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Development of oriented piezoelectric films for ultrasonic imaging at ultra high frequency

Research Project

Project/Area Number 21700503
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Medical systems
Research InstitutionTokyo Institute of Technology

Principal Investigator

ISHIKAWA Mutsuo  Tokyo Institute of Technology, プロダクティブリーダー養成機構, 研究員 (90451864)

Project Period (FY) 2009 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2010: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2009: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Keywords超音波医科学 / 圧電 / 超音波トランスデューサ / KNbO_3 / 水熱合成法 / スパッタリング法 / SrRuO_3 / 圧電性結晶膜 / 圧電定数 / 製膜 / 超音波 / トランスデューサ / プローブ / アレイ / 高周波
Research Abstract

The epitaxially-grown piezoelectric films were successfully obtained on the substrates by the spattering method and hydrothermal method. The clear hysteresis loops originated from the ferroelectricity and the piezoelectricity were observed. Moreover, fabricated ultrasonic transducer with the developed piezoelectric films was able to the ultrasonic transmit and receive over 100MHz with good S/N.

Report

(3 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • Research Products

    (17 results)

All 2011 2010 2009 Other

All Journal Article (4 results) (of which Peer Reviewed: 4 results) Presentation (10 results) Remarks (1 results) Patent(Industrial Property Rights) (2 results)

  • [Journal Article] Effect of deposition time on film thickness and their properties for hydrothermally-grown epitaxial KNbO_3 thick films2010

    • Author(s)
      Mutsuo Ishikawa, Hiro Einishi, Mitsumasa Nakajima, Tomohito Hasegawa, Takeshi Morita, Yoshifumi Saijo, Minoru Kurosawa, Hiroshi Funakubo
    • Journal Title

      Jpn.J.Appl.Phys. 49

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Effect of deposition time on film thickness and their properties for hydrothermally-grown epitaxial KNbO_3 thick films2010

    • Author(s)
      Mutsuo Ishikawa, Hiro Einishi, Mitsumasa Nakajima, Tomohito Hasegawa, Takeshi Morita, Yoshifumi Saijo, Minoru Kurosawa, Hiroshi Funakubo
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: 49

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Growth of Epitaxial Potassium Niobate Film on(100)SrRuO_3/(100)SrTiO_3 by Hydrothermal Method and their Electromechanical Properties2009

    • Author(s)
      Mutsuo ISHIKAWA, Shintaro YASUI, Satoru UTSUGI, Takashi FUJISAWA, Tomoaki YAMADA, Takeshi MORITA, Minoru KUROSAWA, Hiroshi FUNAKUBO
    • Journal Title

      Mater.Res.Soc.Symp.Proc. Vol.1139

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Growth of Epitaxial KNbO_3 Thick Films by Hydrothennal Method and Their Characterization2009

    • Author(s)
      Mutsuo ISHIKAWA, Keisuke YAZAWA, Shintaro YASUI, Takashi FUJISAWA, Tomohito HASEGAWA, Tomoaki YAMADA, Takeshi MORITA, Minoru KUROSAWA, Hiroshi FUNAKUBO
    • Journal Title

      Jpn.J.Appl.Phys. 48

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Presentation] 水熱合成法を用いた(K Na)NbO3エピタキシャル厚膜の合成と電気的および機械的特性評価2010

    • Author(s)
      榮西弘、白石貴久、安井伸太郎、石河睦生、黒澤実、舟窪浩
    • Organizer
      第30回エレクトロセラミックス研究討論会
    • Place of Presentation
      東京理科大
    • Year and Date
      2010-10-29
    • Related Report
      2010 Annual Research Report
  • [Presentation] Djuth, Deposition of Nb-doped Pb(ZrTi)O3 films by hydrothermal method and their electromechanical properties.2010

    • Author(s)
      Mutsuo Ishikawa, Hamid Reza Chabok, Sien-ting Lau, Xiang Li, Ruimin Chen, Takeuchi Shinichi, Minoru Kurosawa, Hiroshi
    • Organizer
      2010 U.S.Navy Workshop on Acoustic Transduction Materials and Devices
    • Place of Presentation
      The Penn Stater Conference Hotel, State College
    • Year and Date
      2010-05-15
    • Related Report
      2010 Final Research Report
  • [Presentation] Deposition of Nb-doped Pb(ZrTi)O3 films by hydrothermal method and their electromechanical properties.2010

    • Author(s)
      Mutsuo Ishikawa, Hamid Reza Chabok, Sien-ting Lau, Xiang Li, Ruimin Chen, Takeuchi Shinichi, Minoru Kurosawa, Hiroshi Funakubo, Qifa Zhou, Kirk Koping Shung, Frank T.Djuth
    • Organizer
      2010 U.S.Navy Workshop on Acoustic Transduction Materials and Devices
    • Place of Presentation
      The Penn Stater Conference Hotel, State College
    • Year and Date
      2010-05-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] エピタキシャルKNbO3膜の水熱合成とアニールによる特性改善2010

    • Author(s)
      榮西弘、石河睦生、山田智明、黒澤実、舟窪浩
    • Organizer
      第48回セラミックス基礎科学討論会
    • Place of Presentation
      沖縄コンベンションセンタ
    • Year and Date
      2010-01-12
    • Related Report
      2010 Final Research Report
  • [Presentation] Djuth, Deposition of Nb-doped Lead Zirconate Titanate Films by Hydrothermal Method and Their Electrical Properties2010

    • Author(s)
      Mutsuo Ishikawa, Hamid Reza Chabok, Takeshi Morita, Shinichi Takeuchi, Minoru Kurosawa, Hiroshi Funakubo, Qifa Zhou, Kirk
    • Organizer
      2010 IEEE International Ultrasonics Symposium (IUS)
    • Place of Presentation
      Town & Country Inn & Convention Center, San Diego
    • Related Report
      2010 Final Research Report
  • [Presentation] Low temperature process of functional oxide films for integration on flexible substrates2010

    • Author(s)
      Hiroshi Funakubo, Hiro Einishi, Takahisa Shiraishi, Mutsuo Ishikawa, Minoru Kurosawa Koping Shung, Frank T.
    • Organizer
      The 5th International symposium on Integrated Molecular/materials Engineering
    • Place of Presentation
      Wujin, Changzhoui, China
    • Related Report
      2010 Annual Research Report 2010 Final Research Report
  • [Presentation] Low temperature synthesis of epitaxaial KNbO3 thick films grown by hydrothermal Method PZT-BZT materials2010

    • Author(s)
      Mutsuo Ishikawa, Hiro Einishi, Tomohito Hasegawa, Takeshi Morita, Minoru Kurosawa, Hiroshi Funakubo
    • Organizer
      3rdt International Congress on Ceramics (ICC3) Nov.14-18
    • Place of Presentation
      Osaka, Japan
    • Related Report
      2010 Final Research Report
  • [Presentation] Hydrothermally deposited PZT films and their electrical properties2010

    • Author(s)
      Mutsuo Ishikawa, Takeuchi Shinichi, Minoru Kurosawa, Hiroshi Funakubo, Takeshi Morita Qifa Zhou, Funakubo, Qifa Zhou, Kirk Koping Shung
    • Organizer
      7th International conference on ultrasonic biomedical microscanning
    • Place of Presentation
      Matusihima Japan
    • Related Report
      2010 Annual Research Report 2010 Final Research Report
  • [Presentation] Deposition of Nb-doped Lead Zirconate Titanate Films by Hydrothermal Method and Their Electrical Properties2010

    • Author(s)
      Mutsuo Ishikawa, Hamid Reza Chabok, Takeshi Morita, Shinichi Takeuchi, Minoru Kurosawa, Hiroshi Funakubo, Qifa Zhou, Kirk Koping Shung, Frank T.Djuth
    • Organizer
      2010 IEEE International Ultrasonics Symposium (IUS)
    • Place of Presentation
      Town & Country Inn & Convention Center, San Diego
    • Related Report
      2010 Annual Research Report
  • [Presentation] Low temperature synthesis of epitaxaial KNbO3 thick films grown by hydrothermal Method PZT-BZT materials2010

    • Author(s)
      Mutsuo Ishikawa, Hiro Einishi, Tomohito Hasegawa, Takeshi Morita, Minoru Kurosawa, Hiroshi Funakubo
    • Organizer
      3rdt International Congress on Ceramics (ICC3)
    • Place of Presentation
      Osaka, Japan
    • Related Report
      2010 Annual Research Report
  • [Remarks] ホームページ等

    • URL

      http://www.cc.toin.ac.jp/univ/japanese/02_bm_engin/

    • Related Report
      2010 Final Research Report
  • [Patent(Industrial Property Rights)] ペロブスカイト型酸化物膜及びそれを用いた強誘電体膜、強誘電体素子、ペロブスカイト型酸化物膜の製造方法2011

    • Inventor(s)
      坂下幸雄、舟窪浩、黒澤実、石河睦生、榮西弘、白石貴久
    • Industrial Property Rights Holder
      富士フイルム株式会社,国立大学法人東京工業大学
    • Filing Date
      2011-03-24
    • Related Report
      2010 Final Research Report
  • [Patent(Industrial Property Rights)] ペロブスカイト型酸化物膜及びそれを用いた強誘電体膜、強誘電体素子、ベロブスカイト型酸化物膜の製造方法2011

    • Inventor(s)
      坂下幸雄, 舟窪浩, 黒澤実, 石河睦生, 榮西弘, 白石貴久
    • Industrial Property Rights Holder
      富士フィルム株式会社,国立大学法人東京工業大学
    • Industrial Property Number
      2011-065517
    • Filing Date
      2011-03-24
    • Related Report
      2010 Annual Research Report

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Published: 2009-04-01   Modified: 2016-04-21  

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