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Polarization control and development of new measurement method of piezoelectric properties for thin-film materials

Research Project

Project/Area Number 21560328
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionKobe University (2011)
Kyoto University (2009-2010)

Principal Investigator

KANNO Isaku  神戸大学, 大学院・工学研究科, 教授 (70346039)

Project Period (FY) 2009 – 2011
Project Status Completed (Fiscal Year 2011)
Budget Amount *help
¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2011: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2010: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2009: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Keywords圧電 / 薄膜 / 圧電すべり効果 / 圧電横効果 / PZT / MEMS
Research Abstract

In this study, we controlled the polarization direction of piezoelectric thin films and revealed the detailed piezoelectric characteristics of the thin film materials. Especially, we focused on the shear piezoelectricity of the thin films and developed the measurement system for it. The final goal of this study is to synthesis new piezoelectric thin films on the basis of the the whole piezoelectric properties of the thin films.

Report

(4 results)
  • 2011 Annual Research Report   Final Research Report ( PDF )
  • 2010 Annual Research Report
  • 2009 Annual Research Report
  • Research Products

    (39 results)

All 2012 2011 2010 2009 Other

All Journal Article (14 results) (of which Peer Reviewed: 10 results) Presentation (23 results) Remarks (2 results)

  • [Journal Article] Multilayer Thin-Film Capacitor Fabricated by Radio-Frequency Magnetr on Sputtering2012

    • Author(s)
      Yuji Imamiya, Isaku Kanno, Ryuji Yokokawa, Hidetoshi Kotera
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 50 Issue: 9S2 Pages: 09NA01-09NA01

    • DOI

      10.1143/jjap.50.09na01

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Power-generation performance of lead-free (KNa)NbO3 piezoelectric thin-film energy harvester2012

    • Author(s)
      I.Kanno, T.Ichida, K.Adachi, H.Kotera, K.Shibata, T.Mishima
    • Journal Title

      Sensors and Actuators A : Physical

      Volume: 179 Pages: 132-136

    • DOI

      10.1016/j.sna.2012.03.003

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Metal-based Piezoelectric Microelectromechanical Systems Scanner Composed of Pb(Zr,Ti)O3 Thin Film on Titanium Substrate2012

    • Author(s)
      S.Matsushita, I.Kanno, K.Adachi, R.Yokokawa, H.Kotera
    • Journal Title

      Microsystem technologies

      Volume: 18(web) Issue: 6 Pages: 765-771

    • DOI

      10.1007/s00542-012-1462-8

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Piezoelectric properties of microfabricated (K,Na)NbO3 thin films2011

    • Author(s)
      Yu Wakasa, Isaku Kanno, Ryuji Yokokawa, Hidetoshi Kotera, Kenji Shibata, Tomoyoshi Mishima
    • Journal Title

      Sensors and Actuators A : Physical

      Volume: 171 Issue: 2 Pages: 223-227

    • DOI

      10.1016/j.sna.2011.06.018

    • NAID

      120003534364

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 機能性薄膜のマイクロデバイス応用2011

    • Author(s)
      神野伊策, 小寺秀俊
    • Journal Title

      機械の研究

      Volume: 63 Pages: 459-466

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Sol-gel deposition and piezoelectric properties of{110}-oriented Pb(Zr0. 52Ti0. 48) O3 thin films2010

    • Author(s)
      D. Ambika, V. Kumar, H. Imai, I. Kanno
    • Journal Title

      Appl. Phys. Lett

      Volume: Vol.96 Pages: 31909-31909

    • Related Report
      2011 Final Research Report
  • [Journal Article] Orientation Dependence of Shear Mode Piezoelectric Properties of Epitaxial Pb(Zrx, Ti1-x) O3 Thin Films2010

    • Author(s)
      K. Akama, I. Kanno, R. Yokokawa, K. Wasa, H. Kotera
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 49

    • NAID

      210000069214

    • Related Report
      2011 Final Research Report
  • [Journal Article] Orientation Dependence of Transverse Piezoelectric Properties of Epitaxial BaTiO3 Films2010

    • Author(s)
      H. Imai, I. Kanno, R. Yokokawa, K. Wasa, H. Kotera
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 49

    • NAID

      210000069216

    • Related Report
      2011 Final Research Report
  • [Journal Article] Orientation Dependence of Shear Mode Piezoelectric Properties of Epitaxial Pb(Zrx, Til-x)O3 Thin Films2010

    • Author(s)
      Kenji Akama, Isaku Kanno, Ryuji Yokokawa, Kiyotaka Wasa, Hidetoshi Kotera
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: 49

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Orientation Dependence of Transverse Piezoelectric Properties of Epitaxial BaTiO3 Films2010

    • Author(s)
      Hideyuki Imai, Isaku Kanno, Ryuji Yokokawa, Kiyotaka Wasa, Hidetoshi Kotera
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: 49

    • NAID

      210000069216

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] High-efficiency piezoelectric energy harvesters of c-axis-oriented epitaxial PZT films transferred onto stainless steel cantilevers2010

    • Author(s)
      Keiji Morimoto, Isaku Kanno, Kiyotaka Wasa, Hidetoshi Kotera
    • Journal Title

      Sens.Actuators A

      Volume: 163 Pages: 428-432

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Sol-gel deposition and piezoelectric properties of {110}-oriented Pb(Zr0.52Ti0.48)O3 thin films2010

    • Author(s)
      Ambika, D.; Kumar, Viswanathan; Imai, Hideyuki; Kanno, Isaku
    • Journal Title

      Applied Physics Letters 96

      Pages: 31909-31909

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Evaluation of Intrinsic Shear Piezoelectric Coefficient d15 of c-Axis Oriented Pb(Zr, Ti) O3 Films2009

    • Author(s)
      I. Kanno, K. Akama, K. Wasa, H. Kotera
    • Journal Title

      Appl. Phys. Express

      Volume: Vol.2 Pages: 91402-91402

    • Related Report
      2011 Final Research Report
  • [Journal Article] Evaluation of Intrinsic Shear Piezoelectric Coefficient d15 of c-Axis Oriented Pb(Zr, Ti)O3 Films2009

    • Author(s)
      Isaku Kanno, Kenji Akama, Kiyotaka Wasa, Hidetoshi
    • Journal Title

      Applied Physics Express 2

      Pages: 91402-91402

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Presentation] 圧電薄膜を用いたMEMSエナジーハーベスト2012

    • Author(s)
      神野伊策
    • Organizer
      2012年春季第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(東京都)
    • Year and Date
      2012-03-16
    • Related Report
      2011 Annual Research Report
  • [Presentation] 圧電薄膜を用いたMEMSデバイス開発2012

    • Author(s)
      神野伊策
    • Organizer
      第18回『エレクトロニクスにおけるマイクロ接合・実装技術』(mate2012)
    • Place of Presentation
      パシフィコ横浜(神奈川県)
    • Year and Date
      2012-02-01
    • Related Report
      2011 Annual Research Report
  • [Presentation] 圧電薄膜を用いたMEMSデバイス開発2012

    • Author(s)
      神野伊策
    • Organizer
      第18回『エレクトロニクスにおけるマイクロ接合・実装技術』
    • Related Report
      2011 Final Research Report
  • [Presentation] VIBRATION ENERGY HAEVESTERS OF LEAD-FREE (K,Na)NbO3 PIEZOELECTRIC THIN FILMS2011

    • Author(s)
      I.Kanno, T.Ichida, H.Kotera, K.Shibata, F.Horikiri, T.Mishima
    • Organizer
      Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2011)
    • Place of Presentation
      ソウル
    • Year and Date
      2011-11-17
    • Related Report
      2011 Annual Research Report
  • [Presentation] Vibration energy harvesters of piezoelectric thin films2011

    • Author(s)
      Isaku Kanno
    • Organizer
      International Symposium on Green Manufactureing and Applications (ISGMA 2011)
    • Place of Presentation
      ソウル
    • Year and Date
      2011-10-06
    • Related Report
      2011 Annual Research Report
  • [Presentation] PIEZOELECTRIC ENERGY HARVESTERS OF PZT FILMS DEPOSITED ON TI CANTILEVERS2010

    • Author(s)
      I.Kanno, K.Sagawa, R.Oka, H.Kotera, J.Ogawa, N.Yamauchi, K.Aizawa, T.Mateushima
    • Organizer
      10th Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS2010)
    • Place of Presentation
      ベルギー ルーベン
    • Year and Date
      2010-12-02
    • Related Report
      2010 Annual Research Report
  • [Presentation] RFマグネトロンスパッタ法によるNaNbO3-BaTiO3積層膜の作製及び評価2010

    • Author(s)
      今井英之, 神野伊策, 横川隆司, 和佐清孝, 小寺秀俊
    • Organizer
      2010年秋季 第71回応用物理学会学術講演会
    • Place of Presentation
      長崎市・長崎大学
    • Year and Date
      2010-09-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] エピタキシャルPb(Mg1/3Nb2/3)O3-PbTiO3薄膜の圧電特性2010

    • Author(s)
      赤間健司, 神野伊策, 横川隆司, 和佐清孝, 小寺秀俊
    • Organizer
      2010年秋季 第71回応用物理学会学術講演会
    • Place of Presentation
      長崎市・長崎大学
    • Year and Date
      2010-09-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] DEVELOPMENT OF PIEZOELECTRIC MEMS DEFORMABLE MIRROR2010

    • Author(s)
      Masaehi Sato, Isaku Kanno, Hidetoshi Kotera
    • Organizer
      20th Annual ASME Conference on Information Storage and Processing Systems(ISPS'2010)
    • Place of Presentation
      米国カリフォルニア州サンタクララ
    • Year and Date
      2010-06-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] エピタキシャルPZT薄膜における圧電すべり効果の配向依存性2010

    • Author(s)
      赤間健司, 神野伊策, 小寺秀俊, 和佐清孝
    • Organizer
      第27回強誘電体応用会議
    • Place of Presentation
      京都市
    • Year and Date
      2010-05-28
    • Related Report
      2010 Annual Research Report
  • [Presentation] 非鉛BaTiO3膜の配向依存性および圧電特性評価2010

    • Author(s)
      今井英之, 神野伊策, 和佐清孝, 小寺秀俊
    • Organizer
      第27回強誘電体応用会議
    • Place of Presentation
      京都市
    • Year and Date
      2010-05-28
    • Related Report
      2010 Annual Research Report
  • [Presentation] エピタキシャルPZT薄膜における圧電すべり効果の配向依存性2010

    • Author(s)
      赤間健司, 神野伊策, 和佐清孝, 小寺秀俊
    • Organizer
      2010年 第57回応用物理学会関係連合講演会
    • Place of Presentation
      東海大学(神奈川県平塚市)
    • Year and Date
      2010-03-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] 配向制御したBaTiO3膜の結晶構造および圧電特性評価2010

    • Author(s)
      今井英之, 神野伊策, 和佐清孝, 小寺秀俊
    • Organizer
      2010年 第57回応用物理学会関係連合講演会
    • Place of Presentation
      東海大学(神奈川県平塚市)
    • Year and Date
      2010-03-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] 強誘電体簿膜を用いたエナジーハーベスティング技術2010

    • Author(s)
      神野伊策, 小寺秀俊
    • Organizer
      2010年 第57回応用物理学会関係連合講演会
    • Place of Presentation
      東海大学(神奈川県平塚市)
    • Year and Date
      2010-03-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] エピタキシャルPZT薄膜における圧電すべり効果の配向依存性2010

    • Author(s)
      赤間健司, 神野伊策, 和佐清孝, 小寺秀俊
    • Organizer
      応用物理学会春期講演会
    • Place of Presentation
      東海大学
    • Related Report
      2011 Final Research Report
  • [Presentation] 配向制御したBaTiO3膜の結晶構造および圧電特性評価2010

    • Author(s)
      今井英之, 神野伊策, 和佐清孝, 小寺秀俊
    • Organizer
      応用物理学会春期講演会
    • Place of Presentation
      東海大学
    • Related Report
      2011 Final Research Report
  • [Presentation] エピタキシャルPZT薄膜における圧電すべり効果の配向依存性2010

    • Author(s)
      赤間健司, 神野伊策, 和佐清孝, 小寺秀俊
    • Organizer
      第27回強誘電体応用会議
    • Place of Presentation
      京都
    • Related Report
      2011 Final Research Report
  • [Presentation] Piezoelectric MEMS-Their characteristics and potential applications2009

    • Author(s)
      Isaku Kanno
    • Organizer
      2009 CMOS Emerging Technologies Workshop
    • Place of Presentation
      メトロポリタンホテル(カナダ・バンクーバー)
    • Year and Date
      2009-09-23
    • Related Report
      2009 Annual Research Report
  • [Presentation] 転写エピタキシャルPZT薄膜の振動発電特性2009

    • Author(s)
      森本恵司, 神野伊策, 和佐清孝, 小寺秀俊, 山内規裕, 松嶋朝明
    • Organizer
      2009年秋季 第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学(富山県)
    • Year and Date
      2009-09-11
    • Related Report
      2009 Annual Research Report
  • [Presentation] エピタキシャルPZT薄膜における圧電すべり効果の定量的評価2009

    • Author(s)
      赤間健司, 神野伊策, 和佐清孝, 小寺秀俊
    • Organizer
      2009年秋季 第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学(富山県)
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] BaTiO3膜の配向制御および圧電特性評価2009

    • Author(s)
      今井英之, 神野伊策, 和佐清孝, 小寺秀俊
    • Organizer
      2009年秋季 第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学(富山県)
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] BaTiO3膜の配向制御および圧電特性評価2009

    • Author(s)
      今井英之, 神野伊策, 和佐清孝, 小寺秀俊
    • Organizer
      応用物理学会秋期講演会
    • Place of Presentation
      富山大学
    • Related Report
      2011 Final Research Report
  • [Presentation] エピタキシャルPZT薄膜における圧電すべり効果の定量的評価2009

    • Author(s)
      赤間健司, 神野伊策, 和佐清孝, 小寺秀俊
    • Organizer
      応用物理学会秋期講演会
    • Place of Presentation
      富山大学
    • Related Report
      2011 Final Research Report
  • [Remarks]

    • URL

      http://www.research.kobe-u.ac.jp/eng-dynamics/

    • Related Report
      2011 Annual Research Report
  • [Remarks]

    • URL

      http://www.researcherid.com/rid/B-3959-2010

    • Related Report
      2011 Annual Research Report

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Published: 2009-04-01   Modified: 2016-04-21  

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