Development of high-sensitivity near-field fluorescence thermal nanoscopy for in-situ measurement of thermophysical properties.

• Project/Area Number: 21760163
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Thermal engineering
• Research Institution: Keio University
• Principal Investigator: TAGUCHI Yoshihiro Keio University, 理工学部, 専任講師 (30433741)
• Project Period (FY): 2009 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000); Fiscal Year 2010: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000); Fiscal Year 2009: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
• Keywords: 近接場蛍光 / 走査プローブ顕微鏡 / マイクロ・ナノデバイス / ナノ熱工学 / 近接場光 / 走査型プローブ顕微鏡 / 計測技術 / 蛍光寿命

Research Abstract

Real-time and in situ monitoring of local temperature and thermal properties of nano material is extremely important for the system design of nano devices. In this study, high-sensitivity near-field fluorescence thermal nanoscopy was proposed, and its validity was successfully verified.

Research Products

• [Journal Article] Development of a Micro Optical Diffusion Sensor Using Laser-Induced Dielectrophoretic Manipulation (2010)
  • Author(s): Itani, K., Ebisui, A., Taguchi, Y., Nagasaka, Y.
  • Journal Title: Heat Transfer-Asian Research Vol.39, No.5 Pages: 344-354
  • NAID: 10025440264
  • Peer Reviewed
• [Journal Article] 光学式粘性センサーを用いたリアルタイムモニタリング実現性の検討 (2010)
  • Author(s): 阿部広, 長町隆介, 田口良広, 長坂雄次
  • Journal Title: 日本機械学会論文集(C編) Vol.76, No.768 Pages: 43-45
  • Peer Reviewed
• [Journal Article] 偏光した近接場光を用いたナノスケール温度測定手法の開発 (2010)
  • Author(s): 保坂俊輔, 笠掛利彰, 田口良広, 長坂雄次
  • Journal Title: 日本機械学会論文集(C編) Vol.76, No.768 Pages: 46-48
  • Peer Reviewed
• [Journal Article] 光学式粘性センサーを用いたリアルタイムモニタリング実現性の検討 (2010)
  • Author(s): 阿部広
  • Journal Title: 日本機械学会論文集(C編) Volume: 76 Pages: 1923-1925
  • Peer Reviewed
• [Journal Article] 偏光した近接場光を用いたナノスケール温度測定手法の開発 (2010)
  • Author(s): 保坂俊輔
  • Journal Title: 日本機械学会論文集(C編) Volume: 76 Pages: 1926-1928
  • Peer Reviewed
• [Journal Article] Development of a micro optical diffusion sensor using laser-induced dielectrophoretic manipulation (2010)
  • Author(s): K.Itani
  • Journal Title: Heat Transfer-Asian Research Volume: 39 Pages: 344-354
  • Peer Reviewed
• [Journal Article] Development of Near-field Fluorescence Life-time Thermometry (2009)
  • Author(s): Taguchi, Y., Oka, T., Saiki, T., Nagasaka, Y.
  • Journal Title: Nanoscale and Microscale Thermophysical Engineering Vol.13, No.2 Pages: 77-87
  • Peer Reviewed
• [Journal Article] Micro Optical Viscosity Sensor for in situ Measurement Based on a Laser-Induced Capillary Wave (2009)
  • Author(s): Taguchi, Y., Nagamachi, R., Nagasaka, Y.
  • Journal Title: Journal of Thermal Science and Technology Vol.4, No.1 Pages: 98-108
  • NAID: 130000104405
  • Peer Reviewed
• [Journal Article] レーザー誘起誘電泳動を用いた小型拡散センサーの開発 (2009)
  • Author(s): 猪谷恒一, 蛭子井明, 田口良広, 長坂雄次
  • Journal Title: 熱物性 Vol.23, No.4 Pages: 197-202
  • NAID: 10025440264
  • Peer Reviewed
• [Journal Article] レーザー誘起誘電泳動を用いた小型拡散センサーの開発 (2009)
  • Author(s): 猪谷恒一
  • Journal Title: 熱物性 23 Pages: 197-202
  • Peer Reviewed
• [Journal Article] Micro Optical Viscosity Sensor for in situ Measurement Based on a Laser-Induced Capillary Wave (2009)
  • Author(s): Taguchi, Y.
  • Journal Title: J.Thermal Sci. and Tech. 4 Pages: 99-108
  • NAID: 130000104405
  • Peer Reviewed
• [Journal Article] Development of Near-field Fluoresence Lifetime Thermometry (2009)
  • Author(s): Taguchi, Y
  • Journal Title: Nanosc.Microse.Therm. 13 Pages: 77-87
  • Peer Reviewed
• [Presentation] フォトサーマル赤外検知法によるカーボンナノチューブ複合ポリマー薄膜の熱伝導率・温度伝導率同時測定の研究加熱用半導体レーザー消光比の検討 (2010)
  • Author(s): 佐藤翼
  • Organizer: 第31回日本熱物性シンポジウム
  • Place of Presentation: 福岡
  • Year and Date: 2010-11-19
• [Presentation] 近接場光を用いた自己組織化単分子膜の局所熱パターニング手法の開発 (2010)
  • Author(s): 田口良広
  • Organizer: 第31回日本熱物性シンポジウム
  • Place of Presentation: 福岡
  • Year and Date: 2010-11-17
• [Presentation] Simultaneous Measurement of Thermal Conductivity and Thermal Diffusivity for Superconducting Thin Films (YBCO) by Photothermal Radiometry (2010)
  • Author(s): Ando, T., Taguchi, Y., Nagasaka, Y.
  • Organizer: 9th Asian Thermophysical Properties Conference
  • Place of Presentation: Beijing, China
  • Year and Date: 2010-10-20
• [Presentation] Development of Nanometer Scale Temperature Measurement Method by Polarized Near-field Light (2010)
  • Author(s): Hosaka, S., Kasakake, T., Taguchi, Y., Saiki, T., Nagasaka, Y.
  • Organizer: 9th Asian Thermophysical Properties Conference
  • Place of Presentation: Beijing, China
  • Year and Date: 2010-10-20
• [Presentation] Simultaneous Measurement of Thermal Conductivity and Thermal Diffusivity for Superconducting Thin Films (YBCO) by Photothermal Radiometry (2010)
  • Author(s): T.Ando
  • Organizer: 9th Asian Thermophysical Properties Conference
  • Place of Presentation: 北京
  • Year and Date: 2010-10-20
• [Presentation] Development of Nanometer Scale Temperature Measurement Method by Polarized Near-Field Light (2010)
  • Author(s): S.Hosaka
  • Organizer: 9th Asian Thermophysical Properties Conference
  • Place of Presentation: 北京
  • Year and Date: 2010-10-20
• [Presentation] Development of Novel Micro Optical Diffusion Sensor using Micro Fresnel Mirror (2010)
  • Author(s): Oka, T., Itani, K., Taguchi, Y., Nagasaka, Y.
  • Organizer: The 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences
  • Place of Presentation: Groningen, The Netherlands
  • Year and Date: 2010-10-05
• [Presentation] Study on Nanoscale Patterning Method of Self-Assembled Monolayer using Near-Field Photothermal Desorption (2010)
  • Author(s): Yamamoto, Y., Taguchi, Y., Nagasaka, Y.
  • Organizer: The 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences
  • Place of Presentation: Groningen, The Netherlands
  • Year and Date: 2010-10-05
• [Presentation] Study on Nanoscale Patterning Method of Self-assembled Monolayer Using Near-field Photothermal Desorption (2010)
  • Author(s): Y.Yamamoto
  • Organizer: The 14th International Conference on Miniaturised Systems for Chemistory and Life Science
  • Place of Presentation: フローニンゲン(オランダ)
  • Year and Date: 2010-10-05
• [Presentation] Development of Novel Micro Optical Duffusion Sensor Using Micro Fresnel Mirror (2010)
  • Author(s): T.Oka
  • Organizer: The 14th International Conference on Miniaturised Systems for Chemistory and Life Science
  • Place of Presentation: フローニンゲン(オランダ)
  • Year and Date: 2010-10-05
• [Presentation] Development of Nanoscale Patterning Method of Self-Assembled Monolayer using Photothermal Desorption in Near-field (2010)
  • Author(s): Yamamoto, Y., Taguchi, Y., Nagasaka, Y.
  • Organizer: 2010 International Conference on Solid State Devices and Materials
  • Place of Presentation: Tokyo, Japan
  • Year and Date: 2010-09-23
• [Presentation] Development of Nanoscale Patterning Method of Self-Assembled Monolayer using Photothermal Desorption in Near-field (2010)
  • Author(s): Y.Yamamoto
  • Organizer: The 2010 International Conference on Solid State Devices and Materials, Tokyo
  • Place of Presentation: 東京
  • Year and Date: 2010-09-23
• [Presentation] レーザー誘起誘電泳動を用いた新しい光MEMS拡散センサーの開発マイクロフレネルミラーによる誘電泳動の誘起および拡散現象の観察 (2010)
  • Author(s): 岡哲大
  • Organizer: 日本機械学会2010年度年次大会
  • Place of Presentation: 名古屋
  • Year and Date: 2010-09-07
• [Presentation] 近接場光学熱脱離を用いた自己組織化単分子膜のナノスケールパターニング法の開発 (2010)
  • Author(s): 山本裕
  • Organizer: 日本機械学会2010年度年次大会
  • Place of Presentation: 名古屋
  • Year and Date: 2010-09-07
• [Presentation] フォトサーマル赤外検知法を用いた超伝導薄膜(YBCO)の熱伝導率と温度伝導率の同時測定 (2010)
  • Author(s): 安藤哲
  • Organizer: 第47回日本伝熱シンポジウム
  • Place of Presentation: 札幌
  • Year and Date: 2010-05-28
• [Presentation] 周期加熱サーモリフレクタンス法を用いた半導体デバイス内部におけるマイクロスケール熱抵抗評価技術の開発界面熱抵抗の異なるAu-Si 2層試料の測定 (2010)
  • Author(s): 秋葉洋
  • Organizer: 第47回日本伝熱シンポジウム
  • Place of Presentation: 札幌
  • Year and Date: 2010-05-28
• [Presentation] 近接場蛍光を用いたナノスケール温度センシング技術の開発融着型近接場ファイバプローブによる蛍光寿命測定の高感度化 (2010)
  • Author(s): 岡巧
  • Organizer: 第47回日本伝熱シンポジウム
  • Place of Presentation: 札幌
  • Year and Date: 2010-05-28
• [Presentation] Development of a Micro Optical Diffusion Sensor using Laser-Induced Dielectrophoresis (2010)
  • Author(s): Itani, K., Oka, T., Taguchi, Y., Nagasaka, Y.
  • Organizer: International Symposium on Nano-Micro Multi-Functional Devices
  • Place of Presentation: Kawasaki, Japan
  • Year and Date: 2010-03-18
• [Presentation] Study on Novel Micro Optical Diffusion Sensor based on Laser Induced Dielectrophoresis (2010)
  • Author(s): Itani, K.
  • Organizer: The 23rd IEEE MEMS2010
  • Place of Presentation: Hong Kong
  • Year and Date: 2010-01-24
• [Presentation] Feasibility Study of Micro Optical Diffusion Sensor based on Laser Induced Dielectrophoresis (2010)
  • Author(s): Itani, K.
  • Organizer: SPIE Photonies West
  • Place of Presentation: San Francisco
  • Year and Date: 2010-01-23
• [Presentation] Development of Miniaturized Optical Viscosity Sensor with Optical Surface Tracking System (2010)
  • Author(s): Abe, H.
  • Organizer: SPIE Photonics West
  • Place of Presentation: San Francisco
  • Year and Date: 2010-01-23
• [Presentation] Development of Micro Optical Diffusion Sensor Based on Laser Induced Dielectrophoresis (2009)
  • Author(s): Taguchi, Y.
  • Organizer: ASME 2009 2nd Micro/Nanoscale Heat & Mass Transfer International Conference(MNHMT2009)
  • Place of Presentation: Shanghai
  • Year and Date: 2009-12-18
• [Presentation] ナノからマクロまでの光学的熱物性センシング (2009)
  • Author(s): 田口良広
  • Organizer: 日本顕微鏡学会 走査型プローブ顕微鏡分科会「光プローブ顕微鏡の新たな活躍の場を求めて～顕微鏡技術の融合と熱物性への応用～」
  • Place of Presentation: 神奈川
  • Year and Date: 2009-12-15
• [Presentation] レーザー誘起表面波法を用いた粘性率測定マイクロチップの開発(第三報 液面-センサー間距離制御機構を用いた揮発性溶液の測定) (2009)
  • Author(s): 阿部広
  • Organizer: 日本機械学会熱工学コンファレンス2009講演論文集
  • Place of Presentation: 宇部
  • Year and Date: 2009-11-07
• [Presentation] 周期加熱サーモリフレクタンス法を用いたSip実装半導体デバイス内部におけるマイクロスケール熱抵抗評価手法の開発 (2009)
  • Author(s): 秋葉洋
  • Organizer: 日本機械学会熱工学コンファレンス2009講演論文集
  • Place of Presentation: 宇部
  • Year and Date: 2009-11-07
• [Presentation] レーザー誘起誘電泳動を用いたマイクロ拡散センサーの開発 (2009)
  • Author(s): 田口良広
  • Organizer: 第30回日本熱物性シンポジウム講演論文集
  • Place of Presentation: 米沢
  • Year and Date: 2009-10-29
• [Presentation] 偏光した近接場光を用いたナノスケール温度・熱物性測定手法の開発 (2009)
  • Author(s): 保坂俊輔
  • Organizer: 第1回マイクロ・ナノ工学シンポジウム
  • Place of Presentation: 東京
  • Year and Date: 2009-10-15
• [Presentation] レーザー誘起誘電泳動を用いた拡散係数モニタリングのための集積化マイクロチップに関する予備的検討 (2009)
  • Author(s): 猪谷恒一
  • Organizer: 第1回マイクワ・ナノ工学シンポジウム
  • Place of Presentation: 東京
  • Year and Date: 2009-10-15
• [Presentation] 光学式粘性センサーを用いたリアルタイムモニタリング実現性の検討 (2009)
  • Author(s): 阿部広
  • Organizer: 第1回マイクロ・ナノ工学シンポジウム
  • Place of Presentation: 東京
  • Year and Date: 2009-10-15
• [Presentation] 光MEMS熱物性センサーを用いた粘性率、拡散係数のリアルタイムモニタリング (2009)
  • Author(s): 田口良広
  • Organizer: 日本機械学会RC237分科会「先端的熱流体計測法に関する研究分科会」第6回研究会
  • Place of Presentation: 神奈川
  • Year and Date: 2009-09-08
• [Presentation] Development of Micro Optical Viscosity Sensor with Focus control System for in-process Monitorin (2009)
  • Author(s): Taguchi, Y.
  • Organizer: IEEE/LEOS Optical MEMS and Nanophotonics 2009
  • Place of Presentation: Florida
  • Year and Date: 2009-08-17
• [Presentation] Development of High Sensitive Near-Field Fluorescence Lifetime Thel mometry with Nanoscale Spatial Resolution (2009)
  • Author(s): Oka, T.
  • Organizer: Proc.17th Symposium on Thermophysical Prope rties
  • Place of Presentation: Boulder
  • Year and Date: 2009-06-24
• [Presentation] Development of Photothermal Reflectance Method for Microscale The rmal Resistance in SiP-mounted Semiconductor Devices (2009)
  • Author(s): Akiba, Y.
  • Organizer: Proc.17th Symposium on Thermophysical Prope rties
  • Place of Presentation: Boulder
  • Year and Date: 2009-06-24
• [Presentation] Development of Micro Optical Diffusion Sensor using Opto-dielectrop horesis (2009)
  • Author(s): Taguchi, Y.
  • Organizer: Proc.17th Symposium on Thermophysical Prope rties
  • Place of Presentation: Boulder
  • Year and Date: 2009-06-24
• [Presentation] レーザー誘起誘電泳動を用いた新しい光学的小型拡散センサーの研究 第一報:測定原理の妥当性の検証及び相互拡散現象の観察 (2009)
  • Author(s): 蛭子井明
  • Organizer: 第46回日本伝熱シンポジウム講演論文
  • Place of Presentation: 京都
  • Year and Date: 2009-06-03
• [Presentation] 偏光近接場を用いた高感度ナノスケール温度測定手法の開発(第一報 測定原理の検証および従来法との感度比較) (2009)
  • Author(s): 笠掛利彰
  • Organizer: 第46回日本伝熱シンポジウム講演論文
  • Place of Presentation: 京都
  • Year and Date: 2009-06-03
• [Remarks]
  • URL: http://www.naga.sd.keio.ac.jp/