Development of a high sensitive and resolution angle sensor using single-cell photodiodes
| Project/Area Number |
21760094
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Tohoku University |
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Principal Investigator |
ARAI Yoshikazu 東北大学, 大学院・工学研究科, 助教 (20455801)
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| Project Period (FY) |
2009 – 2010
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| Project Status |
Completed (Fiscal Year 2010)
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| Budget Amount *help |
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2010: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2009: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
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| Keywords | 角度計測 / 非分割型光電変換素子 / オートコリメーション法 / 多自由度 / 角度センサ / 位置検出素子 / 高感度 / 高分解能 |
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| Research Abstract |
This research proposes an angle sensor using single-cell photodiodes to measure small tilt angles. This sensor can overcome a weakness in conventional technology. The weakness is decrease of S/N ratio because of the influence by the insensitive gap between the photodiode cells of multi-cell photodiode. In autocollimation method, when a light spot size is reduced to improve the sensitivity of angle sensor, the strongest central signal of the light spot intensity distribution decreases. The performance of the developed sensor is demonstrated.
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Report
(3 results)
Research Products
(6 results)
