Inner surface profile measurement of a cylindrical object by an oblique incidence and multiple-wavelength interferometer

• Project/Area Number: 21560443
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Measurement engineering
• Research Institution: Niigata University
• Principal Investigator: SASAKI Osami 新潟大学, 自然科学系, 教授 (90018911)
• Co-Investigator(Kenkyū-buntansha): SUZUKI Takamasa 新潟大学, 自然科学系, 教授 (40206496)
• Project Period (FY): 2009 – 2011
• Project Status: Completed (Fiscal Year 2011)
• Budget Amount: ¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000); Fiscal Year 2011: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000); Fiscal Year 2010: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000); Fiscal Year 2009: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
• Keywords: 光干渉計測 / 円筒内面形状 / 多波長干渉計 / 斜め入射干渉計 / 正弦波位相変調 / 流体軸受 / 計測機器 / 2波長干渉計

Research Abstract

A collimated line beam is incident at an oblique incident angle into an inner surface of a hydrodynamic bearing whose inner diameter and length are 3 mm and 3. 5 mm, respectively. Lights reflected in specified directions from the inner surface are selected to obtain an optical field whose phase distribution is proportional to the inner surface profile. This optical field interferes with a reference optical field in a multiple-wavelength interferometer using a tunable external cavity laser diode. Shapes of grooves with depth of about 5μm on the inner surface can be measured with an error less than 0. 3μm.

Research Products

• [Presentation] 多波長レーザ干渉計を用いた円筒内面形状計測 (2011)
  • Author(s): 森松孝文
  • Organizer: 電子情報通信学会信越支部大会
  • Place of Presentation: 新潟工科大学柏崎
  • Year and Date: 2011-10-02
• [Presentation] 多波長レーザ干渉計を用いた円筒内面形状計測 (2011)
  • Author(s): 森松孝文、佐々木修己、崔森悦、鈴木孝昌
  • Organizer: 電子情報通信学会信越支部大会
• [Presentation] Inner surface profile measurement of a hydrodynamic bearing by an oblique incidence and two-wavelength interferometer (2009)
  • Author(s): Osami Sasaki
  • Organizer: Optics+Photonics 2009, SPIE
  • Place of Presentation: San Diego, USA
  • Year and Date: 2009-08-03
• [Presentation] Inner surface profile measurement of a hydrodynamic bearing by an oblique incidence and two-wavelength interferometer, Optics+Photonics 2009 (2009)
  • Author(s): O. Sasaki, R. Yamamura, K. Yokoyama, and T. Suzuki
  • Organizer: Optical Inspection and Metrology for Non-Optics Industries
  • Place of Presentation: San Deigo, USA