| Project/Area Number |
21760176
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Dynamics/Control
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| Research Institution | Fukuoka Institute of Technology (2010)
Tokyo Metropolitan College of Industrial Technology (2009) |
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Principal Investigator |
KATO Tomonori Fukuoka Institute of Technology, 工学部, 助教 (20390429)
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| Project Period (FY) |
2009 – 2010
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| Project Status |
Completed (Fiscal Year 2010)
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| Budget Amount *help |
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2010: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2009: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000)
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| Keywords | 振動制御 / 空気ばね式除振台 / 圧力制御 / 圧力微分計 / 流量制御 / アクティブ制御 / 空圧サーボステージ / 外乱補償制御 |
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| Research Abstract |
This research topic concerned stabilization of pressurized air supply systems such as those used in factories, in order to realize highly accurate and efficient pneumatic vibration isolation tables and servo stages for ultra precision devices. Conventional pressure control methods such as the use of pressure regulators and buffer tanks are incapable of cancelling the effects of variations in the supplied air pressure. In the present study, we proposed a fast and precise pressure control method for a pneumatic vibration isolation table which is capable of overcoming such problems. In addition, a new method has been proposed for controlling the air pressure in the air spring of the isolator to compensate for inclinations of the isolation table caused by relatively rapid movements of a servo stage on the table.
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