Non-contact precision quideway systems for high vacuum chamber Using ionic liquid
| Project/Area Number |
21560151
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Design engineering/Machine functional elements/Tribology
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| Research Institution | Tokyo University of Science |
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Principal Investigator |
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| Project Period (FY) |
2009 – 2011
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| Project Status |
Completed (Fiscal Year 2011)
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| Budget Amount *help |
¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2011: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2010: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2009: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
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| Keywords | 高精度非接触案内 / イオン液体 / 高真空 / 真空 / 非接触運動機構 / 磁性イオン液体 / 真空チャンバ / 高精度非接触移動機構 |
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| Research Abstract |
Conventional vacuum compatible non-contact guideway systems have used aerostatic bearings with several steps of seals using vacuum pumps. Accordingly, these systems require relatively large space for seals and several vacuum pumps. Therefore, in this study, we proposed hydrostatic guideway systems using ionic liquid instead of aerostatic guideway systems. The proposed system does not need any seal systems to maintain vacuum, which makes the guideway system for a vacuum chamber simple and small. We developed a hydrostatic rotational spindle and a hydrostatic linear guideway table using ionic liquid and confirmed the usefulness of the proposed guideway system.
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Report
(4 results)
Research Products
(4 results)
