Study on highly efficient laser-plasma light source and its applications for microfabrication and textural control of materials
| Project/Area Number |
21560752
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Material processing/treatments
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| Research Institution | University of Hyogo |
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Principal Investigator |
MOCHIZUKI Takayasu 兵庫県立大学, 高度産業科学技術研究所, 特任教授 (80101278)
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| Co-Investigator(Kenkyū-buntansha) |
MIYAMOTO Shuji 兵庫県立大学, 高度産業科学技術研究所, 教授 (90135757)
UTSUMI Uichi 兵庫県立大学, 高度産業科学技術研究所, 教授 (80326298)
AMANO Sho 兵庫県立大学, 高度産業科学技術研究所, 助教 (50271200)
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| Project Period (FY) |
2009 – 2011
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| Project Status |
Completed (Fiscal Year 2011)
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| Budget Amount *help |
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2011: ¥390,000 (Direct Cost: ¥300,000、Indirect Cost: ¥90,000)
Fiscal Year 2010: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2009: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
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| Keywords | レーザープラズマ / 極端紫外光(EUV光) / プラズマデブリ / アルゴンガスバッファー / キセノン / 軟X線 / レーザー生成プラズマ / ガスバッファ / アルゴン / リチウム / ダブルパルス / スパッタリング |
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| Research Abstract |
Plasma expansions on micro-balloon lithium targets irradiated with coaxial double pulses and counter-streamed simultaneous two-pulses were observed by a time-resolved EUV camera. The counter-streamed pulses were confirmed to be more effective for uniform heating of the target. A soft X-ray conversion efficiency in a wavelength range of 5-17 nm in a cryogenic xenon rotating target was 25%/2πsr at the maximum. An attenuation coefficient of sputtering by the debris and an absorption coefficient of soft x-rays at 13.5 nm by argon gas were derived to be 2.2×10^<20> m^2 and 1.8×10^<-22> m^2, respectively. The attenuation coefficient of sputtering is concluded to be equivalent to the effective collision cross section. These parameters provide a useful design tool for realizing a practical soft x-ray source.
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Report
(4 results)
Research Products
(10 results)
