| Budget Amount *help |
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2011: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2010: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2009: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
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| Research Abstract |
A 3-dof active scanning probes using non-redundantly and redundantly actuated translational parallel mechanisms are developed. In order to improve the positioning accuracy and controlling small forces, a small parallelogram linkage with low friction joint is developed. We have developed 3D measurement system by stereo cameras for evaluating the accuracy of the parallel mechanisms. The positional resolution of the redundantly actuated mechanism becomes 0.5μm in a cubic working range with side length of 1.6 mm. By applying mechanical parameters calibration, the accuracy of the absolute position of the parallel mechanism has been improved to 2.4μm. A stable scanning motion based on the impedance control is also developed.
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