Development of surface acoustic wave piezoelectric films sensors for liquid property measurement

• Project/Area Number: 21760049
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Applied physics, general
• Research Institution: Nagoya Institute of Technology
• Principal Investigator: YANAGITANI Takahiko Nagoya Institute of Technology, 工学研究科, 助教 (10450652)
• Project Period (FY): 2009 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000); Fiscal Year 2010: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000); Fiscal Year 2009: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
• Keywords: 圧電薄膜センサ / 圧電薄膜 / スパッタリング / 圧電デバイス / 弾性表面波 / 液体センサ / ZnO薄膜 / 面内配向膜 / 横波励振

Research Abstract

To obtain shear type surface acoustic wave (SAW) thin film sensor, we fabricated the c-axis parallel oriented ZnO film on silica glass substrate. Shear type SAW was excited at first time, by applying VHF electric field to inter digital electrode fabricated on the film. Moreover, shear type SAW was propagated even in the liquid. Finally, the change of the conductiviy in the liquid was detected from the change of the SAW velocity.

Research Products

• [Journal Article] Texture modification of wurtzite piezoelectric films by ion beam irradiation (2011)
  • Author(s): T.Yanagitani, M.Kiuchi
  • Journal Title: Surf.Coat.Technol. in press
  • Peer Reviewed
• [Journal Article] Observation of induced longitudinal and shear acoustic phonons by Brillouin scattering (2011)
  • Author(s): T.Yoshida, T.Yanagitani, M.Matsukawa
  • Journal Title: IEEE Trans.Ultrason., Ferroelectr., Freq.Contr. vol.58. no.6,in press
  • Peer Reviewed
• [Journal Article] c-axis zig-zag ZnO film ultrasonic transducers for designing longitudinal and shear wave resonant frequencies and modes (2011)
  • Author(s): T.Yanagitani, N Morisato, S.Takayanagi, M.Matsukawa, Y.Watanabe
  • Journal Title: IEEE Trans.Ultrason., Ferroelectr., Freq.Contr. Volume: 58(印刷中)
  • Peer Reviewed
• [Journal Article] Texture modification of wurtzite piezoelectric films by ion beam irradiation (2011)
  • Author(s): T.Yanagitani, M.Kiuchi
  • Journal Title: Surf.Coat.Technol. Volume: (印刷中)
  • Peer Reviewed
• [Journal Article] 超高周波、高Q値、高圧電性、高キュリー温度の両立に向けて (2011)
  • Author(s): 柳谷隆彦
  • Journal Title: 超音波テクノ(解説記事) Volume: 23 Pages: 40-44
• [Journal Article] A method for measuring in-plane unidirectional electrical properties in a wide band-gap semiconductor using a Brillouin scattering method (2010)
  • Author(s): T.Yanagitani, H.Sano, M.Matsukawa
  • Journal Title: J.Appl.Phys. vol.108
  • Peer Reviewed
• [Journal Article] Large-area growth of in-plane oriented (11-20) ZnO films by linear cathode magnetron sputtering (2010)
  • Author(s): T.Kawamoto, T.Yanagitani, M.Matsukawa, Y.Watanabe, Y.Mori, S.Sasaki, M.Oba
  • Journal Title: Jpn.J.Appl.Phys.
  • Peer Reviewed
• [Journal Article] A method for measuring in-plane unidirectional electrical properties in a wide band-gapsemiconductor using a Brillouin scattering method (2010)
  • Author(s): T.Yanagitani, H.Sano, M.Matsukawa
  • Journal Title: J.Appl.Phys. Volume: 108
  • Peer Reviewed
• [Journal Article] Large-area growth of in-plane oriented (11-20) ZnO films by linear cathode magnetron sputtering (2010)
  • Author(s): T.Kawamoto, T.Yanagitani, M.Matsukawa, Y.Watanabe, Y.Mori, S.Sasaki, M.Oba
  • Journal Title: Jpn, J.Appl.Phys (未定)(印刷中)
  • Peer Reviewed
• [Journal Article] (11-20)配向AlN薄膜を用いた純横波モード共振子 (2010)
  • Author(s): 柳谷隆彦, 木内正人, 松川真美
  • Journal Title: 超音波テクノ 22 Pages: 46-49
• [Journal Article] Distribution of longitudinal wave velocity and hydroxyapatite crystallite orientation in bovine cortical bone (2009)
  • Author(s): Y.Yaoi, K.Yamamoto, Y.Yamato, T.Yanagitani, M.Matsukawa, K.Yamazaki, A.Nagano
  • Journal Title: Acoust.Sci.& Tech. vol.30, no.4 Pages: 306-309
  • NAID: 10025992837
  • Peer Reviewed
• [Journal Article] Anisotropy of longitudinal wave velocity and hydroxyapatite orientation in bovine cortical bone (2009)
  • Author(s): Y.Yaoi, K.Yamamoto, T.Nakatsuji, T.Yanagitani, M.Matsukawa, K.Yamazaki, A.Nagano
  • Journal Title: Jpn.J.Appl.Phys. vol.48
  • NAID: 210000067157
  • Peer Reviewed
• [Journal Article] Anisotropy of longitudinal wave velocity and hydroxyapatite orientation in bovine cortical bone (2009)
  • Author(s): Y.Yaoi, K Yamamoto, Y.Yamato, T.Yanagitani, M.Matsukawa, K.Yamazaki, A.Nagano
  • Journal Title: Jpn, J.Appl.Phys 48
  • NAID: 210000067157
  • Peer Reviewed
• [Journal Article] Measurement of electric properties in a ZnO single crystal via electromechanical coupling using Brillouin scattering method (2009)
  • Author(s): T. Yanagitani, H.Sano, M.Matsukawa
  • Journal Title: Proc.IEEE Ultrason.Symp.2009 1 Pages: 1074-1077
  • Peer Reviewed
• [Journal Article] Multilayered shear wave resonator consisting of c-axis tilted ZnO films (2009)
  • Author(s): N.Morisato, S.Takayanagi, T.Yanagitani, M.Matsukawa, Y.Watanabe
  • Journal Title: Proc.IEEE Ultrason.Symp.2009 1 Pages: 2162-2165
  • Peer Reviewed
• [Journal Article] Brillouin散乱法による圧電半導体の面内方向抵抗率評価に関する検討 (2009)
  • Author(s): 柳谷隆彦, 佐野広幸, 松川真美
  • Journal Title: 超音波テクノ 21 Pages: 35-38
• [Journal Article] c-axis zig-zag ZnO film ultrasonic transducers for designing longitudinal and shear wave resonant frequencies and modes
  • Author(s): T.Yanagitani, N.Morisato, S.Takayanagi, M.Matsukawa, Y.Watanabe
  • Journal Title: IEEE Trans.Ultrason., Ferroelectr., Freq.Contr. vol.58. no.5 Pages: 1062-1068
  • Peer Reviewed
• [Journal Article] Observation of induced longitudinal and shear acoustic phonons by Brillouin scattering
  • Author(s): T.Yoshida, T.Yanagitani, M.Matsukawa
  • Journal Title: IEEE Trans.Ultrason., Ferroelectr., Freq.Contr. Volume: (Accepted)
  • Peer Reviewed
• [Presentation] 曲面試料上に成膜したZnO薄膜からの励起フォノンによるBrillouin散乱 (2011)
  • Author(s): 杉本剛士, 佐野広幸, 中東佑太, 高柳真司, 柳谷隆彦, 松川真美
  • Organizer: 日本音響学会2011年春季研究発表会
  • Place of Presentation: 早稲田大学理工学術院
  • Year and Date: 2011-03-09
• [Presentation] c軸平行配向ZnO膜/非圧電性基板構造におけるSH-SAWの電気機械結合係数およびセンサ応用の検討 (2011)
  • Author(s): 中東佑太, 柳谷隆彦, 松川真美, 渡辺好章
  • Organizer: 圧電材料・デバイスシンポジウム2011
  • Place of Presentation: 東北大学工学部
  • Year and Date: 2011-02-01
• [Presentation] c軸平行配向AlN薄膜を用いた極性反転すべり共振子 (2011)
  • Author(s): 鈴木雅視, 柳谷隆彦
  • Organizer: 圧電材料・デバイスシンポジウム2011
  • Place of Presentation: 東北大学工学部
  • Year and Date: 2011-01-31
• [Presentation] Giant shear mode electromechanical coupling in c-axis tilted ScAlN films (2010)
  • Author(s): T.Yanagitani, K.Arakawa, M.Suzuki, K.Kano, T.Akihiko, A.Morito
  • Organizer: The 31th Symposium on Ultrasonic Electronics
  • Place of Presentation: 明治大学
  • Year and Date: 2010-12-08
• [Presentation] In-plane and out-of-plane orientation control of AlN films by ion beam assisted RF magnetron sputtering (2010)
  • Author(s): M Suzuki, T.Yanagitani
  • Organizer: The 31th Symposium on Ultrasonic Electronics
  • Place of Presentation: 明治大学
  • Year and Date: 2010-12-08
• [Presentation] c-axis parallel oriented ZnO film depositions by variable frequency RF bias sputtering (2010)
  • Author(s): S.Takayanagi, T.Yanagitani, M.Matsukawa, Y.Watanabe
  • Organizer: The 31th Symposium on Ultrasonic Electronics
  • Place of Presentation: 明治大学
  • Year and Date: 2010-12-08
• [Presentation] Observation of induced phonons by ZnO transducer with coaxial microwave resonator using Brillouin scattering (2010)
  • Author(s): H.Sano, T Yanagitani, S.Takayanagi, M.Matsukawa, N.Ohtori
  • Organizer: The 31th Symposium on Ultrasonic Electronics
  • Place of Presentation: 明治大学
  • Year and Date: 2010-12-06
• [Presentation] Giant shear mode electromechanical coupling coefficient k15 in c-axis tilted ScAlN films (2010)
  • Author(s): T.Yanagitani, K.Arakawa, K.Kano, A.Teshigahara, M.Akiyama
  • Organizer: IEEE Ultrason. Symp.(2010) 4pages
  • Place of Presentation: in press
  • Year and Date: 2010-10-14
• [Presentation] Influence of shadowing effect on shear mode acoustic properties in the c-axis tilted AlN films (2010)
  • Author(s): M Suzuki, T.Yanagitani
  • Organizer: IEEE Ultrason. Symp.(2010) 4pages
  • Place of Presentation: in press
  • Year and Date: 2010-10-14
• [Presentation] Deposition techniques of c-axis-tilted ScAlN films by conventional RF magnetron sputtering (2010)
  • Author(s): K.Arakawa, T.Yanagitani, K.Kano, A.Teshigahara, M.Akiyama
  • Organizer: IEEE Ultrason. Symp.(2010) 4pages
  • Place of Presentation: in press
  • Year and Date: 2010-10-14
• [Presentation] A simple technique for obtaining (11-20) or (10-10)textured ZnO films by RF bias sputtering (2010)
  • Author(s): S.Takayanagi, T.Yanagitani, M.Matsukawa, Y.Watanabe
  • Organizer: IEEE Ultrason. Symp.(2010) 4pages
  • Place of Presentation: in press
  • Year and Date: 2010-10-14
• [Presentation] Giant shear mode electromechanical coupling coefficient k15 in c-axis tilted ScAlN films (2010)
  • Author(s): T.Yanagitani, K.Arakawa, M.Suzuki, K.Kano, T.Akihiko, A.Morito
  • Organizer: 2010 IEEE International Ultrasonics Symposium
  • Place of Presentation: San Diego, California
  • Year and Date: 2010-10-14
• [Presentation] A simple technique for obtaining (11-20) or (10-10) textured ZnO films by RF bias sputtering (2010)
  • Author(s): S, Takayanagi, T.Yanagitani, M.Matsukawa, Y.Watanabe
  • Organizer: 2010 IEEE International Ultrasonics Symposium
  • Place of Presentation: San Diego, California
  • Year and Date: 2010-10-14
• [Presentation] Influence of shadowing effect on shear mode acoustic properties in the c-axis tilted AlN films (2010)
  • Author(s): M Suzuki, T.Yanagitani
  • Organizer: 2010 IEEE International Ultrasonics Symposium
  • Place of Presentation: San Diego, California
  • Year and Date: 2010-10-14
• [Presentation] Deposition techniques of c-axis-tilted ScAlN films by conventional RF magnetron sputtering (2010)
  • Author(s): K.Arakawa, T.Yanagitani, K.Kano, A.Teshigahara, M.Akiyama
  • Organizer: 2010 IEEE International Ultrasonics Symposium
  • Place of Presentation: San Diego, California
  • Year and Date: 2010-10-14
• [Presentation] Effects of HAp alignment and microstructure on the anisotropy of longitudinal wave velocity in bovine cortical bone (2010)
  • Author(s): K.Yamamoto, T.Nakatsuji, Y.Yamato, T.Yanagitani, K.Yamazaki, M.Matsukawa, Y.Matsuyama
  • Organizer: 2010 IEEE International Ultrasonics Symposium
  • Place of Presentation: San Diego, California
  • Year and Date: 2010-10-14
• [Presentation] Highest wave velocity direction in the bovine cortical bone : observation of a small tilt relative to the bone axis (2010)
  • Author(s): T.Nakatsuji, K.Yamamoto, T.Yanagitani, M.Matsukawa, K.Yamazaki
  • Organizer: 2010 IEEE International Ultrasonics Symposium
  • Place of Presentation: San Diego, California
  • Year and Date: 2010-10-12
• [Presentation] c軸傾斜配向ScAlN膜の擬似すべりモードにおける巨大圧電性 (2010)
  • Author(s): 柳谷隆彦、荒川和樹、鈴木雅視、加納一彦、勅使河原明彦、秋山守人
  • Organizer: 電子情報通信学会超音波研究会
  • Place of Presentation: 東北大学工学部
  • Year and Date: 2010-09-30
• [Presentation] RFバイアススパッタ法によるc軸平行配向ZnO薄膜の形成～バイアス周波数が配向性に及ぼす影響～ (2010)
  • Author(s): 高柳真司、柳谷隆彦、松川真美、渡辺好章
  • Organizer: 電子情報通信学会超音波研究会
  • Place of Presentation: 東北大学工学部
  • Year and Date: 2010-09-30
• [Presentation] Brillouin散乱法による同軸共振器と圧電薄膜を用いた励起フォノンの観測 (2010)
  • Author(s): 佐野広幸, 柳谷隆彦, 高柳真司、松川真美
  • Organizer: 電子情報通信学会超音波研究会
  • Place of Presentation: 東北大学工学部
  • Year and Date: 2010-09-30
• [Presentation] c軸傾斜配向ScAlN膜の擬似すべりモードにおける巨大圧電性 (2010)
  • Author(s): 柳谷隆彦、秋山守人
  • Organizer: 日本音響学会2010年秋季研究発表会
  • Place of Presentation: 関西大学
  • Year and Date: 2010-09-15
• [Presentation] Brillouin散乱法による導電性ZnO単結晶を用いた擬似すべりモード電気機械結合係数kl5'の評価 (2010)
  • Author(s): 佐野広幸, 柳谷隆彦, 松川真美
  • Organizer: 日本音響学会2010年秋季研究発表会
  • Place of Presentation: 関西大学
  • Year and Date: 2010-09-14
• [Presentation] RFバイアススパッタ法による簡便な(11-20)および(10-10)配向ZnO膜の形成 (2010)
  • Author(s): 高柳真司、柳谷隆彦、松川真美、渡辺好章
  • Organizer: 応用物理学会2010年春季大会
  • Place of Presentation: 東海大学 湘南キャンパス
  • Year and Date: 2010-03-17
• [Presentation] 傾斜配向AlN膜の結晶粒界と横波音響特性 (2010)
  • Author(s): 鈴木雅視、柳谷隆彦
  • Organizer: 日本音響学会2010年春季研究発表会
  • Place of Presentation: 電気通信大学
  • Year and Date: 2010-03-10
• [Presentation] Brillouin散乱法による圧電半導体の面内方向抵抗率評価 (2010)
  • Author(s): 柳谷隆彦、佐野広幸、松川真美
  • Organizer: 日本音響学会2010年春季研究発表会
  • Place of Presentation: 電気通信大学
  • Year and Date: 2010-03-08
• [Presentation] RFバイアススパッタ法による簡便な面内配向ZnO薄膜の形成 (2010)
  • Author(s): 高柳真司、柳谷隆彦、松川真美、渡辺好章
  • Organizer: 圧電材料・デバイスシンポジウム2010
  • Place of Presentation: 仙台市青葉区荒巻字青葉 東北大学工学部青葉記念会館
  • Year and Date: 2010-02-01
• [Presentation] 傾斜配向AlN膜の構造が横波音響特性におよぼす影響 (2010)
  • Author(s): 鈴木雅視、柳谷隆彦
  • Organizer: 圧電材料・デバイスシンポジウム2010
  • Place of Presentation: 仙台市青葉区荒巻字青葉 東北大学工学部青葉記念会館
  • Year and Date: 2010-02-01
• [Presentation] ウシ大腿骨皮質骨の3次元音速異方性～ハイドロキシアパタイト結晶配向と微細構造の影響～ (2010)
  • Author(s): 中辻知宏, 犬童雅規, 小泉喬亮, 松川真美, 山本和史, 山崎薫, 柳谷隆彦
  • Organizer: 電子情報通信学会超音波研究会
  • Place of Presentation: 関西大学 千里山キャンパス第四学舎(システム理工学部)
  • Year and Date: 2010-01-25
• [Presentation] Brillouin散乱法による圧電性ワイドバンドギャップ半導体の面内方向電気特性評価 (2009)
  • Author(s): 柳谷隆彦, 佐野広幸, 松川真美
  • Organizer: 第30回超音波エレクトロニクスの基礎と応用に関するシンポジウム
  • Place of Presentation: 同志社大学今出川キャンパス寒梅館
  • Year and Date: 2009-11-20
• [Presentation] 直線状エロージョンマグネトロンスパッタを用いた(11-20)配向ZnO圧電膜の結晶性 (2009)
  • Author(s): 川本貴之, 柳谷隆彦, 松川真美, 渡辺好章, 森嘉一, 佐々木昌, 大場正利
  • Organizer: 第30回超音波エレクトロニクスの基礎と応用に関するシンポジウム
  • Place of Presentation: 同志社大学今出川キャンパス寒梅館
  • Year and Date: 2009-11-20
• [Presentation] 高角度傾斜配向AlN膜の作製と圧電特性 (2009)
  • Author(s): 鈴木雅視, 柳谷隆彦
  • Organizer: 第30回超音波エレクトロニクスの基礎と応用に関するシンポジウム
  • Place of Presentation: 同志社大学今出川キャンパス寒梅館
  • Year and Date: 2009-11-20
• [Presentation] c軸傾斜反転配向ZnO多層膜の作製と横波共振子への応用 (2009)
  • Author(s): 守里直希, 高柳真司, 柳谷隆彦, 松川真美, 渡辺好章
  • Organizer: 第30回超音波エレクトロニクスの基礎と応用に関するシンポジウム
  • Place of Presentation: 同志社大学今出川キャンパス寒梅館
  • Year and Date: 2009-11-20
• [Presentation] ウシ大腿骨皮質骨の縦波音速異方性とHAp結晶配向 (2009)
  • Author(s): 山本和史, 大和雄, 山崎薫, 長野昭, 矢追佑一郎, 中辻智宏, 松川真美, 柳谷隆彦
  • Organizer: 第24回日本整形外科学会基礎学術集会
  • Place of Presentation: パシフィコ横浜
  • Year and Date: 2009-11-05
• [Presentation] c軸傾斜反転配向ZnO多層膜の作製と横波共振子への応用 (2009)
  • Author(s): 守里直希・高柳真司, 柳谷隆彦, 松川真美, 渡辺好章
  • Organizer: 電子情報通信学会超音波研究会
  • Place of Presentation: 登別グランドホテル 会議室
  • Year and Date: 2009-09-30
• [Presentation] Brillouin散乱法による圧電半導体の面内方向電気特性評価に関する検討 (2009)
  • Author(s): 柳谷隆彦, 佐野広幸, 松川真美
  • Organizer: 電子情報通信学会超音波研究会
  • Place of Presentation: 登別グランドホテル 会議室
  • Year and Date: 2009-09-30
• [Presentation] 直線状エロージョンマグネトロンスパッタリングによる(11-20)配向ZnO圧電膜の大面積成膜 (2009)
  • Author(s): 川本貴之, 柳谷隆彦, 松川真美, 渡辺好章, 森嘉一, 佐々木昌, 大場正利
  • Organizer: 電子情報通信学会超音波研究会
  • Place of Presentation: 登別グランドホテル 会議室
  • Year and Date: 2009-09-30
• [Presentation] Measurement of electric properties in a ZnO single crystal via electromechanical coupling using Brillouin scattering method (2009)
  • Author(s): T.Yanagitani, H.Sano, M.Matsukawa
  • Organizer: IEEE Ultrason. Symp. pp.1074-1077 (2009)
  • Year and Date: 2009-09-22
• [Presentation] Multilayered shear wave resonator consisting of c-axis tilted ZnO films (2009)
  • Author(s): N.Morisato, S.Takayanagi, T.Yanagitani, M.Matsukawa, Y.Watanabe
  • Organizer: IEEE Ultrason. Symp. pp.2162-2165 (2009)
  • Year and Date: 2009-09-22
• [Presentation] Measurement of electric properties in a ZnO single crystal via electromechanical coupling using Brillouin scattering method (2009)
  • Author(s): T.Yanagitani, H.Sano, M.Matsukawa
  • Organizer: IEEE Ultrasonic.Symposium.2009
  • Place of Presentation: Ergife Palace Hotel, Roma, Italy
  • Year and Date: 2009-09-22
• [Presentation] Multilayered shear wave resonator consisting of c-axis tilted ZnO films (2009)
  • Author(s): N.Morisato, S.Takayanagi, T.Yanagitani, M.Matsukawa, Y.Watanabe
  • Organizer: IEEE Ultrasonic.Symposium.2009
  • Place of Presentation: Ergife Palace Hotel, Roma, Italy
  • Year and Date: 2009-09-22
• [Presentation] Relationships between anisotropy of longitudinal wave velocity and HAp orientation in bovine cortical bone (2009)
  • Author(s): K.Yamamoto, T.Nakatsuji, Y.Yaoi, Y.Yamato, T.Yanagitani, M.Matsukawa, K.Yamazaki
  • Organizer: 3rd European Symposium on Ultrasonic Characterization of Bone
  • Place of Presentation: Kazimierz Wielki University in Bydgoszcz, Bydgoszcz, Poland
  • Year and Date: 2009-09-17
• [Presentation] Texture modification of wurtzite piezoelectric films by ion beam irradiation (2009)
  • Author(s): T.Yanagitani, M.Kiuchi
  • Organizer: 16th International Conference on Surface Modification of Materials by Ion Beams
  • Place of Presentation: Miraikan Hall, The National Museum of Emerging Science and Innovation (Miraikan)
  • Year and Date: 2009-09-14
• [Presentation] ウシ大腿骨皮質骨中の超音波縦波音速 ～ハイドロキシアパタイト結晶配向と微細構造の影響～ (2009)
  • Author(s): 中辻知宏, 矢追佑一郎, 松川真美, 山本和史, 山崎薫, 柳谷隆彦
  • Organizer: 電子情報通信学会超音波研究会
  • Place of Presentation: 千葉大学フロンティアメディカル工学研究開発センターB号棟1階会議室
  • Year and Date: 2009-06-26
• [Presentation] ヒト及びウシ円環状皮質骨における骨軸方向への超音波伝搬特性 (2009)
  • Author(s): 山本和史, 大和雄, 山崎薫, 長野昭, 矢追佑一郎, 中辻智宏, 松川真美, 柳谷隆彦
  • Organizer: 第29回日本骨形態計測学会
  • Place of Presentation: 大阪国際会議場
  • Year and Date: 2009-05-28
• [Remarks] ホームページ等
  • URL: http://researcher.nitech.ac.jp/html/191_ja.html
• [Patent(Industrial Property Rights)] 薄膜製造方法飲び装 (2010)
  • Inventor(s): 柳谷隆彦, 高柳真司, 松川真美, 渡辺好章
  • Industrial Property Rights Holder: 名古屋工業大学、同志社大学
  • Filing Date: 2010-01-29
• [Patent(Industrial Property Rights)] ウルツ鉱圧電体薄膜、該薄膜の製造方法及び製造装置、並びに薄膜共振子 (2010)
  • Inventor(s): 柳谷隆彦、鈴木雅視、渡辺好章
  • Industrial Property Rights Holder: 名古屋工業大学、同志社大学
  • Filing Date: 2010-12-03
• [Patent(Industrial Property Rights)] ウルツ鉱圧電体薄膜、該薄膜の製造方法及び製造装置、並びに薄膜共振子 (2010)
  • Inventor(s): 柳谷隆彦、鈴木雅視、渡辺好章
  • Industrial Property Rights Holder: 名古屋工業大学、同志社大学
  • Industrial Property Number: 2010-270539
  • Filing Date: 2010-12-03
• [Patent(Industrial Property Rights)] 薄膜製造方法及び装置 (2010)
  • Inventor(s): 柳谷隆彦、高柳真司、松川真美、渡辺好章
  • Industrial Property Rights Holder: 名古屋工業大学、同志社大学
  • Industrial Property Number: 2009-019956
  • Filing Date: 2010-01-29