Photon-stimulated desorption spectrometer using EUV emissions from laser-produced-plasma

• Project/Area Number: 21760262
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Electron device/Electronic equipment
• Research Institution: University of Miyazaki
• Principal Investigator: KAKU Masanori University of Miyazaki, 工学部, 助教 (10425621)
• Project Period (FY): 2009 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000); Fiscal Year 2010: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000); Fiscal Year 2009: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
• Keywords: 微細プロセス技術 / 表面分析 / 極端紫外光 / 光脱離 / レーザープラズマ

Research Abstract

The wavelength of a laser-produced plasma source was extended to the extreme ultraviolet (EUV) region by using solid metal targets. We have developed a Photon-stimulated desorption spectrometer (PSDS), as a new surface analysis tool. The system uses laser-produced argon-plasma emissions as a continuous vacuum ultraviolet (VUV) radiation source. Using the PSDS, we have detected differences of mass spectra among plastic samples.

Research Products

• [Journal Article] 超短パルス真空紫外レーザーの開発 (2011)
  • Author(s): 加来昌典
  • Journal Title: 平成21年度研究助成金受給者 研究報告集 Volume: 28 Pages: 84-88
  • NAID: 40018778243
• [Journal Article] Generation of subpicosecond vacuum ultraviolet pulses at 126 nm by using harmonics of a subpicosecond Ti : Sapphire laser (2010)
  • Author(s): Masahito Katto, Kazuyoshi Oda, Masanori Kaku, Atsushi Yokotani, Shoichi Kubodera, Noriaki Miyanaga, Kunioki Mima
  • Journal Title: Optics Communications Vol.283(s) Pages: 414-416
  • Peer Reviewed
• [Journal Article] Development of ultra-short pulse VUV laser system for nanoscale processing (2010)
  • Author(s): Masahito Katto, Hironari Zushi, Wataru Nagaya, Shinya Harano, Ryota Matsumoto, Atushi Yokotani, Masanori Kaku, Shoichi Kubodera, Noriaki Miyanaga
  • Journal Title: Applied Physics A Vol.101 Pages: 297-301
  • Peer Reviewed
• [Journal Article] 極端紫外光源を用いた光脱離質量分析装置の開発 (2010)
  • Author(s): 加来昌典, 甲藤正人, 横谷篤至, 窪寺昌一, 佐々木亘, 宮林延良
  • Journal Title: 電気学会研究会資料光・量子デバイス研究会
  • NAID: 10027634351
• [Journal Article] Vacuum ultraviolet argon excimer laser at 126 nm excited by a high intensity laser (2010)
  • Author(s): Masanori Kaku, Shinya Harano, Masahito Katto, Shoichi Kubodera
  • Journal Title: Proceedings of SPIE Vol.7751
• [Journal Article] Novel analysis system using surface desorption stimulated by VUV photons from laser-produced plasma (2010)
  • Author(s): Masahito Katto, Masanori Kaku, Shoichi Kubodera, Atsusi Yokotani, Nobuyoshi Miyabayashi, Wataru Sasaki
  • Journal Title: Proceedings of SPIE Vol.7751
• [Journal Article] 真空紫外光による光励起表面脱離プロセスと表面分析への応用 (2010)
  • Author(s): 甲藤正人, 加来昌典, 窪寺昌一, 横谷篤至, 宮林延良, 佐々木亘
  • Journal Title: レーザー学会第404回研究会報告 RTM-10-32 Pages: 27-32
  • NAID: 10026691050
• [Journal Article] 極端紫外光源を用いた光脱離質量分析装置の開発 (2010)
  • Author(s): 加来昌典
  • Journal Title: 電気学会研究会資料 Volume: OQD-10-54 Pages: 39-43
  • NAID: 10027634351
• [Journal Article] Vacuum ultraviolet argon excimer laser at 126 nm excited by a high intensity laser (2010)
  • Author(s): Masanori Kaku
  • Journal Title: Proceedings of SPIE Volume: 7751
• [Journal Article] 真空紫外光による光励起表面脱離プロセスと表面分析への応用 (2010)
  • Author(s): 甲藤正人
  • Journal Title: レーザー学会第404回研究会報告 Volume: RTM-10-32 Pages: 27-32
• [Journal Article] Novel analysis system using surface desorption stimulated by VUV photons from laser-produced plasma (2010)
  • Author(s): Masahito Katto
  • Journal Title: Proceedings of SPIE Volume: 7751
• [Journal Article] Development of ultra-short pulse VUV laser system for nanoscale processing (2010)
  • Author(s): Masahito Katto
  • Journal Title: Applied Physics A Volume: 101 Pages: 297-301
  • Peer Reviewed
• [Journal Article] Generation of subpicosecond vacuum ultraviolet Pulses at 126 nm by using harmonics of a subpicosecond Ti : Sapphire laser (2010)
  • Author(s): Masahito Katto
  • Journal Title: Optics Communications 283 Pages: 414-416
  • Peer Reviewed
• [Journal Article] Mass spectrometric study of photo dissociation of organic molecules by vacuum-ultraviolet irradiation for development of analysis technique (2009)
  • Author(s): Makoto Wasamoto, Masahito Katto, Masanori Kaku, Shoichi Kubodera, Atsusi Yokotani,
  • Journal Title: Applied Surface Science Vol.255 Pages: 9861-9863
  • Peer Reviewed
• [Journal Article] レーザー生成プラズマ極端紫外光源を用いた光脱離質量分析装置の開発 (2009)
  • Author(s): 加来昌典, 甲藤正人, 横谷篤至, 窪寺昌一, 佐々木亘, 宮林延良
  • Journal Title: レーザー学会第394回研究会報告 RTM-09-38 Pages: 1-6
  • NAID: 10026195187
• [Journal Article] Femtosecond vacuum ultraviolet seed pulse generation at 126 nm by using harmonic radiation (2009)
  • Author(s): Shoichi Kubodera, Masanori Kaku, Wataru Nagaya, Hironari Zushi, Shinya Harano, Ryota Matsumoto, Msahito Katto
  • Journal Title: 2009 IEEE LEOS Annual Meeting Conference Proceedings Pages: 116-117
• [Journal Article] Femtosecond vacuum ultraviolet seed pulse generation at 126 nm by using harmonic radiation (2009)
  • Author(s): Shoichi Kubodera, Masanori Kaku, Wataru Nagaya, Hironari Zushi, Shinya Harano, Ryota Matsumoto, Masahito Katto
  • Journal Title: 2009 IEEE LEOS Annual Meeting Conference Proceedings Pages: 116-117
• [Journal Article] 超短パルスコヒーレント光発生 (2009)
  • Author(s): 加来昌典, 原野慎也, 松本亮大, 長谷渉, 圖師裕也, 甲藤正人, 窪寺昌一
  • Journal Title: 電気学会研究会資料光・量子デバイス研究会 OQD-09-59 Pages: 1-6
• [Journal Article] OFI argon excimer amplifier for intense subpicosecond VUV pulse generation (2009)
  • Author(s): Masanori Kaku, Shoichi Kubodera, Kazuyoshi Oda, Masahito Katto, Atsushi Yokotani, Noriaki Miyanaga, Kunioki Mima
  • Journal Title: Proceedings of SPIE Vol.7131
• [Journal Article] EUV and debris characteristics of a laser-plasma tin-dioxide colloidal target (2009)
  • Author(s): Masanori Kaku, Shoichi Kubodera, Shunsuke Touge, Masahito Katto
  • Journal Title: Proceedings of SPIE Vol.7131
• [Journal Article] Mass spectrometric study of photo dissociation of organic molecules by vacuum-ultraviolet irradiation for development of analysis technique (2009)
  • Author(s): Makoto Wasamoto
  • Journal Title: Applied Surface Science 255 Pages: 9861-863
  • Peer Reviewed
• [Journal Article] レーザー生成プラズマ極端紫外光源を用いた脱離質量分析装置の開発 (2009)
  • Author(s): 加来昌典
  • Journal Title: レーザー学会第394回研究会報告 RTM-09-38 Pages: 1-6
• [Journal Article] Femtosecond vacuum ultraviolet seed pulse generation at 126 nm by using harmonic radiation (2009)
  • Author(s): Shoichi Kubodera
  • Journal Title: IEEE LEOS Annual Meeting Conference Proceedings Pages: 116-117
  • Peer Reviewed
• [Journal Article] 超短パルスコヒーレント光発生 (2009)
  • Author(s): 加来昌典
  • Journal Title: 電気学会研究会資料 OQD-09-59 Pages: 1-6
• [Journal Article] OFI argon excimer amplifer for intense subicosecond VUV pulse generation (2009)
  • Author(s): Masanori Kaku
  • Journal Title: Proceedings of SPIE 7131
• [Journal Article] EUV and debris characteristics of a laser-plasma tin-dioxide colloidal target (2009)
  • Author(s): Masanori Kaku
  • Journal Title: Proceedings of SPIE 7131
• [Presentation] 極端紫外光源を用いた光脱離質量分析装置の開発 (2010)
  • Author(s): 加来昌典, 他
  • Organizer: 電気学会光・量子デバイス研究会
  • Place of Presentation: 大阪市立大学
  • Year and Date: 2010-12-03
• [Presentation] Extreme ultraviolet radiations from a laser-produced-plasma using solid metal targets (2010)
  • Author(s): Yuta Matsuura, 他
  • Organizer: 平成22年度電気関係学会九州支部連合大会
  • Place of Presentation: 九州産業大学
  • Year and Date: 2010-09-25
• [Presentation] 多光子電離を用いたフェムト秒パルスの自己相関測定 (2010)
  • Author(s): 長谷渉, 他
  • Organizer: 第71回応用物理学会学術講演会
  • Place of Presentation: 長崎大学文教キャンパス
  • Year and Date: 2010-09-16
• [Presentation] 真空紫外光による光励起表面脱離プロセスと表面分析への応用 (2010)
  • Author(s): 甲藤正人, 他
  • Organizer: レーザー学会第404回研究会
  • Place of Presentation: ホテルセントヒル長崎
  • Year and Date: 2010-09-13
• [Presentation] Vacuum ultraviolet argon excimer laser at 126 nm excited by a high intensity laser (2010)
  • Author(s): Masanori Kaku, 他
  • Organizer: The XVIII International Symposium on Gas Flow and Chemical Lasers & High Power Lasers
  • Place of Presentation: Sofia, Bulgaria
  • Year and Date: 2010-08-30
• [Presentation] Novel analysis system using surface desorption stimulated by VUV photons from laser-produced plasma (2010)
  • Author(s): Masahito Katto, 他
  • Organizer: The XVIII International Symposium on Gas Flow and Chemical Lasers & High Power Lasers
  • Place of Presentation: Sofia, Bulgaria
  • Year and Date: 2010-08-30
• [Presentation] Autocorrelation measurement of femtosecond VUV pulses using multiphoton ionization (2010)
  • Author(s): Shoicchi Kubodera, 他
  • Organizer: The XVIII International Symposium on Gas Flow and Chemical Lasers & High Power Lasers
  • Place of Presentation: Sofia, Bulgaria
  • Year and Date: 2010-08-30
• [Presentation] 多光子電離を用いた真空紫外フェムト秒パルスの自己相関測定 (2010)
  • Author(s): 加来昌典, 他
  • Organizer: 第57回応用物理学関係連合講演会
  • Place of Presentation: 東海大学
  • Year and Date: 2010-03-17
• [Presentation] 多光子電離を用いた真空紫外フェムト秒パルスの自己相関測定 (2010)
  • Author(s): 加来昌典
  • Organizer: 第57回応用物理学関係連合講演会
  • Place of Presentation: 東海大学(神奈大県)
  • Year and Date: 2010-03-17
• [Presentation] レーザー生成プラズマ極端紫外光源を用いた光脱離質量分析装置の開発 (2009)
  • Author(s): 加来昌典, 他
  • Organizer: レーザー学会第394回研究会
  • Place of Presentation: 兵庫県先端科学技術支援センター
  • Year and Date: 2009-12-08
• [Presentation] レーザー生成プラズマ極端紫外光源を用いた光脱離質量分析装置の開発 (2009)
  • Author(s): 加来昌典
  • Organizer: レーザー学会第394回研究会
  • Place of Presentation: 兵庫県先端科学技術支援センター(兵庫県)
  • Year and Date: 2009-12-08
• [Presentation] 光脱離表面分析装置に応用する極端紫外光源の開発 (2009)
  • Author(s): 加来昌典, 他
  • Organizer: 2009年応用物理学会九州支部学術講演会
  • Place of Presentation: 熊本大学
  • Year and Date: 2009-11-21
• [Presentation] 光脱離表面分析装置に応用する極端紫外光源の開発 (2009)
  • Author(s): 加来昌典
  • Organizer: 2009年応用物理学会九州支部学術講演会
  • Place of Presentation: 熊本大学(熊本県)
  • Year and Date: 2009-11-21
• [Presentation] Femtosecond vacuum ultraviolet seed pulse generation at 126 nm by using harmonic radiation (2009)
  • Author(s): Masanori Kaku, 他
  • Organizer: The 22nd Annual Meeting the IEEE Photonics Society
  • Place of Presentation: Turkey
  • Year and Date: 2009-10-04
• [Presentation] Femtosecond vacuum ultraviolet seed pulse gendration at 126 nm by using harmonic radiation (2009)
  • Author(s): Masanori Kaku
  • Organizer: The 22nd Annual Meeting the IEEE Photonics Society
  • Place of Presentation: Ela Quality Resort (Turkey)
  • Year and Date: 2009-10-04
• [Presentation] 高調波発生を利用した波長126nmの真空紫外超短パルス光の特性 (2009)
  • Author(s): 加来昌典, 他
  • Organizer: 第70回応用物理学会学術講演会
  • Place of Presentation: 富山大学
  • Year and Date: 2009-09-11
• [Presentation] 高調波発生を利用した波長126nmの真空紫外超短パルス光の特性 (2009)
  • Author(s): 加来昌典
  • Organizer: 第70回応用物理学会学術講演会
  • Place of Presentation: 富山大学(富山県)
  • Year and Date: 2009-09-11
• [Patent(Industrial Property Rights)] 極端紫外光源および極端紫外光発生方法 (2009)
  • Inventor(s): 窪寺昌一, 加来昌典
  • Industrial Property Rights Holder: 宮崎大学
  • Filing Date: 2009-06-12