Elucidation of Dynamic Dislocation Behavior in Nano-scale Metal Component

• Project/Area Number: 21686013
• Research Category: Grant-in-Aid for Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: Materials/Mechanics of materials
• Research Institution: Kyoto University
• Principal Investigator: SUMIGAWA Takashi 京都大学, 大学院・工学研究科, 准教授 (80403989)
• Project Period (FY): 2009 – 2011
• Project Status: Completed (Fiscal Year 2011)
• Budget Amount: ¥27,560,000 (Direct Cost: ¥21,200,000、Indirect Cost: ¥6,360,000); Fiscal Year 2011: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000); Fiscal Year 2010: ¥6,370,000 (Direct Cost: ¥4,900,000、Indirect Cost: ¥1,470,000); Fiscal Year 2009: ¥18,070,000 (Direct Cost: ¥13,900,000、Indirect Cost: ¥4,170,000)
• Keywords: ナノ / 塑性変形 / 転位 / 透過型電子顕微鏡 / 力学解析 / 金属 / 変形特性 / メカニズム

Research Abstract

In order to investigate the plastic deformation mechanism in nano-components where a nano-thickness copper(Cu) film is sandwiched between a silicon(Si) substrate and silicon nitride(SiN) layer, we developed a bending specimen, of which understructure can be observed in-situ by means of a transmission electron microscope(TEM), and examined the plastic behavior of a Cu portion. TEM images exhibited that an initial plastic deformation took place near the interface edge(junction between the Cu/Si interface and the surface) in the Cu portion with a high critical resolved shear stress(400. 420 MPa). The TEM observation after the experiment indicated that stacking fault layers governed the plastic deformation in nano-scale region near the dissimilar interface.

Research Products

• [Journal Article] Criterion of mechanical instabilities for dislocation structures (2012)
  • Author(s): Yan Yabin
  • Journal Title: Materials Science and Engineering A Volume: 534 Pages: 681-687
  • DOI: 10.1016/j.msea.2011.12.027
  • Peer Reviewed
• [Journal Article] Fatigue Strength of Cu/Si Interface in Nano-Component (2011)
  • Author(s): Takashi Sumigawa, 他
  • Journal Title: Materials Science and Engineering A Volume: 528 Issue: 15 Pages: 5158-5163
  • DOI: 10.1016/j.msea.2011.03.023
  • Peer Reviewed
• [Journal Article] 微小曲げ試験を用いたTa2O5薄膜の機械特性評価 (2011)
  • Author(s): 大倉康孝, 澄川貴志, 井手修平, 北村隆行
  • Journal Title: 日本機械学会論文集(A編) Volume: 77巻775号 Pages: 495-504
  • NAID: 130000874181
  • Peer Reviewed
• [Journal Article] Three-Dimensional Cohesive Zone Modeling on Interface Crack Initiation from Nanoscale Stress Concentration (2011)
  • Author(s): Yan Yan, Takashi Sumigawa
  • Journal Title: Journal of Solid Mechanics and Materials Engineering Volume: 5 Issue: 2 Pages: 117-127
  • DOI: 10.1299/jmmp.5.117
  • NAID: 130000422401
  • ISSN: 1880-9871
  • Peer Reviewed
• [Journal Article] Cohesive Zone Criterion for Cracking along the Cu/Si Interface in Nanoscale Components (2011)
  • Author(s): Yabin Yan, Takashi Sumigawa, Fulin Shang and Takayuki Kitamura
  • Journal Title: Engineering Fracture Mechanics, with peer review Volume: 78 Issue: 17 Pages: 2935-2946
  • DOI: 10.1016/j.engfracmech.2011.08.010
• [Journal Article] Evaluation on Mechanical Property of Ta2O5 Thin Film by Microscale Bending Test (2011)
  • Author(s): 澄川貴志, 他
  • Journal Title: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A Volume: 77 Issue: 775 Pages: 495-504
  • DOI: 10.1299/kikaia.77.495
  • NAID: 130000874181
  • ISSN: 0387-5008, 1884-8338
  • Peer Reviewed
• [Journal Article] Stress Singularity Transition of Generic Wedges Due To Nanoelement Layer (2011)
  • Author(s): Takashi Sumigawa, et.al
  • Journal Title: Engineering Fracture Mechanics Volume: 78 Issue: 16 Pages: 2789-2799
  • DOI: 10.1016/j.engfracmech.2011.08.004
  • Peer Reviewed
• [Journal Article] Development of in-situ TEM Observation Method on Plasticity in Nanoscale Component (2011)
  • Author(s): Takashi Sumigawa, ほか
  • Journal Title: Journal of Solid Mechanics and Materials Engineering Volume: 5 Pages: 128-137
  • NAID: 130000660992
  • Peer Reviewed
• [Journal Article] 微小曲げ試験を用いたTa_2O_5薄膜の機械特性評価 (2011)
  • Author(s): 大倉康孝, ほか
  • Journal Title: 日本機械学会論文集 Volume: 77 Pages: 495-504
  • Peer Reviewed
• [Journal Article] Evaluation on Plastic Deformation Property of Cooperman-Film by Nano-Scale Cantilever Specimen (2010)
  • Author(s): Takashi Sumigawa, Tetsuya Shishido, Tadashi Murakami and Takayuki Kitamura
  • Journal Title: Thin Solid Films, with peer review Volume: Vol.518 Issue: 21 Pages: 6040-6047
  • DOI: 10.1016/j.tsf.2010.06.039
• [Journal Article] Interface Crack Initiation Due to Nanoscale Stress Concentration (2010)
  • Author(s): Takashi Sumigawa, Tetsuya Shishido, Tadashi Murakami and Takayuki Kitamura
  • Journal Title: Material Science and Engineering A, with peer review Volume: Vol.527 Issue: 18-19 Pages: 4796-4803
  • DOI: 10.1016/j.msea.2010.04.002
• [Journal Article] Cu/Si Interface Fracture due to Fatigue of Copper Film in Nanometer Scale (2010)
  • Author(s): Takashi Sumigawa, Tadashi Murakami, Tetsuya Shishido and Takayuki Kitamura
  • Journal Title: Material Science and Engineering A, with peer review Volume: Vol.527 Issue: 24-25 Pages: 6518-6523
  • DOI: 10.1016/j.msea.2010.07.002
  • NAID: 120002511342
• [Journal Article] 透過型電子顕微鏡を用いたナノスケール構造体中の塑性領域に対するその場観察試験手法の開発 (2010)
  • Author(s): 澄川貴志, 北川裕次郎, 北村隆行
  • Journal Title: 日本機械学会論文集(A編) Volume: 76巻772号 Pages: 1713-1720
  • NAID: 110008143581
  • Peer Reviewed
• [Journal Article] 離散転位動力学に基づく転位組織の力学的不安定性クライテリオン (2010)
  • Author(s): 嶋田隆広, 近藤忠広, 澄川貴志, 北村隆行
  • Journal Title: 日本機械学会論文集(A編) Volume: 76巻772号 Pages: 1721-1728
  • NAID: 110008143582
  • Peer Reviewed
• [Journal Article] Interface crack initiation due to nano-scale stress concentration (2010)
  • Author(s): Takashi Sumigawa, ほか
  • Journal Title: Materials Science and Engineering A Volume: 527 Pages: 4796-4803
  • NAID: 120002511341
  • Peer Reviewed
• [Journal Article] Evaluation on plastic deformation property of copper nano-film by nano-scale cantilever specimen (2010)
  • Author(s): Takashi Sumigawa, ほか
  • Journal Title: Thin Solid Films Volume: 518 Pages: 6040-6047
  • NAID: 120002511340
  • Peer Reviewed
• [Journal Article] Cu/Si interface fracture due to fatigue of copper film in nanometer scale (2010)
  • Author(s): Takashi Sumigawa, ほか
  • Journal Title: Materials Science and Engineering A Volume: 527 Pages: 6518-6523
  • NAID: 120002511342
  • Peer Reviewed
• [Journal Article] 透過型電子顕微鏡を用いたナノスケール構造対中の塑性領域に対するその場観察試験手法の開発 (2010)
  • Author(s): 澄川貴志, ほか
  • Journal Title: 日本機械学会論文集 Volume: 76 Pages: 1713-1720
  • Peer Reviewed
• [Journal Article] 離散転位動力学に基づく転位組織の力学的不安定性クライテリオン (2010)
  • Author(s): 嶋田隆広, ほか
  • Journal Title: 日本機械学会論文集 Volume: 76 Pages: 1721-1728
  • Peer Reviewed
• [Journal Article] Interface Crack Initiation Due to Nanoscale Stress Concentration (2010)
  • Author(s): T.Sumigawa, ほか
  • Journal Title: Material Engineering and Science A (In press)
  • Peer Reviewed
• [Journal Article] 破壊のナノ力学(第1報 ナノ構造体の界面強度) (2009)
  • Author(s): 北村隆行、澄川貴志, ほか
  • Journal Title: 日本機械学会論文集 A編 75 Pages: 77-783
  • Peer Reviewed
• [Journal Article] 破壊のナノカ学(第2報 ナノ要素の強度) (2009)
  • Author(s): 北村隆行、澄川貴志, ほか
  • Journal Title: 日本機械学会論文集 A編 75 Pages: 784-791
  • Peer Reviewed
• [Journal Article] Analysis of Stress Distribution in Au Micro-Interconnection by Polycrystalline Models (2009)
  • Author(s): Y.Kawamura, T.Sumigawa, ほか
  • Journal Title: Journal of Computational Science and Technology 3 Pages: 159-170
  • NAID: 130000105005
  • Peer Reviewed
• [Presentation] 銅ナノ薄膜を有する微小構造体の疲労強度 (2012)
  • Author(s): 澄川貴志
  • Organizer: 日本機械学会関西支部第87期定時総会講演会
  • Place of Presentation: 吹田市、関西大学
  • Year and Date: 2012-03-17
• [Presentation] Criterion for crack initiation at the interface edge innano-components (2012)
  • Author(s): Takashi Sumigawa and Takayuki Kitamura
  • Organizer: Asian Pacific Conference on Fracture and Strength-Mechanics and Materials
  • Place of Presentation: Busan(Korea)
• [Presentation] Fatigue and Fracture Criterion in Nano-components (2012)
  • Author(s): Takashi Sumigawa, Takahiro Shimada and Takayuki Kitamura
  • Organizer: IUTAM Symposium on Advanced Materials Modeling for Structures
  • Place of Presentation: Paris(Frace)
• [Presentation] 銅ナノ薄膜を有する微小構造体の疲労強度 (2012)
  • Author(s): 澄川貴志, 北村隆行
  • Organizer: 日本機械学会関西支部第87期定時総会講演会
  • Place of Presentation: 吹田市
• [Presentation] Evaluation of mechanical properties of nano-component by bending experiment with in-situ TEM observation (2011)
  • Author(s): Takashi Sumigawa
  • Organizer: The 14th International Symposium on Technology for Next Generation Vehicle
  • Place of Presentation: Gwanju (KOREA)
  • Year and Date: 2011-11-11
• [Presentation] In-situ TEM Observation on Fracture of Dissimilar Interface in Nanoscale Component (2011)
  • Author(s): Takashi Sumigawa
  • Organizer: International Conference on Advanced Technology in Experimental Mechanics 2011 (ATEM'11)
  • Place of Presentation: Kobe (Japan)
  • Year and Date: 2011-09-21
• [Presentation] 異材界面を有するナノ構造体の変形と破壊 (2011)
  • Author(s): 澄川貴志
  • Organizer: 日本機械学会M&M2011材料力学カンファレンス
  • Place of Presentation: 北九州市、九州工業大学
  • Year and Date: 2011-07-18
• [Presentation] (2011)
  • Author(s): 澄川貴志
  • Organizer: 日本材料学会・第60期学術講演会
  • Place of Presentation: 吹田市、大阪大学
  • Year and Date: 2011-05-26
• [Presentation] Evaluation of mechanical properties of nano-component by bending experiment with in-situ TEM observation (2011)
  • Author(s): Takashi Sumigawa
  • Organizer: The 14thInternational Symposium on Technology for Next Generation Vehicle
  • Place of Presentation: Gwanju(KOREA)
• [Presentation] In-situ TEM Observation on Fracture of Dissimilar Interface in Nanoscale Component (2011)
  • Author(s): Takashi Sumigawa, Takuya Nakano and Takayuki Kitamura
  • Organizer: International Conference on Advanced Technology in Experimental Mechanics 2011
  • Place of Presentation: Kobe JAPAN)
• [Presentation] 異材界面を有するナノ構造体の変形と破壊 (2011)
  • Author(s): 岸本光平, 石井義之, 澄川貴志, 北村隆行
  • Organizer: 日本機械学会M & M2011材料力学カンファレンス
  • Place of Presentation: 北九州市
• [Presentation] 結晶塑性を考慮したCu微細接合部の局在ひずみ解析 (2011)
  • Author(s): 澄川貴志, 中野拓哉, 北村隆行
  • Organizer: 日本機械学会M & M2011材料力学カンファレンス
  • Place of Presentation: 北九州市
• [Presentation] 銅ナノ薄膜界面における破壊の透過電子顕微鏡その場観察 (2011)
  • Author(s): 澄川貴志, 中野拓哉, 北村隆行
  • Organizer: 日本材料学会・第60期学術講演会
  • Place of Presentation: 吹田市
• [Presentation] ナノ領域における動薄膜の疲労 (2010)
  • Author(s): 澄川貴志
  • Organizer: 日本機械学会M&M2010材料力学カンファレンス
  • Place of Presentation: 長岡技術科学大学,新潟県長岡市
  • Year and Date: 2010-10-11
• [Presentation] Governing Mechanical Factor on Interface Crack Initiation in Nanometer-Scale Components (2010)
  • Author(s): Takashi Sumigawa
  • Organizer: 18^<th> European Conference on Fracture
  • Place of Presentation: University of Dresden, Germany
  • Year and Date: 2010-09-01
• [Presentation] ナノ領域における銅薄膜の疲労 (2010)
  • Author(s): 澄川貴志, 村上直司, 宍戸徹也, 北村隆行
  • Organizer: 日本機械学会M & M2010材料力学カンファレンス
  • Place of Presentation: 長岡市
• [Presentation] Governing Mechanical Factor on Interface Crack Initiation in Nanometer-Scale Components (2010)
  • Author(s): Takashi Sumigawa and Takayuki Kitamura
  • Organizer: 18th European Conference on Fracture
  • Place of Presentation: Dresden(GERMANY)
• [Presentation] ナノ構造体におけるCu薄膜/Si基板界面中央部からのき裂発生 (2009)
  • Author(s): 澄川貴志, ほか
  • Organizer: 日本機械学会2009年度材料力学カンファレンス
  • Place of Presentation: 札幌
  • Year and Date: 2009-07-24
• [Presentation] Effect of Microscopic Structure on Deformation and Fracture of Materials (2009)
  • Author(s): T.Sumigawa, ほか
  • Organizer: 12th International Conference on Fracture
  • Place of Presentation: Ottawa, CANADA
  • Year and Date: 2009-07-16
• [Presentation] 微小カンチレバー試験片を用いた20m厚Cu薄膜の弾塑性変形特性評価 (2009)
  • Author(s): 澄川貴志, ほか
  • Organizer: 日本材料学会 第58期学術講演会
  • Place of Presentation: 松山
  • Year and Date: 2009-05-24
• [Presentation] ナノCu薄膜/Si基板界面端からのはく離き裂発生強度 (2009)
  • Author(s): 澄川貴志, 宍戸徹也, 北村隆行
  • Organizer: 日本機械学会2009年度年次大会学術講演会
  • Place of Presentation: 盛岡
• [Presentation] (2009)
  • Author(s): 澄川貴志, 宍戸徹也, 北村隆行
  • Organizer: 日本機械学会2009年度材料力学カンファレンス
  • Place of Presentation: 札幌
• [Presentation] Deformation and Fracture of Nano-sculptured Thin Film (2009)
  • Author(s): Takashi Sumigawa and Takayuki Kitamura
  • Organizer: 12th ICF2009
  • Place of Presentation: Ottawa(CANADA)
• [Presentation] 微小カンチレバー試験片を用いた20 m厚Cu薄膜の弾塑性変形特性評価 (2009)
  • Author(s): 澄川貴志, 宍戸徹也, 北村隆行
  • Organizer: 日本材料学会第58期学術講演会
  • Place of Presentation: 松山市
• [Book] Mechanical Testing of Nano-Component in TEM, The Transmission Electron Microscope (2012)
  • Author(s): T. Sumigawa, T. Kitamura
  • Total Pages: 26
  • Publisher: InTech
• [Book] Fracture Nanomechanics (2011)
  • Author(s): T. Kitamura, H. Hirakata, T. Sumigawa, T. Shimada
  • Total Pages: 297
  • Publisher: Pan Stanford Publishing Pte. Ltd.
• [Book] Fracture Nanomechanics (2011)
  • Author(s): Takashi Sumigawa, et.al
  • Total Pages: 297
  • Publisher: Pan Stanford Publishing Pte.Ltd.