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Development of Three Dimensional Strain Field Scanning Technique with Nano-Scale Special Resolution by EBSD Method and Application to Strain Silicon Semiconductor

Research Project

Project/Area Number 21760086
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Materials/Mechanics of materials
Research InstitutionMeijo University

Principal Investigator

KIMACHI Hirohisa  名城大学, 理工学部, 教授 (30324453)

Project Period (FY) 2009 – 2011
Project Status Completed (Fiscal Year 2011)
Budget Amount *help
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2011: ¥260,000 (Direct Cost: ¥200,000、Indirect Cost: ¥60,000)
Fiscal Year 2010: ¥520,000 (Direct Cost: ¥400,000、Indirect Cost: ¥120,000)
Fiscal Year 2009: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
KeywordsEBSD法 / ひずみ測定 / ナノ空間分解能 / 菊池パターン / 弾性変形 / 塑性変形 / シリコン / 銅 / SEM・EBSDその場観察 / ニッケル
Research Abstract

In this study, evaluation of elastic and plastic strains by 2D and 3D strain mapping techniques by EBSD method was conducted. In the former, SEM in-situ 4 point bending test machine was manufactured, and band width variation in Kikuchi pattern of Si under 1000μst was measured. In the latter, the relationships between OIM parameters and plastic strain were discussed, the GROD parameter was most effective for plastic strain evaluation. And the last, 3 dimensional plastic strain mapping was conducted by serial-sectioning/EBSD method and crystallographic orientation rotation in 3 dimensional was observed.

Report

(4 results)
  • 2011 Annual Research Report   Final Research Report ( PDF )
  • 2010 Annual Research Report
  • 2009 Annual Research Report
  • Research Products

    (4 results)

All 2012 2011

All Presentation (4 results)

  • [Presentation] 引張負荷により生じる塑性ひずみのEBSD評価2012

    • Author(s)
      伊藤盛生・阿知和秀希・浅岡幸靖・來海博央
    • Organizer
      日本材料学会東海支部第5回学術講演会
    • Place of Presentation
      愛知・名城大学名駅サテライト
    • Year and Date
      2012-03-05
    • Related Report
      2011 Final Research Report
  • [Presentation] 引張負荷による塑性ひずみのEBSD評価2012

    • Author(s)
      來海博央, 他3名
    • Organizer
      日本材料学会東海支部第6回学術講演会
    • Place of Presentation
      名城大学MSAT(愛知県)
    • Year and Date
      2012-03-05
    • Related Report
      2011 Annual Research Report
  • [Presentation] 引張負荷による塑性ひずみのEBSD評価2011

    • Author(s)
      阿知和秀希・伊藤盛生・藤山一成・來海博央
    • Organizer
      日本材料学会東海支部第5回学術講演会
    • Place of Presentation
      愛知・名城大学名駅サテライト
    • Year and Date
      2011-03-07
    • Related Report
      2011 Final Research Report
  • [Presentation] 引張負荷による塑性ひずみのEBSD評価2011

    • Author(s)
      來海博央, 他3名
    • Organizer
      日本材料学会東海支部第5回学術講演会
    • Place of Presentation
      名城大学MSAT(愛知県)
    • Year and Date
      2011-03-07
    • Related Report
      2010 Annual Research Report

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Published: 2009-04-01   Modified: 2016-04-21  

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