Study of Erbium-Doped Silicon Oxide Film for Optical Emitter

• Project/Area Number: 21760249
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Electron device/Electronic equipment
• Research Institution: Utsunomiya University
• Principal Investigator: YODA Hidehiko Utsunomiya University, 工学研究科, 准教授 (30312862)
• Project Period (FY): 2009 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000); Fiscal Year 2010: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000); Fiscal Year 2009: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
• Keywords: シリコン / 光エミッタ / シリコン酸化膜

Research Abstract

Er-doped silicon oxide films (SiOx:Er) were deposited under various conditions and their optical and structural characteristics were evaluated. It was experimentally demonstrated that the composition (Si:O:Er) and band-gap energy of SiOx:Er films can be controlled by the sputtering condition of gas and/or temperature. A prototype of SiOx:Er optical emitter was fabricated and its PL characteristic was evaluated. It was demonstrated that the SiOx:Er film is emitted at the wavelength of 1534nm.

Research Products

• [Journal Article] High-Index-Layer Coating on a Lensed Fiber Endface for Enhanced Focusing Power (2009)
  • Author(s): K.Shiraishi, N.Kawasaki, H.Yoda, K.Watanabe, M.Umetsu, T.Hitomi, K.Muro
  • Journal Title: J.Lightwave Technol. vol.27, no.7 Pages: 864-870
• [Journal Article] A Two-Port Single Mode Fiber-Silicon Wire Waveguide Coupler Module Using Spot Size Converters (2009)
  • Author(s): H.Yoda, K.Shiraishi, H.Furuhashi, A.Ohshima, H.Tsuchiya, C.S.Tsai
  • Journal Title: J.Lightwave Technol. vol.27, no.10 Pages: 1315-1319
• [Presentation] a-Si:D/SiO_2多層膜波長可変フィルタチップの応答評価 (2011)
  • Author(s): 田代拓也, 依田秀彦
  • Organizer: 電子情報通信学会東京支部学生会研究発表会 講演番号175
  • Place of Presentation: 東京電機大学(東京)
  • Year and Date: 2011-03-12
• [Presentation] a-Si:D/SiO2多層膜 波長可変フィルタチップの応答評価 (2011)
  • Author(s): 田代拓也, 依田秀彦
  • Organizer: 電子情報通信学会東京支部学生会研究発表会
  • Place of Presentation: 東京電機大学
  • Year and Date: 2011-03-12
• [Presentation] Miniaturized Spot Size Converters for Coupling between Single-Mode Optical Fibers and Silicon Photonic Circuits (2010)
  • Author(s): K.Shiraishi, H.Yoda, C.Tsai
  • Organizer: 16th Microoptics Conference (MOC'10) TB2
  • Place of Presentation: The Ambassador Hotel (Hsinchu, Taiwan)
  • Year and Date: 2010-11-02
• [Presentation] a-Si:D/SiO_2多層膜を用いたマルチキャビティ型チューナブルバンドパスフィルタ (2010)
  • Author(s): 四ノ宮寛, 晴山貴行, 依田秀彦
  • Organizer: 信学総大 C-3-52
  • Place of Presentation: 東北大学(仙台市)
  • Year and Date: 2010-03-18
• [Presentation] a-Si:D/SiO_2多層膜を用いたマルチキャビティ型チューナブルバンドパスフィルタ (2010)
  • Author(s): 四ノ宮寛, 晴山貴行, 依田秀彦
  • Organizer: 信学総大
  • Place of Presentation: 東北大学
  • Year and Date: 2010-03-18
• [Presentation] Miniaturized Spot Size Converters for Coupling between Single-Mode Optical Fibers and Silicon Photonic Circuits (2010)
  • Author(s): K.Shiraishi, H.Yoda, C.Tsai
  • Organizer: 16th Microoptics Conference (MOC'10)
  • Place of Presentation: Hsinchu, Taiwan