| Project/Area Number |
21760250
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | The University of Tokyo |
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Principal Investigator |
MORITA Takeshi The University of Tokyo, 大学院・新領域創成科学研究科, 准教授 (60344735)
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| Project Period (FY) |
2009 – 2010
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| Project Status |
Completed (Fiscal Year 2010)
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| Budget Amount *help |
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2010: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2009: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
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| Keywords | 波動利用工学 / 超音波 / 圧電薄膜 / 波動応用工学 |
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| Research Abstract |
It had been difficult to produce a flexible piezoelectric material which is useful for the medical ultrasound transducer and the energy harvesting device, etc. In the present study, the titanium thin film was deposited on the plastic substrate (PEEK) with the electron beam deposition method, and the piezoelectric thin film of lead zirconate titanate (PZT) was obtained with the ultrasonic assisted hydrothermal method. It was verified to be able to achieve a flexible, light piezoelectric transducer by developing this technique.
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