Quantitative analysis of SEM image contrasts with consideration of diffraction phenomenon and challenges of nano-characterization

• Project/Area Number: 21651054
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Single-year Grants
• Research Field: Nanomaterials/Nanobioscience
• Research Institution: Kyushu University
• Principal Investigator: KUWANO Noriyuki 九州大学, 産学連携センター, 教授 (50038022)
• Project Period (FY): 2009 – 2011
• Project Status: Completed (Fiscal Year 2011)
• Budget Amount: ¥3,280,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥180,000); Fiscal Year 2011: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000); Fiscal Year 2010: ¥900,000 (Direct Cost: ¥900,000); Fiscal Year 2009: ¥1,600,000 (Direct Cost: ¥1,600,000)
• Keywords: 走査電子顕微鏡 / 像コントラスト / 電子回折 / 後方散乱電子 / チャネリング / 微細構造解析転位 / バーガースベクトル / 微細構造解析 / 後方散乱回折 / 走査型電子顕微鏡 / 二次電子 / 格子欠陥 / 2次電子 / 転位

Research Abstract

In this research project, the formation mechanism of electron channeling(EC) contrasts in SEM-BSE(back-scatter electron) images was investigated by examining the influences of EC contrasts to the tilting of specimen and the position of an electron detector. The experimental results revealed that the EC contrasts are explained by the relative relationship between the intensity distribution of primary electron waves and the positions of atomic columns in crystalline specimen. A new procedure for characterization of dislocations was proposed.

Research Products

• [Journal Article] 組織制御に向けた高性能Nd-Fe-B系磁石材料のナノ構造解析 (2012)
  • Author(s): 板倉賢、桑野範之
  • Journal Title: 日本金属学会誌 Volume: 76(1) Pages: 17-26
  • NAID: 10030260366
  • Peer Reviewed
• [Journal Article] Microstructure of AlN grown on a nucleation layer on sapphire substrate (2012)
  • Author(s): R.Miyagawa, S.Yang, H.Miyake, K.Hiramatsu, T.Kuwahara, M.Mitsuhara, N.Kuwano
  • Journal Title: Appl.Phys.Express Volume: Volime 5 No.2 Issue: 2 Pages: 025501-025501
  • DOI: 10.1143/apex.5.025501
  • Peer Reviewed
• [Journal Article] Microstructure of Bulk AIN Grown by a New Solution Growth Method (2011)
  • Author(s): Yoshihiro Kangawa, Noriyuki Kuwano, Boris M.Epelbaum, Koichi Kakimoto
  • Journal Title: Japanese Journal of Applied Physics Volume: 50 Issue: 12R Pages: 120202-120202
  • DOI: 10.1143/jjap.50.120202
  • Peer Reviewed
• [Journal Article] Scanning electron microscope observation of dislocations insemiconductor and metal materials (2010)
  • Author(s): Noriyuki Kuwano
  • Journal Title: Masaru Itakura, Yoshiyuki Nagatomo and Shigeaki Tachibana, J. Electron Microscopy Volume: 59 Pages: 175-181
  • Peer Reviewed
• [Journal Article] Variations in contrast of scanning electron microscope images for microstructure analysis of Si-based semiconductor materials, Masaru Itakura (2010)
  • Author(s): Noriyuki Kuwano
  • Journal Title: Kaoru Sato and Shigeaki Tachibana, J. Electron Microscopy Volume: 59 Pages: 165-173
  • Peer Reviewed
• [Journal Article] Microscopic studies of metal-induced lateral crystallization in SiGe, Masaru Itakura, Shunji Masumori (2010)
  • Author(s): Noriyuki Kuwano
  • Journal Title: Hiroshi Kanno, Taizoh Sadoh and Masanobu Miyao, Applied Physics Letters Volume: 96
  • Peer Reviewed
• [Journal Article] Fracture Process of Aluminum/Aluminum Nitride Interfaces during Thermal Cycling, Yoshiyuki Nagatomo, Ryo (2010)
  • Author(s): Muranaka, Hiromasa Hayashi, Yoshirou Kuromitsu and Noriyuki Kuwano
  • Journal Title: Materials Science Forum Volume: 638/642 Pages: 3895-3900
  • Peer Reviewed
• [Journal Article] Microscopic studies of metal-induced lateral crystallization in SinGe (2010)
  • Author(s): Masaru Itakura, et al
  • Journal Title: Applied Physics Letters Volume: 96
  • Peer Reviewed
• [Journal Article] Formation mechanism of Al-depleted bands in MOVPE-AlGaN layer on GaN template with trenches (2010)
  • Author(s): Noriyuki Kuwano, et al
  • Journal Title: Physical Status Solidi Volume: C7 Pages: 2036-2039
  • Peer Reviewed
• [Journal Article] Variation in contrast of scanning electron microscope images for microstructure analysis of Si-based semiconductor materials (2010)
  • Author(s): Masaru Itakura, et al
  • Journal Title: J.Electron Microscopy Volume: 59
  • Peer Reviewed
• [Journal Article] Scanning electron microscope observation of dislocations in semiconductor and metal materials (2010)
  • Author(s): Noriyuki Kuwano, et al.
  • Journal Title: J.Electron Microscopy Volume: 59
  • Peer Reviewed
• [Journal Article] Electron microscopy analysis of dislocation behavior in HVEM-AlGaN layer grown on a stripe-pattered(0001)sapphire substrate (2009)
  • Author(s): Noriyuki Kuwano, Yuta Kugiyama, Yutaka Nishikouri, Tadashige Sato, Akira Usui
  • Journal Title: J.Crystal Growth 311 Pages: 3085-3088
  • Peer Reviewed
• [Presentation] Workshop on the Collaboration of Application of Electron Microscopy at MJIIT UTM (2012)
  • Author(s): Introduction of Potential Uses of Advanced SEM, Noriyuki Kuwano
  • Place of Presentation: International Campus, University of Technology Malaysia, Kuala Lampur, Malaysia
  • Year and Date: 2012-05-10
• [Presentation] 半導体薄膜結晶のひずみを観る (2012)
  • Author(s): 桑野範之、桑原崇彰
  • Organizer: 2012年春季第59回応用物理学関係連合講演会
  • Place of Presentation: 早稲田大学
  • Year and Date: 2012-03-15
• [Presentation] 半導体薄膜結晶のひずみを観る (2012)
  • Author(s): 桑野範之、桑原崇彰
  • Organizer: 2012年春季第59回応用物理学関係連合講演会
  • Place of Presentation: 早稲田大学(招待講演)
  • Year and Date: 2012-03-15
• [Presentation] 結晶の皺を鑑る (2011)
  • Author(s): 桑野範之
  • Organizer: 第3回窒化物半導体結晶成長講演会
  • Place of Presentation: 九州大学筑紫キャンパス
  • Year and Date: 2011-06-18
• [Presentation] Behavior of Threading Dislocations in VPE-Grown AlGaN (2011)
  • Author(s): Noriyuki Kuwano, Tomoaki Fujita, Tadaaki Kuwahara, Hideto Miyake, Kazumasa Hiramatsu
  • Organizer: IUMAS-V (5th Congress of International Union of Microbeam Analysis Society)
  • Place of Presentation: Seoul Olympic Parktel, Seoul, Korea(招待講演)
  • Year and Date: 2011-05-23
• [Presentation] SEM技術現在から未来へ(材料 (2011)
  • Author(s): 桑野範之
  • Organizer: 日本顕微鏡学会第67回学術講演会
  • Place of Presentation: 福岡国際会議場
  • Year and Date: 2011-05-17
• [Presentation] SEM技術現在から未来へ(材料) (2011)
  • Author(s): 桑野範之
  • Organizer: 日本顕微鏡学会第67回学術講演会
  • Place of Presentation: 福岡国際会議場(招待講演)
  • Year and Date: 2011-05-17
• [Presentation] 半極性InGaN薄膜成長に伴う転位の挙動 (2011)
  • Author(s): 桑原崇彰、藤田智彰、桑野範之、栗栖彰宏、岡田成仁、只友一行
  • Organizer: 日本顕微鏡学会第67回学術講演会
  • Place of Presentation: 福岡国際会議場
  • Year and Date: 2011-05-16
• [Presentation] TEM and SEM Analysis for Formation Mechanism of Tin Whiskers (2010)
  • Author(s): N.Kuwano, et al.
  • Organizer: International Conference on the Advancement of Materials & Nanotechnology II
  • Place of Presentation: Prince Hotel, Kuala Lumpur, Malaysia
  • Year and Date: 2010-11-30
• [Presentation] 結晶欠陥の評価-転位などの結晶欠陥の見方・考え方- (2010)
  • Author(s): 桑野範之
  • Organizer: 第1回結晶工学講演会「半導体デバイスの基盤をなす結晶工学」
  • Place of Presentation: 学習院大学(東京)
  • Year and Date: 2010-07-29
• [Presentation] 微細構造解析ツールとしての最先端SEM「何がどこまで見えるのか?」についての討論 (2010)
  • Author(s): 板倉賢、桑野範之、佐藤馨、立花繁明
  • Organizer: 日本顕微鏡学会第66回学術講演会
  • Place of Presentation: 名古屋国際会議場
  • Year and Date: 2010-05-24
• [Presentation] 走査電顕による転位コントラストの発現機構について (2010)
  • Author(s): 桑野範之立花繁明
  • Organizer: 日本顕微鏡学会第66回学術講演会
  • Place of Presentation: 名古屋国際会議場
  • Year and Date: 2010-05-24
• [Presentation] 走査電顕による転位コントラストの発現機構について (2010)
  • Author(s): 桑野範之, 他
  • Organizer: 日本顕微鏡学会第66回学術講演会
  • Place of Presentation: 名古屋国際会議場(名古屋市)
  • Year and Date: 2010-05-24
• [Presentation] 微細構造解析ツールとしての最先端SEM「何がどこまで見えるのか?」についての討論 (2010)
  • Author(s): 板倉賢, 他
  • Organizer: 日本顕微鏡学会第66回学術講演会
  • Place of Presentation: 名古屋国際会議場(名古屋市)
  • Year and Date: 2010-05-24
• [Presentation] Formation Mechanism of Al-Depleted Bands in MOVPE-AlGaN Layer on GaN Template with Trenches (2009)
  • Author(s): N. Kuwano, T. Ezaki, T. Kurogi, H. Miyake and K.
  • Organizer: Hiramatsu, The 8th InternationalConference n Nitride Semiconductors(ICNS-8)
  • Place of Presentation: ICC Jeju, Korea
  • Year and Date: 2009-10-20
• [Presentation] Scanning Electron Microscope Observation of Dislocations in Semiconductor and Metal Materials (2009)
  • Author(s): Noriyuki Kuwano
  • Organizer: Masaru Italkura, Yoshiyuki Nagatomo and Shigeaki Tachibana, Frontiers of Electron Microscopy in Materials Science(FEMMS2009)
  • Place of Presentation: Huis Ten Bosch, Sasebo
  • Year and Date: 2009-09-30
• [Presentation] Variation in Contrast of Scanning Electron Microscope Images for Microstructure Analysis of Si-based Semiconductor Materials, Masaru Itakura (2009)
  • Author(s): Noriyuki Kuwano
  • Organizer: Kaoru Sato, Shigeaki Tachibana, Frontiers of Electron Microscopy in Materials Science(FEMMS2009)
  • Place of Presentation: Huis Ten Bosch, Sasebo
  • Year and Date: 2009-09-29
• [Presentation] TEMとSEMによる微細構造解析 (2009)
  • Author(s): 桑野範之
  • Organizer: 第19回格子欠陥フォーラム「半導体格子欠陥の最前線」
  • Place of Presentation: 九州大学
  • Year and Date: 2009-09-24
• [Presentation] Fracture Process of Aluminum/Aluminum Nitride interfaces during Thermal Cycling, Yoshiyuki Nagatomo, Ryo Muranaka, Hiromasa Hayashi (2009)
  • Author(s): Yoshirou Kuromitsu and Noriyuki Kuwano
  • Organizer: International Conference on Processing & Manufacturing of Advanced Materials(THERMEC' 2009)
  • Place of Presentation: Berlin
  • Year and Date: 2009-08-27
• [Presentation] 材料微細構造解析機器としてのSEM:「SEM解析の将来」についての討論 (2009)
  • Author(s): 桑野範之、板倉賢、佐藤馨
  • Organizer: 日本顕微鏡学会第65回学術講演会
  • Place of Presentation: 仙台国際センター
  • Year and Date: 2009-05-27
• [Presentation] 走査電子顕微鏡で見たシリコン系半導体薄膜の微細構造 (2009)
  • Author(s): 板倉賢、桑野範之、立花繁明、佐藤馨
  • Organizer: 日本顕微鏡学会第65回学術講演会
  • Place of Presentation: 仙台国際センター
  • Year and Date: 2009-05-27
• [Presentation] Scanning Electron Microscope Observation of Dislocations in Semiconductor and Metal Materials (2009)
  • Author(s): Noriyuki Kuwano, Masaru Italkura, Yoshiyuki Nagatomo, Shigeaki Tachibana
  • Organizer: Frontiers of Electron Microscopy in Materials Science(FEMMS2009)
  • Place of Presentation: ハウステンボス(佐世保)
• [Presentation] Variation in Contrast of Scanning Electron Microscope Images for Microstructure Analysis of Si-based Semiconductor Materials (2009)
  • Author(s): Masaru Itakura, Noriyuki Kuwano, Kaoru Sato, Shigeaki Tachibana
  • Organizer: Frontiers of Electron Microscopy in Materials Science(FEMMS2009)
  • Place of Presentation: ハウステンボス(佐世保)