Budget Amount *help |
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2010: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2009: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
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Research Abstract |
To obtain shear type surface acoustic wave (SAW) thin film sensor, we fabricated the c-axis parallel oriented ZnO film on silica glass substrate. Shear type SAW was excited at first time, by applying VHF electric field to inter digital electrode fabricated on the film. Moreover, shear type SAW was propagated even in the liquid. Finally, the change of the conductiviy in the liquid was detected from the change of the SAW velocity.
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