Quantitative analysis of SEM image contrasts with consideration of diffraction phenomenon and challenges of nano-characterization
Project/Area Number |
21651054
|
Research Category |
Grant-in-Aid for Challenging Exploratory Research
|
Allocation Type | Single-year Grants |
Research Field |
Nanomaterials/Nanobioscience
|
Research Institution | Kyushu University |
Principal Investigator |
|
Project Period (FY) |
2009 – 2011
|
Project Status |
Completed (Fiscal Year 2011)
|
Budget Amount *help |
¥3,280,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥180,000)
Fiscal Year 2011: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2010: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 2009: ¥1,600,000 (Direct Cost: ¥1,600,000)
|
Keywords | 走査電子顕微鏡 / 像コントラスト / 電子回折 / 後方散乱電子 / チャネリング / 微細構造解析転位 / バーガースベクトル / 微細構造解析 / 後方散乱回折 / 走査型電子顕微鏡 / 二次電子 / 格子欠陥 / 2次電子 / 転位 |
Research Abstract |
In this research project, the formation mechanism of electron channeling(EC) contrasts in SEM-BSE(back-scatter electron) images was investigated by examining the influences of EC contrasts to the tilting of specimen and the position of an electron detector. The experimental results revealed that the EC contrasts are explained by the relative relationship between the intensity distribution of primary electron waves and the positions of atomic columns in crystalline specimen. A new procedure for characterization of dislocations was proposed.
|
Report
(4 results)
Research Products
(35 results)
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
[Presentation] 結晶の皺を鑑る2011
Author(s)
桑野範之
Organizer
第3回窒化物半導体結晶成長講演会
Place of Presentation
九州大学筑紫キャンパス
Year and Date
2011-06-18
Related Report
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-
-