Fabrication of Multi Nano-array Electrodes with High Aspect Ratio Using Quantum Beam Irradiation

• Project/Area Number: 21686087
• Research Category: Grant-in-Aid for Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: Nuclear engineering
• Research Institution: Osaka University
• Principal Investigator: OSHIMA Akihiro 大阪大学, 産業科学研究所, 特任研究員 (80398924)
• Research Collaborator: TAGAWA Seiichi 大阪大学, 産業科学研究所, 特任教授 (80011203) ; WASHIO Masakazu 早稲田大学, 理工学術院, 教授 (70158608)
• Project Period (FY): 2009 – 2011
• Project Status: Completed (Fiscal Year 2011)
• Budget Amount: ¥26,910,000 (Direct Cost: ¥20,700,000、Indirect Cost: ¥6,210,000); Fiscal Year 2011: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000); Fiscal Year 2010: ¥11,310,000 (Direct Cost: ¥8,700,000、Indirect Cost: ¥2,610,000); Fiscal Year 2009: ¥13,260,000 (Direct Cost: ¥10,200,000、Indirect Cost: ¥3,060,000)
• Keywords: 量子ビーム / ナノ粒子 / 金属還元 / アレイ電極 / プラズマ / ナノ加工 / 超低エネルギーEB / マイクロアレイ / ナノ材料

Research Abstract

The precision nano/ micro-fabrication of perfluorinated polymers including crosslinked one was carried out using various ion beams. Then, the sample which functionalized by graft polymerization and supported the silver ion was prepared. The direct reduction in the solid phase was performed by the quantum beam irradiation, and the obtained materials were analyzed with SEM-EDX and XPS. As results, the pure silver nanoparticle has been detected. Moreover, the array electrode with 60. m square can produce. It is succeeded that 800nm-width structures would be fabricated by direct patterning.

Research Products

• [Journal Article] Nanofabrication of Sulfonated Polystyrene-g-FEP with Silver Ion(Ag+) using Ion Beam Direct Etching and Reduction (2011)
  • Author(s): H. Tsubokura、A. Oshima、T. G. Oyama、H. Yamamoto、T. Murakami、S. Tagawa、M. Washio
  • Journal Title: J. Photopolym. Sci. Technol. Volume: 24 Pages: 513-516
  • NAID: 130004833407
  • URL: http://www.jstage.jst.go.jp/article/photopolymer/24/5/513/_pdf
  • Peer Reviewed
• [Journal Article] Development of function-graded proton exchange membrane for PEFC using heavy ion beam irradiation (2011)
  • Author(s): F. Shiraki、T. Yoshikawa、A. Oshima、Y. Oshima、Y. Takasawa、N. Fukutake、T. G. Oyama、T. Urakawa、H. Fujita、T. Takahashi、T. Oka、H. Kudo、T. Murakami、Y. Hama、M. Washio
  • Journal Title: Nucl. Instr. Meth. Phys. Res. B Volume: 269 Issue: 15 Pages: 1777-1781
  • DOI: 10.1016/j.nimb.2011.04.117
  • Peer Reviewed
• [Journal Article] Nano-and micro-fabrication of perfluorinated polymers using quantum beam technology、Radiat (2011)
  • Author(s): N. Miyoshi、A. Oshima、T. Urakawa、N. Fukutake、H. Nagai、T. Gowa、Y. Takasawa、T. Takahashi、Y. Numata、T. Katoh、E. Katoh、S. Tagawa、M. Washio
  • Journal Title: Phys. Chem Volume: 80 Issue: 2 Pages: 230-235
  • DOI: 10.1016/j.radphyschem.2010.07.037
  • Peer Reviewed
• [Journal Article] Surface modification of polymeric materials using ultra low energy electron beam irradiation (2011)
  • Author(s): A. Oshima、F. Shiraki、H. Fujita、M. Washio
  • Journal Title: Radiat. Phys. Chem Volume: 0 Issue: 2 Pages: 196-200
  • DOI: 10.1016/j.radphyschem.2010.07.032
  • Peer Reviewed
• [Journal Article] Nanofabrication of Sulfonated Polystyrene-g-FEP with Silver Ion (Ag^+) using Ion Beam Direct Etching and Reduction (2011)
  • Author(s): H.Tsubokura, A.Oshima, T.G.Oyama, H.Yamamoto, T.Murakami, S.Tagawa, M.Washio
  • Journal Title: Journal of Photopolymer Science and Technology Volume: 24 Pages: 513-516
  • NAID: 130004833407
  • Peer Reviewed
• [Journal Article] Surface modificationofpolymericmaterialsusingultralowenergyelectron beam irradiation (2011)
  • Author(s): Akihiro Oshima, Fumiya Shiraki, Hajime Fujita, Masakazu Washio
  • Journal Title: RadiationPhysicsandChemistry Volume: 80 Pages: 196-200
  • Peer Reviewed
• [Journal Article] Nano- and micro-fabrication of perfluorinated polymers using quantum beam technology (2011)
  • Author(s): Nozomi Miyoshi, Akihiro Oshima, Tatsuya Urakawa, Naoyuki Fukutake, Hiroyuki Nagai, Tomoko Gowa, Yuya Takasawa, Tomohiro Takahashi, Yukari Numata, Takanori Katoh, Etsuko Katoh, Seiichi Tagawa, Masakazu Washio
  • Journal Title: RadiationPhysicsandChemistry Volume: 80 Pages: 230-235
  • Peer Reviewed
• [Journal Article] 量子ビームによるフッ素系高分子の超微細加工研究 (2009)
  • Author(s): 大島明博
  • Journal Title: 放射線と産業 Volume: 124 Pages: 9-14
• [Journal Article] 量子ビームによるフッ素系高分子の超微細加工研究 (2009)
  • Author(s): 大島明博
  • Journal Title: 放射線と産業 124 Pages: 9-14
• [Presentation] Study on Fabrication of Functionalized Polymer with Patterned Nano-scale Silver Metal using Radiation Reduction Technique (2012)
  • Author(s): H. Tsubokura、R. Tsuchida、T. Tatsumi、T. G. Oyama、T. Murakami、A. Oshima、Tagawa、M. Washio
  • Organizer: 33 the Australian Polymer Symposium(33-APS)
  • Place of Presentation: West Point Convention Centre(Hobart・Australia)
  • Year and Date: 2012-02-13
• [Presentation] Study on Fabrication of Functionalized Polymer with Patterned Nano-scale Silver Metal using Radiation Reduction Technique (2012)
  • Author(s): H.Tsubokura, R.Tsuchida, T.Tatsumi, T.G.Oyama, T.Murakami, A.Oshima, S.Tagawa, M.Washio
  • Organizer: 33 the Australian Polymer Symposium (33-APS)
  • Place of Presentation: Hobart (Australia Tasmania)
  • Year and Date: 2012-02-13
• [Presentation] Arプラズマを用いたFEPの表面改質～ラジカル生成とグラフト重合～ (2011)
  • Author(s): 坪倉英裕、吉川妙子、大山(五輪)智子、大島明博、田川精一、鷲尾方一
  • Organizer: 第54回放射線化学討論会
  • Place of Presentation: 大阪大学(大阪府)
  • Year and Date: 2011-09-29
• [Presentation] Arプラズマを用いたFEPの表面改質～ラジカル生成とグラフト重合～ (2011)
  • Author(s): 坪倉英裕, 吉川妙子, 大山(五輪)智子, 大島明博, 田川精一, 鷲尾方一
  • Organizer: 第54回放射線化学討論会
  • Place of Presentation: 大阪大学(日本大阪)
  • Year and Date: 2011-09-29
• [Presentation] Nanofabrication of Sulfonated Styrene-g-FEP Silver Ion using Focused Ion Beam Direct Etching and Reduction (2011)
  • Author(s): A. Oshima、H. Tsubokura、T. G. Oyama、H. Yamamoto、M. Washio、Seichi Tagawa
  • Organizer: 28th International Conference of Photopolymer Science and Technology
  • Place of Presentation: 千葉大学(千葉県)
  • Year and Date: 2011-06-23
• [Presentation] Nanofabrication of Sulfonated Styrene-g-FEP Silver Ion using Focused Ion Beam Direct Etching and Reduction (2011)
  • Author(s): A.Oshima, H.Tsubokura, T.G.Oyama, H.Yamamoto, M.Washio, Seichi Tagawa
  • Organizer: 28th International Conference of Photopolymer Science and Technology
  • Place of Presentation: 千葉大学(日本千葉)(招待講演)
  • Year and Date: 2011-06-23
• [Presentation] 機能性フッ素樹脂を用いた各種プラズマ暴露による金属還元に関する研究 (2011)
  • Author(s): 坪倉英裕、高橋朋宏, 藤田創、大山(五輪)智子、山本洋揮, 大島明博、田川精一、鷲尾方一
  • Organizer: 日本化学会第91春季年会
  • Place of Presentation: 神奈川大学(神奈川県)
  • Year and Date: 2011-03-27
• [Presentation] 機能性フッ素樹脂を用いた各種プラズマ暴露による金属還元に関する研究 (2011)
  • Author(s): 坪倉英裕, 高橋朋宏, 藤田創, 大山(五輪)智子, 山本洋揮, 大島明博, 田川精一, 鷲尾方一
  • Organizer: 日本化学会 第91春季年会
  • Place of Presentation: 神奈川大学(横浜)
  • Year and Date: 2011-03-27
• [Presentation] Study on Reduction of Metal Ions in Functionalized Fluorinated-Polymers by Means of Plasma Exposure (2010)
  • Author(s): H. Tsubokura、T. Takahashi、H. Fujita、T. G. Oyama、H. Yamamoto、A. Oshima、S. Tagawa、M. Washio
  • Organizer: 2010 Internatinal Chemical Congress of Pacific Basin Societies(Pacifichem 2010)
  • Place of Presentation: Hawaii Convention Center(Hawaii・USA)
  • Year and Date: 2010-12-17
• [Presentation] Study on Reduction of Metal Ions in Functionalized Fluorinated-Polymers by Means of Plasma Exposure (2010)
  • Author(s): H.Tsubokura, T.Takahashi, H.Fujita, T.(Gowa) Oyama, H.Yamamoto, A.Oshima, S.Tagawa, M.Washio
  • Organizer: 2010 Internatinal Chemical Congress of Pacific Basin Societies (Pacifichem 2010)
  • Place of Presentation: Hawaii(USA)
  • Year and Date: 2010-12-17
• [Presentation] Nano-Scale fabrication of Perfluorinated Polymers using Focused Ion Beams (2010)
  • Author(s): A. Oshima、T. Takahashi、S. Okubo、N. Fukutake、Y. Takasawa、T. Gowa、M. Washio、S. Tagawa
  • Organizer: 2010 Internatinal Chemical Congress of Pacific Basin Societies(Pacifichem 2010)
  • Place of Presentation: Hawaii Convention Center(Hawaii・USA)
  • Year and Date: 2010-12-16
• [Presentation] Nano-Scale fabrication of Perfluorinated Polymers using Focused Ion Beams (2010)
  • Author(s): Akihiro Oshima, Tomohiro Takahashi, Satoshi Okubo, Naoyuki Fukutake, Yuya Takasawa, Tomoko Gowa, Masakazu Washio, Seiichi Tagawa
  • Organizer: 2010 Internatinal Chemical Congress of Pacific Basin Societies (Pacifichem 2010)
  • Place of Presentation: Hawaii(USA)
  • Year and Date: 2010-12-16
• [Presentation] 重イオン照射による傾斜機能材料の創製 (2010)
  • Author(s): 大島明博, 白木文也, 高澤侑也, 藤田創, 吉川妙子, 巽貴浩, 坪倉英裕, 高橋朋宏, 大山(五輪)智子, 坂上和之, 岡壽崇, 工藤久明, 村上健, 鷲尾方一, 濱義昌
  • Organizer: 第53回放射線化学討論会
  • Place of Presentation: 名古屋大学(名古屋)
  • Year and Date: 2010-09-21
• [Presentation] Ag+含有高分子の量子ビーム照射による直接還元に関する研究 (2010)
  • Author(s): 坪倉英裕、高澤侑也、高橋朋宏、白木文也、藤田創、五輪智子、佐々木隆、山本洋揮、大島明博、田川精一、鷲尾方一
  • Organizer: 第47回アイソトープ学会
  • Place of Presentation: 科学未来館(東京都)
  • Year and Date: 2010-07-07
• [Presentation] Ag^<+>含有高分子の量子ビーム照射による直接還元に関する研究 (2010)
  • Author(s): 坪倉英裕, 高澤侑也, 高橋朋宏, 白木文也, 藤田創, 五輪智子, 佐々木隆, 山本洋揮, 大島明博, 田川精一, 鷲尾方一
  • Organizer: 第47回アイソトープ学会
  • Place of Presentation: 科学未来館(東京)
  • Year and Date: 2010-07-07
• [Presentation] 重イオン照射による傾斜機能材料の創製 (2010)
  • Author(s): 大島明博、白木文也、高澤侑也、藤田創、吉川妙子、巽貴浩、坪倉英裕、高橋朋宏, 大山(五輪)智子, 坂上和之、岡壽崇、工藤久明、村上健、鷲尾方一、濱義昌
  • Organizer: 第53回放射線化学討論会
  • Place of Presentation: 名古屋大学(愛知県)
• [Presentation] 機能性微細パターン作製のための金属担持高分子に対する集束イオンビーム加工に関する研究 (2010)
  • Author(s): 坪倉英裕, 高澤侑也, 高橋朋宏, 大久保聡, 大山(五輪)智子, 山本洋揮, 大島明博, 田川精一, 鷲尾方一
  • Organizer: 第53回放射線化学討論会
  • Place of Presentation: 名古屋大学(名古屋)
• [Presentation] Study on Direct Etching of Fluoropolymers by Heavy Ion Beam Irradiation (2009)
  • Author(s): Y. Takasawa、N. Fukutake、T. Takahashi、T. Urakawa、Y. Oshima、T. Gowa、F. Shiraki、H. Fujita、T. Oka、T. Murakami、A. Oshima、Y. Hama、M. Washio
  • Organizer: 11th Pacific Polymer Conference
  • Place of Presentation: Cairns Convention Centre(Cairns, Australia)
  • Year and Date: 2009-12-07
• [Presentation] Surface Modification of Polymeric Materials Using Ultra Low Energy Electron Beam Irradiation (2009)
  • Author(s): A. Oshima、F. Shiraki、M. Washio
  • Organizer: 11th Pacific Polymer Conference
  • Place of Presentation: Cairns Convention Centre(Cairns, Australia)
  • Year and Date: 2009-12-07
• [Presentation] Surface Modification of Polymeric Materials Using Ultra Low Energy Electron Beam Irradiation (2009)
  • Author(s): A.Oshima, F.Shiraki, M.Washio
  • Organizer: 11th Pacific Polymer Conference
  • Place of Presentation: Cairns, Australia
  • Year and Date: 2009-12-07
• [Presentation] Study on Direct Etching of Fluoropolymers by Heavy Ion Beam Irradiation (2009)
  • Author(s): Y.Takasawa, N.Fukutake, T.Takahashi, T.Urakawa, Y.Oshima, T.Gowa, F.Shiraki, H.Fujita, T.Oka, T.Murakami, A.Oshima, Y.Hama, M.Washio
  • Organizer: 11th Pacific Polymer Conference
  • Place of Presentation: Cairns, Australia
  • Year and Date: 2009-12-07
• [Presentation] 量子ビームによるフッ素系高分子の微細加工 (2009)
  • Author(s): 大島明博、福武直之、高澤侑也、五輪智子、裏川達也、白木文也、岡壽崇、工藤久明、村上健、濱義昌、鷲尾方一、田川精一
  • Organizer: 第52回放射線化学討論会
  • Place of Presentation: 福井工業大学(福井県)
  • Year and Date: 2009-09-24
• [Patent(Industrial Property Rights)] 微細構造体及びその製造方法 (2011)
  • Inventor(s): 大島明博、田川精一、鷲尾方一、大山智子、高橋朋宏、大久保聡、小林亜暢、長澤尚胤、田口光正
  • Industrial Property Rights Holder: 大阪大学、早稲田大学、日本原子力研究開発機構
  • Industrial Property Number: 2011-052359
  • Filing Date: 2011-03-10