| Budget Amount *help |
¥6,724,439 (Direct Cost: ¥5,172,646、Indirect Cost: ¥1,551,793)
Fiscal Year 2011: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2010: ¥2,174,439 (Direct Cost: ¥1,672,646、Indirect Cost: ¥501,793)
Fiscal Year 2009: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
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| Research Abstract |
in this research, I studied the method of planning and controlling production tools or a factory line for maximizing the throughput of quality products for nano-scale production in semiconductor manufacturing system. The optimal method of the manufacturing control inside a multi-chamber tool was proposed by applying queuing model with blocking and TOC (Theory of constraints), and it was applied to management at a real factory. Moreover, I created a management method which achieves simultaneously zero-rework, improvement in the throughput of quality products, the improvement in a tool utilization in product-mix production. As the result to apply the method to an actual semiconductor factory, overall equipment effectiveness(OEE) can be improved to 1.4 or more times.
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