Development of laser-assisted three-dimensional-wiring technology inside insulated substrates by short pulse irradiation
Project/Area Number |
21760095
|
Research Category |
Grant-in-Aid for Young Scientists (B)
|
Allocation Type | Single-year Grants |
Research Field |
Production engineering/Processing studies
|
Research Institution | Ibaraki University |
Principal Investigator |
YAMASAKI Kazuhiko Ibaraki University, 工学部, 助教 (30436240)
|
Project Period (FY) |
2009 – 2010
|
Project Status |
Completed (Fiscal Year 2010)
|
Budget Amount *help |
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2010: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2009: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
|
Keywords | ナノ・マイクロ加工 / レーザ焼結 |
Research Abstract |
To confirm the feasibility of the laser-assisted three-dimensional-wiring technology, near-infrared short pulses were irradiated inside polyimide substrates. As a result, formation of modified polyimide with 20-30 μm in width and 250-270 μm in length was observed. The regions consist of a lot of micro voids with 20 μm or less in size. Although fabrication of continuous micro-channels inside the substrate could not be achieved, we succeeded in carrying out laser sintering of Ag nano-particles under oxygen-free condition. This indicates possibility of the laser sintering of the particles in micro-channels.
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Report
(4 results)
Research Products
(1 results)