Development of surface acoustic wave piezoelectric films sensors for liquid property measurement
| Project/Area Number |
21760049
|
|---|
| Research Category |
Grant-in-Aid for Young Scientists (B)
|
| Allocation Type | Single-year Grants |
|---|
| Research Field |
Applied physics, general
|
|---|
| Research Institution | Nagoya Institute of Technology |
|---|
Principal Investigator |
YANAGITANI Takahiko Nagoya Institute of Technology, 工学研究科, 助教 (10450652)
|
|---|
| Project Period (FY) |
2009 – 2010
|
| Project Status |
Completed (Fiscal Year 2010)
|
| Budget Amount *help |
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2010: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2009: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
|
|---|
| Keywords | 圧電薄膜センサ / 圧電薄膜 / スパッタリング / 圧電デバイス / 弾性表面波 / 液体センサ / ZnO薄膜 / 面内配向膜 / 横波励振 |
|---|
| Research Abstract |
To obtain shear type surface acoustic wave (SAW) thin film sensor, we fabricated the c-axis parallel oriented ZnO film on silica glass substrate. Shear type SAW was excited at first time, by applying VHF electric field to inter digital electrode fabricated on the film. Moreover, shear type SAW was propagated even in the liquid. Finally, the change of the conductiviy in the liquid was detected from the change of the SAW velocity.
|
Report
(3 results)
Research Products
(67 results)
