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Development of an assembly-free fabrication process for microsystems driven by distributed actuators on a chip

Research Project

Project/Area Number 21760201
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionKagawa University

Principal Investigator

SUZUKI Takaaki  Kagawa University, 工学部, 准教授 (10378797)

Project Period (FY) 2009 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2010: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2009: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Keywordsマイクロ・ナノデバイス / マイクロマシン / フォトリソグラフィ / 流体工学 / ナノコンポジット
Research Abstract

Composite material made of magnetic nanoparticles/SU-8 is expected to be a material of microactuators which can be controlled by external magnetizing field and easily fabricated by only photolithography. In this study, we evaluated the dispersivity of the proposed nanocomposites mixed by a planetary and an ultrasonic stirrers. As a result, the planetary stirrer achieves higher dispersivity than the ultrasonic one. Moreover, we propose assembly-free integration method for driving elements internally fabricated by infusing liquid nanocomposite and sacrificial resist into a microchannel before exposing. By a magnetic driving test in the microchannel, it is confirmed that the fabricated element made of the proposed nanocomposite moved with the external magnetic field applied by an electromagnet.

Report

(3 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • Research Products

    (40 results)

All 2011 2010 2009 Other

All Journal Article (7 results) (of which Peer Reviewed: 2 results) Presentation (28 results) Remarks (2 results) Patent(Industrial Property Rights) (3 results) (of which Overseas: 2 results)

  • [Journal Article] 多重マスク回転傾斜露光法による3次元複雑マイクロ構造の作製2010

    • Author(s)
      平丸大介, 鈴木博之, 神野伊策, 小寺秀俊, 鈴木孝明
    • Journal Title

      日本AEM学会誌 Vol.18, No.4

      Pages: 377-382

    • NAID

      110008007281

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] 単一マスク回転傾斜露技術の応用展開,(解説論文)2010

    • Author(s)
      鈴木孝明
    • Journal Title

      電子材料(工業調査会)

      Pages: 28-33

    • Related Report
      2010 Final Research Report
  • [Journal Article] アセンブリフリー回転傾斜露光法を用いた細胞アレイの作製とその応用,(解説論文)2010

    • Author(s)
      鈴木孝明
    • Journal Title

      エレクトロニクス実装学会誌 Vol.13, No.3

      Pages: 194-199

    • Related Report
      2010 Final Research Report
  • [Journal Article] 多重マスク回転傾斜露光法による3次元複雑マイクロ構造の作製2010

    • Author(s)
      平丸大介
    • Journal Title

      日本AEM学会誌

      Volume: 18 Pages: 377-382

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 単一マスク回転傾斜露技術の応用展開2010

    • Author(s)
      鈴木孝明
    • Journal Title

      電子材料(工業調査会)

      Volume: 7月号 Pages: 28-33

    • Related Report
      2010 Annual Research Report
  • [Journal Article] アセンブリフリー回転傾斜露光法を用いた細胞アレイの作製とその応用2010

    • Author(s)
      鈴木孝明
    • Journal Title

      エレクトロニクス実装学会誌

      Volume: 13 Pages: 194-199

    • NAID

      10026477655

    • Related Report
      2010 Annual Research Report
  • [Journal Article] アセンブリフリー回転傾斜露光法を用いた細胞アレイの作製とその応用2010

    • Author(s)
      鈴木孝明
    • Journal Title

      エレクトロニクス実装学会誌 5月号(掲載確定)

    • NAID

      10026477655

    • Related Report
      2009 Annual Research Report
  • [Presentation] スプレー塗布による厚膜レジストの膜厚制御性に関する研究2011

    • Author(s)
      赤松幹夫
    • Organizer
      日本機械学会 情報・知能・精密機器部門講演会
    • Place of Presentation
      東京電機大学(東京都)
    • Year and Date
      2011-03-22
    • Related Report
      2010 Annual Research Report
  • [Presentation] Crystalline Anisotropic Dry Etching for Single Crystal Silicon2011

    • Author(s)
      T.Mishima
    • Organizer
      The 24th IEEE International Conference on Micro Electro Mechanical Systems
    • Place of Presentation
      Cancun, Mexico
    • Year and Date
      2011-01-24
    • Related Report
      2010 Annual Research Report
  • [Presentation] マイクロデバイスを用いた細胞・染色体解析技術2011

    • Author(s)
      鈴木孝明
    • Organizer
      徳島大学 若手医工連携研究者のネットワーク形成と独創的生体医工学研究テーマの設定のための講演会
    • Place of Presentation
      徳島大学工学部(招待講演)
    • Year and Date
      2011-01-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] Fabrication of a Magnetically-Driven Microstructure Made of Magnetic Nanoparticles/SU-8 Composite2011

    • Author(s)
      Y.Hosokawa, T.Nakahara, K.Terao, H.Takao, F.Shimokawa, F.Oohira, T.Suzuki
    • Organizer
      Proceedings of the 6th International Conference on Microtechnologies in Medicine and Biology pp.74-75
    • Place of Presentation
      Lucerne, Switzerland.
    • Related Report
      2010 Final Research Report
  • [Presentation] スプレー塗布による厚膜レジストの膜厚制御性に関する研究2011

    • Author(s)
      赤松幹夫, 寺尾京平, 高尾英邦, 下川房男, 大平文和, 鈴木孝明
    • Organizer
      日本機械学会情報・知能・精密機器部門講演会,pp.30-33
    • Place of Presentation
      東京電機大学(東京都)
    • Related Report
      2010 Final Research Report
  • [Presentation] Crystalline Anisotropic Dry Etching for Single Crystal Silicon2011

    • Author(s)
      T.Mishima, K.Terao, H.Takao, F.Shimokawa, F.Oohira, T.Suzuki
    • Organizer
      Technical digest of 24th IEEE International Conference on Micro Electro Mechanical Systems pp.221-224
    • Place of Presentation
      Cancun, Mexico
    • Related Report
      2010 Final Research Report
  • [Presentation] アセンブリフリー単一マスク回転傾斜露光法の開発とバイオ応用2010

    • Author(s)
      鈴木孝明
    • Organizer
      JSTイノベーションサテライト徳島 第4回大学等の研究シーズ発表会-香川の最先端ものづくり技術-
    • Place of Presentation
      サンメッセ香川(香川県)(招待講演)
    • Year and Date
      2010-12-09
    • Related Report
      2010 Annual Research Report
  • [Presentation] マイクロ・ナノ加工技術とその応用2010

    • Author(s)
      鈴木孝明
    • Organizer
      将来加工技術第136委員会第11回研究会(合同)日本学術振興会将来加工技術第136委員会
    • Place of Presentation
      学士会館(東京都千代田区) 招待講演
    • Year and Date
      2010-11-19
    • Related Report
      2010 Final Research Report
  • [Presentation] マイクロ・ナノ加工技術とその応用2010

    • Author(s)
      鈴木孝明
    • Organizer
      日本学術振興会 将来加工技術第136委員会 将来加工技術第136委員会 第11回研究会(合同)
    • Place of Presentation
      学士会館(東京都)(招待講演)
    • Year and Date
      2010-11-19
    • Related Report
      2010 Annual Research Report
  • [Presentation] 同心円マイクロメッシュ構造を用いた高速染色体解析デバイス2010

    • Author(s)
      鈴木孝明
    • Organizer
      兵庫県立大学 第1回先端ナノバイオフォーラム
    • Place of Presentation
      姫路キャスパホール(兵庫県)(招待講演)
    • Year and Date
      2010-11-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] 三次元多層流生成デバイスの開発2010

    • Author(s)
      鈴木孝明
    • Organizer
      電気学会 第27回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      くにびきメッセ(島根県松江市)
    • Year and Date
      2010-10-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] 同心円マイクロメッシュ構造を用いた高速染色体解析デバイスの開発2010

    • Author(s)
      鈴木博之
    • Organizer
      電気学会 第27回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      くにびきメッセ(島根県松江市)
    • Year and Date
      2010-10-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] A High-Throughput FISH Microchip for Clinical Genetics2010

    • Author(s)
      H.Suzuki
    • Organizer
      The 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences
    • Place of Presentation
      Groningen, Netherlands
    • Year and Date
      2010-10-05
    • Related Report
      2010 Annual Research Report
  • [Presentation] アセンブリフリー回転傾斜露光法とそのバイオ応用2010

    • Author(s)
      鈴木孝明
    • Organizer
      第117回講演会ラドテック研究会
    • Place of Presentation
      学士会館(東京都千代田区) 招待講演
    • Year and Date
      2010-04-14
    • Related Report
      2010 Final Research Report
  • [Presentation] アセンブリフリー回転傾斜露光法とそのバイオ応用2010

    • Author(s)
      鈴木孝明
    • Organizer
      ラドテック研究会 第117回講演会
    • Place of Presentation
      学士会館(東京都)(招待講演)
    • Year and Date
      2010-04-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] A High-Throughput FISH Microchip for Clinical Genetics2010

    • Author(s)
      H.Suzuki, D.Hiramaru, K.Terao, H.Takao, F.Oohira, H.Kotera, T.Suzuki
    • Organizer
      Proceedings of The 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences, pp.702-704
    • Place of Presentation
      Groningen, Netherlands
    • Related Report
      2010 Final Research Report
  • [Presentation] ナノ磁気粒子とSU-8からなる複合材料を用いたマイクロ磁気駆動構造の作製2010

    • Author(s)
      細川祐揮, 中野哲郎, 寺尾京平, 高尾英邦, 大平文和, 鈴木孝明
    • Organizer
      日本機械学会情報・知能・精密機器部門講演会,pp.114-117
    • Place of Presentation
      東京電機大学(東京都)
    • Related Report
      2010 Final Research Report
  • [Presentation] ナノ磁気粒子とSU-8からなる複合材料を用いたマイクロ磁気駆動構造の作製2010

    • Author(s)
      細川祐揮
    • Organizer
      日本機械学会情報・知能・精密機器部門講演会(IIP2010)
    • Place of Presentation
      東京電機大学(東京都)
    • Related Report
      2009 Annual Research Report
  • [Presentation] アセンブリフリー回転傾斜露光法とそのバイオ応用2009

    • Author(s)
      鈴木孝明
    • Organizer
      電気学会「量子ビームによるナノバイオエレクトロニクス技術調査専門委員会」
    • Place of Presentation
      産業総合技術研究所四国センター(香川県)
    • Year and Date
      2009-08-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] Three Dimentional Multi-Layered Flow Generator2009

    • Author(s)
      T.Suzuki, Y.Hagio, D.Hiramaru, K.Terao, A.Okonogi, I.Kanno, H.Kotera
    • Organizer
      Proceedings of The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences
    • Place of Presentation
      Jeju, Korea2-54
    • Related Report
      2010 Final Research Report
  • [Presentation] Development of an Assembly-Free 3D Lithography for Bio-Microsystems2009

    • Author(s)
      T.Suzuki, K.Terao
    • Organizer
      IEEE-NANOMED
    • Place of Presentation
      TAINAN, TAIWAN. 招待講演
    • Related Report
      2010 Final Research Report
  • [Presentation] Assembly-Free 3-D Microfabrication Process Using Single-Mask Multidirectional Photolithography2009

    • Author(s)
      T.Suzuki, H.Yamamoto, I.Kanno, M.Washizu, H.Kotera
    • Organizer
      Proceedings of the 15th International Conference on Solid-State Sensors, Actuators and Microsystems, pp.1900-1903
    • Place of Presentation
      Denver, Colorado, USA.
    • Related Report
      2010 Final Research Report
  • [Presentation] Magnetic Actuation Type Low Cost Polymer MEMS Mirror Fabricated by Photolithography Technology2009

    • Author(s)
      Tetsuro Nakano
    • Organizer
      2009 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment
    • Place of Presentation
      Tsukuba International Congress Center, (Ibaraki, Japan)
    • Related Report
      2009 Annual Research Report
  • [Presentation] Assembly-Free 3-D Microfabrication Process Using Single-Mask Multidir ectional Photolithography2009

    • Author(s)
      Takaaki Suzuki
    • Organizer
      15th International Conference on Solid-State Sensors, Actuators and Microsystems
    • Place of Presentation
      Sheraton Denver Downtown Hotel, Colorado (USA)
    • Related Report
      2009 Annual Research Report
  • [Presentation] Magnetic Actuation Type Low Cost Polymer MEMS Mirror Fabricated by Photolithography and Wet Etching Processes2009

    • Author(s)
      Tetsuro Nakano
    • Organizer
      2009 IEEE/LEOS International Conference on Optical MEMS & Nanophotonics
    • Place of Presentation
      Hilton Clearwater Beach Resort, FL (USA)
    • Related Report
      2009 Annual Research Report
  • [Presentation] 磁性粒子を含むSU-8を用いたフォトリソグラフィとウエットエッチングによるポリマーMEMSミラーの製作2009

    • Author(s)
      中野哲郎
    • Organizer
      第26回「センサ・マイクロマシンと応用オウヨウ」シンポジウム
    • Place of Presentation
      タワーホール船堀(東京都)
    • Related Report
      2009 Annual Research Report
  • [Presentation] Development of an assembly-free 3D lithography for bio-microsystems2009

    • Author(s)
      Takaaki Suzuki
    • Organizer
      IEEE-NANOMED 2009
    • Place of Presentation
      TAYIH Landis Hotel, TAI NAN (TAIWAN)
    • Related Report
      2009 Annual Research Report
  • [Presentation] Assembly-free 3D lithography for bio-microsystems2009

    • Author(s)
      Takaaki Suzuki
    • Organizer
      Taiwan Japan Bilateral Symposium on Research of Nanotechnology(先端ナノテク研究シンポジウム)
    • Place of Presentation
      National Cheng Kung University, TAINAN, TAIWAN
    • Related Report
      2009 Annual Research Report
  • [Remarks]

    • URL

      http://www.eng.kagawa-u.ac.jp/~suzuki/

    • Related Report
      2010 Annual Research Report
  • [Remarks]

    • URL

      http://www.eng.kagawa-u.ac.jp/~suzuki/

    • Related Report
      2009 Annual Research Report
  • [Patent(Industrial Property Rights)] 微小構造体2010

    • Inventor(s)
      鈴木孝明、小寺秀俊、神野伊策、平丸大介
    • Industrial Property Rights Holder
      香川大学、京都大学
    • Filing Date
      2010-10-14
    • Related Report
      2010 Final Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] 微小構造体の作製方法2010

    • Inventor(s)
      鈴木孝明、小寺秀俊、神野伊策、平丸大介
    • Industrial Property Rights Holder
      香川大学、京都大学
    • Filing Date
      2010-10-14
    • Related Report
      2010 Annual Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] 微小構造体の作製方法2009

    • Inventor(s)
      鈴木孝明、小寺秀俊、神野伊策、平丸大介
    • Industrial Property Rights Holder
      香川大学、京都大学
    • Industrial Property Number
      2009-237709
    • Filing Date
      2009-10-14
    • Related Report
      2009 Annual Research Report

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Published: 2009-04-01   Modified: 2016-04-21  

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