High-Aspect-Ratio Nanofabrication of Carbon Materials Using CNT Probe and TEM in-situ Observations of Their Process
| Project/Area Number |
21560133
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Aichi Institute of Technology |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
TAKAGI Makoto 愛知工業大学, 工学部, 教授 (40288428)
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| Project Period (FY) |
2009 – 2011
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| Project Status |
Completed (Fiscal Year 2011)
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| Budget Amount *help |
¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2011: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2010: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2009: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
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| Keywords | ナノチューブ加工 / TEM内その場観察 / カーボンナノチューブ / ナノスケールSTM加工 / TEM内その場観 / 加工原理 / カーボン材料 / TEMホルダー開発 / 最適加工条件 / 応力負荷 / 高アスペクト比加工 / 線加工 / 低抵抗シリコン / 高アスペクト比凹凸加工 / ピエゾ試料ホルダー |
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| Research Abstract |
We have developed a fabrication method for a high-aspect-ratio nanometer-scale pit using a carbon nanotube as a scanning tunneling microscope probe. Nanometer-scale pits were fabricated on low-resistivity single crystal silicon in an ambient pressure and room temperature. The results of our experiment show that the shape fabricated was changed from the pit to the mound increasing with the bias voltage. Furthermore, we tried to fabricate the nanometer-scale line fabrications with high-aspect-ratio. The process mechanism of the nanofabrication by STM method was also tried to clarify by TEM in-situ observations during fabrication process. The field evaporation of the specimen around the probe was observed without dislocations and strains. Therefore, the physical origin of this nanometer-scale fabrication using STM was considered to be the field evaporation mechanism.
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Report
(4 results)
Research Products
(17 results)
