Budget Amount *help |
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2010: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2009: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
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Research Abstract |
Development of large-displacement micro actuators is mandatory for tactile displays that deforms finger skins, stimulates tactile receptors, and deliver tactile information and micro valves controlling large mass flows. We have developed and characterized large-displacement MEMS actuators with hydraulic amplification mechanism that encapsulates incompressible fluid in a micro chamber whose input and output surfaces have different cross-sectional areas.
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