| Project/Area Number |
21740402
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Plasma science
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| Research Institution | Sophia University |
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Principal Investigator |
TANAKA Kunihito Sophia University, 理工学部, 准教授 (60276516)
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| Project Period (FY) |
2009 – 2010
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| Project Status |
Completed (Fiscal Year 2010)
|
| Budget Amount *help |
¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2010: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2009: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
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| Keywords | プラズマ応用 / 大気圧グロープラズマ / 薄膜堆積 / プラズマ重合 / ポリエチレン / 堆積機構 |
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| Research Abstract |
The objective of this study was to obtain guidelines of plasma reactor design and plasma parameters for polymer thin film deposition via atmospheric pressure glow plasma with high monomer use efficiency and high deposition rate. The guideline of plasma reactor design was that all gases introduce into plasma zone. And under the fixed discharge power condition, long enough retention time of sample gas in the plasma zone provides maximum monomer use efficiency and deposition rate. When ethylene is used for the monomer gas, the needed retention time was 1 s, and the use efficiency was 85%.
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