Tube-type micropump by using MEMS technology

• Project/Area Number: 21760108
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Design engineering/Machine functional elements/Tribology
• Research Institution: Tokyo Institute of Technology
• Principal Investigator: KIM Joon-wan Tokyo Institute of Technology, 精密工学研究所, 助教 (40401517)
• Project Period (FY): 2009 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000); Fiscal Year 2010: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000); Fiscal Year 2009: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
• Keywords: マイクロマシン / MEMS / 電界共役流体(ECF) / マイクロポンプ / 平面集積化 / 機能性流体 / 液体マイクロレンズ / 液体マイクロレートジャイロ / 管路形ポンプ

Research Abstract

A high power tube-type ECF (Electro-Conjugate Fluid) micropump that consists of triangular prism and slit electrode pairs was proposed and fabricated by MEMS. As advanced ECF micropumps, they were in-plane integrated for high performance by the serialization and parallelization, achieving output power density of the world top class.

Research Products

• [Presentation] MEMS技術を用いたECF可変焦点マイクロレンズの提案 (2010)
  • Author(s): 金俊完, 由元崇, 横田眞一, 枝村一弥
  • Organizer: 平成22年秋季フルードパワーシステム講演会
  • Place of Presentation: 大分県別府市
  • Year and Date: 2010-12-03
• [Presentation] MEMS技術によるECFマイクロレートジャイロの開発 (2010)
  • Author(s): 鈴木俊也, 金俊完, 横田眞一, 枝村一弥, 今村恒彦
  • Organizer: 平成22年秋季フルードパワーシステム講演会
  • Place of Presentation: 大分県別府市
  • Year and Date: 2010-12-03
• [Presentation] A High Performance ECF-jet Generator using Improved Three-dimensional Electrode Structures (2010)
  • Author(s): Hai-bo Wang, Joon-wan Kim, Shinichi Yokota, Kazuya Edamura
  • Organizer: The 14th International Conference on Mechatronics Technology (ICMT2010)
  • Place of Presentation: 大阪府
  • Year and Date: 2010-11-24
• [Presentation] Miniaturization of ECF Micro Rate Gyro by using MEMS Technology (2010)
  • Author(s): Tsunehiko Imamura, Toshiya Suzuki, Joon-wan Kim, Shinichi Yokota, Kazuya Edamura
  • Organizer: The 14th International Conference on Mechatronics Technology (ICMT2010)
  • Place of Presentation: 大阪府
  • Year and Date: 2010-11-24
• [Presentation] MEMS-based tube-type micropump by using electro-conjugated fluid (ECF) (2010)
  • Author(s): Joon-wan Kim, Vinh Vinh Vinh Nguyen, Shinichi Yokota, Kazuya Edamura
  • Organizer: ICEM2010
  • Place of Presentation: Rome, Italy
  • Year and Date: 2010-09-06
• [Presentation] MEMS-based tube-type micropump by using electro-conjugated fluid (ECF) (2010)
  • Author(s): Joon-wan Kim, Vinh Vinh Vinh Nguyen, Shinichi Yokota, Kazuya Edamura
  • Organizer: Proc.ICEM2010
  • Place of Presentation: Rome, Italy
  • Year and Date: 2010-09-06
• [Presentation] 三角柱-スリット形電極対を用いたECFジェット発生器の性能評価MEMS技術を用いた管路形ECFマイクロポンプ (2010)
  • Author(s): 王海波, 金俊完, 横田眞一, 枝村一弥
  • Organizer: 日本機械学会ロボティクス・メカトロニクス講演会2010
  • Place of Presentation: 旭川市
  • Year and Date: 2010-06-15
• [Presentation] MEMS技術を用いた管路形ECFマイクロポンプ (2010)
  • Author(s): グェンヴィンソンタン, 金俊完, 横田眞一, 枝村一弥
  • Organizer: 日本機械学会ロボティクス・メカトロニクス講演会2010
  • Place of Presentation: 旭川市
  • Year and Date: 2010-06-15
• [Presentation] MEMS技術によるECFマイクロレートジャイロの特性評価 (2010)
  • Author(s): 鈴木俊也, 横田眞一, 金俊完, 今村恒彦, 枝村一弥
  • Organizer: 日本機械学会ロボティクス・メカトロニクス講演会2010
  • Place of Presentation: 旭川市
  • Year and Date: 2010-06-15
• [Presentation] MEMS技術によるECFマイクロレートジャイロの開発 (2010)
  • Author(s): 鈴木俊也, 金俊完, 横田眞一, 枝村一弥, 今村恒彦
  • Organizer: 平成22年度春季フルードパワーシステム学術講演会
  • Place of Presentation: 東京都
  • Year and Date: 2010-05-28
• [Presentation] ECFを用いた可変焦点マイクロレンズ (2010)
  • Author(s): 金俊完, 横田眞一, 枝村一弥
  • Organizer: 平成22年度春季フルードパワーシステム学術講演会
  • Place of Presentation: 東京都
  • Year and Date: 2010-05-28
• [Presentation] MEMS技術を用いたECFマイクロレートジャイロ (2010)
  • Author(s): 金俊完, 鈴木俊也, 横田眞一, 枝村一弥
  • Organizer: 第22回「電磁力関連のダイナミクス」シンポジウム(SEAD22)
  • Place of Presentation: 福岡県
  • Year and Date: 2010-05-21
• [Presentation] MEMS技術を用いた高出力管路形ECFマイクロポンプ (2010)
  • Author(s): 金俊完, グエンヴィンソンタン, 横田眞一, 枝村一弥
  • Organizer: 日本機械学会機素潤滑設計部門講演会
  • Place of Presentation: 新潟県
  • Year and Date: 2010-04-19
• [Presentation] MEMS技術を用いた高出力管路形ECFマイクロポンプ (2010)
  • Author(s): 金俊完, グエンヴィンソンタン, 横田眞一, 枝村一弥
  • Organizer: 日本機械学会機素潤滑設計部門講演
  • Place of Presentation: 新潟県
  • Year and Date: 2010-04-19
• [Presentation] 管路形ECFポンプの最適化 (2009)
  • Author(s): グェンヴィンソンタン, 金俊完, 枝村一弥, 横田眞一
  • Organizer: 平成21年秋季フルードパワーシステム講演会
  • Place of Presentation: 東京都港区
  • Year and Date: 2009-11-26
• [Presentation] ECFジェットの発生圧力に関する研究 (2009)
  • Author(s): 井上潤一, 横田眞一, 金俊完, 枝村一弥
  • Organizer: 平成21年秋季フルードパワーシステム講演会
  • Place of Presentation: 東京都港区
  • Year and Date: 2009-11-26
• [Presentation] Tube-Type Micropump By Using Electro-Conjugated Fluid (ECF) (2009)
  • Author(s): Joon-wan Kim, Toshiya Suzuki, Shinichi Yokota, Kazuya Edamura
  • Organizer: 13th International Conference on Mechatronics Technology ICMT 2009
  • Place of Presentation: Cebu City, Philippines
  • Year and Date: 2009-10-21
• [Presentation] Tube-Type Micropump By Using Electro-Conjugated Fluid(ECF) (2009)
  • Author(s): 金俊完, 鈴木俊也, 横田眞一, 枝村一弥
  • Organizer: 13th International Conference on Mechatronics Technology ICMT 2009
  • Place of Presentation: Cebu City, Philippines
  • Year and Date: 2009-10-21
• [Presentation] Tube-type ECF Pump (2009)
  • Author(s): Joon-wan Kim, Toshiya Suzuki, Shinichi Yokota, Kazuya Edamura
  • Organizer: The 3rd International Conference on Manufacturing, Machine Design and Tribology (ICMDT2009)
  • Place of Presentation: Jeju Island, Korea
  • Year and Date: 2009-06-25
• [Presentation] Tube-type ECF Pump (2009)
  • Author(s): 金俊完, 鈴木俊也, 横田眞一, 枝村一弥
  • Organizer: The 3rd International Conference on Manufacturing, Machine Design and Tribology(ICMDT 2009)
  • Place of Presentation: Jeju Island, Korea
  • Year and Date: 2009-06-25
• [Presentation] 管路形ECFポンプ (2009)
  • Author(s): 金俊完, 鈴木俊也, 横田眞一, 枝村一弥
  • Organizer: 第21回「電磁力関連のダイナミクス」シンポジウム(SEAD21)
  • Place of Presentation: 長野市
  • Year and Date: 2009-05-21
• [Book] Next-Generation Actuators Leading Breakthroughs, Part III Micro Actuators, New Microactuators Using Functional Fluids London (2010)
  • Author(s): Shinichi Yokota, Kazuhiro Yoshida, Kenjiro Takemura, Joon-wan Kim
  • Publisher: Springer
• [Book] New Microactuators Using Functional Fluids(Next-Generation Actuators Leading Breakthroughs, Part III Micro Actuators) (2010)
  • Author(s): Shinichi Yokota, Kazuhiro Yoshida, Kenjiro Takemura, Joon-wan Kim
  • Publisher: Springer