| Project/Area Number |
21656105
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Single-year Grants |
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| Research Field |
Measurement engineering
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| Research Institution | Toyota Technological Institute |
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Principal Investigator |
SASAKI Minoru 豊田工業大学, 工学部, 教授 (70282100)
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| Co-Investigator(Kenkyū-buntansha) |
KUMAGAI Shinya 豊田工業大学, 工学部, 准教授 (70333888)
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| Project Period (FY) |
2009 – 2011
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| Project Status |
Completed (Fiscal Year 2011)
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| Budget Amount *help |
¥2,680,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥180,000)
Fiscal Year 2011: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2010: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 2009: ¥1,100,000 (Direct Cost: ¥1,100,000)
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| Keywords | 計測工学 / マイクロ・ナノデバイス / 赤外線センサ / 振動型 / 非線形効果 / 非線形バネ / 張力 / 薄膜トーションバー / 多結晶シリコン / 感度 / Q値 / 温度特性 |
|---|
| Research Abstract |
A new infra-red sensor is proposed using the non-linear vibration, which can be observed in the tense thin film MEMS twisting resonator under the influence of the thermal stress generating the bending. The basic performance is confirmed by designing and fabricating the devices. The shift of the resonant frequency indicates the detection of the infra-red. From the results operated under the vacuum condition, 0.04℃change of the resonator temperature is estimated to be resolved.
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