Investigations of Phase Transition and Ultra-fast Carrier Excitation in Semiconductor by Ultra-short Coherent Light Sources

• Project/Area Number: 21560762
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Material processing/treatments
• Research Institution: Institute for Laser Technology
• Principal Investigator: FUJITA Masayuki (財)レーザー技術総合研究所, レーザープロセス研究チーム, 主席研究員 (30260178)
• Co-Investigator(Renkei-kenkyūsha): SOMEKAWA Toshihiro (財)レーザー技術総合研究所, レーザープロセス研究チーム, 研究員 (00508442)
• Project Period (FY): 2009 – 2011
• Project Status: Completed (Fiscal Year 2011)
• Budget Amount: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000); Fiscal Year 2011: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000); Fiscal Year 2010: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000); Fiscal Year 2009: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
• Keywords: 結晶・組織制御 / レーザー加工

Research Abstract

Femtosecond laser irradiation near ablation threshold generates periodic structures, which give us clues to understand interactions between materials and coherent light. In these studies, SiC and Al-Si alloy are used as samples. We investigated changes of periodic surface structure, which were influenced by the phase transition of semiconductors and changes of the ablation thresholds and effective optical penetration depths accompanied with carrier excitation.

Research Products

• [Journal Article] フェムト秒レーザーが切り開く新しい微細加工技術 (2012)
  • Author(s): 藤田雅之
  • Journal Title: 応用物理 Volume: 81巻 Pages: 380-385
  • NAID: 10030594594
  • Peer Reviewed
• [Presentation] レーザープロセシングの現状とこれから (2011)
  • Author(s): 藤田雅之
  • Organizer: 日本光学会年次学術講演会(招待講演)
  • Place of Presentation: 大阪大学コンベンションセンター
  • Year and Date: 2011-11-29
• [Presentation] レーザープロセシングの現状とこれから (2011)
  • Author(s): 藤田雅之
  • Organizer: 日本光学会年次学術講演会
  • Place of Presentation: 大阪大学コンベンションセンター(招待講演)
  • Year and Date: 2011-11-29
• [Presentation] 複合・多層材料のレーザー加工 (2010)
  • Author(s): 藤田雅之
  • Organizer: 第74回レーザ加工学会
  • Place of Presentation: 東京大学生産技術研究所
  • Year and Date: 2010-12-07
• [Presentation] 4H-SiCのフェムト秒ダブルパルスレーザーによる周期構造形成 (2010)
  • Author(s): 染川智弘、濱村隆司、藤田雅之, 他
  • Organizer: 第71回応用物理学会学術講演会
  • Place of Presentation: 長崎大学
  • Year and Date: 2010-09-15
• [Remarks]
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