Development of ZnO thermoelectric thin film with fine particle using plasma sputtering and plasma flow

• Project/Area Number: 21740401
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Plasma science
• Research Institution: Saga University
• Principal Investigator: MISAWA Tatsuya Saga University, 大学院・工学系研究科, 助教 (70346873)
• Project Period (FY): 2009 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000); Fiscal Year 2010: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000); Fiscal Year 2009: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
• Keywords: 放電プラズマ焼結プロセス / プラズマスパッタリング / 熱電変換材料 / 酸化亜鉛セラミックス / 金属酸化物薄膜

Research Abstract

For the realization of the high-performance thermoelectric thin film materials, the study of mechanism of the internal construction control in sintered specimen on Spark Plasma Sintering process and development of ZnO thermoelectric thin film with fine particle using plasma sputtering and plasma flow were carried out.

Research Products

• [Journal Article] Influence of Internal Pulsed Current on the Sintering Behavior of Pulsed Current Sintering Process (2010)
  • Author(s): T.Misawa, N.Shikatani, Y.Kawakami, T.Enjoji, Y.Ohtsu
  • Journal Title: Materials Science Forum vol.638-642 Pages: 2109-2114
• [Journal Article] Microstructure and Thermoelectric Properties of Al-doped ZnO Sintered Body (2010)
  • Author(s): N.Shikatani, T.Misawa, Y.Kawakami, M.Ohta
  • Journal Title: Materials Science Forum Vol.638-642 Pages: 2172-2177
• [Journal Article] Influence of Internal Pulsed Current on the Sintering Behavior of Pulsed Current Sintering Process (2010)
  • Author(s): Tastuya Misawa
  • Journal Title: Materials Science Forum 637-642 Pages: 2109-2144
  • Peer Reviewed
• [Journal Article] Microstructure and Thermoelectric Properties of Al-doped ZnO Sintered Body (2010)
  • Author(s): N.Shikatani, T.Misawa, et. Al.
  • Journal Title: Materials Science Forum 638-642 Pages: 2172-2177
  • Peer Reviewed
• [Journal Article] 放電プラズマ焼結プロセスにおける焼結試料の構造形成に対する試料内部電流の効果 (2009)
  • Author(s): 三沢達也, 鹿谷昇, 川上雄士, 円城寺隆志, 川原正和, 大津康徳
  • Journal Title: 粉体および粉末冶金 第56巻 Pages: 744-751
  • NAID: 10026345946
• [Journal Article] 放電プラズマ焼結プロセスにおける焼結試料の構造形成に対する試料内部電流の効果 (2009)
  • Author(s): 三沢達也
  • Journal Title: 粉体および粉末治金 56 Pages: 744-751
  • NAID: 10026345946
  • Peer Reviewed
• [Presentation] Orientation of ceramics using ZnO nano powder sintered by Spark Plasma Sintering Process (2010)
  • Author(s): T.Misawa, S.Ishibashi, T.Hirai, N.Shikatani, Y.Kawakami, T.Enjoji, M.Kawahara, Y.Ohtsu
  • Organizer: 20th MRS-Japan Academic Symposium
  • Place of Presentation: Yokohama Port Opening Plaza, Yokohama Media & Communications Center, Hatoba Kaikan, Yokohama.
  • Year and Date: 2010-12-20
• [Presentation] Orientation of ceramics using ZnO nano powder sintered by Spark Plasma Sintering Process (2010)
  • Author(s): T.Misawa, S.Ishibashi, T.Hirai, N.Shikatani, Y.Kawakami, T.Enjoji, M.Kawahara, Y.Ohtsu
  • Organizer: 20th MRS-Japan Academic Symposium
  • Place of Presentation: Yokohama Port Opening Plaza, Yokohama Media & Communications Center, Hatoba Kaikan
  • Year and Date: 2010-12-20
• [Presentation] パルス通電焼結プロセス中の電流評価と制御 (2010)
  • Author(s): 三沢達也
  • Organizer: 中部電気利用基礎研究振興財団開催助成講演会「パルス通電焼結基礎科学討論会」
  • Place of Presentation: かながわサイエンスパークKSP西棟7階711号室
  • Year and Date: 2010-12-11
• [Presentation] 内部電流と加熱プロセスを制御した放電プラズマ焼結プロセスの開発 (2010)
  • Author(s): 三沢達也, 石橋奏太朗, 平井智紀, 鹿谷昇, 川上雄士, 円城寺隆志, 川原正和, 大津康徳
  • Organizer: 粉体粉末冶金協会平成22年度秋季大会
  • Place of Presentation: 京都大学百周年時計台記念館
  • Year and Date: 2010-11-11
• [Presentation] 放電プラズマ焼結プロセスを利用した酸化亜鉛ナノ粒子焼結体の特性 (2010)
  • Author(s): 三沢達也, 石橋奏太朗, 鹿谷昇, 平井智紀, 川上雄士, 円城寺隆志, 川上正和, 大津康徳
  • Organizer: 第71回応用物理学会学術講演会(秋季大会)
  • Place of Presentation: 長崎大学
  • Year and Date: 2010-09-17
• [Presentation] 放電プラズマ焼結プロセスを用いたZnO焼結体の配向性に対する内部電流と加圧力の影響 (2010)
  • Author(s): 三沢達也, 鹿谷昇, 川上雄士, 円城寺隆志, 川原正和, 大津康徳
  • Organizer: 粉体粉末冶金協会平成22年度春季大会
  • Place of Presentation: 早稲田大学国際会議場
  • Year and Date: 2010-05-26
• [Presentation] Characteristics of Al-doped ZnO thermoelectric materials using Spark Plasma Sintering Process (2010)
  • Author(s): T.Misawa, N.Shikatani, Y.Kawakami, T.Enjoji, Y.Ohtsu
  • Organizer: 27th Symposium of Plasma Processing
  • Place of Presentation: Yokohama Port Opening Plaza, Yokohama.
• [Presentation] Characteristics of Al-doped ZnO thermoelectric materials using Spark Plasma Sintering Process (2010)
  • Author(s): Tatsuya Misawa
  • Organizer: 27^<th> Symposium of Plasma Processing
  • Place of Presentation: 横浜市開港記念会館
• [Presentation] Generation of Al-doped Thermoelectric Materials using Spark Plasma Sintering Method (2009)
  • Author(s): T.Misawa, N.Shikatani, Y.Kawakami, T.Enjoji, Y.Ohtsu
  • Organizer: Seventh Asian-European International Conference on Plasma Surface Engineering(AEPSE 2009)
  • Place of Presentation: Bexco Conference Center, Korea.
  • Year and Date: 2009-09-23
• [Presentation] Generation of Al-doped Thermoelectric Materials using Spark Plasma Sintering Method (2009)
  • Author(s): Tatsuya Misawa
  • Organizer: Seventh Asian-European International Conference on Plasma Surface Engineering (AEPSE 2009)
  • Place of Presentation: Bexco Conference Center, Korea
  • Year and Date: 2009-09-23
• [Presentation] Influence of Internal Pulsed Current on the Sintering Behavior of Pulsed Current Sintering Process (2009)
  • Author(s): T.Misawa, N.Shikatani, Y.Kawakami, T.Enjoji, Y.Ohtsu
  • Organizer: International Conference on Processing & Manufacturing of Advanced Materials(Thermec'2009)
  • Place of Presentation: Maritim Hotel, Berlin, Germany(Invited talk).
  • Year and Date: 2009-08-27
• [Presentation] Influence of Internal Pulsed Current on the Sintering Behavior of Pulsed Current Sintering Process (Invited talk) (2009)
  • Author(s): Tatsuya Misawa
  • Organizer: International Conference on Processing & Manufa cturing of Advanced Materials (Thermec'2009)
  • Place of Presentation: Maritim Hotel, Berlin, Germany
  • Year and Date: 2009-08-27
• [Presentation] 放電プラズマ焼結プロセスにおける焼結試料の構造形成に対する試料内部電流の効果 (2009)
  • Author(s): 三沢達也, 鹿谷昇, 川上雄士, 円城寺隆志, 川原正和, 大津康徳
  • Organizer: 粉体粉末冶金協会平成21年度春季大会
  • Place of Presentation: 京都工芸繊維大学(招待講演)
  • Year and Date: 2009-06-03
• [Presentation] 放電ブラズマ焼結プロセスにおける焼結試料の構造形成に対する試料内部電流の効果(招待講演) (2009)
  • Author(s): 三沢達也
  • Organizer: 粉体粉末治金協会平成21年度春季大会
  • Place of Presentation: 京都工芸繊維大学
  • Year and Date: 2009-06-03
• [Book] 関西パルス通電懇話会(パルス通電場プロセッシング総説集)(関西パルス通電懇話会編集委員会編)(第1版第1刷発行, 編集:関西パルス通電懇話会編集委員会(編集代表者巻野勇喜雄)) (2010)
  • Author(s): 三沢達也(分担執筆)
  • Publisher: 株式会社ティー・アイ・シー
• [Remarks] ホームページ等