプロセスの解明2010

    • Author(s)
      冨田雅斗, 高木誠, 松室昭仁
    • Organizer
      日本機械学会第2回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      松江
    • Year and Date
      2010-10-13
    • Related Report
      2010 Annual Research Report
  • [Presentation] 電圧印加に伴うナノスケール現象のTEM内その場観察2010

    • Author(s)
      江間弘崇, 高木誠, 松室昭仁, 岩田博之
    • Organizer
      日本機械学会第2回マイクロ・ナノ工学シンポジウム
    • Related Report
      2011 Final Research Report
  • [Presentation] CNT探針を用いたSTMによるカーボン材料の高アスペクト比ナノスケール加工2010

    • Author(s)
      岩見裕介, 高木誠, 松室昭仁
    • Organizer
      日本機械学会第2回マイクロ・ナノ工学シンポジウム
    • Related Report
      2011 Final Research Report 2010 Annual Research Report
  • [Presentation] CNTを用いたSTMによるSiウェハの高アスペクト比ナノ加工2009

    • Author(s)
      久米崇亮, 松室昭仁, 高木誠, 岩田博之
    • Organizer
      2009年度精密工学会秋季大会
    • Related Report
      2011 Final Research Report 2009 Annual Research Report
  • [Presentation] AFMを用いた電圧印加によるナノ加工2009

    • Author(s)
      稲垣貴生, 高木誠, 松室昭仁・岩田博之
    • Organizer
      2009年度精密工学会秋季大会
    • Place of Presentation
      神戸大学
    • Related Report
      2011 Final Research Report

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Published: 2009-04-01   Modified: 2016-04-21  

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