Polarization control and development of new measurement method of piezoelectric properties for thin-film materials
| Project/Area Number |
21560328
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Electronic materials/Electric materials
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| Research Institution | Kobe University (2011)
Kyoto University (2009-2010) |
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Principal Investigator |
KANNO Isaku 神戸大学, 大学院・工学研究科, 教授 (70346039)
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| Project Period (FY) |
2009 – 2011
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| Project Status |
Completed (Fiscal Year 2011)
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| Budget Amount *help |
¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2011: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2010: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2009: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
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| Keywords | 圧電 / 薄膜 / 圧電すべり効果 / 圧電横効果 / PZT / MEMS |
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| Research Abstract |
In this study, we controlled the polarization direction of piezoelectric thin films and revealed the detailed piezoelectric characteristics of the thin film materials. Especially, we focused on the shear piezoelectricity of the thin films and developed the measurement system for it. The final goal of this study is to synthesis new piezoelectric thin films on the basis of the the whole piezoelectric properties of the thin films.
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Report
(4 results)
Research Products
(39 results)
